CN101456487B - 悬挂式暂存货架及其移设方法 - Google Patents
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Abstract
本发明提供一种悬挂式暂存货架,在屋顶上以固定的间隔安装第1支撑部件,由第1支撑部件支撑下方具有水平开口的滑轨,在滑轨上安装第2支撑部件,在其下端设置用于载置物品的搁板。通过使第2支撑部件沿着滑轨滑动,能够移设悬挂式暂存货架。
Description
技术领域
本发明涉及与天车等组合使用的悬挂式暂存货架(buffer)的改良。
背景技术
在专利文献1:特开2006-324469中公开了一种在天车的行驶轨道的侧方设置悬挂式暂存货架,用来暂时放置天车的搬送物品的技术。如果设置悬挂式暂存货架,则在目的地的装载口(load port)堵塞的情况下,可以把物品暂时放置在附近的悬挂式暂存货架中,当装载口空出时把物品搬入。另外,在不能调配从装载位置的装载口向搬送目的地搬送的天车的情况下,可以把物品搬出到装载位置附近的悬挂式暂存货架中,清空装载位置的装载口。通过上述的说明可以了解到,悬挂式暂存货架多数情况与处理装置的装载口对应,因而一般需要对应处理装置的设置或移设等,增设或移设悬挂式暂存货架。其中,装载口是设在处理装置中的物品的搬入搬出位置。另外,以下有时把悬挂式暂存货架简称为暂存货架。
专利文献1所记载的结构是,用天车的行驶轨道支撑暂存货架的左右一方,把另一方通过支柱从屋顶吊下。由于无尘车间的屋顶具有越来越高的倾向,所以,如果从屋顶把暂存货架利用悬吊螺栓等支柱吊下,则在暂存货架的移动时需要进行高空作业。因此,暂存货架的移设变得困难。
[专利文献1]特开2006-324469
发明内容
本发明的目的是使悬挂式暂存货架的移设变得容易。
本发明的悬挂式暂存货架,由向铅垂方向延伸的支撑部件,支撑用于与天车之间自如地传递物品的搁板,其特征在于,上述支撑部件由第1支撑部件和第2支撑部件构成,该第1支撑部件被安装在屋顶上,且支撑在下部具有沿着水平方向的开口的第1滑轨,该第2支撑部件被水平方向滑动自如地安装在该滑轨上,并且支撑上述货架。
本发明提供一种移设悬挂式暂存货架的方法,该悬挂式暂存货架由向铅垂方向延伸的支撑部件,支撑用于与天车之间自如传递物品的搁板,其中,将第1支撑部件固定在屋顶上,在该第1支撑部件上安装下部具有沿着水平方向的开口的第1滑轨,在该滑轨上安装第2支撑部件,通过在该第2支撑部件上安装货架,来设置悬挂式暂存货架,并且,通过使上述第2支撑部件沿着上述滑轨在水平方向滑动,来移设悬挂式暂存货架。
优选上述搁板由第2滑轨和物品的载置部件构成,该第2滑轨被安装在第2支撑部件上,并且具有沿着水平方向的开口,该载置部件被该第2滑轨被支撑为在水平方向滑动自如。更优选上述第2支撑部件由搁板两端的支撑部件和搁板的中央部的支撑部件构成,搁板的中央部的支撑部件沿着上述第1滑轨和第2滑轨在水平方向滑动自如,把具有呈L字状的2片平板、和连结该2片平板的连结部的安装部件,沿着上述第1滑轨的开口,配置在第2支撑部件的前后双方,把上述L字状的2片平板中的1片安装在上述第1滑轨上,把另1片安装在第2支撑部件上。
本发明通过使第2支撑部件沿着滑轨水平移动,可容易地移设悬挂式暂存货架。而且,由于把第1支撑部件安装在屋顶上,把第2支撑部件安装在滑轨上,所以,暂存货架的搁板长度不受屋顶上的安装间隔的限制。
利用被安装在第2支撑部件上的第2滑轨、和由第2滑轨支撑为在水平方向滑动自如的物品的载置部件构成搁板,可容易地变更载置位置。并且,采用把L字状的安装部件的1片安装在第2支撑部件上,把另1片安装在第1滑轨上,并连结L字状的2片的结构,可以把第2支撑部件牢固地安装在第1滑轨上。因此,不需要把第2支撑部件相互结合的横梁。而且,通过使支撑搁板的中央部的第2支撑部件沿着第1和第2滑轨滑动,可容易地改变搁板上的载置部件的配置。
附图说明
图1是实施例的悬挂式暂存货架的主要部分的侧视图。
图2是实施例的悬挂式暂存货架的主视图。
图3是表示悬挂式暂存货架和天车的主视图。
图4是实施例中的下部支撑部件及其安装部件的俯视图。
图5是表示实施例中的在上部滑轨(race way)上安装下部支撑部件的状态的侧视图。
图6是表示实施例中的在下部滑轨上安装薄板(sheet)的图。
图7是从图1变更了下部支撑部件的位置的悬挂式暂存货架的主要部分侧视图。
图中:2-悬挂式暂存货架;4-屋顶;6-悬吊螺栓;8-上部滑轨;10-暂存货架单元;12-下部支撑部件;14-安装部件;15-补强板;16-下部滑轨;18-薄板(sheet);20-轨道;22-悬吊螺栓;24-天车;26-FOUP;27-θ驱动器;28-卷扬机(hoist);29-夹头(chuck);30-横向驱动器(lateral driver);31-掉落防止罩;32-开口;34-螺母;36、37-平板;38、39-开口;40、41-螺栓;42-螺母板;45-撑条;50-螺栓;g1、g2-间隔。
具体实施方式
下面,说明用于实施本发明的最佳实施例。
【实施例】
图1~图7表示实施例的悬挂式暂存货架2,4是无尘车间等的屋顶,其以固定的间隔安装有悬吊螺栓6。8是上部滑轨,在图1的右下部分放大表示了其结构,在滑轨8的底部是沿着长度方向的开口32,在滑轨8的上面,利用螺母34等安装着悬吊螺栓6的下端。另外,由于滑轨8在上面不具有沿着长度方向的开口,所以,在适当的位置,在滑轨8的上面设有贯通孔,用螺母34来固定悬吊螺栓6。
在滑轨8的下部设有暂存货架单元10。12是下部支撑部件,14是安装部件,利用开口32把支撑部件12的前后两侧安装在滑轨8上。15是三角形状的补强板,其将L字状的2片安装部件14连接。16是下部滑轨,安装有多个用于载置FOUP等物品的托盘上的薄板18。也可以取代下部滑轨16而使用适宜的搭边料等,另外,这里是把下部支撑部件12用3根支撑部件12a~12c构成,但也可以使用支撑暂存货架单元10两端的2根支撑部件构成。关于薄板18之间的间隔,在之间存在下部支撑部件12b的情况下,设置为比较大的值g2,在之间不存在下部支撑部件12b的情况下,设置为比较小的值g1。并且,暂存货架单元10沿着滑轨8在适当的位置安装有多个。
悬挂式暂存货架2与天车系统之间传递FOUP26等物品。导轨20从屋顶4由悬吊螺栓22支撑,用于使天车24行驶。天车24利用卷扬机28来升降FOUP26,利用横向驱动器30使卷扬机28和FOUP26在水平面内与导轨20成直角的方向进退,在与薄板18之间传递FOUP26。
图2表示悬挂式暂存货架2的主视图,左右一对悬吊螺栓6、6从屋顶4向铅垂下方延伸,支撑长度方向为水平的上部滑轨8。通过安装部件14,把左右一对垂直的下部支撑部件12安装在上部滑轨8上,在其底部,通过长度方向为水平的下部滑轨16,安装薄板18。
安装部件14具有金属制的连接左右下部支撑部件12、12,并呈L字状的2片平板36、37,为了减轻重量,在平板36、37上形成开口38、39。而且,通过使用补强板15连结,来加强平板36、37。如图4、图5所示,在下部支撑部件12的前后,即滑轨8的长度方向分别安装有安装部件14、14,利用螺栓和螺母板42等把平板36安装在滑轨8的底面,利用螺栓把平板37安装在下部支撑部件12上。螺母板42是设有螺母的板,在滑轨8内滑动自如。
利用安装部件14把左右的下部支撑部件12相互连结,防止下部支撑部件12向前后,即沿着滑轨8的长度方向产生振动。因此,在滑轨8与滑轨16的中间位置不需要撑条。另外,如图5的右下部所示,也可以取代补强板15而使用撑条45等连结平板36、37的前端。
如图2的下部所示,下部滑轨16沿着长度方向例如具有4个开口, 利用这些开口,使用螺栓40、41等把其安装在下部支撑部件12上。而且,如图6所示,利用螺栓50等和下部滑轨16的上部开口等,把薄板18固定在下部滑轨16上。
下面,说明实施例的悬挂式暂存货架2的设置。屋顶4能够以规定的间隔任意安装悬吊螺栓6。因此,以该间隔左右2列地安装悬吊螺栓6,并在其下部固定上部滑轨8。例如,把安装部件14的平板36暂时固定在下部滑轨16上,将下部支撑部件12固定在平板37上。然后,将下部滑轨16安装在下部支撑部件12上,并安装薄板18。在此过程中,由于下部支撑部件12沿着上部滑轨8滑动自如,所以能够调整位置。而且,在调整了各部的位置后,把下部支撑部件12固定在上部滑轨8上,把下部滑轨16固定在下部支撑部件12上,把薄板18固定在下部滑轨16上。另外,也可以预先组装好暂存货架单元10,然后再安装到上部滑轨8上。
图3表示天车24与悬挂式暂存货架2之间的关系。天车24在轨道20内的位置具有行驶驱动部和受电部,在沿着轨道20行驶的同时,通过非接触式供电等,从轨道20侧受电。由横向驱动器30使θ驱动器27~FOUP26横向移动,由θ驱动器27使卷扬机28和FOUP26的朝向在水平面内转动。卷扬机28使FOUP26升降,夹头29用于夹住或松开FOUP26上部的突缘。另外,利用掉落防止罩31来防止FOUP26的掉落。根据上述的结构,天车24在薄板18和未图示的装载口等之间自如地传递FOUP26。
随着无尘车间中的处理装置等的移动,有时需要移动暂存货架单元10。这是因为一般需要把暂存货架单元10设置在与处理装置对置的位置等。在移设暂存货架单元10时,只要松开安装部件14在上部滑轨8上的固定,即可使暂存货架单元10整体沿着滑轨8滑动。因此,可非常简单地移设暂存货架单元10。另外,随着处理装置的更换等,有时需要调整各薄板18a~18d的位置。在这种情况下,可不移动暂存货架单元10两端的下部支撑部件12a、12c,而移动中央的下部支撑部件12b的位置。因此,可放松中央的下部支撑部件12b在滑轨8、16上的固定,使其滑动到规定的位置。而且,与此同时,使薄板18c等沿着滑轨16移动。由此,可变更薄板18b、18c之间的间隔、和薄板18c、18d之间 的间隔。并且,能够使下部支撑部件12b单独滑动的原因是,不存在把下部支撑部件12a~12c在高度方向的中间连结的横梁等。
实施例可以获得以下的效果。
(1)暂存货架单元10的设置位置和长度等不受屋顶4上的悬吊螺栓6的安装间隔的限制。
(2)通过使暂存货架单元10沿着上部滑轨8滑动,可简单地使其移动。
(3)通过移动中央的下部支撑部件12b,可改变薄板18a~18d的配置。
(4)下部支撑部件12用安装部件14相互连结,而且被牢固地安装在上部滑轨8上。
实施例的暂存货架单元10例如与天车24的轨道20平行地配置在其侧方,但也可以把暂存货架单元10配置在导轨20的下方。
Claims (2)
1.一种悬挂式暂存货架,由向铅垂方向延伸的支撑部件支撑用于与天车之间自如传递物品的搁板,其特征在于,
上述支撑部件由第1支撑部件和第2支撑部件构成,
该第1支撑部件被安装在屋顶上,用于支撑下部具有沿着水平方向的开口的第1滑轨,
该第2支撑部件被水平方向滑动自如地安装在该滑轨上,并且支撑上述搁板,
上述搁板由第2滑轨和物品的载置部件构成,
该第2滑轨被安装在第2支撑部件上,并且具有沿着水平方向的开口,
该载置部件被该第2滑轨支撑为在水平方向滑动自如。
2.根据权利要求1所述的悬挂式暂存货架,其特征在于,
上述第2支撑部件由搁板两端的支撑部件和搁板中央部的支撑部件构成,
搁板中央部的支撑部件沿着上述第1滑轨和第2滑轨在水平方向滑动自如,
把具有L字状的2片平板、和连结该2片平板的连结部的安装部件,沿着上述第1滑轨的开口,配置在第2支撑部件的前后双方,将上述L字状的2片平板中的1片安装在上述第1滑轨上,将另1片安装在第2支撑部件上。
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JP2007318332 | 2007-12-10 |
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EP (1) | EP2071617A3 (zh) |
JP (1) | JP5163866B2 (zh) |
KR (1) | KR101236361B1 (zh) |
CN (1) | CN101456487B (zh) |
TW (1) | TWI414468B (zh) |
Families Citing this family (14)
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TWI488251B (zh) * | 2012-10-19 | 2015-06-11 | Inotera Memories Inc | 軌道緩衝裝置及晶圓傳輸系統 |
KR102512046B1 (ko) * | 2016-06-29 | 2023-03-20 | 세메스 주식회사 | 캐리어 이송 장치 |
KR102490590B1 (ko) * | 2016-06-29 | 2023-01-20 | 세메스 주식회사 | 캐리어 이송 장치 |
CN105931448B (zh) * | 2016-07-06 | 2019-07-12 | 北京爱德王智能科技有限公司 | 一种单通道多向传送系统 |
KR102302099B1 (ko) * | 2017-05-19 | 2021-09-13 | 무라다기카이가부시끼가이샤 | 보관 시스템 |
KR102020234B1 (ko) * | 2017-09-08 | 2019-09-11 | 세메스 주식회사 | 레이스웨이 유닛 및 이를 갖는 oht |
KR102080877B1 (ko) * | 2018-05-28 | 2020-02-24 | 세메스 주식회사 | 레이스웨이 유닛 및 이를 갖는 oht |
KR102114413B1 (ko) * | 2018-07-25 | 2020-05-22 | 세메스 주식회사 | 천장 주행 시스템 |
KR102531956B1 (ko) * | 2019-01-25 | 2023-05-12 | 무라다기카이가부시끼가이샤 | 보관 시스템 |
CN109720765A (zh) * | 2019-01-26 | 2019-05-07 | 西安威仁自动化科技有限公司 | 一种自动存取物料装置 |
KR102541299B1 (ko) * | 2020-09-23 | 2023-06-12 | 세메스 주식회사 | 물품 반송 시스템 |
KR102361173B1 (ko) | 2021-01-22 | 2022-02-14 | 주식회사 에이치씨씨 | 반도체 제조에 사용되는 풉 저장장치 |
KR102360920B1 (ko) | 2021-02-22 | 2022-02-14 | 주식회사 에이치씨씨 | 반도체 생산라인에서 사용되는 풉 저장 장치 |
CN114582772B (zh) * | 2022-04-28 | 2022-08-02 | 长鑫存储技术有限公司 | 悬吊式暂存装置、水平调节系统、水平调节方法 |
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CN1506257A (zh) * | 2002-12-09 | 2004-06-23 | 村田机械株式会社 | 天车系统 |
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JP2892523B2 (ja) * | 1991-06-15 | 1999-05-17 | 松下電工株式会社 | 台所のハンギング装置 |
JPH08288355A (ja) * | 1995-04-12 | 1996-11-01 | Nikon Corp | 基板搬送装置 |
KR100400788B1 (ko) * | 1995-08-22 | 2004-04-14 | 가부시키가이샤 다이후쿠 | 이동선반설비 |
JP3067682B2 (ja) * | 1997-03-13 | 2000-07-17 | 村田機械株式会社 | 天井走行車システム |
JP2001031368A (ja) * | 1999-07-22 | 2001-02-06 | Murata Mach Ltd | 搬送車システム |
TWI246501B (en) * | 2003-02-03 | 2006-01-01 | Murata Machinery Ltd | Overhead traveling carriage system |
US7168553B2 (en) * | 2003-11-13 | 2007-01-30 | Applied Materials, Inc. | Dynamically balanced substrate carrier handler |
JP4045451B2 (ja) * | 2003-12-26 | 2008-02-13 | 村田機械株式会社 | 天井走行車システム |
JP4501843B2 (ja) * | 2005-11-04 | 2010-07-14 | 株式会社ダイフク | 転換設備 |
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CN1506257A (zh) * | 2002-12-09 | 2004-06-23 | 村田机械株式会社 | 天车系统 |
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Also Published As
Publication number | Publication date |
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CN101456487A (zh) | 2009-06-17 |
JP5163866B2 (ja) | 2013-03-13 |
TWI414468B (zh) | 2013-11-11 |
EP2071617A3 (en) | 2011-11-02 |
TW200927620A (en) | 2009-07-01 |
KR101236361B1 (ko) | 2013-02-22 |
JP2009137740A (ja) | 2009-06-25 |
KR20090060940A (ko) | 2009-06-15 |
EP2071617A2 (en) | 2009-06-17 |
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