CN101393958B - 第ⅲ族氮化物基化合物半导体发光器件 - Google Patents
第ⅲ族氮化物基化合物半导体发光器件 Download PDFInfo
- Publication number
- CN101393958B CN101393958B CN2008102115377A CN200810211537A CN101393958B CN 101393958 B CN101393958 B CN 101393958B CN 2008102115377 A CN2008102115377 A CN 2008102115377A CN 200810211537 A CN200810211537 A CN 200810211537A CN 101393958 B CN101393958 B CN 101393958B
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- node
- layer
- group iii
- based compound
- iii nitride
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 86
- 150000001875 compounds Chemical class 0.000 title claims abstract description 81
- 150000004767 nitrides Chemical class 0.000 claims abstract description 79
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 230000004888 barrier function Effects 0.000 abstract description 4
- 239000010931 gold Substances 0.000 abstract description 3
- 229910052594 sapphire Inorganic materials 0.000 abstract description 3
- 239000010980 sapphire Substances 0.000 abstract description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052737 gold Inorganic materials 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 95
- 229910002704 AlGaN Inorganic materials 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000005253 cladding Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 230000005533 two-dimensional electron gas Effects 0.000 description 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 239000011777 magnesium Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 239000002355 dual-layer Substances 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
Landscapes
- Led Devices (AREA)
- Junction Field-Effect Transistors (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007240639 | 2007-09-18 | ||
| JP2007240639A JP2009071220A (ja) | 2007-09-18 | 2007-09-18 | Iii族窒化物系化合物半導体発光素子 |
| JP2007-240639 | 2007-09-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101393958A CN101393958A (zh) | 2009-03-25 |
| CN101393958B true CN101393958B (zh) | 2011-01-26 |
Family
ID=40453503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008102115377A Active CN101393958B (zh) | 2007-09-18 | 2008-09-17 | 第ⅲ族氮化物基化合物半导体发光器件 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20090072267A1 (enExample) |
| JP (1) | JP2009071220A (enExample) |
| CN (1) | CN101393958B (enExample) |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101527869B1 (ko) * | 2008-11-18 | 2015-06-11 | 삼성전자주식회사 | 발광 소자의 제조 방법 |
| TWI527261B (zh) | 2009-09-11 | 2016-03-21 | 晶元光電股份有限公司 | 發光元件 |
| JP5310534B2 (ja) | 2009-12-25 | 2013-10-09 | 豊田合成株式会社 | Iii族窒化物半導体の製造方法 |
| JP5423390B2 (ja) * | 2009-12-26 | 2014-02-19 | 豊田合成株式会社 | Iii族窒化物系化合物半導体素子及びその製造方法 |
| US8455856B1 (en) * | 2010-04-09 | 2013-06-04 | Stc.Unm | Integration of LED driver circuit with LED |
| CN102169944B (zh) * | 2011-04-06 | 2012-11-07 | 上海大学 | Ag/ITO/氧化锌基复合透明电极的发光二极管及其制备方法 |
| JP5626123B2 (ja) * | 2011-05-30 | 2014-11-19 | 豊田合成株式会社 | Iii族窒化物半導体発光素子の製造方法 |
| CN102270714B (zh) * | 2011-08-24 | 2013-11-27 | 上海蓝光科技有限公司 | 发光二极管芯片的制备方法 |
| CN103243389B (zh) | 2012-02-08 | 2016-06-08 | 丰田合成株式会社 | 制造第III族氮化物半导体单晶的方法及制造GaN衬底的方法 |
| EP2820678B1 (en) * | 2012-02-28 | 2019-05-08 | Lumileds Holding B.V. | Integration of gallium nitride leds with aluminum gallium nitride/gallium nitride devices on silicon substrates for ac leds |
| KR20140073351A (ko) * | 2012-12-06 | 2014-06-16 | 엘지이노텍 주식회사 | 발광 소자 |
| JP5999443B2 (ja) | 2013-06-07 | 2016-09-28 | 豊田合成株式会社 | III 族窒化物半導体結晶の製造方法およびGaN基板の製造方法 |
| JP6015566B2 (ja) | 2013-06-11 | 2016-10-26 | 豊田合成株式会社 | III 族窒化物半導体のエッチング方法およびIII 族窒化物半導体結晶の製造方法およびGaN基板の製造方法 |
| TWI642874B (zh) * | 2013-09-11 | 2018-12-01 | 晶元光電股份有限公司 | 發光二極體組件以及相關之照明裝置 |
| US10270436B2 (en) | 2014-11-14 | 2019-04-23 | The Hong Kong University Of Science And Technology | Transistors having on-chip integrated photon source or photonic-ohmic drain to facilitate de-trapping electrons trapped in deep traps of transistors |
| CN105810707B (zh) * | 2014-12-31 | 2018-07-24 | 黄智方 | 高电子迁移率发光晶体管的结构 |
| US9502602B2 (en) * | 2014-12-31 | 2016-11-22 | National Tsing Hua University | Structure of high electron mobility light emitting transistor |
| US9871060B2 (en) | 2015-02-16 | 2018-01-16 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device |
| CN105206735A (zh) * | 2015-10-22 | 2015-12-30 | 江苏新广联半导体有限公司 | 基于碳纳米管作为桥接结构的高压二极管 |
| WO2017096032A1 (en) * | 2015-12-04 | 2017-06-08 | Quora Technology, Inc. | Wide band gap device integrated circuit architecture on engineered substrate |
| US10290674B2 (en) * | 2016-04-22 | 2019-05-14 | QROMIS, Inc. | Engineered substrate including light emitting diode and power circuitry |
| CN105914218B (zh) * | 2016-06-03 | 2019-01-29 | 华南理工大学 | 集成放大电路的氮化镓基发光二极管结构及其制备方法 |
| CN105932034B (zh) * | 2016-06-23 | 2019-02-19 | 厦门乾照光电股份有限公司 | 增加esd保护的led芯片及其制造方法 |
| JP6668979B2 (ja) * | 2016-07-04 | 2020-03-18 | 豊田合成株式会社 | 半導体素子および電気回路 |
| CN110277421B (zh) * | 2018-03-16 | 2021-10-29 | 京东方科技集团股份有限公司 | 阵列基板及其制造方法、显示装置 |
| JP2019161172A (ja) * | 2018-03-16 | 2019-09-19 | 株式会社ブイ・テクノロジー | Led・トランジスタ複合素子 |
| CN108550683B (zh) * | 2018-06-14 | 2019-10-18 | 华南理工大学 | 一种高电子迁移率晶体管与垂直结构发光二极管的单片集成方法 |
| GB201816455D0 (en) * | 2018-10-09 | 2018-11-28 | Univ Sheffield | LED Arrays |
| JP7348520B2 (ja) * | 2018-12-25 | 2023-09-21 | 日亜化学工業株式会社 | 発光装置及び表示装置 |
| GB201910348D0 (en) | 2019-07-19 | 2019-09-04 | Univ Sheffield | LED Arrays |
| KR102806086B1 (ko) * | 2019-09-25 | 2025-05-12 | 삼성전자주식회사 | 반도체 장치, 그 제조 방법, 및 이를 포함하는 디스플레이 장치 |
| KR102721080B1 (ko) * | 2019-10-08 | 2024-10-24 | 삼성전자주식회사 | 반도체 장치, 그 제조 방법 및 이를 포함하는 디스플레이 장치 |
| CN113690266A (zh) * | 2021-06-29 | 2021-11-23 | 河源市众拓光电科技有限公司 | 一种hemt与阵列led单片集成芯片及其制备方法 |
| US12446385B2 (en) | 2023-11-03 | 2025-10-14 | Snap Inc. | Monolithic RGB microLED array |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0828550B2 (ja) * | 1988-02-02 | 1996-03-21 | 松下電器産業株式会社 | 光集積回路 |
| JPH09213918A (ja) * | 1996-02-01 | 1997-08-15 | Furukawa Electric Co Ltd:The | 光電子集積回路素子 |
| DE10054970A1 (de) * | 2000-11-06 | 2002-05-23 | Infineon Technologies Ag | Verfahren zur Steuerung der Lade- und Entladephasen eines Stützkondensators |
| WO2003015174A2 (en) * | 2001-08-07 | 2003-02-20 | Jan Kuzmik | High electron mobility devices |
| JP3981864B2 (ja) * | 2001-11-15 | 2007-09-26 | 富士通株式会社 | ナイトライド系半導体レーザを備えた光集積装置 |
| US6768146B2 (en) * | 2001-11-27 | 2004-07-27 | The Furukawa Electric Co., Ltd. | III-V nitride semiconductor device, and protection element and power conversion apparatus using the same |
| US7382001B2 (en) * | 2004-01-23 | 2008-06-03 | International Rectifier Corporation | Enhancement mode III-nitride FET |
| EP1759408A1 (en) * | 2004-06-11 | 2007-03-07 | AMMONO Sp.z o.o. | High electron mobility transistor (hemt) made of layers of group xiii element nitrides and manufacturing method thereof. |
| US7288803B2 (en) * | 2004-10-01 | 2007-10-30 | International Rectifier Corporation | III-nitride power semiconductor device with a current sense electrode |
| US7535028B2 (en) * | 2005-02-03 | 2009-05-19 | Ac Led Lighting, L.Lc. | Micro-LED based high voltage AC/DC indicator lamp |
| JP2007059595A (ja) * | 2005-08-24 | 2007-03-08 | Toshiba Corp | 窒化物半導体素子 |
-
2007
- 2007-09-18 JP JP2007240639A patent/JP2009071220A/ja not_active Withdrawn
-
2008
- 2008-09-15 US US12/232,320 patent/US20090072267A1/en not_active Abandoned
- 2008-09-17 CN CN2008102115377A patent/CN101393958B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009071220A (ja) | 2009-04-02 |
| US20090072267A1 (en) | 2009-03-19 |
| CN101393958A (zh) | 2009-03-25 |
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| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |