CN101034679A - 基板处理装置、基板吸附方法和存储介质 - Google Patents
基板处理装置、基板吸附方法和存储介质 Download PDFInfo
- Publication number
- CN101034679A CN101034679A CNA2007100860633A CN200710086063A CN101034679A CN 101034679 A CN101034679 A CN 101034679A CN A2007100860633 A CNA2007100860633 A CN A2007100860633A CN 200710086063 A CN200710086063 A CN 200710086063A CN 101034679 A CN101034679 A CN 101034679A
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- CN
- China
- Prior art keywords
- substrate
- battery lead
- lead plate
- high frequency
- mounting table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006062884A JP5127147B2 (ja) | 2006-03-08 | 2006-03-08 | 基板吸着脱離方法 |
JP2006062884 | 2006-03-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN101034679A true CN101034679A (zh) | 2007-09-12 |
Family
ID=38588121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2007100860633A Pending CN101034679A (zh) | 2006-03-08 | 2007-03-08 | 基板处理装置、基板吸附方法和存储介质 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5127147B2 (ja) |
KR (1) | KR100853575B1 (ja) |
CN (1) | CN101034679A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105097423A (zh) * | 2014-05-12 | 2015-11-25 | 中芯国际集成电路制造(上海)有限公司 | 等离子体反应器及清除等离子体反应腔室颗粒污染的方法 |
CN105990194A (zh) * | 2015-03-17 | 2016-10-05 | 东京毅力科创株式会社 | 基板处理方法和基板处理装置 |
CN107615460A (zh) * | 2015-05-26 | 2018-01-19 | 株式会社日本制钢所 | 原子层生长装置 |
CN108648995A (zh) * | 2018-05-22 | 2018-10-12 | 徐亚琴 | 一种半导体集成电路用硅晶片刻蚀方法 |
CN109107987A (zh) * | 2017-06-22 | 2019-01-01 | 北京北方华创微电子装备有限公司 | 一种吹扫方法 |
WO2022068423A1 (zh) * | 2020-09-29 | 2022-04-07 | 长鑫存储技术有限公司 | 半导体设备电极板的安装治具 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009076129A (ja) | 2007-09-19 | 2009-04-09 | Kobe Steel Ltd | 読み出し専用の光情報記録媒体 |
JP2009212293A (ja) * | 2008-03-04 | 2009-09-17 | Tokyo Electron Ltd | 基板処理装置用の部品及び基板処理装置 |
JP5875775B2 (ja) * | 2011-03-30 | 2016-03-02 | 東京エレクトロン株式会社 | 基板除去方法及び記憶媒体 |
KR102442285B1 (ko) * | 2022-03-14 | 2022-09-13 | 에이피티씨 주식회사 | 플라즈마 에칭 시스템 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0269956A (ja) * | 1988-09-05 | 1990-03-08 | Toshiba Corp | 静電チャック方法及び静電チャック装置 |
JPH04240747A (ja) * | 1991-01-24 | 1992-08-28 | Fujitsu Ltd | 半導体装置の製造方法 |
JP2879887B2 (ja) * | 1995-08-24 | 1999-04-05 | 東京エレクトロン株式会社 | プラズマ処理方法 |
JPH1074734A (ja) * | 1996-09-02 | 1998-03-17 | Toshiba Corp | プラズマ処理装置と半導体装置の製造方法 |
JP2985761B2 (ja) * | 1996-03-18 | 1999-12-06 | 株式会社日立製作所 | 試料処理方法 |
JPH10209126A (ja) * | 1997-01-23 | 1998-08-07 | Hitachi Ltd | プラズマエッチング装置 |
JP2002100614A (ja) * | 2000-09-25 | 2002-04-05 | Nec Corp | 半導体製造装置および半導体製造方法 |
JP2002164328A (ja) * | 2000-11-27 | 2002-06-07 | Seiko Epson Corp | ドライエッチング装置 |
US6620520B2 (en) * | 2000-12-29 | 2003-09-16 | Lam Research Corporation | Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof |
KR20050018063A (ko) * | 2003-08-13 | 2005-02-23 | 삼성전자주식회사 | 반도체 제조장치의 기판 척킹/디척킹 장치 및 그의 방법 |
KR100544897B1 (ko) * | 2004-11-30 | 2006-01-24 | (주)아이씨디 | 플라즈마 쳄버용 정전기 척 |
-
2006
- 2006-03-08 JP JP2006062884A patent/JP5127147B2/ja active Active
-
2007
- 2007-02-12 KR KR1020070014576A patent/KR100853575B1/ko active IP Right Grant
- 2007-03-08 CN CNA2007100860633A patent/CN101034679A/zh active Pending
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105097423A (zh) * | 2014-05-12 | 2015-11-25 | 中芯国际集成电路制造(上海)有限公司 | 等离子体反应器及清除等离子体反应腔室颗粒污染的方法 |
CN105097423B (zh) * | 2014-05-12 | 2018-09-18 | 中芯国际集成电路制造(上海)有限公司 | 等离子体反应器及清除等离子体反应腔室颗粒污染的方法 |
CN105990194A (zh) * | 2015-03-17 | 2016-10-05 | 东京毅力科创株式会社 | 基板处理方法和基板处理装置 |
CN107615460A (zh) * | 2015-05-26 | 2018-01-19 | 株式会社日本制钢所 | 原子层生长装置 |
CN107615460B (zh) * | 2015-05-26 | 2020-07-14 | 株式会社日本制钢所 | 原子层生长装置 |
CN109107987A (zh) * | 2017-06-22 | 2019-01-01 | 北京北方华创微电子装备有限公司 | 一种吹扫方法 |
CN108648995A (zh) * | 2018-05-22 | 2018-10-12 | 徐亚琴 | 一种半导体集成电路用硅晶片刻蚀方法 |
CN108648995B (zh) * | 2018-05-22 | 2021-03-19 | 深圳市盛鸿运科技有限公司 | 一种半导体集成电路用硅晶片刻蚀方法 |
WO2022068423A1 (zh) * | 2020-09-29 | 2022-04-07 | 长鑫存储技术有限公司 | 半导体设备电极板的安装治具 |
US11348820B2 (en) | 2020-09-29 | 2022-05-31 | Changxin Memory Technologies, Inc. | Installation fixture for electrode plate of semiconductor equipment |
Also Published As
Publication number | Publication date |
---|---|
JP5127147B2 (ja) | 2013-01-23 |
KR100853575B1 (ko) | 2008-08-21 |
KR20070092104A (ko) | 2007-09-12 |
JP2007242870A (ja) | 2007-09-20 |
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C06 | Publication | ||
PB01 | Publication | ||
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C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20070912 |