CN101086483B - 用于检查膜缺陷的设备和方法 - Google Patents

用于检查膜缺陷的设备和方法 Download PDF

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Publication number
CN101086483B
CN101086483B CN2007101388870A CN200710138887A CN101086483B CN 101086483 B CN101086483 B CN 101086483B CN 2007101388870 A CN2007101388870 A CN 2007101388870A CN 200710138887 A CN200710138887 A CN 200710138887A CN 101086483 B CN101086483 B CN 101086483B
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China
Prior art keywords
film
light
light receiver
polarizer
optical axis
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Expired - Fee Related
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CN2007101388870A
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English (en)
Chinese (zh)
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CN101086483A (zh
Inventor
下田一弘
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Fujifilm Corp
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Fujifilm Corp
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Publication of CN101086483A publication Critical patent/CN101086483A/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8848—Polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N2021/8908—Strip illuminator, e.g. light tube
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/23—Bi-refringence

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN2007101388870A 2006-06-09 2007-06-08 用于检查膜缺陷的设备和方法 Expired - Fee Related CN101086483B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006161280A JP4960026B2 (ja) 2006-06-09 2006-06-09 フイルムの欠陥検査装置及びフイルムの製造方法
JP2006161280 2006-06-09
JP2006-161280 2006-06-09

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CN101086483A CN101086483A (zh) 2007-12-12
CN101086483B true CN101086483B (zh) 2011-08-31

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CN2007101388870A Expired - Fee Related CN101086483B (zh) 2006-06-09 2007-06-08 用于检查膜缺陷的设备和方法

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US (1) US7428049B2 (enExample)
JP (1) JP4960026B2 (enExample)
KR (1) KR101376648B1 (enExample)
CN (1) CN101086483B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
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CN104884942A (zh) * 2012-12-28 2015-09-02 大金工业株式会社 极化树脂膜及其制造方法
TWI896778B (zh) * 2020-09-29 2025-09-11 日商住友化學股份有限公司 檢查樹脂膜的方法、光學膜的製造方法及檢查系統

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JP4217918B2 (ja) * 2006-11-28 2009-02-04 村田機械株式会社 移動体システム
JP5024935B2 (ja) * 2007-01-16 2012-09-12 富士フイルム株式会社 光透過性部材の欠陥検出装置及び方法
KR101057626B1 (ko) * 2008-01-07 2011-08-19 주식회사 엘지화학 화상 분석을 이용한 편광판 얼룩 검사 방법 및 이를 이용한 편광판 얼룩 자동 검사 시스템
JP5258349B2 (ja) * 2008-03-28 2013-08-07 富士フイルム株式会社 欠陥検出装置及び方法
KR101676333B1 (ko) * 2008-03-28 2016-11-15 후지필름 가부시키가이샤 결함 검출 방법 및 장치
JP5175600B2 (ja) * 2008-04-09 2013-04-03 株式会社日立ハイテクノロジーズ 検査装置
JP2011033564A (ja) * 2009-08-05 2011-02-17 Sumitomo Chemical Co Ltd 光学フィルムの検査方法
TW201107817A (en) * 2009-08-18 2011-03-01 Hirose Tech Co Ltd Image inspection apparatus
CN101806966B (zh) * 2010-03-31 2012-05-23 苏州达信科技电子有限公司 检测装置及检测方法
JP2012163533A (ja) * 2011-02-09 2012-08-30 Fujifilm Corp レンチキュラシートの欠陥検査装置及び方法
TWI536003B (zh) * 2011-08-31 2016-06-01 富士軟片股份有限公司 圖案化相位差膜的缺陷檢測裝置與方法以及製造方法
KR101294220B1 (ko) * 2011-11-21 2013-08-07 동우 화인켐 주식회사 패턴화 리타더의 영상 획득 장치
CN102539482B (zh) * 2012-02-09 2013-10-23 重庆师范大学 透明薄膜微孔缺陷微电流检测系统
JP2013205091A (ja) * 2012-03-27 2013-10-07 Dainippon Printing Co Ltd フィルム検査システム、フィルム検査方法
JP2013210245A (ja) * 2012-03-30 2013-10-10 Dainippon Printing Co Ltd フィルム検査システム、フィルム検査方法
JP5173047B2 (ja) * 2012-05-15 2013-03-27 株式会社ナナオ 画面光演算装置またはその方法
EP2703772B1 (de) * 2012-08-28 2015-05-20 Texmag GmbH Vertriebsgesellschaft Sensor zum Erfassen einer laufenden Warenbahn
KR20140087715A (ko) * 2012-12-31 2014-07-09 동우 화인켐 주식회사 인라인 측정 장치
KR101446061B1 (ko) * 2013-10-15 2014-10-01 기가비스주식회사 투명 기판의 표면 패턴 불량 측정 장치
KR101697071B1 (ko) * 2014-04-18 2017-01-17 동우 화인켐 주식회사 광학 필름의 결함 판별 방법
CN104317075B (zh) * 2014-10-14 2017-10-24 深圳市华星光电技术有限公司 液晶盒一次点灯设备
CN105115429B (zh) * 2015-05-26 2016-06-29 雷艳梅 一种反射式化学药液涂抹均匀性检测方法及装置
WO2017171153A1 (ko) * 2016-03-31 2017-10-05 동우화인켐 주식회사 편광판 검사 방법 및 편광판 검사 장치
US11391678B2 (en) * 2017-07-28 2022-07-19 Shanjin Optoelectronics (Suzhou) Co., Ltd. Device and method for detecting defect of optical film
JP6924645B2 (ja) * 2017-07-31 2021-08-25 日東電工株式会社 偏光フィルムの撮像装置、及び検査装置、並びに検査方法
JP7095966B2 (ja) * 2017-09-22 2022-07-05 株式会社Ｓｃｒｅｅｎホールディングス 検査装置および検査方法
CN107703152A (zh) * 2017-10-27 2018-02-16 深圳精创视觉科技有限公司 光学膜缺点自动标示装置
CN108273768B (zh) * 2018-02-09 2020-04-21 明基材料有限公司 一种偏光片筛选装置及筛选方法
CN109187577A (zh) * 2018-08-29 2019-01-11 深圳市盛波光电科技有限公司 一种偏光片隐性缺陷光线检测装置及方法
CN109540902A (zh) * 2018-11-14 2019-03-29 苏州襄行软件有限公司 一种偏光片瑕疵检测系统及其检测方法
KR102735596B1 (ko) * 2019-01-30 2024-11-28 삼성디스플레이 주식회사 접착 결함 검출 장치 및 이를 이용한 검출 방법
CN110033433B (zh) * 2019-03-04 2021-07-02 深圳市智能机器人研究院 一种纹理缺陷检测方法、系统、装置和存储介质
JP2020173188A (ja) * 2019-04-11 2020-10-22 住友化学株式会社 検査装置、検査方法、及び、フィルムの製造方法
JP2022072182A (ja) * 2020-10-29 2022-05-17 住友化学株式会社 検査方法
JP7592260B2 (ja) 2020-12-07 2024-12-02 国立大学法人 奈良先端科学技術大学院大学 微弱偏光変化分布撮像装置および微弱偏光変化分布撮像方法
CN112880173B (zh) * 2021-03-26 2024-11-12 珠海格力电器股份有限公司 卷帘盒组件及具有其的空调器
CN114324369B (zh) * 2022-03-11 2022-06-07 北京新研创能科技有限公司 双极板表面划痕检测系统及方法
CN116559199A (zh) * 2023-07-10 2023-08-08 杭州百子尖科技股份有限公司 基于机器视觉的薄膜缺陷检测装置及检测方法
CN118379525B (zh) * 2024-06-25 2024-09-03 深圳市微晶光学科技有限公司 一种基于智能图像处理的透镜缺陷检测方法

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104884942A (zh) * 2012-12-28 2015-09-02 大金工业株式会社 极化树脂膜及其制造方法
CN104884942B (zh) * 2012-12-28 2019-02-19 大金工业株式会社 极化树脂膜及其制造方法
TWI896778B (zh) * 2020-09-29 2025-09-11 日商住友化學股份有限公司 檢查樹脂膜的方法、光學膜的製造方法及檢查系統

Also Published As

Publication number Publication date
CN101086483A (zh) 2007-12-12
US7428049B2 (en) 2008-09-23
US20070285665A1 (en) 2007-12-13
KR20070118053A (ko) 2007-12-13
JP2007327915A (ja) 2007-12-20
KR101376648B1 (ko) 2014-03-20
JP4960026B2 (ja) 2012-06-27

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