DE102006015714B4 - Lichtunterstütztes Testen eines optoelektronischen Moduls - Google Patents

Lichtunterstütztes Testen eines optoelektronischen Moduls Download PDF

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Publication number
DE102006015714B4
DE102006015714B4 DE102006015714.1A DE102006015714A DE102006015714B4 DE 102006015714 B4 DE102006015714 B4 DE 102006015714B4 DE 102006015714 A DE102006015714 A DE 102006015714A DE 102006015714 B4 DE102006015714 B4 DE 102006015714B4
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DE
Germany
Prior art keywords
optoelectronic module
source
voltage
illumination
module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102006015714.1A
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German (de)
English (en)
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DE102006015714A1 (de
Inventor
Bernhard Gunter Mueller
Ralf Schmid
Matthias Brunner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials GmbH and Co KG
Original Assignee
Applied Materials GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials GmbH and Co KG filed Critical Applied Materials GmbH and Co KG
Priority to DE102006015714.1A priority Critical patent/DE102006015714B4/de
Priority to TW096111586A priority patent/TWI383133B/zh
Priority to US12/296,055 priority patent/US8222911B2/en
Priority to CN200780020797XA priority patent/CN101460857B/zh
Priority to JP2009503487A priority patent/JP5519271B2/ja
Priority to PCT/EP2007/003063 priority patent/WO2007115774A1/de
Publication of DE102006015714A1 publication Critical patent/DE102006015714A1/de
Priority to KR1020087026897A priority patent/KR101342460B1/ko
Application granted granted Critical
Publication of DE102006015714B4 publication Critical patent/DE102006015714B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136254—Checking; Testing

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Photovoltaic Devices (AREA)
DE102006015714.1A 2006-04-04 2006-04-04 Lichtunterstütztes Testen eines optoelektronischen Moduls Expired - Fee Related DE102006015714B4 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE102006015714.1A DE102006015714B4 (de) 2006-04-04 2006-04-04 Lichtunterstütztes Testen eines optoelektronischen Moduls
TW096111586A TWI383133B (zh) 2006-04-04 2007-04-02 用以測試光電模組之裝置與方法
CN200780020797XA CN101460857B (zh) 2006-04-04 2007-04-04 光电模块的光辅助测试
JP2009503487A JP5519271B2 (ja) 2006-04-04 2007-04-04 オプトエレクトロニックモジュールの光補助試験
US12/296,055 US8222911B2 (en) 2006-04-04 2007-04-04 Light-assisted testing of an optoelectronic module
PCT/EP2007/003063 WO2007115774A1 (de) 2006-04-04 2007-04-04 Lichtunterstütztes testen eines optoelektronischen moduls
KR1020087026897A KR101342460B1 (ko) 2006-04-04 2008-11-03 광전자 모듈의 광-보조 테스팅

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006015714.1A DE102006015714B4 (de) 2006-04-04 2006-04-04 Lichtunterstütztes Testen eines optoelektronischen Moduls

Publications (2)

Publication Number Publication Date
DE102006015714A1 DE102006015714A1 (de) 2007-10-18
DE102006015714B4 true DE102006015714B4 (de) 2019-09-05

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE102006015714.1A Expired - Fee Related DE102006015714B4 (de) 2006-04-04 2006-04-04 Lichtunterstütztes Testen eines optoelektronischen Moduls

Country Status (7)

Country Link
US (1) US8222911B2 (enExample)
JP (1) JP5519271B2 (enExample)
KR (1) KR101342460B1 (enExample)
CN (1) CN101460857B (enExample)
DE (1) DE102006015714B4 (enExample)
TW (1) TWI383133B (enExample)
WO (1) WO2007115774A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5520289B2 (ja) * 2008-05-21 2014-06-11 フォトン・ダイナミクス・インコーポレイテッド 前方照明（ｆｒｏｎｔｌｉｇｈｔｉｎｇ）を用いてディスプレイパネル上の欠陥の検出を向上させること
KR101052361B1 (ko) * 2008-07-31 2011-07-27 한국표준과학연구원 중에너지 이온빔 산란을 이용한 분광분석기
WO2010140236A1 (ja) * 2009-06-03 2010-12-09 三菱電機株式会社 粒子線照射装置
US10373998B1 (en) * 2013-03-14 2019-08-06 Wavefront Research, Inc. Compact annular field imager optical interconnect
CN103353790B (zh) * 2013-06-26 2016-09-14 林大伟 光线寻迹方法与装置
CN103324304B (zh) * 2013-06-26 2016-05-11 林大伟 光传感器阵列装置
US9804000B2 (en) * 2013-09-25 2017-10-31 Yun-Shan Chang Optical sensor array apparatus
US9804688B2 (en) * 2013-09-25 2017-10-31 Yun-Shan Chang Light tracing method and apparatus thereof
US9804695B2 (en) * 2014-01-08 2017-10-31 Yun-Shan Chang Cursor control apparatus and method for the same

Citations (9)

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Publication number Priority date Publication date Assignee Title
US4875004A (en) * 1988-06-01 1989-10-17 The United States Of America As Represented By The Secretary Of The Army High speed semiconductor characterization technique
DE4003983C1 (en) * 1990-02-09 1991-08-29 Abos Automation, Bildverarbeitung, Optische Systeme Gmbh, 8057 Eching, De Automated monitoring of space=shape data for mfg. semiconductors - compares image signals for defined illumination angle range with master signals, to determine defects
US5057773A (en) 1989-03-21 1991-10-15 International Business Machines Corporation Method for opens/shorts testing of capacitively coupled networks in substrates using electron beams
EP0523594A1 (de) 1991-07-15 1993-01-20 ICT Integrated Circuit Testing Gesellschaft für HalbleiterprÀ¼ftechnik mbH Verfahren zur Korpuskularstrahl-Prüfung von Substraten für Flüssigkeitskristallanzeigen (LCD)
DE3879541T2 (de) * 1987-04-21 1993-09-30 Philips Nv Prüfverfahren für LCD-Elemente.
EP0943951A1 (en) 1998-03-20 1999-09-22 Nec Corporation Optical surface inspection apparatus and inspecting method
DE19901767A1 (de) * 1999-01-18 2000-07-20 Etec Ebt Gmbh Verfahren und Vorrichtung zum Testen der Funktion einer Vielzahl von Mikrostrukturelementen
US20040223140A1 (en) 2003-05-09 2004-11-11 Shimadzu Corporation TFT array inspection apparatus
WO2004109375A1 (ja) 2003-06-06 2004-12-16 Toshiba Matsushita Display Technology Co., Ltd. 基板の検査方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH073446B2 (ja) * 1988-05-18 1995-01-18 松下電器産業株式会社 スイッチング素子を有したアクティブ基板の欠陥検査装置および欠陥検査方法
US4902967A (en) * 1989-05-18 1990-02-20 The United States Of America As Represented By The Secretary Of The Navy Scanning electron microscopy by photovoltage contrast imaging
US5150043A (en) * 1991-02-11 1992-09-22 The United States Of America As Represented By The Secretary Of The Navy Apparatus and method for non-contact surface voltage probing by scanning photoelectron emission
US5943125A (en) * 1997-02-26 1999-08-24 Acuity Imaging, Llc Ring illumination apparatus for illuminating reflective elements on a generally planar surface
US5828449A (en) * 1997-02-26 1998-10-27 Acuity Imaging, Llc Ring illumination reflective elements on a generally planar surface
US5982190A (en) * 1998-02-04 1999-11-09 Toro-Lira; Guillermo L. Method to determine pixel condition on flat panel displays using an electron beam
EP1271605A4 (en) * 2000-11-02 2009-09-02 Ebara Corp ELECTRON BEAM APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE COMPRISING SAID APPARATUS
JP2003331774A (ja) * 2002-05-16 2003-11-21 Toshiba Corp 電子ビーム装置およびその装置を用いたデバイス製造方法
CN101107534B (zh) * 2005-05-02 2012-04-25 株式会社岛津制作所 Tft阵列基板检查装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3879541T2 (de) * 1987-04-21 1993-09-30 Philips Nv Prüfverfahren für LCD-Elemente.
US4875004A (en) * 1988-06-01 1989-10-17 The United States Of America As Represented By The Secretary Of The Army High speed semiconductor characterization technique
US5057773A (en) 1989-03-21 1991-10-15 International Business Machines Corporation Method for opens/shorts testing of capacitively coupled networks in substrates using electron beams
DE4003983C1 (en) * 1990-02-09 1991-08-29 Abos Automation, Bildverarbeitung, Optische Systeme Gmbh, 8057 Eching, De Automated monitoring of space=shape data for mfg. semiconductors - compares image signals for defined illumination angle range with master signals, to determine defects
EP0523594A1 (de) 1991-07-15 1993-01-20 ICT Integrated Circuit Testing Gesellschaft für HalbleiterprÀ¼ftechnik mbH Verfahren zur Korpuskularstrahl-Prüfung von Substraten für Flüssigkeitskristallanzeigen (LCD)
EP0943951A1 (en) 1998-03-20 1999-09-22 Nec Corporation Optical surface inspection apparatus and inspecting method
DE19901767A1 (de) * 1999-01-18 2000-07-20 Etec Ebt Gmbh Verfahren und Vorrichtung zum Testen der Funktion einer Vielzahl von Mikrostrukturelementen
US20040223140A1 (en) 2003-05-09 2004-11-11 Shimadzu Corporation TFT array inspection apparatus
WO2004109375A1 (ja) 2003-06-06 2004-12-16 Toshiba Matsushita Display Technology Co., Ltd. 基板の検査方法

Also Published As

Publication number Publication date
US8222911B2 (en) 2012-07-17
JP5519271B2 (ja) 2014-06-11
DE102006015714A1 (de) 2007-10-18
TW200745530A (en) 2007-12-16
US20090179656A1 (en) 2009-07-16
CN101460857B (zh) 2012-07-18
TWI383133B (zh) 2013-01-21
KR20090060215A (ko) 2009-06-11
WO2007115774A1 (de) 2007-10-18
JP2009532687A (ja) 2009-09-10
KR101342460B1 (ko) 2013-12-17
CN101460857A (zh) 2009-06-17

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