KR101342460B1 - 광전자 모듈의 광-보조 테스팅 - Google Patents

광전자 모듈의 광-보조 테스팅 Download PDF

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Publication number
KR101342460B1
KR101342460B1 KR1020087026897A KR20087026897A KR101342460B1 KR 101342460 B1 KR101342460 B1 KR 101342460B1 KR 1020087026897 A KR1020087026897 A KR 1020087026897A KR 20087026897 A KR20087026897 A KR 20087026897A KR 101342460 B1 KR101342460 B1 KR 101342460B1
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South Korea
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optoelectronic module
delete delete
source
voltage
illumination
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Korean (ko)
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KR20090060215A (ko
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베른하르트 귄터 뮐러
랄프 슈미트
마티아스 브루너
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어플라이드 머티어리얼즈 게엠베하
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136254—Checking; Testing

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Photovoltaic Devices (AREA)
KR1020087026897A 2006-04-04 2008-11-03 광전자 모듈의 광-보조 테스팅 Active KR101342460B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006015714.1A DE102006015714B4 (de) 2006-04-04 2006-04-04 Lichtunterstütztes Testen eines optoelektronischen Moduls
DE102006015714.1 2006-04-04
PCT/EP2007/003063 WO2007115774A1 (de) 2006-04-04 2007-04-04 Lichtunterstütztes testen eines optoelektronischen moduls

Publications (2)

Publication Number Publication Date
KR20090060215A KR20090060215A (ko) 2009-06-11
KR101342460B1 true KR101342460B1 (ko) 2013-12-17

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087026897A Active KR101342460B1 (ko) 2006-04-04 2008-11-03 광전자 모듈의 광-보조 테스팅

Country Status (7)

Country Link
US (1) US8222911B2 (enExample)
JP (1) JP5519271B2 (enExample)
KR (1) KR101342460B1 (enExample)
CN (1) CN101460857B (enExample)
DE (1) DE102006015714B4 (enExample)
TW (1) TWI383133B (enExample)
WO (1) WO2007115774A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5520289B2 (ja) * 2008-05-21 2014-06-11 フォトン・ダイナミクス・インコーポレイテッド 前方照明（ｆｒｏｎｔｌｉｇｈｔｉｎｇ）を用いてディスプレイパネル上の欠陥の検出を向上させること
KR101052361B1 (ko) * 2008-07-31 2011-07-27 한국표준과학연구원 중에너지 이온빔 산란을 이용한 분광분석기
WO2010140236A1 (ja) * 2009-06-03 2010-12-09 三菱電機株式会社 粒子線照射装置
US10373998B1 (en) * 2013-03-14 2019-08-06 Wavefront Research, Inc. Compact annular field imager optical interconnect
CN103353790B (zh) * 2013-06-26 2016-09-14 林大伟 光线寻迹方法与装置
CN103324304B (zh) * 2013-06-26 2016-05-11 林大伟 光传感器阵列装置
US9804000B2 (en) * 2013-09-25 2017-10-31 Yun-Shan Chang Optical sensor array apparatus
US9804688B2 (en) * 2013-09-25 2017-10-31 Yun-Shan Chang Light tracing method and apparatus thereof
US9804695B2 (en) * 2014-01-08 2017-10-31 Yun-Shan Chang Cursor control apparatus and method for the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006120861A1 (ja) 2005-05-02 2006-11-16 Shimadzu Corporation Ｔｆｔアレイ基板検査装置

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NL8700933A (nl) * 1987-04-21 1988-11-16 Philips Nv Testmethode voor lcd-elementen.
JPH073446B2 (ja) * 1988-05-18 1995-01-18 松下電器産業株式会社 スイッチング素子を有したアクティブ基板の欠陥検査装置および欠陥検査方法
US4875004A (en) * 1988-06-01 1989-10-17 The United States Of America As Represented By The Secretary Of The Army High speed semiconductor characterization technique
US5057773A (en) 1989-03-21 1991-10-15 International Business Machines Corporation Method for opens/shorts testing of capacitively coupled networks in substrates using electron beams
US4902967A (en) * 1989-05-18 1990-02-20 The United States Of America As Represented By The Secretary Of The Navy Scanning electron microscopy by photovoltage contrast imaging
DE4003983C1 (en) * 1990-02-09 1991-08-29 Abos Automation, Bildverarbeitung, Optische Systeme Gmbh, 8057 Eching, De Automated monitoring of space=shape data for mfg. semiconductors - compares image signals for defined illumination angle range with master signals, to determine defects
US5150043A (en) * 1991-02-11 1992-09-22 The United States Of America As Represented By The Secretary Of The Navy Apparatus and method for non-contact surface voltage probing by scanning photoelectron emission
US5268638A (en) 1991-07-15 1993-12-07 Siemens Aktiengesellschaft Method for particle beam testing of substrates for liquid crystal displays "LCD"
US5943125A (en) * 1997-02-26 1999-08-24 Acuity Imaging, Llc Ring illumination apparatus for illuminating reflective elements on a generally planar surface
US5828449A (en) * 1997-02-26 1998-10-27 Acuity Imaging, Llc Ring illumination reflective elements on a generally planar surface
US5982190A (en) * 1998-02-04 1999-11-09 Toro-Lira; Guillermo L. Method to determine pixel condition on flat panel displays using an electron beam
JP3107039B2 (ja) * 1998-03-20 2000-11-06 日本電気株式会社 面光源プローバ装置及び検査方法
DE19901767A1 (de) * 1999-01-18 2000-07-20 Etec Ebt Gmbh Verfahren und Vorrichtung zum Testen der Funktion einer Vielzahl von Mikrostrukturelementen
EP1271605A4 (en) * 2000-11-02 2009-09-02 Ebara Corp ELECTRON BEAM APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE COMPRISING SAID APPARATUS
JP2003331774A (ja) * 2002-05-16 2003-11-21 Toshiba Corp 電子ビーム装置およびその装置を用いたデバイス製造方法
JP4062527B2 (ja) 2003-05-09 2008-03-19 株式会社島津製作所 Ｔｆｔアレイ検査装置
KR20060024398A (ko) 2003-06-06 2006-03-16 도시바 마쯔시따 디스플레이 테크놀로지 컴퍼니, 리미티드 기판의 검사 방법

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
WO2006120861A1 (ja) 2005-05-02 2006-11-16 Shimadzu Corporation Ｔｆｔアレイ基板検査装置

Also Published As

Publication number Publication date
US8222911B2 (en) 2012-07-17
JP5519271B2 (ja) 2014-06-11
DE102006015714B4 (de) 2019-09-05
DE102006015714A1 (de) 2007-10-18
TW200745530A (en) 2007-12-16
US20090179656A1 (en) 2009-07-16
CN101460857B (zh) 2012-07-18
TWI383133B (zh) 2013-01-21
KR20090060215A (ko) 2009-06-11
WO2007115774A1 (de) 2007-10-18
JP2009532687A (ja) 2009-09-10
CN101460857A (zh) 2009-06-17

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