JP2004309488A - Tftfpd基板検査装置および検査方法 - Google Patents
Tftfpd基板検査装置および検査方法 Download PDFInfo
- Publication number
- JP2004309488A JP2004309488A JP2004120084A JP2004120084A JP2004309488A JP 2004309488 A JP2004309488 A JP 2004309488A JP 2004120084 A JP2004120084 A JP 2004120084A JP 2004120084 A JP2004120084 A JP 2004120084A JP 2004309488 A JP2004309488 A JP 2004309488A
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- crt
- tft
- inspection
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/305—Contactless testing using electron beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2813—Scanning microscopes characterised by the application
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2813—Scanning microscopes characterised by the application
- H01J2237/2817—Pattern inspection
Abstract
【解決手段】 TFT FPD基板検査装置は、基板4に電子線14を導入する複数の電子銃1A〜1Dと、実質的に作業領域Rを定め、該作業領域において真空状態の基板の少なくとも一部分を含み、作業領域内の基板に電子線の照射を行う真空室2と、基板からの電子を検出する電子検出器3とを備え、電子線を基板で走査して得られる電子の電圧コントラストを用いて基板検査を行う構成とする。
【選択図】 図4
Description
なお、後述する電圧コントラストを用いた従来技術として、特許文献1,非特許文献2,3がある。
また、本発明をFPDのTFT FPD基板検査に適用することによって、FPDの製造過程中において短時間でFPDの検査を完了させ、これによって、FPDの製造時間を短縮することができる。
Claims (2)
- 電子線を発生し走査してTFT FPD基板に導く複数の電子銃と、
実質的に作業領域を定め、当該作業領域において真空状態のTFT FPD基板の少なくとも一部分を含み、内部に設けた前記複数の電子銃によって作業領域内のTFT FPD基板に電子線を照射する真空室と、
TFT FPD基板からの電子を検出する電子検出器とを備え、
複数の電子銃による電子線をTFT FPD基板上で走査して得られる二次電子の電圧コントラストを用いてTFT FPD基板検査を行う、TFT FPD基板検査装置。 - 真空状態内で作業領域を囲む工程と、作業領域内にTFT FPD基板の少なくとも一部を配置する工程と、複数の電子銃で発生し走査する電子線の少なくとも一部を作業領域内の基板に導く工程と、TFT FPD基板からの電子を検出する工程とを備え、複数の電子銃による電子線をTFT FPD基板上で走査して得られる電圧コントラストを用いてTFT FPD基板検査を行う、TFT FPD基板検査方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/005,979 US6075245A (en) | 1998-01-12 | 1998-01-12 | High speed electron beam based system for testing large area flat panel displays |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP37288498A Division JP3563283B2 (ja) | 1998-01-12 | 1998-12-28 | 基板検査用高速電子線計測装置及び基板検査方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004309488A true JP2004309488A (ja) | 2004-11-04 |
JP4279720B2 JP4279720B2 (ja) | 2009-06-17 |
Family
ID=21718677
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP37288498A Expired - Fee Related JP3563283B2 (ja) | 1998-01-12 | 1998-12-28 | 基板検査用高速電子線計測装置及び基板検査方法 |
JP2004120084A Expired - Fee Related JP4279720B2 (ja) | 1998-01-12 | 2004-04-15 | Tftfpd基板検査装置および検査方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP37288498A Expired - Fee Related JP3563283B2 (ja) | 1998-01-12 | 1998-12-28 | 基板検査用高速電子線計測装置及び基板検査方法 |
Country Status (2)
Country | Link |
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US (1) | US6075245A (ja) |
JP (2) | JP3563283B2 (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006317437A (ja) * | 2005-04-29 | 2006-11-24 | Applied Materials Inc | インライン電子ビーム検査システム |
JP2009530619A (ja) * | 2006-03-14 | 2009-08-27 | アプライド マテリアルズ インコーポレイテッド | マルチカラム電子ビーム検査システムにおけるクロストークの軽減方法 |
JP2011191265A (ja) * | 2010-03-16 | 2011-09-29 | Shimadzu Corp | Tftアレイ検査装置およびtftアレイ検査方法 |
JP2012230056A (ja) * | 2011-04-27 | 2012-11-22 | Shimadzu Corp | 液晶アレイ検査装置およびライン座標位置算出方法 |
US8391587B2 (en) | 2008-06-02 | 2013-03-05 | Shimadzu Corporation | Liquid crystal array inspection apparatus and method for correcting imaging range |
JP2013232422A (ja) * | 2007-02-22 | 2013-11-14 | Applied Materials Israel Ltd | 高スループットsemツール |
KR20140123342A (ko) * | 2013-04-12 | 2014-10-22 | 삼성전자주식회사 | 기판의 결함 검출 방법 |
CN104978916A (zh) * | 2014-04-03 | 2015-10-14 | 四川虹视显示技术有限公司 | Oled面板显示缺陷修复方法 |
CN110428763A (zh) * | 2019-07-15 | 2019-11-08 | 深圳市华星光电半导体显示技术有限公司 | 阵列基板测试装置 |
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JP4491977B2 (ja) * | 2001-02-27 | 2010-06-30 | 株式会社島津製作所 | Ezフィルタ分光方法及びその装置 |
DE10227332A1 (de) * | 2002-06-19 | 2004-01-15 | Akt Electron Beam Technology Gmbh | Ansteuervorrichtung mit verbesserten Testeneigenschaften |
DE10253717B4 (de) * | 2002-11-18 | 2011-05-19 | Applied Materials Gmbh | Vorrichtung zum Kontaktieren für den Test mindestens eines Testobjekts, Testsystem und Verfahren zum Testen von Testobjekten |
US6765203B1 (en) | 2003-01-31 | 2004-07-20 | Shimadzu Corporation | Pallet assembly for substrate inspection device and substrate inspection device |
US7012583B2 (en) * | 2003-02-07 | 2006-03-14 | Shimadzu Corporation | Apparatus and method for testing pixels of flat panel display |
US6873175B2 (en) | 2003-03-04 | 2005-03-29 | Shimadzu Corporation | Apparatus and method for testing pixels arranged in a matrix array |
US7928404B2 (en) * | 2003-10-07 | 2011-04-19 | Multibeam Corporation | Variable-ratio double-deflection beam blanker |
US7435956B2 (en) * | 2004-09-10 | 2008-10-14 | Multibeam Systems, Inc. | Apparatus and method for inspection and testing of flat panel display substrates |
US7227142B2 (en) * | 2004-09-10 | 2007-06-05 | Multibeam Systems, Inc. | Dual detector optics for simultaneous collection of secondary and backscattered electrons |
US7355418B2 (en) * | 2004-02-12 | 2008-04-08 | Applied Materials, Inc. | Configurable prober for TFT LCD array test |
US20060038554A1 (en) * | 2004-02-12 | 2006-02-23 | Applied Materials, Inc. | Electron beam test system stage |
US6833717B1 (en) * | 2004-02-12 | 2004-12-21 | Applied Materials, Inc. | Electron beam test system with integrated substrate transfer module |
US7319335B2 (en) * | 2004-02-12 | 2008-01-15 | Applied Materials, Inc. | Configurable prober for TFT LCD array testing |
JPWO2005085938A1 (ja) * | 2004-03-05 | 2008-01-24 | 東芝松下ディスプレイテクノロジー株式会社 | 基板の検査方法、アレイ基板の検査方法、及びアレイ基板の検査装置 |
US7456402B2 (en) * | 2004-09-10 | 2008-11-25 | Multibeam Systems, Inc. | Detector optics for multiple electron beam test system |
KR100780759B1 (ko) * | 2005-01-24 | 2007-11-30 | 삼성전자주식회사 | 박막 트랜지스터 어레이 검사장치 |
US7602199B2 (en) * | 2006-05-31 | 2009-10-13 | Applied Materials, Inc. | Mini-prober for TFT-LCD testing |
US7786742B2 (en) * | 2006-05-31 | 2010-08-31 | Applied Materials, Inc. | Prober for electronic device testing on large area substrates |
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JP5163749B2 (ja) * | 2008-12-16 | 2013-03-13 | 株式会社島津製作所 | 液晶アレイ検査装置システムの真空引き方法、液晶アレイ検査装置システム、および液晶アレイ検査装置 |
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JP6604704B2 (ja) * | 2014-12-22 | 2019-11-13 | アプライド マテリアルズ インコーポレイテッド | 基板の検査装置、基板の検査方法、大面積基板検査装置、及びその操作方法 |
KR102329264B1 (ko) * | 2018-02-22 | 2021-11-18 | 어플라이드 머티어리얼스, 인코포레이티드 | 디스플레이 제조를 위한 기판에 대한 자동화된 임계 치수 측정을 위한 방법, 디스플레이 제조를 위한 대면적 기판을 검사하는 방법, 디스플레이 제조를 위한 대면적 기판을 검사하기 위한 장치, 및 그 동작 방법 |
CN109003567A (zh) * | 2018-07-24 | 2018-12-14 | 深圳市华星光电半导体显示技术有限公司 | Tft阵列基板测试装置及测试方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3961190A (en) * | 1975-03-06 | 1976-06-01 | International Business Machines Corporation | Voltage contrast detector for a scanning electron beam instrument |
KR0136382B1 (en) * | 1988-08-11 | 1998-04-27 | Sanyo Electric Co | Circuitry for preventing doming phenomenon in a television and the method thereof |
JP3134772B2 (ja) * | 1996-04-16 | 2001-02-13 | 双葉電子工業株式会社 | 電界放出型表示素子およびその駆動方法 |
-
1998
- 1998-01-12 US US09/005,979 patent/US6075245A/en not_active Expired - Fee Related
- 1998-12-28 JP JP37288498A patent/JP3563283B2/ja not_active Expired - Fee Related
-
2004
- 2004-04-15 JP JP2004120084A patent/JP4279720B2/ja not_active Expired - Fee Related
Cited By (11)
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JP2006317437A (ja) * | 2005-04-29 | 2006-11-24 | Applied Materials Inc | インライン電子ビーム検査システム |
KR101255750B1 (ko) * | 2005-04-29 | 2013-04-17 | 어플라이드 머티어리얼스, 인코포레이티드 | 인라인 전자 빔 검사 시스템 |
JP2009530619A (ja) * | 2006-03-14 | 2009-08-27 | アプライド マテリアルズ インコーポレイテッド | マルチカラム電子ビーム検査システムにおけるクロストークの軽減方法 |
JP2013232422A (ja) * | 2007-02-22 | 2013-11-14 | Applied Materials Israel Ltd | 高スループットsemツール |
US8391587B2 (en) | 2008-06-02 | 2013-03-05 | Shimadzu Corporation | Liquid crystal array inspection apparatus and method for correcting imaging range |
JP2011191265A (ja) * | 2010-03-16 | 2011-09-29 | Shimadzu Corp | Tftアレイ検査装置およびtftアレイ検査方法 |
JP2012230056A (ja) * | 2011-04-27 | 2012-11-22 | Shimadzu Corp | 液晶アレイ検査装置およびライン座標位置算出方法 |
KR20140123342A (ko) * | 2013-04-12 | 2014-10-22 | 삼성전자주식회사 | 기판의 결함 검출 방법 |
KR102009173B1 (ko) | 2013-04-12 | 2019-08-09 | 삼성전자 주식회사 | 기판의 결함 검출 방법 |
CN104978916A (zh) * | 2014-04-03 | 2015-10-14 | 四川虹视显示技术有限公司 | Oled面板显示缺陷修复方法 |
CN110428763A (zh) * | 2019-07-15 | 2019-11-08 | 深圳市华星光电半导体显示技术有限公司 | 阵列基板测试装置 |
Also Published As
Publication number | Publication date |
---|---|
JP4279720B2 (ja) | 2009-06-17 |
JP3563283B2 (ja) | 2004-09-08 |
US6075245A (en) | 2000-06-13 |
JPH11265678A (ja) | 1999-09-28 |
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