CN101175362B - 除电装置和除电方法 - Google Patents

除电装置和除电方法 Download PDF

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Publication number
CN101175362B
CN101175362B CN2007101466776A CN200710146677A CN101175362B CN 101175362 B CN101175362 B CN 101175362B CN 2007101466776 A CN2007101466776 A CN 2007101466776A CN 200710146677 A CN200710146677 A CN 200710146677A CN 101175362 B CN101175362 B CN 101175362B
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China
Prior art keywords
mounting table
medical check
tested
wafer
electrically
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CN2007101466776A
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Chinese (zh)
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CN101175362A (zh
Inventor
筱原荣一
花轮一纪
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/20—Modifications of basic electric elements for use in electric measuring instruments; Structural combinations of such elements with such instruments
    • G01R1/206—Switches for connection of measuring instruments or electric motors to measuring loads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • H10P72/50—

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
CN2007101466776A 2006-11-01 2007-08-24 除电装置和除电方法 Active CN101175362B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2006297979 2006-11-01
JP2006297979 2006-11-01
JP2006-297979 2006-11-01
JP2007063310A JP4068127B2 (ja) 2006-11-01 2007-03-13 除電装置及び除電方法並びにプログラム記録媒体
JP2007063310 2007-03-13
JP2007-063310 2007-03-13

Publications (2)

Publication Number Publication Date
CN101175362A CN101175362A (zh) 2008-05-07
CN101175362B true CN101175362B (zh) 2011-12-14

Family

ID=38305365

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007101466776A Active CN101175362B (zh) 2006-11-01 2007-08-24 除电装置和除电方法

Country Status (4)

Country Link
JP (1) JP4068127B2 (enExample)
KR (1) KR100834176B1 (enExample)
CN (1) CN101175362B (enExample)
TW (1) TW200826213A (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101604075B (zh) * 2008-06-13 2013-04-10 统宝光电股份有限公司 液晶显示面板的点灯测试静电防护装置与方法
JP5377915B2 (ja) * 2008-09-30 2013-12-25 東京エレクトロン株式会社 検査装置及び検査方法
JP5356769B2 (ja) * 2008-10-15 2013-12-04 東京エレクトロン株式会社 載置台
JP2011054762A (ja) * 2009-09-02 2011-03-17 Tokyo Electron Ltd 除電装置の監視装置、除電装置の監視方法及び除電装置の監視用プログラム
KR101999720B1 (ko) * 2012-11-20 2019-07-16 삼성디스플레이 주식회사 기판 정전기 검사 장치 및 기판 제조 방법
JP6227262B2 (ja) 2013-03-06 2017-11-08 株式会社荏原製作所 表面電位測定装置および表面電位測定方法
KR101515719B1 (ko) * 2013-12-23 2015-04-27 세메스 주식회사 프로브 스테이션
CN105530750A (zh) * 2014-09-29 2016-04-27 盛美半导体设备（上海）有限公司 晶圆导静电装置
CN107976576A (zh) * 2016-10-24 2018-05-01 精工爱普生株式会社 电子元器件传送装置以及电子元器件检查装置
JP7153181B2 (ja) * 2018-03-29 2022-10-14 株式会社東京精密 導通検査装置、プローバ
CN111257714B (zh) * 2020-01-17 2022-11-29 上海华力集成电路制造有限公司 静电测量设备及静电测量方法
JP2023148322A (ja) * 2022-03-30 2023-10-13 株式会社東京精密 導通検査装置、ケルビン測定用プローバ、及び除電装置
CN119355311B (zh) * 2024-10-22 2025-04-29 上海矽弼半导体科技有限公司 一种探针台用的具有耐高压低漏电功能的载物台
CN120048713B (zh) * 2025-02-20 2025-10-24 盛吉盛(宁波)半导体科技有限公司 除电装置、电源连接装置以及半导体加工腔室

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2076241U (zh) * 1990-09-30 1991-05-01 朱少武 防爆接地控制器
CN2303378Y (zh) * 1997-07-29 1999-01-06 马思正 电器自动接地消幅器
CN1702495A (zh) * 2004-05-24 2005-11-30 统宝光电股份有限公司 静电消除装置及其机台

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6346428B1 (en) 1998-08-17 2002-02-12 Tegal Corporation Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing
JP2003100821A (ja) 2001-09-27 2003-04-04 Sony Corp ウェハーの検査システムおよび検査方法
JP4048412B2 (ja) * 2002-01-23 2008-02-20 東京エレクトロン株式会社 載置台の除電機構及び検査装置
KR20050018063A (ko) * 2003-08-13 2005-02-23 삼성전자주식회사 반도체 제조장치의 기판 척킹/디척킹 장치 및 그의 방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2076241U (zh) * 1990-09-30 1991-05-01 朱少武 防爆接地控制器
CN2303378Y (zh) * 1997-07-29 1999-01-06 马思正 电器自动接地消幅器
CN1702495A (zh) * 2004-05-24 2005-11-30 统宝光电股份有限公司 静电消除装置及其机台

Also Published As

Publication number Publication date
TWI362712B (enExample) 2012-04-21
KR100834176B1 (ko) 2008-05-30
JP2007180580A (ja) 2007-07-12
JP4068127B2 (ja) 2008-03-26
CN101175362A (zh) 2008-05-07
KR20080039784A (ko) 2008-05-07
TW200826213A (en) 2008-06-16

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