CN101069458B - Multilayer printed wiring board - Google Patents
Multilayer printed wiring board Download PDFInfo
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- CN101069458B CN101069458B CN2006800012939A CN200680001293A CN101069458B CN 101069458 B CN101069458 B CN 101069458B CN 2006800012939 A CN2006800012939 A CN 2006800012939A CN 200680001293 A CN200680001293 A CN 200680001293A CN 101069458 B CN101069458 B CN 101069458B
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Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/115—Via connections; Lands around holes or via connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4602—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0352—Differences between the conductors of different layers of a multilayer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0388—Other aspects of conductors
- H05K2201/0394—Conductor crossing over a hole in the substrate or a gap between two separate substrate parts
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/09563—Metal filled via
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/096—Vertically aligned vias, holes or stacked vias
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09709—Staggered pads, lands or terminals; Parallel conductors in different planes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/09827—Tapered, e.g. tapered hole, via or groove
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4652—Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
In a multilayer printed wiring board, insulating layers and conductor layers are alternately stacked, and the conductor layers are electrically connected through via holes arranged on the insulating layers. The via hole is formed to have a swell at least on a part of it, in a substantially vertical direction to a thickness direction of the insulating layer. External stresses, such as a force of impact when dropped, are suppressed to have an insulating substrate not to easily warp, and cracks, disconnection, and the like of the conductor circuit are prevented. Thus, deterioration of reliability and drop impact resistance of a mounting substrate can be reduced.
Description
Technical field
The present invention relates to a kind of multilayer board that is used for installing electronic units such as capacitor or IC, in detail, relate to not and can cause that electronic unit comes off or multilayer board that electrical connectivity, reliability reduce owing to falling on the top layer.
Background technology
In portable electric appts such as in recent years portable phone, digital camera, answer their multifunction and the requirement of densification, seek to make the installing component miniaturization, in addition, concerning substrate, by taking to reduce wiring density (wiring live width/gap, wiring interval) or reduce the measure etc. of pad, also can be corresponding with the densification of installing component.
As the parts that are installed on such substrate, specifically, IC chip, capacitor or passive components such as resistance, inductance coil are arranged, liquid-crystal apparatus, the class of operation devices such as display unit, keyboard or switch that carry out that numeral shows etc., perhaps outside terminal such as USB or earphone.
Mix setting the conductor pad corresponding with these installing components on installation base plate, installing component is installed on these conductor pad with scolding tin.
As one of multilayer circuit board that such electronic unit is installed, multilayer circuit board with type of making as follows: on single or double, having the insulating properties hard substrate of conductor circuit, form the via opening with laser radiation, form via in this opening and make the circuit board that such interlayer connects by metal cream or plating are filled in, prepare this circuit board more than 2 layers, by stacking gradually or stacked together these circuit boards are produced multilayer circuit board (with reference to Japanese kokai publication hei 10-13028 communique).
Such multilayer circuit board by the via of adjacent side's circuit board or the terminal pad of via are connected on the conductor circuit or terminal pad of the opposing party's circuit board, thereby is electrically connected the two-tier circuit plate respectively.
In addition, in other zone that is not electrically connected of circuit board, attempt by using mutual bonding circuit boards such as the bond layer that constitutes by heat-curing resin or pre-soaked resin sheet to realize multiple stratification.
And; usually on the top layer of multilayer circuit board as described above or common printed circuit board (PCB), be formed with the solder mask layer of protection conductor circuit; on the part of this solder mask layer, form opening; be formed with etching protective layers such as gold or nickel-Jin on the surface of the conductor circuit that exposes from this opening; on the surface of the conductor circuit that is formed with such etching protective layer, be formed with scolding tin bodies such as solder bump, electronic units such as capacitor or IC are installed by these scolding tin bodies.
But present situation is that employed for portable electric appts such as portable phone as described above, digital cameras recently, as to have realized the high-density installation of electronic unit multilayer circuit board requires to have higher reliability.
That is, wish further to improve the reliability to shatter test, (expression will have been installed and comprised liquid-crystal apparatus and be housed in state in the housing at the substrate of all interior electronic units even promptly make substrate or product.) fall the number of times of regulation from certain height, can not reduce the function of substrate and the function of electronic equipment, and electronic unit can not split away off from substrate yet.
In addition, though require the thickness of further attenuate portable electric appts employed substrate itself, but because the thickness of the insulating barrier of each layer of requirement formation installation base plate is below 100 μ m, even carry out multiple stratification, the thickness of its whole erection substrate itself is also than the thin thickness of in the past installation base plate itself, so, reduce the rigidity of installation base plate itself easily.
In addition, because the rigidity of substrate itself reduced, so, the resistance of perk etc. is also reduced easily, consequently, damage the flatness of substrate easily, be easy to generate problem in back operation (for example parts installation procedure).
In addition, because the thin thickness of insulating barrier, so installation base plate itself is also soft, therefore perk easily, is subjected to the stress influence that produces because of from the impact of outside etc. easily.For example, though inquired into the method that improves rigidity as the insulated substrate of thickness more than 600 μ m of the insulated substrate at center by using when stacked, but owing to can not be accommodated in sometimes in the housing of portable electric appts etc., so the predicament of the such technology of the thickness that strengthens the insulated substrate that becomes the center appears using.
Therefore, installation multilayer circuit board in the past as described above, owing to can not improve rigidity by the insulated substrate that thickening becomes stacked center, so, be difficult to improve the function or the startability of substrate to the shatter test in the reliability test.Particularly, as previously discussed, improved the installation base plate of the packing density of parts etc., be difficult to improve reliability or anti-the falling property of shatter test.That is, owing in reliability test, can not obtain enough reliabilities, so just can not further improve electrical connectivity and reliability etc.
So the present invention is about improving reliability to reliability test, can guaranteeing more that electrical connectivity and multilayer board functional, that particularly can further improve the reliability of shatter test propose a plan.
Summary of the invention
The inventor to achieve these goals, the wholwe-hearted repeatedly result who studies, be conceived to the shape and the laminated of the via that carries out the electrical connection between the conductor circuit on the multilayer circuit board, find: such via is being divided into the 1st channel group and the 2nd channel group, to belong to via with each stacked channel group of relative position relation forms when constituting the shape of taper with respect to the surface of the insulated substrate that is provided with these vias or the surface of being located at the conductor circuit on this insulated substrate, even make the insulated substrate that constitutes installation base plate thinner, the rigidity that also can not cause this substrate reduces, or the generation perk etc., based on such discovery, having finished with following such content is the present invention who constitutes main points.Wherein, above-mentioned the 1st channel group be formed on the insulating barrier that is arranged in outermost two insulating barriers and other insulating barriers of disposing to the inside from this insulating barrier on, above-mentioned the 2nd channel group be formed on another insulating barrier of being arranged in outermost two insulating barriers and other insulating barriers of disposing to the inside from this insulating barrier on.
That is, the present invention is:
(1) a kind of multilayer board is alternately laminated insulating barrier and conductor layer, and with being electrically connected mutually and forming by being arranged on via on the insulating barrier between the conductor layer, it is characterized in that,
Above-mentioned via is made of the 1st channel group and the 2nd channel group, the 1st channel group is made of the via of being located at from being arranged at least 1 layer of stacked to the inside insulation of outermost two insulating barrier one insulating barriers, the 2nd channel group is made of the via of being located at least 1 layer of stacked to the inside insulation of another insulating barrier that is arranged in outermost two insulating barriers
The via that constitutes above-mentioned the 1st channel group and the 2nd channel group has along with the thickness direction along insulating barrier extends and the shape of diameter reduction gradually, and the thickness of above-mentioned insulating barrier is below the 100 μ m,
Constitute a plurality of above-mentioned via of above-mentioned the 1st channel group or the 2nd channel group respectively, be layered in along on the position that direction with the thickness direction approximate vertical of insulating barrier or insulated substrate has been offset mutually, and the bottom surface that is layered in these vias is on thickness direction at least a portion position overlapped of insulating barrier or insulated substrate.
In addition, the present invention is:
(2) a kind of multilayer board, be stacked respectively at least 1 layer of other insulated substrate on the two sides of a insulated substrate with conductor circuit with conductor circuit, the conductor circuit that is arranged on the conductor circuit on the above-mentioned insulated substrate and be arranged on other insulated substrate is formed by the via electrical connection that is arranged on the insulated substrate, it is characterized in that
The via that is provided with on lip-deep above-mentioned other insulated substrate that is laminated in an above-mentioned insulated substrate constitutes the 1st channel group, the 1st channel group forms with respect to the surface of above-mentioned insulated substrate or the surface of being located at the lip-deep conductor circuit of this insulated substrate and constitutes the such shape of taper
And constitute the 2nd channel group being laminated in the via that is provided with on another lip-deep above-mentioned other insulated substrate of an above-mentioned insulated substrate, the 2nd channel group forms with respect to the surface of insulated substrate or the surface of being located at the lip-deep conductor circuit of this insulated substrate and constitutes the such shape of taper, and the thickness of above-mentioned insulated substrate is below the 100 μ m
Constitute a plurality of above-mentioned via of above-mentioned the 1st channel group or the 2nd channel group respectively, be layered in along on the position that direction with the thickness direction approximate vertical of insulating barrier or insulated substrate has been offset mutually, and the bottom surface that is layered in these vias is on thickness direction at least a portion position overlapped of insulating barrier or insulated substrate.
In addition, the present invention is:
(3) a kind of multilayer board, be on the two sides of primary insulation substrate, to be laminated to few 1 layer of outer layer insulation substrate with conductor circuit with conductor circuit, the conductor circuit that is arranged on the conductor circuit on the above-mentioned primary insulation substrate and be arranged on the outer layer insulation substrate is formed by the via electrical connection that is arranged on each insulated substrate, it is characterized in that
The via that is provided with on a lip-deep above-mentioned outer layer insulation substrate that is laminated in above-mentioned primary insulation substrate constitutes the 1st channel group, the 1st channel group forms with respect to the surface of insulated substrate or the surface of being located at the lip-deep conductor circuit of this insulated substrate and constitutes the such shape of taper
And constitute the 2nd channel group being laminated in the via that is provided with on another lip-deep above-mentioned outer layer insulation substrate of above-mentioned primary insulation substrate, the 2nd channel group forms with respect to the surface of insulated substrate or the surface of being located at the lip-deep conductor circuit of this insulated substrate and constitutes the such shape of taper, and the thickness of above-mentioned primary insulation substrate or outer layer insulation substrate is below the 100 μ m
Constitute a plurality of above-mentioned via of above-mentioned the 1st channel group or the 2nd channel group respectively, be layered in along on the position that direction with the thickness direction approximate vertical of insulating barrier or insulated substrate has been offset mutually, and the bottom surface that is layered in these vias is on thickness direction at least a portion position overlapped of insulating barrier or insulated substrate.
In addition, the present invention is:
(4) a kind of multilayer board is alternately laminated insulating barrier and conductor layer, and with being electrically connected mutually and forming by being arranged on via on the insulating barrier between the conductor layer, it is characterized in that,
Above-mentioned insulating barrier is 3 layers at least, and the thickness of above-mentioned insulating barrier is below the 100 μ m,
Above-mentioned via is made of the 1st channel group and the 2nd channel group,
Above-mentioned the 1st channel group is being by in that via that extend, that be made of the stack passage more than 2 layers is forming on the thickness direction of insulating barrier and towards the inboard of multilayer board,
Above-mentioned the 2nd channel group forms by have the via that forms along the conical in shape of the direction diameter reduction opposite with the 1st channel group on the thickness direction of insulating barrier,
Constitute a plurality of above-mentioned via of above-mentioned the 1st channel group or the 2nd channel group respectively, be layered in along on the position that direction with the thickness direction approximate vertical of insulating barrier or insulated substrate has been offset mutually, and the bottom surface that is layered in these vias is on thickness direction at least a portion position overlapped of insulating barrier or insulated substrate.
In the invention described above, the thickness of insulating barrier or insulated substrate can be for below the 50 μ m.
In addition, in the present invention, can be so that above-mentioned the 1st channel group position relation stacked 1st channel group relative with above-mentioned the 2nd channel group forms multilayer stack channels configuration.In addition, can be so that position relation stacked the 1st channel group that above-mentioned the 1st channel group has been offset to the direction with the thickness direction approximate vertical of insulating barrier or insulated substrate with respect to above-mentioned the 2nd channel group.
In addition, each via that forms above-mentioned the 1st channel group or above-mentioned the 2nd channel group can be laminated into roughly mutually and be located along the same line.In addition, also can carry out stacked with the position relation that mutually has been offset to direction with the thickness direction approximate vertical of insulated substrate.
In addition, constitute the via of any one party channel group in above-mentioned the 1st channel group or the 2nd channel group, can be positioned at the relative place, two summits of the imaginary grid square on the above-mentioned insulated substrate, constitute the via of the opposing party's channel group, can be positioned at two other place, relative summit of the imaginary grid square on the above-mentioned insulated substrate.
In addition, constitute the via of any one party channel group in above-mentioned the 1st channel group or the 2nd channel group, can be positioned at each place, summit of imaginary grid square on the above-mentioned insulated substrate or trigonal lattice, constitute the via of the opposing party's channel group, can be positioned at imaginary grid square or triangle center of a lattice on the above-mentioned insulated substrate.
In addition, constitute the via of any one party channel group in above-mentioned the 1st channel group or the 2nd channel group, can centralized configuration in the regulation zone of above-mentioned insulated substrate, constitute the via of the opposing party's channel group, can be configured in the neighboring area in the encirclement afore mentioned rules zone of insulated substrate.
In addition, above-mentioned each via can form with respect to the surface of insulating barrier that is formed with this via or insulated substrate or with respect to the surface of the lip-deep conductor circuit of being located at insulating barrier or insulated substrate and have the shape that interior angle is the tapers of 60～90 degree.
In addition, above-mentioned each via can be electronplate to be filled in the opening that forms on insulating barrier or insulated substrate form.
In addition, the via that constitutes above-mentioned the 1st channel group and the 2nd channel group can form multilayer stack channels configuration.
According to the present invention, constitute the multilayer stack channels configuration that the relative configuration with the 2nd channel group of the 1st channel group forms, and the via that will belong to each channel group forms along the conical in shape of thickness direction diameter reduction, promptly form the shape that constitutes taper with respect to the surface of insulating barrier or the surface of being located at the conductor circuit on this surface of insulating layer, so, even the thickness of stacked insulating barrier or insulated substrate be the following thin layers of 100 μ m, for the external stress that takes place from the outside (referring to the impulsive force of generation when falling etc.), can suppress the perk of insulating barrier or insulated substrate.Wherein, above-mentioned the 1st channel group is located at the insulating barrier that becomes stacked center and is layered on the insulating barrier of surface thereof side, and above-mentioned the 2nd channel group is located on the insulating barrier of another face side that is layered in the insulating barrier that becomes stacked center.
Consequently, owing to can suppress external stress, so, can obtain to suppress to take place situations, the reliability reduction that can alleviate installation base plate or the effects of anti-falling property reduction such as conductor circuit fracture or broken string.
That is, be subjected to external stress and during perk laterally, because chimeric one-tenth multilayer stack passage is absorbed in the form of insulating barrier, so insulating resin and the conductor layer that constitutes multilayer stack passage are difficult for peeling off at insulating barrier.Consequently, can reduce the reduction of the reliability of installation base plate, the reduction of anti-falling property.
In addition, be subjected to external stress and during perk to the inside at insulating barrier, because multilayer stack passage plays the effect of stake, so, can suppress the insulating barrier perk.Consequently, owing to can reduce to be delivered to the external stress of insulating barrier, the reliability of installation base plate reduces, anti-falling property reduction so can reduce.
In addition, because at the inner multilayer stack passage that forms of insulating barrier, so, can make insulating barrier be difficult for perk even, also can play the effect of stake for the perk of insulating barrier.Therefore, owing to can not damage the flatness of substrate,, can not reduce the reliability of installation base plate so, phenomenons such as fracture can not take place in advance at conductor circuit (comprising via interior), insulating barrier yet even carry out the inferior reliability test of thermal cycle conditions.
Particularly, conductor circuit is being set below the 100 μ m, on such insulating barrier or insulated substrate, when making their multiple stratifications form installation base plate, can suppressing aspect the installation base plate perk of great use at the thickness of insulating barrier or insulated substrate.
In addition, though the thickness of inferring insulating barrier or insulated substrate conductor circuit is set below the 50 μ m, on such insulating barrier, also useful when making their multiple stratifications form installation base plate.Can guarantee the reliability and anti-the falling property of installation base plate.
In addition, owing on relative position, form multilayer stack passage (the 1st channel group and the 2nd channel group), so, can play a role to the lateral direction and the two-way perk of interior side direction of insulating barrier.That is, when insulating barrier produces perk owing to external stress, for the direction and the perk of direction laterally to the inside, because the existence of multilayer stack passage can not reduce the resistance at external stress.Consequently, the reliability that can reduce installation base plate reduces or anti-falling property reduction.
In addition, owing to form multilayer stack passage in relative position, so can improve the rigidity of insulated substrate itself in such zone.Therefore, can reduce the perk body of installation base plate, even back operation (for example, forming the operations such as installation procedure of solder mask layer operation, formation soldering-tin layer operation, electronic unit etc.), also can keep the flatness of installation base plate, can not produce rough sledding such as installing component comes off.Consequently, the remarkable reduction of electrical connectivity and the reliability that can alleviate installation base plate significantly reduces.
Description of drawings
Fig. 1 is the skeleton diagram that is used to illustrate the conical in shape of the via on the multilayer board of the present invention.
Fig. 2 A is the skeleton diagram of one of citation form of the multilayer stack passage of expression on the multilayer board of the present invention, and Fig. 2 B is the SEM photo in the cross section of the substrate of expression with this multilayer stack passage.
Fig. 3 A is the skeleton diagram of the variation of expression multilayer stack passage, and Fig. 3 B is the SEM photo in the cross section of its substrate of expression, and Fig. 3 C is the skeleton diagram of another variation of expression multilayer stack passage, and Fig. 3 D is the SEM photo in the cross section of its substrate of expression.
Fig. 4 is the skeleton diagram of another citation form of the multilayer stack passage on the expression multilayer board of the present invention.
Fig. 5 A～5C is the skeleton diagram of an example of the planar configuration pattern of the expression via that constitutes multilayer stack passage.
Fig. 6 is the skeleton diagram of another example (arrangement of triangle trellis) of the planar configuration pattern of the expression via that constitutes multilayer stack passage.
Fig. 7 is the skeleton diagram of an example again (linearity arrangement) of the planar configuration pattern of the expression via that constitutes multilayer stack passage.
Fig. 8 A～8B is the skeleton diagram of an example again (concentrate arrange, dispersed arrangement) of the planar configuration pattern of the expression via that constitutes multilayer stack passage.
Fig. 9 A～9E is the figure of a part of the operation of the expression multilayer board of making embodiments of the invention 1.
Figure 10 A～10E is the figure of a part of the operation of the expression multilayer board of making embodiments of the invention 1.
Figure 11 is the figure of a part of the operation of the expression multilayer board of making embodiments of the invention 1.
Figure 12 A～12B is the figure of a part of the operation of the expression multilayer board of making embodiments of the invention 1.
Embodiment
Multilayer board of the present invention is characterised in that, will be across insulating barrier and the via that stacked conductor layer is electrically connected mutually is made of the 1st channel group and the 2nd channel group, the 1st channel group is made of the via of being located on being arranged at least 1 layer of stacked to the inside insulation of outermost two insulating barrier one insulating barriers, the 2nd channel group is made of the via of being located at from least 1 layer of stacked to the inside insulation of another insulating barrier that is arranged in outermost two insulating barriers, the via that constitutes the 1st channel group and the 2nd channel group forms along with the thickness direction along insulating barrier extends and the shape of diameter reduction gradually, and the thickness of above-mentioned insulating barrier is below the 100 μ m.
Promptly, in the multilayer board of the duplexer that forms as alternately laminated conductor layer and insulating barrier, it is characterized in that, be located at from the via (the 1st channel group) that is arranged at least 1 layer of stacked to the inside insulation of outermost two insulating barrier one insulating barriers, constitute the multilayer stack passage that is positioned at relative position with the via of being located at least 1 layer of stacked to the inside insulation of another insulating barrier that is arranged in outermost two insulating barriers (the 2nd channel group), the via that constitutes this multilayer stack passage forms the shape that constitutes taper with respect to the surface of insulating barrier or the surface of being located at the conductor circuit on the surface of insulating layer, and the thickness of each insulated substrate is below the 100 μ m.
Insulating barrier used in the present invention or insulated substrate can be enumerated the hard laminated substrate of for example selecting from glass cloth epoxy resin base material, phenolic resin base material, glass cloth bismaleimide-triazine resin base material, glass cloth polyphenylene oxide resin base material, aramid nonwoven fabric-epoxy resin base material, aramid nonwoven fabric-polyimide resin base material etc.The thickness of the substrate that is made of such insulating resin is preferably below 100 μ m.The thickness that is made of substrate insulating resin also can be below 50 μ m.
With the circuit board that forms conductor circuit at the single or double of such insulating barrier or insulated substrate is stacked center, by at alternately stacked insulating barrier in the surface of its circuit board and conductor layer, can obtain multiple stratification printed circuit board (PCB) (installation base plate).In addition, the thickness by making all insulating barriers on such installation base plate or insulated substrate below 100 μ m, can make multiple stratification the very thin thickness of installation base plate self.
In addition, in the present invention, the via (multilayer stack passage) that preferably is arranged on the conductor circuit on the insulated substrate and constitutes the 1st and the 2nd channel group respectively all is by adopting electroplating processes to form.Its reason is, if form the via that constitutes the 1st channel group or the 2nd channel group respectively and the coupling part that contacts conductor circuit at the upper surface of its via and lower surface respectively by the electroplating film that forms with same electroplating processes, then be difficult for producing coming off, even the external stress that bears from the side can not produce skew yet, so on conductor circuit or insulating barrier, be difficult for cracking etc.
Forming the employed electroplating film of above-mentioned via is preferably handled by metallide or electroless plating and forms.Electroplating employed metal can be metal monomers such as copper, nickel, iron, cobalt both, also can be the alloy based on these metals.
As shown in Figure 1, multilayer stack passage of the present invention, form along with the thickness direction along the insulating barrier that is formed with passage extends and the shape of diameter reduction gradually, or form with respect to the surface of insulated substrate or the surface of being located at the lip-deep conductor circuit of insulated substrate and constitute the shape of taper, or form have along with from the inboard of stacked insulated substrate extend laterally and the shape of the taper that bore expands out gradually.
For example, preferably form the upper surface roughly truncated cone bigger, preferably form taper interior angle in the cross sectional shape (roughly trapezoidal) along the thickness direction of insulated substrate in 60～90 degree scopes than the area of bottom surface as its representative.
Its reason is that more than 90 degree, then the anchoring effect in the passage of multilayer stack is sometimes cancelled out each other as if cone angle.Promptly, when perk took place in the outside of the substrate that has been subjected to external stress, the passage of multilayer stack sometimes was difficult to be fitted in insulating barrier or the insulated substrate, can cause peeling off of insulating resin and conductor layer, its result causes the reduction of the reliability and anti-the falling property of insulated substrate sometimes.On the other hand, if cone angle is less than 60 degree, then sometimes the inhibition ability of multilayer stack passage perk is reduced.That is, when in the inboard of the substrate that has been subjected to external stress perk taking place, the effect reduction as stake promptly, can not suppress perk.Therefore, cause the reliability reduction of insulated substrate and the reduction of anti-falling property sometimes.
The channel diameter of the bottom surface side of above-mentioned multilayer stack passage (hereinafter referred to as " footpath at the bottom of the passage "), diameter is 10 μ m at least.Its reason is, form by electroplating processes owing to form passage, so, when forming this electroplating film, the footpath needs 10 μ m at least at the bottom of the passage, so just can carry out the connection between the conductor circuit of the conductor layer (conductor circuit on upper strata and passage) on upper strata and lower floor.
Multilayer stack passage of the present invention, the bottom surface that preferably forms the via (via on upper strata) outside being in more is overlapping at same position with the bottom surface that is in inboard more via (via of lower floor).That is, shown in Fig. 2 A～2B, constitute a plurality of vias of the 1st channel group or the 2nd channel group respectively, can form each via mutually roughly on same straight line.
In addition, if because the via bottom surface on upper strata and the via bottom surface of lower floor, even on its part, have overlapping, also can make its play be difficult for making reliability and anti-falling property reduction such, give the conical in shape role, so, at a plurality of vias that constitute the 1st channel group or the 2nd channel group respectively, can be layered between each via along on the position that direction with the thickness direction approximate vertical of insulating barrier has been offset mutually, and the bottom surface that is layered in these vias is on thickness direction at least a portion position overlapped of insulated substrate.
For example, shown in Fig. 3 A～3B, a plurality of vias that constitute the 1st channel group or the 2nd channel group respectively can be layered on about 1/2 the position that only has been offset the via diameter mutually.In addition, shown in Fig. 3 C～3D, also a plurality of vias that constitute the 1st channel group or the 2nd channel group respectively can be layered in and only be offset mutually roughly on the position of via diameter.
Like this give the function that conical in shape rises, even as common printed circuit board (PCB) the time, also can play a role fully.
In addition, the insulated substrate more than 2 layers is set at least preferably, forms the 1st channel group or the 2nd channel group of formation multilayer stack passage of the present invention by the stacked via that is arranged on these insulated substrates.That is, also can stacked 3 layers, the via more than 4 layers or 4 layers, constitute the 1st channel group or the 2nd channel group.
Each passage that superposes, i.e. the 1st channel group and the 2nd channel group both can be identical stacked number (for example, the 1st channel group: 3 layers, the 2nd channel group: 3 layers), also can be different stacked number (for example, the 1st channel group: 2 layers, the 2nd channel group: 3 layers).Basically be, form relative position relation with the 2nd channel group, can make it have the such effect of electrical connectivity, reliability that can not reduce installation base plate significantly by making the 1st channel group that constitutes multilayer stack passage.
Though multilayer stack passage of the present invention also can be the conductor layer with electrical connection, also can be the conductor layer that is not electrically connected, so-called illusory conductor layer.When multilayer stack passage is formed by illusory conductor layer, do not reduce conductor layer except that illusory the conductor layer reliability or anti-the falling property of (refer to be present in the conductor layer of illusory conductor layer periphery or have the conductor layer that is electrically connected with relative multilayer stack passage etc.), and, owing to can reduce the perk of installation base plate, so can guarantee the flatness of installation base plate.
In addition, constitute the 1st channel group and the 2nd channel group of multilayer stack passage of the present invention, preferably shown in Fig. 2 A～2B, in the zone of the conductor circuit that forms each insulated substrate, be configured on the roughly the same position (on same straight line), or shown in Fig. 3 A～3D, the state (dispersity) of the position relation that has been configured to keep being offset mutually.
For example, by dispersed arrangement the 1st channel group and/or the 2nd channel group equably in the whole zone of insulated substrate, can improve resistance to the perk that causes by external stress.
In addition, by the 1st channel group and/or the 2nd channel group are concentrated be arranged in the easiest be subjected to the caused perk influence of external stress, mainly be the middle body of insulated substrate, can improve resistance to the caused perk of external stress.
In addition, also can not make the 1st channel group and/or the 2nd channel group be arranged in the central portion of insulated substrate, and make it mainly be arranged in the periphery of the central portion that surrounds insulated substrate.By such arrangement, can improve resistance to the perk of substrate, guarantee the flatness of installation base plate, can make it have resistance to external stress.
In addition, also can be mainly in the middle body of insulated substrate configuration the 1st channel group and the 2nd channel group relatively, at periphery, with mutual state configuration the 1st channel group and the 2nd channel group that has been offset.
As the planar configuration pattern of above-mentioned multilayer stack passage, except above-mentioned pattern, can enumerate square trellis (with reference to Fig. 5 A～5C), triangle trellis (with reference to Fig. 6), a linearity various patterns such as (with reference to Fig. 7).
When disposing with above-mentioned grid square shape, for example can enumerate such imagination shown in Fig. 5 A square rectangular, regularly dispose the 1st channel group and the 2nd channel group or shown in Fig. 5 B such imaginary rectangular configuration the 1st channel group, the pars intermedia of its matrix partly dispose the 2nd relative channel group or shown in Fig. 5 C such staggered imaginary rectangular, dispose forms such as the 1st channel group and the 2nd channel group regularly.
In addition, with the configuration of above-mentioned trigonal lattice shape the time, for example can enumerate with as shown in Figure 6 imaginary triangle dispose the 1st channel group, near leg-of-mutton core or the center of gravity place, dispose relative forms such as the 2nd channel group.
In addition, when disposing, for example can enumerate at least two the 1st channel group of imagination one linearity configuration as shown in Figure 7, near the relative forms such as the 2nd channel group of the configuration core of this straight line with above-mentioned wire always.
In addition, also can constitute multilayer stack passage with the pattern more than 2 kinds of these patterns of combination.
In addition, as other configuration pattern of multilayer of the present invention stack passage, for example, also can be in the zone that is not forming the 1st channel group configuration the 2nd channel group relatively.For example can enumerate and be configured to the 1st channel group plane earth rectangular, be configured to the 2nd channel group rectangular in the zone that does not form the 1st channel group, perhaps, the 1st channel group mainly is configured in substrate center portion, the 2nd channel group is configured in patterns (with reference to Fig. 8 A) such as substrate periphery portion.
And, in Fig. 5～Fig. 8, though the 1st channel group represents that with symbol zero the 2nd channel group also can be the configuration opposite with such configuration with symbol * expression.The size of the 1st channel group and the channel diameter of the 2nd channel group both can be identical, also can be respectively different diameters.
Below, an example of the manufacture method of making multilayer board of the present invention is specifically described.
(1) when when making multilayer board of the present invention, the circuit board as the base unit that constitutes printed circuit board (PCB) can use the single or double at the insulating properties base material to be pasted with the material of Copper Foil as raw material.
This insulating properties base material, for example can use the hard laminated substrate of from glass cloth epoxy resin base material, glass cloth bismaleimide-triazine resin base material, glass cloth polyphenylene oxide resin base material, aramid nonwoven fabric-epoxy resin base material, aramid nonwoven fabric-polyimide resin base material, selecting, particularly, glass cloth epoxy resin base material is the most desirable.
The thickness of above-mentioned insulating properties base material is preferably in below the 100 μ m, in addition, and more preferably in the scope of 30～70 μ m.Its reason is, if thickness surpasses 100 μ m, when multiple stratification, it is big that the thickness of substrate self becomes, and has to be housed in such problem in the housing.
When using laser on the foregoing circuit plate, to form via formation to use opening, though the direct laser method that useful laser radiation is bored a hole simultaneously to Copper Foil and insulating properties base material, with after the Copper Foil part that is equivalent to via of removing Copper Foil by etching, with the conformal method of laser radiation, but can use its any one method in the present invention at the enterprising eleven punch 11 of insulating properties base material.
The thickness that sticks on the Copper Foil on the above-mentioned insulating properties base material is 5～20 μ m preferably.
Its reason is, if the thickness of Copper Foil is less than 5 μ m, then form when using opening using the such laser processing of aftermentioned on the insulating properties base material, to form via, owing to the end face part of the Copper Foil corresponding with the via position sometimes deforms, so be difficult to form the conductor circuit of regulation shape.Also be difficult to form the conductor circuit pattern of fine live width with etching.On the other hand, if the thickness of Copper Foil surpasses 20 μ m, then be difficult to form the conductor circuit pattern of fine live width with etching.
This Copper Foil can be adjusted its thickness with the method for etching partially.In this case, use the thickness Copper Foil bigger than above-mentioned numerical value of Copper Foil, the thickness adjustment of the Copper Foil after the etching becomes above-mentioned scope.
In addition, when using double-sided copper-clad laminated board as circuit board, though copper thickness in above-mentioned scope, also can be in two-sided its thickness difference.Can guarantee intensity thus and not hinder the back operation.
As above-mentioned insulating properties base material and Copper Foil, particularly, preferred use will infiltrate epoxy resin in glass cloth and pre-soaked resin sheet and the copper foil layer of making the B rank gathers into folds, by the single or double copper-clad laminated board of heating and pressurizing acquisition.
Its reason is, in the manufacturing process after Copper Foil is etched, the position of wiring pattern or via can not misplace, and positional precision is good.
(2) then, by laser processing via formation opening is set on the insulating properties base material.
When using the single face copper-clad laminated board to form circuit board, on the insulating properties substrate surface of a side opposite, carry out the carbon dioxide laser radiation with a side that is pasted with Copper Foil, make it connect the insulating properties base material, form the opening that arrives Copper Foil (or conductor circuit pattern).
When using double-sided copper-clad laminated board to form circuit board, on insulating properties base material one surface of pasting Copper Foil, carry out the carbon dioxide laser radiation, make it connect Copper Foil and insulating properties base material both sides, form the opening that arrives another the lip-deep Copper Foil (or conductor circuit pattern) that sticks on the insulating properties base material, perhaps by be etched on the one-sided copper foil surface that sticks on the insulating properties base material form the diameter hole more a little bit smaller slightly than via diameter after, the carbon dioxide laser radiation is carried out as exposure label(l)ing in this hole, make it connect the insulating properties base material, form the opening that arrives another the lip-deep Copper Foil (or conductor circuit pattern) that sticks on the insulating properties base material.
Such laser processing is processed with impulse hunting type carbon dioxide laser processing device, and its processing conditions is defined as: via forms the taper that forms 60～90 degree with the sidewall of opening with respect to the surface of insulating properties base material.
For example, by make pulse energy be 0.5～100mJ, pulse duration be 1～100 μ s, pulse spacing are more than the 0.5ms, emitting times in 2～10 scope, can adjust the cone angle of opening sidewalls.
And the opening diameter of the via formation usefulness opening that the above-mentioned processing conditions of foundation can form is 50～250 μ m preferably.This be because, in this scope, can form taper reliably, and can realize the densification that connects up.
(3) being used for removing the sidewall that remains in the opening that the operation in above-mentioned (2) forms and the decontamination of the gum residue on the diapire handles.
This decontamination is handled, can carry out with the following methods: wet processed or dry process such as oxygen plasma discharge process, Corona discharge Treatment, ultraviolet laser processing or excimer laser processing such as the chemical agent liquid processing of acid or oxidant (for example, chromic acid, permanganic acid).
Selecting any method from these detergency processing methods, is will be according to the opening diameter of the kind of insulated substrate, thickness, via, laser irradiation condition etc., the residual amount of contaminants that consideration can be expected and selecting.
(4) then, the copper-clad surface of the substrate after the decontamination processing is implemented the electrolytic copper plating processing that electro copper foil is lead-in wire, form the via (regional channel) that the electrolytic copper plating complete filling is constituted in opening.
And difference according to circumstances also can be after electrolytic copper plating be handled, and removes the electrolytic copper plating that swells on the top of the via opening of substrate by belt grinding machine grindings, polishing wheel grinding, etching etc., makes its planarization.
In addition, also can implement to implement the electrolytic copper plating processing after electroless plating is handled.In this case, the electroless plating film can be to use metals such as copper, nickel, silver.
(5) then, form resist layer on the electrolytic copper plating film that in above-mentioned (4), is forming on the substrate.Resist layer can be any method in the method for coating resist liquid or the method for pasting the film of making film like in advance.On this resist layer, place the mask of the circuit that drawn in advance,, form resist layer, the metal level of the part that is not formed with resist layer is carried out etching, form and comprise conductor circuit and terminal pad at interior conductor circuit pattern by exposure, development treatment.
As this etching solution, at least a kind of aqueous solution from the aqueous solution of sulfuric acid-hydrogen peroxide, persulfate, copper chloride, frerrous chloride, selecting preferably.
Forming the pre-treatment of conductor circuit as the above-mentioned Copper Foil of etching and electrolytic copper plating film, in order to form fine pattern easily, can be to adjust thickness by the whole surface of etching electrolytic copper plating film in advance.
As the terminal pad of the part of conductor circuit, preferably form its internal diameter and the via opening diameter is roughly the same, or make its external diameter bigger than via diameter, make the terminal pad diameter in the scope of 75～350 μ m.Its reason is, is above-mentioned scope by making the terminal pad diameter, even skew has taken place channel position, also can play the effect as multilayer stack passage.
With the circuit board made by the operation of above-mentioned (1)～(5) is stacked center, at stacked insulating resin layer of its single or double and Copper Foil.Make insulating resin layer thus and only be the substrate of the multiple stratification of 1 layer or 2 layers.
And, with with the same operation in above-mentioned (2)～(5), make it on the stacked insulating resin layer of having changed, form via and conductor circuit, stacked again insulating resin layer and Copper Foil, by carry out repeatedly with the same operation in above-mentioned (2)～(5), can obtain further multiple stratification printed circuit board (PCB).
Said method, though can carry out the multiple stratification of insulating resin layer by stacking gradually the insulating resin lamination sheets, but also can be as required, at stacked insulating resin layer more than 2 layers on the circuit board of 1 unit, together the layer laminate of insulating resin layer is carried out heating and pressurizing, form multilayer board.
In the multilayer board that forms by such operation, the via that forms on each stacked circuit board or each insulating resin layer constitutes the taper that interior angle is 60～90 degree with respect to the surface of the circuit board that is formed with this via or the surface of insulating resin layer.And, the via that at least 1 layer the insulating resin layer that comprises the circuit board that becomes stacked center, forms, constitute the 1st channel group, dispose relatively with the insulating resin layer that constitutes the 1st channel group, the via that forms on stacked another insulating resin layer of at least 1 layer, constitute the 2nd channel group.Constitute multilayer stack passage by these the 1st channel group and the 2nd channel group, each channel group constitutes the taper that interior angle is 60～90 degree with respect to the surface of the insulating resin layer that is formed with via.
(6) then, on the surface of outermost circuit board, form solder mask layer respectively.In this case, coating solder mask layer constituent on the whole outer surface of circuit board, by after making this dried coating film, the photomask of the peristome by will being decorated with pad is placed on this coating, expose, development treatment, form the bonding pad opening that the conductivity pad portion that is positioned at the via top and is adjacent make conductor circuit is exposed respectively.In this case, also can paste the layer that the solder mask layer dry filmization is formed, by exposing, develop or forming opening with laser.
On the pad that the part that never forms photomask is exposed, the etching protective layer of formation nickel-Jin etc.At this moment, the thickness of nickel dam is 1～7 μ m preferably, and the thickness of gold layer is 0.01～0.1 μ m preferably.Except these metals, also can form nickel-palladium-Jin, gold (individual layer), silver (individual layer) etc.
After having formed above-mentioned etching protective layer, the lift off mask layer.Make pad that is formed with etching protective layer and the pad that does not form etching protective layer thus and mix the printed circuit board (PCB) that exists.
(7) the scolding tin body is supplied to from the opening of the solder mask layer that the operation of above-mentioned (6), obtains and be exposed on via top and the adjacent with it pad portion, fusing, curing by this scolding tin body, form solder bump, perhaps, use conductive adhesive or soldering-tin layer that conductive ball or conductivity pin are connected on the welding disk, form printed circuit board (PCB).
As the method for supplying with above-mentioned scolding tin body and soldering-tin layer, can use scolding tin transfer printing or print process.
At this, the scolding tin transfer printing, be that solder foil is sticked on the pre-soaked resin sheet, by this solder foil of etching, only stay the position that is equivalent to opening portion, thereby form the scolding tin pattern, as the scolding tin carrier thin film, after on the solder mask layer opening portion that scaling powder is coated in substrate, stacked this scolding tin carrier thin film also makes the scolding tin pattern contact with pad, and it is heated the method for carrying out transfer printing.
On the other hand, print process is that the mask to print (metal mask) that will opening be set at the position that is equivalent to pad is placed on the substrate, and printed solder paste carries out methods of heating treatment.Scolding tin as forming such solder bump can use Sn/Ag scolding tin, Sn/In scolding tin, Sn/Zn scolding tin, Sn/Bi scolding tin etc., their fusing point, preferably than connect the fusing point of the conductivity projection between stacked each circuit board low.
(embodiment 1)
(1) at first makes the circuit board that conduct constitutes a unit of multilayer board.This circuit board is the substrate that becomes stacked center in a plurality of insulating barriers that should be stacked, uses pre-soaked resin sheet and the copper foil layer of making B rank by the epoxy resin that will infiltrate on glass cloth to gather into folds, carry out double-sided copper-clad laminated board 10 that heating and pressurizing obtains as raw material (with reference to Fig. 9 A).
The thickness of above-mentioned insulating properties base material 12 is 60 μ m, and the thickness of Copper Foil 14 is 12 μ m.If use the Copper Foil of the Copper Foil thicker,, also the thickness of Copper Foil can be adjusted into 12 μ m by this Copper Foil is carried out etch processes as plywood than 12 μ m.
(2) on double-sided PCB 10, carry out the carbon dioxide laser radiation with Copper Foil 14, connect Copper Foil 14 and insulating properties base material 12, the via that forms the Copper Foil that arrives opposing face forms with opening 16, chemical agent liquid by permanganic acid is handled, and handles (with reference to Fig. 9) to carrying out decontamination in the opening that is formed by laser processing.
And, at this embodiment, when forming via formation with opening 16, use the peak value short pulse oscillation mode carbon dioxide laser machine of FDAC PVC ア corporate system, to being pasted with thickness is that the thickness of the Copper Foil of 12 μ m is the glass cloth epoxy resin base material of 60 μ m, with following such processing conditions, on Copper Foil, directly carry out laser beam irradiation, form the opening 16 of φ 75 μ m with the speed of 100 hole/seconds.
With the opening 16 that such condition forms, form the opening inwall constitutes 65 degree cone angles (interior angle) with respect to the surface of insulating properties base material 12 roughly truncated cone.
(laser processing condition)
Pulse energy: 0.5～100mJ
Pulse duration: 1～100 μ s
Pulse spacing: more than the 0.5ms
Emitting times: 2
Frequency of oscillation: 2000～3000Hz
(3) via of handling in the decontamination that is through with that is provided with forms on Copper Foil 14 surfaces of using opening 16 1 sides, implements the electrolytic copper plating processing that electro copper foil is lead-in wire with following such condition, forms electrolytic copper plating film (with reference to Fig. 9 C).
[metallide liquid]
Sulfuric acid: 2.24mol/l
Copper sulphate: 0.26mol/l
Additive A (reaction promoter): 10.0ml/l
Additive B (reaction suppressor): 10.0ml/l
[metallide condition]
Current density: 1A/dm
2
Time: 65 minutes
Temperature: 22 ± 2 ℃
Promote via to form by additive A with the forming of the electrolytic copper plating film in the opening, on the contrary, by additive B mainly attached on the Copper Foil part, the formation of inhibition electrolytic copper plating film.In addition,, become the level roughly the same with Copper Foil 14 if via forms with being filled by electrolytic copper plating fully in the opening, then owing to be attached with additive B, so, can partly similarly suppress the formation of electrolytic copper plating film with Copper Foil.
Therefore, form in opening 16 and fill the via 20 that electrolytic copper plating forms, the surface of this via 20 and copper-clad surface roughly form same level.
In addition, also can adjust thickness by the conductor layer that is made of Copper Foil 14 and electrolytic copper plating film is carried out etching.Also can adjust the thickness of conductor layer as required with the physical method that belt grinding machine grinds and polishing wheel grinds.
(4) two-sided to the substrate that obtained by the operation of above-mentioned (3) on the conductor layer that is made of Copper Foil 14 and electrolytic copper plating film, forms the resist that is made of photosensitive dry film with thickness 15～20 μ m.Be placed on this resist at the mask of interior conductor circuit being decorated with the terminal pad that comprises via, expose, development treatment, form resist layer 22 (with reference to Fig. 9 D).And Copper Foil 14 and electrolytic copper plating film that the part that never is formed with resist layer is exposed use the etching solution that is made of aquae hydrogenii dioxidi/sulfuric acid to implement etch processes, with its dissolving, remove.
(5) then, peel off resist layer 22, form the pattern 24 of the conductor circuit that comprises the via terminal pad with aqueous slkali.Thus, form to be electrically connected the via 20 of the conductor circuit at the surface of substrate and the back side, can to obtain this via 20 and form the circuit board (with reference to Fig. 9 E) that the Copper Foil of conductor circuit 24 partly is flattened and forms.
(6) to the surface and the back side of the circuit board that obtains through the operation of above-mentioned (1)～(5), superimposed infiltration epoxy resin on glass cloth and the thickness of making the B rank are that pre-soaked resin sheet and the thickness of 60 μ m is the Copper Foil of 12 μ m, by in temperature: 80～250 ℃, pressure: 1.0～5.0kgf/cm
2Pressurized conditions under, it is carried out heating and pressurizing, be that the resin insulating barrier 26 of 60 μ m and conductor layer 28 that thickness is 12 μ m are layered in (with reference to Figure 10 A) on the circuit board with thickness.
(7) then, roughly same with the operation of above-mentioned (2), with following such condition, substrate two-sided carried out the carbon dioxide laser radiation,, connect resin insulating barrier 26 and conductor layer 28 with the speed of 100 hole/seconds, the via that forms the φ 65 μ m of the conductor circuit 24 that arrives lower floor forms with opening 30, then, handle, handle (with reference to Figure 10 B) carrying out decontamination in the opening that forms by laser processing by the chemical agent liquid of permanganic acid.
And, with the opening 30 that such condition forms, be the opening inwall constitutes the cone angle (interior angle) of 65 degree with respect to the surface of resin insulating barrier 26 roughly truncated cone.
(laser processing condition)
Pulse energy: 0.5～100mJ
Pulse duration: 1～100 μ s
Pulse spacing: more than the 0.5ms
Emitting times: 2
Frequency of oscillation: 2000～3000Hz
(8) roughly with the operation of above-mentioned (3) similarly, form with on the conductor layer 28 of open side finishing the via that is provided with that decontamination handles, implement electrolytic copper plating with following such condition and handle, formation electrolytic copper plating film 32 (with reference to Figure 10 C).
[metallide liquid]
Sulfuric acid: 2.24mol/l
Copper sulphate: 0.26mol/l
Additive A (reaction promoter): 10.0ml/l
Additive B (reaction suppressor): 10.0ml/l
[metallide condition]
Current density: 1A/dm
2
Time: 65 minutes
Temperature: 22 ± 2 ℃
Therefore, form in opening 30 and fill the via 34 that electrolytic copper plating 32 forms, the surface of this via 34 and copper-clad surface roughly form same level.
(9) roughly with the operation of above-mentioned (4) similarly, on the electrolytic copper plating that obtains in above-mentioned (8), form the resist that constitutes by photosensitive dry film with thickness 15～20 μ m.The mask that is decorated with the terminal pad etc. of conductor circuit, via 34 is placed on this resist,, makes itself and the position alignment of substrate, expose, development treatment with camera the 2nd telltale mark, thus formation resist layer 36 (with reference to Figure 10 D).
Then, do not forming on the part of resist, using the etching solution that constitutes by aquae hydrogenii dioxidi/sulfuric acid to implement etch processes, removing the copper plating film and the Copper Foil that are equivalent to not form part.
(10) then, peel off resist layer 36, form the conductor circuit 38 that comprises via 34 and its terminal pad with alkali lye.The circuit board (with reference to Figure 10 E) that can obtain to connect the via 34 at the surface of substrate and the back side thus and partly be flattened for the Copper Foil of conductor circuit 38.
In addition, by carrying out the operation of above-mentioned (6)～(10) repeatedly, can form 1 layer of resin insulating barrier 40 again, in electrolytic copper plating being filled in the opening that is arranged on this resin insulating barrier 40 and form via 42, and form the pattern 44 of the conductor circuit that comprises the via terminal pad.Can obtain thus to double-sided PCB 10 two-sided form that 2 layer insulatings and conductor circuit form, multiple stratification respectively printed circuit board (PCB) (with reference to Figure 11).
Promptly, form the insulation number of plies and be 5, the conductor circuit number is 6 such multilayer boards, double-sided PCB and be layered in it above 2 layer insulatings on the via that forms constitute the 1st channel group, the 1st channel group is the truncated cone that forms 65 degree taperings with respect to surface of insulating layer, be layered in double-sided PCB below 2 layer insulatings on the via that forms also constitute the 2nd channel group, the 2nd channel group is the truncated cone that forms 65 degree taperings with respect to surface of insulating layer, these channel group are configuration relatively mutually, and is laminated into roughly on same straight line.
(11) on the surface of outermost two insulating barriers that are positioned at the substrate that obtains by above-mentioned (10), formed solder mask layer 46.
At first, with thickness be 20～30 μ m filming solder resist stick on the surface of the insulating barrier that is formed with conductor circuit 38.Then, carry out with 70 ℃ 20 minutes, carry out 30 minutes dried with 100 ℃ after, will with the chromium layer draw the thickness of circle diagram case (mask pattern) of solder resist peristome be 5mm the soda lime glass substrate, its side that is formed with the chromium layer is close on the solder mask layer 46, use 1000mJ/cm
2Ultraviolet ray expose, carry out the DMTG development treatment.
In addition, carry out 1 hour, 150 ℃ conditions of carrying out 3 hours with 120 ℃ and carry out heat treated, forming the thickness that has with pad portion corresponding opening 48 (opening diameter 200 μ m) is the solder mask layer 46 (with reference to Figure 12 A) of 20 μ m.
Can before forming solder mask layer 46, as required, on the surface of the outermost insulating barrier that is positioned at multilayer board, roughened layer be set.
(12) then, the substrate that will be formed with solder mask layer 46 is immersed in the electroless plating nickel solution of the pH=5 that is made of nickel chloride 30g/l, sodium hypophosphite 10g/l, natrium citricum 10g/l 20 minutes, and forming thickness on the surface of the conductor circuit 38 that exposes from peristome 48 is the nickel coating of 5 μ m.
Once more under 93 ℃ condition, this substrate is immersed in the electroless plating gold solution that constitutes by potassium auricyanide 2g/l, ammonium chloride 75g/l, natrium citricum 50g/l, sodium hypophosphite 10g/l 23 seconds, forming thickness on nickel coating is the gold plate of 0.03 μ m, forms by the metal level that is made of nickel coating and gold plate and covers the conductor pad 50 that forms.
(13) then, metal mask is placed on the solder mask layer 46, printing approximately is the solder(ing) paste that 183 ℃ Sn/Pb scolding tin or Sn/Ag/Cu constitute by fusing point T2, after taking off metal mask, by carrying out Reflow Soldering with 183 ℃, be formed on the conductor pad of exposing from opening 48 50 and form the multilayer board (with reference to Figure 12 B) that soldering-tin layers 52 form.
Then,, electronic units such as capacitor, resistance are installed mainly,, outside terminals such as keyboard are installed mainly, make multilayer board thus in the zone that is formed with soldering-tin layer 52 in the zone that is not formed with soldering-tin layer 52.
(embodiment 2)
Be formed in the 1st channel group that forms on the surface that is layered in above-mentioned double-sided PCB respectively and the insulating barrier on the back side and each via of the 2nd channel group, form in the position of about 1/2 distance of mutual skew via diameter as shown in Figure 3A, in addition, roughly similarly make multilayer board with embodiment 1.
(embodiment 3)
Be formed in above-mentioned double-sided PCB and be laminated in the 1st channel group that forms on the insulating barrier of its top and each via of the 2nd channel group that on the insulating barrier that is laminated in below the double-sided PCB, forms, being shown in the position that roughly is offset the via diameter mutually as Fig. 3 B forms, in addition, roughly similarly make multilayer board with embodiment 1.
(embodiment 4)
Stacked 2 layer insulatings above above-mentioned double-sided PCB, stacked 1 layer insulating below double-sided PCB, form the insulation number of plies and be 4, the conductor circuit number is 5 such multilayer boards, in addition, roughly similarly makes multilayer board with embodiment 1.
(embodiment 5)
Stacked 2 layer insulatings above above-mentioned double-sided PCB, stacked 1 layer insulating below double-sided PCB, form the insulation number of plies and be 4, the conductor circuit number is 5 such multilayer boards, in addition, roughly similarly makes multilayer board with embodiment 2.
(embodiment 6)
Stacked 2 layer insulatings above above-mentioned double-sided PCB, stacked 1 layer insulating below double-sided PCB, form the insulation number of plies and be 4, the conductor circuit number is 5 such multilayer boards, in addition, roughly similarly makes multilayer board with embodiment 3.
(embodiment 7)
Make above-mentioned double-sided PCB and be layered in it above insulating barrier on the 1st channel group that forms, as shown in Figure 4, with respect to the 2nd channel group that on the insulating barrier that is layered in below the double-sided PCB, forms, carry out stacked with the position relation that is offset via diameter roughly to horizontal direction mutually, in addition, roughly similarly make multilayer board with embodiment 1.
(embodiment 8)
Stacked 2 layer insulatings above above-mentioned double-sided PCB, stacked 1 layer insulating below double-sided PCB, form the insulation number of plies and be 4, the conductor circuit number is 5 such multilayer boards, in addition, roughly similarly makes multilayer board with embodiment 7.
(embodiment 9)
Make the via that forms above-mentioned the 1st channel group shown in Fig. 5 B, be positioned at imaginary square lattice (the grid interval: each place, summit 10mm) on the insulated substrate, make the via that forms another channel group be positioned at imaginary square center of a lattice on the above-mentioned insulated substrate, except stacked like this, roughly similarly make multilayer board with embodiment 4.
(embodiment 10)
Make form above-mentioned the 1st channel group via as shown in Figure 6, be positioned at imaginary triangle lattice (the grid interval: each place, summit 20mm) on the above-mentioned insulated substrate, make the via that forms the 2nd channel group be positioned at above-mentioned imaginary triangle center of a lattice, except stacked like this, roughly similarly make multilayer board with embodiment 4.
(embodiment 11)
Make the via that constitutes above-mentioned the 1st channel group shown in Fig. 8 A, be positioned at the substantial middle portion on the above-mentioned insulated substrate, centralized configuration is in the zone of 40mm * 40mm, the via that constitutes the 2nd channel group is configured in the neighboring area that surrounds above-mentioned central portion (in the outside of the middle section of 40mm * 40mm, the inboard in the zone of 70mm * 100mm), except such configuration, roughly similarly make multilayer board with embodiment 4.
(comparative example 1)
Do not form the 2nd channel group except forming the via that constitutes the 1st channel group, in addition, all the other and embodiment 1 roughly similarly make multilayer board.
(comparative example 2)
Do not form the via that constitutes the 1st channel group and the 2nd channel group, in addition, roughly similarly make multilayer board with embodiment 1.
To the multilayer board of making according to the embodiment 1～11 and the comparative example 1～2 of above explanation, carry out the evaluation test of A project, after the multilayer board that will make respectively is accommodated in the housing of electronic equipment, carry out the evaluation test of B project and C project.Their evaluation test the results are shown in table 1.
A. substrate load test
From fixing the level of substrate one end, upwards lift about loose other end 3cm, make the substrate perk after, turn back to level, carry out so repeatedly 30 times.Then, be equivalent to the conduction test of the particular electrical circuit of multilevel access,, measure the variable quantity of resistance value, calculate resistance change rate, it be the results are shown in table 1 in order to confirm open circuit (conductor circuit broken string).
And, resistance change rate=(resistance value before (resistance value before the resistance value after the substrate load test-substrate load test)/substrate load test)
B. reliability test
Multilayer board according to the foregoing description 1～11 and comparative example 1～2 manufacturing is carried out conduction test, and each takes out 10 certified products at random respectively.Then, (will-55 ℃/3 minutes＜=〉130 ℃/3 minutes be as 1 circulation under thermal cycle conditions), cycle-index is proceeded to 1000 times, 2000 times, 3000 times, whenever carry out 1000 times, after placing 2 hours naturally, carry out conduction test, in order to confirm to have or not the conductor circuit broken string, to connect the changes in resistance amount and surpass 10% (the connection resistance value of (the connection resistance value of the connection resistance value-initial value after the thermal cycle)/initial value) and regard as defectively, and regard this as underproof quantity and be shown in table 1.
C. shatter test
Make under the liquid crystal display part state down that is installed on the substrate, the housing of taking in substrate is fallen naturally from the height of 1m.Making this drop number is 50 times, 100 times, 150 times, confirms the conduction status of conductor circuit.
And,, represent 5% with interior situation at the variable quantity that connects resistance value with zero (Good), at the variable quantity that connects resistance value 10% with interior situation, with △ (Average) expression, surpass 10% situation at the variable quantity that connects resistance value, with * (Poor) expression.
(table 1)
(reference example)
Result based on assessment item A, the cone angle (being meant the interior angle with respect to the conductor circuit surface) that makes the via that constitutes the 1st channel group and the 2nd channel group is 55 degree, 60 degree, 70 degree, 75 degree, 80 degree, 85 degree, 90 degree and 95 degree, make the substrate that amounts to 8 kinds of different angles, simulate.To these substrates, use the substrate load test same with estimating each embodiment and comparative example project A., carry out 50 tests, simulate connecting the changes in resistance amount, will be the table 2 that the results are shown in of resistance change rate.
(table 2)
| Cone angle | Resistance change rate |
| 55 degree | 7.42％ |
| 60 degree | 4.89％ |
| 70 degree | 4.78％ |
| 75 degree | 4.65％ |
| 80 degree | 4.58％ |
| Cone angle | Resistance change rate |
| 85 degree | 4.76％ |
| 90 degree | 4.89％ |
| 95 degree | 6.98％ |
Utilizability on the industry
As described above, according to multilayer board of the present invention, because the external stresses such as impulsive force in the time of suppressing to fall, can suppress the perk of insulating barrier, so, can provide and can prevent conductor circuit fracture or broken string etc., can reduce the multilayer board of the reduction of the reliability of installation base plate or anti-falling property.
Claims (14)
1. a multilayer board is alternately laminated insulating barrier and conductor layer, and with being electrically connected mutually and forming by being arranged on via on the insulating barrier between the conductor layer, it is characterized in that,
Above-mentioned via is made of the 1st channel group and the 2nd channel group, the 1st channel group constitutes by being located at the via that begins in the stacked at least 1 layer of insulation in inboard from an insulating barrier that is arranged in outermost two insulating barriers, the 2nd channel group constitutes by being located at the via that begins in the stacked at least 1 layer of insulation in inboard from another insulating barrier that is arranged in outermost two insulating barriers
The via that constitutes above-mentioned the 1st channel group and the 2nd channel group has along with the thickness direction along insulating barrier extends and the conical in shape of diameter reduction gradually, and the thickness of above-mentioned insulating barrier is below the 100 μ m,
Constitute a plurality of above-mentioned via of above-mentioned the 1st channel group or the 2nd channel group respectively, be layered in along on the position that direction with the thickness direction approximate vertical of insulating barrier or insulated substrate has been offset mutually, and the bottom surface that is layered in these vias is on thickness direction at least a portion position overlapped of insulating barrier or insulated substrate.
2. multilayer board, be stacked respectively at least 1 layer of other insulated substrate on the two sides of a insulated substrate with conductor circuit with conductor circuit, the conductor circuit that is arranged on the conductor circuit on the above-mentioned insulated substrate and be arranged on other insulated substrate is formed by the via electrical connection that is arranged on each insulated substrate, it is characterized in that
The via that is provided with on a lip-deep insulated substrate that is laminated in an above-mentioned insulated substrate constitutes the 1st channel group, the 1st channel group forms with respect to the surface of above-mentioned insulated substrate or the surface of being located at the lip-deep conductor circuit of this insulated substrate and constitutes the such shape of taper
And constitute the 2nd channel group being laminated in the via that is provided with on another lip-deep insulated substrate of an above-mentioned insulated substrate, the 2nd channel group forms with respect to the surface of above-mentioned insulated substrate or the surface of being located at the lip-deep conductor circuit of this insulated substrate and constitutes the such shape of taper, and the thickness of above-mentioned insulated substrate is below the 100 μ m
Constitute a plurality of above-mentioned via of above-mentioned the 1st channel group or the 2nd channel group respectively, be layered in along on the position that direction with the thickness direction approximate vertical of insulating barrier or insulated substrate has been offset mutually, and the bottom surface that is layered in these vias is on thickness direction at least a portion position overlapped of insulating barrier or insulated substrate.
3. according to claim 1 or 2 multilayer boards of being put down in writing, it is characterized in that the thickness of above-mentioned insulating barrier or insulated substrate is below the 50 μ m.
4. according to claim 1 or 2 multilayer boards of being put down in writing, it is characterized in that, so that above-mentioned the 1st channel group relation stacked the 1st channel group in position relative with above-mentioned the 2nd channel group.
5. according to claim 1 or 2 multilayer boards of being put down in writing, it is characterized in that, so that position relation stacked the 1st channel group that above-mentioned the 1st channel group has been offset to the direction with the thickness direction approximate vertical of insulating barrier or insulated substrate with respect to above-mentioned the 2nd channel group.
6. the multilayer board of putting down in writing according to claim 5, it is characterized in that, constitute the via of any one party channel group in above-mentioned the 1st channel group or the 2nd channel group, be positioned at the relative place, two summits of the imaginary grid square on the above-mentioned insulated substrate, constitute the via of the opposing party's channel group, be positioned at two other place, relative summit of the imaginary grid square on the above-mentioned insulated substrate.
7. the multilayer board of putting down in writing according to claim 5, it is characterized in that, constitute the via of any one party channel group in above-mentioned the 1st channel group or the 2nd channel group, be positioned at each place, summit of the imaginary grid square on the above-mentioned insulated substrate, constitute the via of the opposing party's channel group, be positioned at the imaginary square center of a lattice on the above-mentioned insulated substrate.
8. the multilayer board of putting down in writing according to claim 5, it is characterized in that, constitute the via of any one party channel group in above-mentioned the 1st channel group or the 2nd channel group, be positioned at each place, summit of the imaginary trigonal lattice on the above-mentioned insulated substrate, constitute the via of the opposing party's channel group, be positioned at the imaginary triangle center of a lattice on the above-mentioned insulated substrate.
9. the multilayer board of putting down in writing according to claim 5, it is characterized in that, constitute the via of any one party channel group in above-mentioned the 1st channel group or the 2nd channel group, centralized configuration is in the regulation zone of above-mentioned insulated substrate, constitute the via of the opposing party's channel group, be configured in the neighboring area in the encirclement afore mentioned rules zone of insulated substrate.
10. according to claim 1 or 2 multilayer boards of being put down in writing, it is characterized in that above-mentioned each via forms the taper that interior angle is 60～90 degree with respect to the surface of insulating barrier that is formed with this via or insulated substrate or with respect to the surface of being located at the conductor circuit on insulating barrier or the insulated substrate.
11., it is characterized in that above-mentioned each via is electronplate to be filled in the opening that forms form according to claim 1 or 2 multilayer boards of being put down in writing on insulating barrier or insulated substrate.
12., it is characterized in that the via that constitutes above-mentioned the 1st channel group and the 2nd channel group forms multilayer stack channels configuration according to claim 1 or 2 multilayer boards of being put down in writing.
13. a multilayer board is alternately laminated insulating barrier and conductor layer, and with being electrically connected mutually and forming by being arranged on via on the insulating barrier between the conductor layer, it is characterized in that,
Above-mentioned insulating barrier is 3 layers at least, and the thickness of above-mentioned insulating barrier is below the 100 μ m,
Above-mentioned via is made of the 1st channel group and the 2nd channel group,
Above-mentioned the 1st channel group is being by forming on the thickness direction of insulating barrier and towards the via inboard, that be made of the stack passage more than 2 layers of multilayer board,
Above-mentioned the 2nd channel group forms by have the via that forms along the conical in shape of the direction diameter reduction opposite with the 1st channel group on the thickness direction of insulating barrier,
Constitute a plurality of above-mentioned via of above-mentioned the 1st channel group or the 2nd channel group respectively, be layered in along on the position that direction with the thickness direction approximate vertical of insulating barrier or insulated substrate has been offset mutually, and the bottom surface that is layered in these vias is on thickness direction at least a portion position overlapped of insulating barrier or insulated substrate.
14. the multilayer board according to claim 13 is put down in writing is characterized in that, the thickness of above-mentioned insulating barrier is below the 50 μ m.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP199443/2005 | 2005-07-07 | ||
| JP2005199443 | 2005-07-07 | ||
| PCT/JP2006/314011 WO2007007857A1 (en) | 2005-07-07 | 2006-07-07 | Multilayer printed wiring board |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101032938A Division CN101772261B (en) | 2005-07-07 | 2006-07-07 | Multilayered printed wiring board |
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| Publication Number | Publication Date |
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| CN101069458A CN101069458A (en) | 2007-11-07 |
| CN101069458B true CN101069458B (en) | 2010-04-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010101032938A Active CN101772261B (en) | 2005-07-07 | 2006-07-07 | Multilayered printed wiring board |
| CN2006800012939A Active CN101069458B (en) | 2005-07-07 | 2006-07-07 | Multilayer printed wiring board |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010101032938A Active CN101772261B (en) | 2005-07-07 | 2006-07-07 | Multilayered printed wiring board |
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|---|---|
| US (3) | US7834273B2 (en) |
| EP (4) | EP1858307B1 (en) |
| JP (2) | JP5172340B2 (en) |
| KR (1) | KR100987619B1 (en) |
| CN (2) | CN101772261B (en) |
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| US7834273B2 (en) * | 2005-07-07 | 2010-11-16 | Ibiden Co., Ltd. | Multilayer printed wiring board |
| US7759582B2 (en) * | 2005-07-07 | 2010-07-20 | Ibiden Co., Ltd. | Multilayer printed wiring board |
| WO2008053833A1 (en) | 2006-11-03 | 2008-05-08 | Ibiden Co., Ltd. | Multilayer printed wiring board |
| US8569876B2 (en) | 2006-11-22 | 2013-10-29 | Tessera, Inc. | Packaged semiconductor chips with array |
| US8250751B2 (en) * | 2007-02-20 | 2012-08-28 | Ddi Global Corp. | Method of manufacturing a printed circuit board |
| US8440916B2 (en) * | 2007-06-28 | 2013-05-14 | Intel Corporation | Method of forming a substrate core structure using microvia laser drilling and conductive layer pre-patterning and substrate core structure formed according to the method |
| US8877565B2 (en) * | 2007-06-28 | 2014-11-04 | Intel Corporation | Method of forming a multilayer substrate core structure using sequential microvia laser drilling and substrate core structure formed according to the method |
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| TW201101955A (en) | 2011-01-01 |
| JPWO2007007857A1 (en) | 2009-01-29 |
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| US20100252318A1 (en) | 2010-10-07 |
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