CN101019301B - 驱动单元 - Google Patents

驱动单元 Download PDF

Info

Publication number
CN101019301B
CN101019301B CN2005800286224A CN200580028622A CN101019301B CN 101019301 B CN101019301 B CN 101019301B CN 2005800286224 A CN2005800286224 A CN 2005800286224A CN 200580028622 A CN200580028622 A CN 200580028622A CN 101019301 B CN101019301 B CN 101019301B
Authority
CN
China
Prior art keywords
arm
drive unit
resonator
plane
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2005800286224A
Other languages
English (en)
Chinese (zh)
Other versions
CN101019301A (zh
Inventor
B·威特维恩
E·莫克
E·达门
F·考夫曼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miniswys SA
Original Assignee
Miniswys SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miniswys SA filed Critical Miniswys SA
Publication of CN101019301A publication Critical patent/CN101019301A/zh
Application granted granted Critical
Publication of CN101019301B publication Critical patent/CN101019301B/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003Alignment of optical elements
    • G02B7/005Motorised alignment
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/003Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN2005800286224A 2004-06-24 2005-06-21 驱动单元 Expired - Lifetime CN101019301B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
CH01066/04A CH696993A5 (de) 2004-06-24 2004-06-24 Antriebseinheit.
CH1066/04 2004-06-24
CH21672004 2004-12-30
CH2167/04 2004-12-30
PCT/CH2005/000343 WO2006000118A1 (de) 2004-06-24 2005-06-21 Antriebseinheit

Publications (2)

Publication Number Publication Date
CN101019301A CN101019301A (zh) 2007-08-15
CN101019301B true CN101019301B (zh) 2011-07-06

Family

ID=34970098

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2005800286224A Expired - Lifetime CN101019301B (zh) 2004-06-24 2005-06-21 驱动单元

Country Status (8)

Country Link
US (1) US7429812B2 (enExample)
EP (2) EP1761999B1 (enExample)
JP (2) JP4690398B2 (enExample)
KR (1) KR101175823B1 (enExample)
CN (1) CN101019301B (enExample)
CH (1) CH696993A5 (enExample)
DE (1) DE502005007466D1 (enExample)
WO (1) WO2006000118A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111837328A (zh) * 2018-03-09 2020-10-27 Eta瑞士钟表制造股份有限公司 行程更长的线性压电马达

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005077669A (ja) 2003-08-29 2005-03-24 Canon Inc 画像形成装置
FI118215B (fi) 2005-09-27 2007-08-31 Kone Corp Hissijärjestelmä
DE102006004194B3 (de) * 2006-01-27 2007-05-31 Ief Werner Gmbh Elektromechanischer Antrieb mit Piezomotor
WO2007093074A2 (de) * 2006-02-16 2007-08-23 Nanoswys Sa Kraftumsetzer
DE102007005041B4 (de) * 2007-01-26 2011-09-22 Elliptec Resonant Actuator Ag Piezomotor mit Federungseinrichtung
CH699707A2 (de) * 2008-10-10 2010-04-15 Creaholic Sa Miniaturisierte angetriebene lagerungsvorrichtung.
JP5426897B2 (ja) * 2009-02-24 2014-02-26 太平洋セメント株式会社 駆動装置
WO2011125579A1 (ja) * 2010-03-31 2011-10-13 株式会社ニコン モータ装置、モータ装置の製造方法及びロボット装置
DE102011109590A1 (de) * 2011-08-05 2013-02-07 Physik Instrumente (Pi) Gmbh & Co. Kg Piezoelektrischer Drehantrieb für eine Welle
FR2994134B1 (fr) * 2012-08-03 2014-08-08 Faurecia Sieges Automobile Siege de vehicule comportant une partie reglable motorisee, unite electrique de commande de vehicule automobile
JP6084061B2 (ja) * 2013-02-15 2017-02-22 並木精密宝石株式会社 振動アクチュエータ
US9479031B2 (en) * 2013-03-08 2016-10-25 Mts Sensor Technologie Gmbh & Co. Kg Tubular linear motor with magnetostrictive sensor
DE102013212053A1 (de) * 2013-06-25 2015-01-08 Robert Bosch Gmbh Leiterplatte mit einem schwingungsentkoppelten elektronischen Bauelement
CN105765853B (zh) * 2013-11-27 2019-03-08 株式会社村田制作所 驱动装置
CN103701359B (zh) * 2013-12-09 2015-09-16 浙江大学 一种基于压电堆的压电振动冲击的旋转电机
CH709292A3 (de) * 2014-02-20 2015-10-15 Miniswys Sa Positioniervorrichtung für einen Bildstabilisator.
JP6543951B2 (ja) 2015-02-18 2019-07-17 セイコーエプソン株式会社 圧電駆動装置、ロボット、及び、それらの駆動方法
WO2016187211A1 (en) * 2015-05-19 2016-11-24 The Regents Of The University Of California Dna structured linear actuator
CN105141174B (zh) * 2015-09-07 2017-10-31 南京航空航天大学 一种贴片式驻波旋转型压电作动器
CN105141101B (zh) * 2015-09-28 2018-04-20 北京航空航天大学 一种基于电磁原理的梁式微驱动器
EP3468028A1 (en) * 2017-10-04 2019-04-10 miniswys SA Piezoelectric drive unit
EP3537593B1 (fr) * 2018-03-09 2024-04-24 ETA SA Manufacture Horlogère Suisse Dispositif de rotation d'une roue dentée
EP3537591B1 (fr) * 2018-03-09 2020-11-18 ETA SA Manufacture Horlogère Suisse Moteur piezoelectrique rotatif a precontrainte axiale
EP3537232B1 (fr) * 2018-03-09 2025-11-19 ETA SA Manufacture Horlogère Suisse Moteur piezoélectrique rotatif pour disque
EP3537594A1 (fr) * 2018-03-09 2019-09-11 ETA SA Manufacture Horlogère Suisse Moteur piezoelectrique rotatif a precontrainte radiale
CN108880323B (zh) * 2018-06-15 2019-08-06 福建工程学院 一种转速转矩可变的压电电机及其使用方法
CN112654920B (zh) 2018-08-13 2022-09-20 米尼斯怀斯股份公司 透镜驱动装置、摄像机模块及摄像机搭载装置
CN111258057A (zh) * 2018-11-30 2020-06-09 成都理想境界科技有限公司 一种扫描驱动器及光纤扫描器
FI3928423T3 (fi) 2019-02-22 2025-12-18 Acuvi Ab Sähkömekaaninen moottori ja sähkömekaanisen moottorin käsittävä viritettävä suodatin
EP3736965A1 (en) 2019-05-10 2020-11-11 Miniswys Sa Drive unit and method for operating a drive unit
CN118426244A (zh) 2019-05-10 2024-08-02 米尼斯怀斯股份公司 透镜驱动装置、摄像机模块及摄像机搭载装置
EP3966923A1 (en) 2019-05-10 2022-03-16 Miniswys Sa Drive unit and method for operating a drive unit
JP7294897B2 (ja) * 2019-06-07 2023-06-20 ミニスイス・ソシエテ・アノニム レンズ駆動装置、カメラモジュール、及びカメラ搭載装置
EP3787178A1 (en) 2019-08-30 2021-03-03 Miniswys Sa Piezoelectric drive unit
CN112492130B (zh) 2019-09-12 2021-10-01 华为技术有限公司 摄像模组及移动终端
CN110601597B (zh) * 2019-09-24 2022-07-15 太原科技大学 一种双模态复合型尺蠖超声波电机
EP3836390A1 (en) 2019-12-13 2021-06-16 Miniswys Sa Method for operating a drive unit and drive unit
WO2021117404A1 (ja) 2019-12-13 2021-06-17 ミニスイス・ソシエテ・アノニム 駆動ユニットの動作方法及びコントローラー
CN111181490B (zh) * 2020-01-02 2022-02-11 西安交通大学 一种基于超谐同步技术的硅微谐振式倍频器
JP7104365B2 (ja) 2020-03-30 2022-07-21 ミツミ電機株式会社 光学素子駆動装置、カメラモジュール、及びカメラ搭載装置
JP7526283B2 (ja) * 2020-04-16 2024-07-31 ミニスイス・ソシエテ・アノニム 駆動ユニット
CN115398791A (zh) * 2020-04-16 2022-11-25 米尼斯怀斯股份公司 驱动单元
WO2021210365A1 (ja) 2020-04-17 2021-10-21 ミツミ電機株式会社 光学素子駆動装置、カメラモジュールおよびカメラ搭載装置
CN114079401A (zh) 2020-08-17 2022-02-22 华为技术有限公司 驱动组件、马达及终端
CN112165273B (zh) * 2020-09-24 2021-11-30 南京工程学院 基于同向偏心约束和斜压电陶瓷的耦合模态型超声波电机
DE102020126863A1 (de) * 2020-10-13 2022-04-14 Physik Instrumente (PI) GmbH & Co KG Stellvorrichtung und verfahren zu deren montage
JPWO2022102306A1 (enExample) * 2020-11-13 2022-05-19
KR102642671B1 (ko) * 2020-11-24 2024-02-29 미쓰미덴기가부시기가이샤 광학 소자 구동 장치, 카메라 모듈, 및 카메라 탑재 장치
CN116547602A (zh) * 2020-11-30 2023-08-04 三美电机株式会社 光学致动器、摄像机模块及摄像机搭载装置
CN114915704B (zh) * 2021-02-09 2023-04-21 宁波舜宇光电信息有限公司 套筒组件、摄像模组及其运行方法和移动电子设备
CN115037849B (zh) * 2021-03-04 2023-06-09 宁波舜宇光电信息有限公司 感光组件、摄像模组、移动电子设备以及光学防抖方法
CN113131786B (zh) * 2021-04-08 2023-02-24 合肥工业大学 一种旋转压电马达
EP4075661A1 (en) * 2021-04-15 2022-10-19 Miniswys Sa Oscillating drive element and drive unit
WO2022218989A1 (en) * 2021-04-15 2022-10-20 Miniswys Sa Oscillating drive element and drive unit
DE102021116325B3 (de) 2021-06-24 2022-09-29 Physik Instrumente (PI) GmbH & Co KG Elektromechanischer Antrieb mit ebenem Versteifungskörper
JP2023043037A (ja) * 2021-09-15 2023-03-28 エスゼット ディージェイアイ テクノロジー カンパニー リミテッド 超音波モータ
DE102021130298A1 (de) 2021-11-19 2023-05-25 Physik Instrumente (PI) GmbH & Co KG Ultraschallantrieb
CN116683789A (zh) * 2022-02-22 2023-09-01 新思考电机有限公司 压电超声波马达、光学构件驱动装置、照相机装置及电子设备
DE102022112809A1 (de) * 2022-05-20 2023-11-23 Physik Instrumente (PI) GmbH & Co KG Antriebsvorrichtung, Antriebssystem, Stellsystem und Antriebsmotor
EP4311097A1 (en) 2022-07-22 2024-01-24 Miniswys Sa Shock resistant drive unit
JP7648922B2 (ja) 2023-03-10 2025-03-19 ミツミ電機株式会社 駆動装置、光学素子駆動装置、カメラモジュール及びカメラ搭載装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6150750A (en) * 1996-06-05 2000-11-21 Samsung Electronics Co., Ltd. Piezoelectric linear step motor
CN1459141A (zh) * 2001-03-21 2003-11-26 皇家菲利浦电子有限公司 压电驱动装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU773715A1 (ru) * 1979-04-12 1980-10-23 Предприятие П/Я А-3593 Устройство дл транспортировани носител записи
JPS6074982A (ja) * 1983-09-30 1985-04-27 Hitachi Maxell Ltd 強力音叉を用いたリニアモ−タ
JPH06101941B2 (ja) * 1986-05-09 1994-12-12 株式会社村田製作所 リニア駆動モ−タ
JPH03120694U (enExample) * 1990-03-19 1991-12-11
DE4326479C2 (de) * 1993-08-06 2000-09-28 Daimler Chrysler Ag Aktuator für ein bewegbares Element
JPH0880069A (ja) * 1994-09-06 1996-03-22 Hitachi Ltd 駆動装置
JP3190634B2 (ja) 1999-01-05 2001-07-23 セイコーインスツルメンツ株式会社 圧電アクチュエータおよび圧電アクチュエータの駆動方法並びに圧電アクチュエータの駆動方法をコンピュータに実行させるプログラムを格納した、コンピュータが読取可能な記憶媒体
AU5653699A (en) * 1999-09-20 2001-04-24 Nikon Corporation Parallel link mechanism, exposure system and method of manufacturing the same, and method of manufacturing devices
US6768245B2 (en) 1999-11-29 2004-07-27 Creaholic Sa Piezoelectric drive
US6690101B2 (en) * 2000-03-23 2004-02-10 Elliptec Resonant Actuator Ag Vibratory motors and methods of making and using same
JP2002101676A (ja) 2000-09-25 2002-04-05 Minolta Co Ltd アクチュエータ
AU2002304947A1 (en) 2001-06-06 2002-12-16 Creaholic Sa Piezoelectric drive
JP4033643B2 (ja) * 2001-06-18 2008-01-16 日本碍子株式会社 圧電/電歪デバイスおよびその製造方法
EP1438754B1 (de) 2001-10-22 2005-12-28 miniswys SA Piezoelektrischer antrieb
GB0128591D0 (en) * 2001-11-29 2002-01-23 1 Ltd Mounting system
DE50304468D1 (de) 2002-03-15 2006-09-14 Miniswys Sa Piezoelektrischer motor und verfahren zum antrieb desselben
JP4574206B2 (ja) * 2003-04-25 2010-11-04 キヤノン株式会社 駆動装置、それを用いた露光装置、デバイスの製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6150750A (en) * 1996-06-05 2000-11-21 Samsung Electronics Co., Ltd. Piezoelectric linear step motor
CN1459141A (zh) * 2001-03-21 2003-11-26 皇家菲利浦电子有限公司 压电驱动装置

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
JP昭60-74982A 1985.04.27
JP昭62-262676A 1987.11.14
全文.
同上.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111837328A (zh) * 2018-03-09 2020-10-27 Eta瑞士钟表制造股份有限公司 行程更长的线性压电马达
CN111837328B (zh) * 2018-03-09 2024-05-03 Eta瑞士钟表制造股份有限公司 行程更长的线性压电马达

Also Published As

Publication number Publication date
EP1761999A1 (de) 2007-03-14
WO2006000118A1 (de) 2006-01-05
EP2200102B1 (de) 2012-06-20
KR101175823B1 (ko) 2012-08-24
HK1109247A1 (en) 2008-05-30
US20070164635A1 (en) 2007-07-19
JP2008503995A (ja) 2008-02-07
US7429812B2 (en) 2008-09-30
CH696993A5 (de) 2008-02-29
DE502005007466D1 (de) 2009-07-23
CN101019301A (zh) 2007-08-15
KR20070072851A (ko) 2007-07-06
EP2200102A1 (de) 2010-06-23
JP4700084B2 (ja) 2011-06-15
EP1761999B1 (de) 2009-06-10
JP2008220171A (ja) 2008-09-18
JP4690398B2 (ja) 2011-06-01

Similar Documents

Publication Publication Date Title
CN101019301B (zh) 驱动单元
JP4628363B2 (ja) 平らに共振する電気機械的駆動ユニット
CN102067435B (zh) 振动致动器
US8482185B2 (en) Ultrasonic actuator
US7960895B2 (en) Drive unit
JP5235856B2 (ja) 振動型アクチュエータ
JPWO2007091443A1 (ja) 圧電素子及び超音波アクチュエータ
US11356040B2 (en) Piezo actuator device and motor
JP3939048B2 (ja) 圧電アクチュエータ
JPWO2007083752A1 (ja) 超音波アクチュエータ
CN104883090B (zh) 融合切变压电致动器复合驱动模式的压电直线马达
JP4452275B2 (ja) 圧電電気機械式駆動装置
US8350446B2 (en) Vibratory actuator and drive device using the same
JP2008278712A (ja) 駆動装置
US6700305B2 (en) Actuator using a piezoelectric element
JP4405590B2 (ja) 駆動装置
JP2004222453A (ja) アクチュエータ
JP4120195B2 (ja) 単一の変位素子により複数方向の駆動力を作用するアクチュエータ
JP2007325366A (ja) 圧電アクチュエータ
JP2007300798A (ja) 圧電素子及び超音波アクチュエータ
HK1109247B (en) Drive unit
JPH07178370A (ja) 振動子及び振動アクチュエータ
CN113437900A (zh) 一种直线型压电超声电机及其驱动方法
JP2001327919A (ja) 音響振動制御材料及び圧電振動体
WO2010067774A1 (ja) 超音波モータ

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
REG Reference to a national code

Ref country code: HK

Ref legal event code: DE

Ref document number: 1109247

Country of ref document: HK

C14 Grant of patent or utility model
GR01 Patent grant
REG Reference to a national code

Ref country code: HK

Ref legal event code: GR

Ref document number: 1109247

Country of ref document: HK

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20110706