TWI383133B - 用以測試光電模組之裝置與方法 - Google Patents
用以測試光電模組之裝置與方法 Download PDFInfo
- Publication number
- TWI383133B TWI383133B TW096111586A TW96111586A TWI383133B TW I383133 B TWI383133 B TW I383133B TW 096111586 A TW096111586 A TW 096111586A TW 96111586 A TW96111586 A TW 96111586A TW I383133 B TWI383133 B TW I383133B
- Authority
- TW
- Taiwan
- Prior art keywords
- module
- source
- voltage
- photovoltaic module
- pixel
- Prior art date
Links
- 238000012360 testing method Methods 0.000 title claims description 87
- 230000005693 optoelectronics Effects 0.000 title claims description 56
- 238000000034 method Methods 0.000 title claims description 28
- 230000007547 defect Effects 0.000 claims description 65
- 238000005259 measurement Methods 0.000 claims description 48
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 43
- 229910052732 germanium Inorganic materials 0.000 claims description 41
- 230000002950 deficient Effects 0.000 claims description 36
- 239000010409 thin film Substances 0.000 claims description 32
- 238000005286 illumination Methods 0.000 claims description 26
- 239000002245 particle Substances 0.000 claims description 26
- 230000005855 radiation Effects 0.000 claims description 25
- 239000011163 secondary particle Substances 0.000 claims description 25
- 239000003990 capacitor Substances 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 11
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 238000010998 test method Methods 0.000 claims description 7
- 230000005670 electromagnetic radiation Effects 0.000 claims description 5
- 238000001429 visible spectrum Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 description 15
- 239000004973 liquid crystal related substance Substances 0.000 description 12
- 230000004907 flux Effects 0.000 description 11
- 230000007423 decrease Effects 0.000 description 9
- 230000008901 benefit Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 201000009310 astigmatism Diseases 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 230000005611 electricity Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005421 electrostatic potential Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011152 fibreglass Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/305—Contactless testing using electron beams
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136254—Checking; Testing
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Liquid Crystal (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Photovoltaic Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102006015714.1A DE102006015714B4 (de) | 2006-04-04 | 2006-04-04 | Lichtunterstütztes Testen eines optoelektronischen Moduls |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200745530A TW200745530A (en) | 2007-12-16 |
| TWI383133B true TWI383133B (zh) | 2013-01-21 |
Family
ID=38283920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096111586A TWI383133B (zh) | 2006-04-04 | 2007-04-02 | 用以測試光電模組之裝置與方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8222911B2 (enExample) |
| JP (1) | JP5519271B2 (enExample) |
| KR (1) | KR101342460B1 (enExample) |
| CN (1) | CN101460857B (enExample) |
| DE (1) | DE102006015714B4 (enExample) |
| TW (1) | TWI383133B (enExample) |
| WO (1) | WO2007115774A1 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5520289B2 (ja) * | 2008-05-21 | 2014-06-11 | フォトン・ダイナミクス・インコーポレイテッド | 前方照明（ｆｒｏｎｔｌｉｇｈｔｉｎｇ）を用いてディスプレイパネル上の欠陥の検出を向上させること |
| KR101052361B1 (ko) * | 2008-07-31 | 2011-07-27 | 한국표준과학연구원 | 중에너지 이온빔 산란을 이용한 분광분석기 |
| WO2010140236A1 (ja) * | 2009-06-03 | 2010-12-09 | 三菱電機株式会社 | 粒子線照射装置 |
| US10373998B1 (en) * | 2013-03-14 | 2019-08-06 | Wavefront Research, Inc. | Compact annular field imager optical interconnect |
| CN103353790B (zh) * | 2013-06-26 | 2016-09-14 | 林大伟 | 光线寻迹方法与装置 |
| CN103324304B (zh) * | 2013-06-26 | 2016-05-11 | 林大伟 | 光传感器阵列装置 |
| US9804000B2 (en) * | 2013-09-25 | 2017-10-31 | Yun-Shan Chang | Optical sensor array apparatus |
| US9804688B2 (en) * | 2013-09-25 | 2017-10-31 | Yun-Shan Chang | Light tracing method and apparatus thereof |
| US9804695B2 (en) * | 2014-01-08 | 2017-10-31 | Yun-Shan Chang | Cursor control apparatus and method for the same |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01292736A (ja) * | 1988-05-18 | 1989-11-27 | Matsushita Electric Ind Co Ltd | スイッチング素子を有したアクティブ基板の欠陥検査装置および欠陥検査方法 |
| US4902967A (en) * | 1989-05-18 | 1990-02-20 | The United States Of America As Represented By The Secretary Of The Navy | Scanning electron microscopy by photovoltage contrast imaging |
| US5150043A (en) * | 1991-02-11 | 1992-09-22 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus and method for non-contact surface voltage probing by scanning photoelectron emission |
| US5982190A (en) * | 1998-02-04 | 1999-11-09 | Toro-Lira; Guillermo L. | Method to determine pixel condition on flat panel displays using an electron beam |
| US6396299B1 (en) * | 1998-03-20 | 2002-05-28 | Nec Corporation | Method and apparatus for substrate defect testing by surface illumination |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8700933A (nl) * | 1987-04-21 | 1988-11-16 | Philips Nv | Testmethode voor lcd-elementen. |
| US4875004A (en) * | 1988-06-01 | 1989-10-17 | The United States Of America As Represented By The Secretary Of The Army | High speed semiconductor characterization technique |
| US5057773A (en) | 1989-03-21 | 1991-10-15 | International Business Machines Corporation | Method for opens/shorts testing of capacitively coupled networks in substrates using electron beams |
| DE4003983C1 (en) * | 1990-02-09 | 1991-08-29 | Abos Automation, Bildverarbeitung, Optische Systeme Gmbh, 8057 Eching, De | Automated monitoring of space=shape data for mfg. semiconductors - compares image signals for defined illumination angle range with master signals, to determine defects |
| US5268638A (en) | 1991-07-15 | 1993-12-07 | Siemens Aktiengesellschaft | Method for particle beam testing of substrates for liquid crystal displays "LCD" |
| US5943125A (en) * | 1997-02-26 | 1999-08-24 | Acuity Imaging, Llc | Ring illumination apparatus for illuminating reflective elements on a generally planar surface |
| US5828449A (en) * | 1997-02-26 | 1998-10-27 | Acuity Imaging, Llc | Ring illumination reflective elements on a generally planar surface |
| DE19901767A1 (de) * | 1999-01-18 | 2000-07-20 | Etec Ebt Gmbh | Verfahren und Vorrichtung zum Testen der Funktion einer Vielzahl von Mikrostrukturelementen |
| EP1271605A4 (en) * | 2000-11-02 | 2009-09-02 | Ebara Corp | ELECTRON BEAM APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE COMPRISING SAID APPARATUS |
| JP2003331774A (ja) * | 2002-05-16 | 2003-11-21 | Toshiba Corp | 電子ビーム装置およびその装置を用いたデバイス製造方法 |
| JP4062527B2 (ja) | 2003-05-09 | 2008-03-19 | 株式会社島津製作所 | Ｔｆｔアレイ検査装置 |
| KR20060024398A (ko) | 2003-06-06 | 2006-03-16 | 도시바 마쯔시따 디스플레이 테크놀로지 컴퍼니, 리미티드 | 기판의 검사 방법 |
| CN101107534B (zh) * | 2005-05-02 | 2012-04-25 | 株式会社岛津制作所 | Tft阵列基板检查装置 |
-
2006
- 2006-04-04 DE DE102006015714.1A patent/DE102006015714B4/de not_active Expired - Fee Related
-
2007
- 2007-04-02 TW TW096111586A patent/TWI383133B/zh not_active IP Right Cessation
- 2007-04-04 US US12/296,055 patent/US8222911B2/en not_active Expired - Fee Related
- 2007-04-04 WO PCT/EP2007/003063 patent/WO2007115774A1/de not_active Ceased
- 2007-04-04 CN CN200780020797XA patent/CN101460857B/zh active Active
- 2007-04-04 JP JP2009503487A patent/JP5519271B2/ja active Active
-
2008
- 2008-11-03 KR KR1020087026897A patent/KR101342460B1/ko active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01292736A (ja) * | 1988-05-18 | 1989-11-27 | Matsushita Electric Ind Co Ltd | スイッチング素子を有したアクティブ基板の欠陥検査装置および欠陥検査方法 |
| US4902967A (en) * | 1989-05-18 | 1990-02-20 | The United States Of America As Represented By The Secretary Of The Navy | Scanning electron microscopy by photovoltage contrast imaging |
| US5150043A (en) * | 1991-02-11 | 1992-09-22 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus and method for non-contact surface voltage probing by scanning photoelectron emission |
| US5982190A (en) * | 1998-02-04 | 1999-11-09 | Toro-Lira; Guillermo L. | Method to determine pixel condition on flat panel displays using an electron beam |
| US6396299B1 (en) * | 1998-03-20 | 2002-05-28 | Nec Corporation | Method and apparatus for substrate defect testing by surface illumination |
Also Published As
| Publication number | Publication date |
|---|---|
| US8222911B2 (en) | 2012-07-17 |
| JP5519271B2 (ja) | 2014-06-11 |
| DE102006015714B4 (de) | 2019-09-05 |
| DE102006015714A1 (de) | 2007-10-18 |
| TW200745530A (en) | 2007-12-16 |
| US20090179656A1 (en) | 2009-07-16 |
| CN101460857B (zh) | 2012-07-18 |
| KR20090060215A (ko) | 2009-06-11 |
| WO2007115774A1 (de) | 2007-10-18 |
| JP2009532687A (ja) | 2009-09-10 |
| KR101342460B1 (ko) | 2013-12-17 |
| CN101460857A (zh) | 2009-06-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |