CN101460857B - 光电模块的光辅助测试 - Google Patents

光电模块的光辅助测试 Download PDF

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Publication number
CN101460857B
CN101460857B CN200780020797XA CN200780020797A CN101460857B CN 101460857 B CN101460857 B CN 101460857B CN 200780020797X A CN200780020797X A CN 200780020797XA CN 200780020797 A CN200780020797 A CN 200780020797A CN 101460857 B CN101460857 B CN 101460857B
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China
Prior art keywords
optical
source
equipment
electric module
voltage
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CN200780020797XA
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English (en)
Chinese (zh)
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CN101460857A (zh
Inventor
伯恩哈德·冈特·米勒
拉尔夫·施密德
麦特瑟斯·波拉纳
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Applied Materials GmbH and Co KG
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Applied Materials GmbH and Co KG
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Publication of CN101460857A publication Critical patent/CN101460857A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136254—Checking; Testing

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Photovoltaic Devices (AREA)
CN200780020797XA 2006-04-04 2007-04-04 光电模块的光辅助测试 Active CN101460857B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006015714.1A DE102006015714B4 (de) 2006-04-04 2006-04-04 Lichtunterstütztes Testen eines optoelektronischen Moduls
DE102006015714.1 2006-04-04
PCT/EP2007/003063 WO2007115774A1 (de) 2006-04-04 2007-04-04 Lichtunterstütztes testen eines optoelektronischen moduls

Publications (2)

Publication Number Publication Date
CN101460857A CN101460857A (zh) 2009-06-17
CN101460857B true CN101460857B (zh) 2012-07-18

Family

ID=38283920

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200780020797XA Active CN101460857B (zh) 2006-04-04 2007-04-04 光电模块的光辅助测试

Country Status (7)

Country Link
US (1) US8222911B2 (enExample)
JP (1) JP5519271B2 (enExample)
KR (1) KR101342460B1 (enExample)
CN (1) CN101460857B (enExample)
DE (1) DE102006015714B4 (enExample)
TW (1) TWI383133B (enExample)
WO (1) WO2007115774A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU226905U1 (ru) * 2024-04-13 2024-06-28 Виктор Юрьевич Ильин Оптоэлектронный фотоприемный модуль

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JP5520289B2 (ja) * 2008-05-21 2014-06-11 フォトン・ダイナミクス・インコーポレイテッド 前方照明（ｆｒｏｎｔｌｉｇｈｔｉｎｇ）を用いてディスプレイパネル上の欠陥の検出を向上させること
KR101052361B1 (ko) * 2008-07-31 2011-07-27 한국표준과학연구원 중에너지 이온빔 산란을 이용한 분광분석기
WO2010140236A1 (ja) * 2009-06-03 2010-12-09 三菱電機株式会社 粒子線照射装置
US10373998B1 (en) * 2013-03-14 2019-08-06 Wavefront Research, Inc. Compact annular field imager optical interconnect
CN103353790B (zh) * 2013-06-26 2016-09-14 林大伟 光线寻迹方法与装置
CN103324304B (zh) * 2013-06-26 2016-05-11 林大伟 光传感器阵列装置
US9804000B2 (en) * 2013-09-25 2017-10-31 Yun-Shan Chang Optical sensor array apparatus
US9804688B2 (en) * 2013-09-25 2017-10-31 Yun-Shan Chang Light tracing method and apparatus thereof
US9804695B2 (en) * 2014-01-08 2017-10-31 Yun-Shan Chang Cursor control apparatus and method for the same

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NL8700933A (nl) * 1987-04-21 1988-11-16 Philips Nv Testmethode voor lcd-elementen.
JPH073446B2 (ja) * 1988-05-18 1995-01-18 松下電器産業株式会社 スイッチング素子を有したアクティブ基板の欠陥検査装置および欠陥検査方法
US4875004A (en) * 1988-06-01 1989-10-17 The United States Of America As Represented By The Secretary Of The Army High speed semiconductor characterization technique
US5057773A (en) 1989-03-21 1991-10-15 International Business Machines Corporation Method for opens/shorts testing of capacitively coupled networks in substrates using electron beams
US4902967A (en) * 1989-05-18 1990-02-20 The United States Of America As Represented By The Secretary Of The Navy Scanning electron microscopy by photovoltage contrast imaging
DE4003983C1 (en) * 1990-02-09 1991-08-29 Abos Automation, Bildverarbeitung, Optische Systeme Gmbh, 8057 Eching, De Automated monitoring of space=shape data for mfg. semiconductors - compares image signals for defined illumination angle range with master signals, to determine defects
US5150043A (en) * 1991-02-11 1992-09-22 The United States Of America As Represented By The Secretary Of The Navy Apparatus and method for non-contact surface voltage probing by scanning photoelectron emission
US5268638A (en) 1991-07-15 1993-12-07 Siemens Aktiengesellschaft Method for particle beam testing of substrates for liquid crystal displays "LCD"
US5943125A (en) * 1997-02-26 1999-08-24 Acuity Imaging, Llc Ring illumination apparatus for illuminating reflective elements on a generally planar surface
US5828449A (en) * 1997-02-26 1998-10-27 Acuity Imaging, Llc Ring illumination reflective elements on a generally planar surface
US5982190A (en) * 1998-02-04 1999-11-09 Toro-Lira; Guillermo L. Method to determine pixel condition on flat panel displays using an electron beam
JP3107039B2 (ja) * 1998-03-20 2000-11-06 日本電気株式会社 面光源プローバ装置及び検査方法
DE19901767A1 (de) * 1999-01-18 2000-07-20 Etec Ebt Gmbh Verfahren und Vorrichtung zum Testen der Funktion einer Vielzahl von Mikrostrukturelementen
EP1271605A4 (en) * 2000-11-02 2009-09-02 Ebara Corp ELECTRON BEAM APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE COMPRISING SAID APPARATUS
JP2003331774A (ja) * 2002-05-16 2003-11-21 Toshiba Corp 電子ビーム装置およびその装置を用いたデバイス製造方法
JP4062527B2 (ja) 2003-05-09 2008-03-19 株式会社島津製作所 Ｔｆｔアレイ検査装置
KR20060024398A (ko) 2003-06-06 2006-03-16 도시바 마쯔시따 디스플레이 테크놀로지 컴퍼니, 리미티드 기판의 검사 방법
CN101107534B (zh) * 2005-05-02 2012-04-25 株式会社岛津制作所 Tft阵列基板检查装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU226905U1 (ru) * 2024-04-13 2024-06-28 Виктор Юрьевич Ильин Оптоэлектронный фотоприемный модуль

Also Published As

Publication number Publication date
US8222911B2 (en) 2012-07-17
JP5519271B2 (ja) 2014-06-11
DE102006015714B4 (de) 2019-09-05
DE102006015714A1 (de) 2007-10-18
TW200745530A (en) 2007-12-16
US20090179656A1 (en) 2009-07-16
TWI383133B (zh) 2013-01-21
KR20090060215A (ko) 2009-06-11
WO2007115774A1 (de) 2007-10-18
JP2009532687A (ja) 2009-09-10
KR101342460B1 (ko) 2013-12-17
CN101460857A (zh) 2009-06-17

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