CN101019292A - 用于有混合和超低电压源的高速技术的静电放电保护结构 - Google Patents
用于有混合和超低电压源的高速技术的静电放电保护结构 Download PDFInfo
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- CN101019292A CN101019292A CNA2005800254149A CN200580025414A CN101019292A CN 101019292 A CN101019292 A CN 101019292A CN A2005800254149 A CNA2005800254149 A CN A2005800254149A CN 200580025414 A CN200580025414 A CN 200580025414A CN 101019292 A CN101019292 A CN 101019292A
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0259—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using bipolar transistors as protective elements
- H01L27/0262—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using bipolar transistors as protective elements including a PNP transistor and a NPN transistor, wherein each of said transistors has its base coupled to the collector of the other transistor, e.g. silicon controlled rectifier [SCR] devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/08—Modifications for protecting switching circuit against overcurrent or overvoltage
- H03K17/081—Modifications for protecting switching circuit against overcurrent or overvoltage without feedback from the output circuit to the control circuit
- H03K17/0812—Modifications for protecting switching circuit against overcurrent or overvoltage without feedback from the output circuit to the control circuit by measures taken in the control circuit
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/08—Modifications for protecting switching circuit against overcurrent or overvoltage
- H03K17/081—Modifications for protecting switching circuit against overcurrent or overvoltage without feedback from the output circuit to the control circuit
- H03K17/0814—Modifications for protecting switching circuit against overcurrent or overvoltage without feedback from the output circuit to the control circuit by measures taken in the output circuit
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/30—Modifications for providing a predetermined threshold before switching
- H03K17/305—Modifications for providing a predetermined threshold before switching in thyristor switches
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Bipolar Integrated Circuits (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/899,383 | 2004-07-26 | ||
US10/899,383 US7589944B2 (en) | 2001-03-16 | 2004-07-26 | Electrostatic discharge protection structures for high speed technologies with mixed and ultra-low voltage supplies |
PCT/US2005/026332 WO2006014875A2 (en) | 2004-07-26 | 2005-07-25 | Electrostatic discharge protection structures for high speed technologies with mixed and ultra-low voltage supplies |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101019292A true CN101019292A (zh) | 2007-08-15 |
CN100594647C CN100594647C (zh) | 2010-03-17 |
Family
ID=35787744
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200580025414A Expired - Fee Related CN100594647C (zh) | 2004-07-26 | 2005-07-25 | 静电放电保护电路 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7589944B2 (zh) |
JP (1) | JP2008507857A (zh) |
CN (1) | CN100594647C (zh) |
WO (1) | WO2006014875A2 (zh) |
Cited By (16)
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---|---|---|---|---|
CN101771043B (zh) * | 2010-01-19 | 2011-07-20 | 浙江大学 | 齐纳二极管辅助触发的互补型scr结构 |
CN103094893A (zh) * | 2011-11-03 | 2013-05-08 | Nxp股份有限公司 | Led应用的cmos可调过电压esd和冲击电压保护 |
CN102227808B (zh) * | 2008-10-17 | 2013-10-23 | 剑桥硅无线电有限公司 | 静电放电保护电路 |
CN103548138A (zh) * | 2011-05-11 | 2014-01-29 | 美国亚德诺半导体公司 | 用于静电释放保护的设备 |
CN104332981A (zh) * | 2014-11-06 | 2015-02-04 | 北京大学 | 一种直流触发与瞬态触发结合的电源钳位esd保护电路 |
CN104701312A (zh) * | 2013-12-09 | 2015-06-10 | 精工爱普生株式会社 | 静电保护电路以及半导体集成电路装置 |
CN104701311A (zh) * | 2013-12-09 | 2015-06-10 | 精工爱普生株式会社 | 静电保护电路以及半导体集成电路装置 |
CN104766858A (zh) * | 2014-01-06 | 2015-07-08 | 旺宏电子股份有限公司 | 静电放电保护装置 |
CN105633072A (zh) * | 2014-11-25 | 2016-06-01 | 精工爱普生株式会社 | 静电保护电路以及半导体集成电路装置 |
CN106935573A (zh) * | 2015-12-31 | 2017-07-07 | 联咏科技股份有限公司 | 静电放电防护装置及其操作方法 |
CN107482004A (zh) * | 2017-07-06 | 2017-12-15 | 北京时代民芯科技有限公司 | 一种外延工艺下多电源电压集成电路esd保护网络 |
CN109935584A (zh) * | 2019-04-02 | 2019-06-25 | 常州工学院 | 可调制触发电压的esd保护装置及其制备方法 |
CN111883526A (zh) * | 2020-06-23 | 2020-11-03 | 帝奥微电子有限公司 | 一种高速开关通道esd的保护结构 |
WO2022017143A1 (zh) * | 2020-07-23 | 2022-01-27 | 长鑫存储技术有限公司 | 静电保护器件 |
WO2023284176A1 (zh) * | 2021-07-16 | 2023-01-19 | 长鑫存储技术有限公司 | 静电保护电路及半导体器件 |
CN111883526B (zh) * | 2020-06-23 | 2024-05-24 | 江苏帝奥微电子股份有限公司 | 一种高速开关通道esd的保护结构 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004009981B4 (de) * | 2004-03-01 | 2005-12-29 | Infineon Technologies Ag | ESD-Schutzschaltkreis mit Kollektorstrom-gesteuerter Zündung für eine monolithisch integrierte Schaltung |
JP2006086211A (ja) * | 2004-09-14 | 2006-03-30 | Denso Corp | 半導体装置 |
US8441765B2 (en) * | 2004-12-10 | 2013-05-14 | Nxp B.V. | Electrostatic discharge protected device |
TWI237893B (en) * | 2004-12-10 | 2005-08-11 | Richtek Technology Corp | Booster-type power management chip containing electrostatic discharge protection mechanism of output electrode |
US7245468B2 (en) * | 2005-02-04 | 2007-07-17 | Agere Systems Inc. | Electro-static discharge (ESD) power clamp with power up detection |
US7075252B1 (en) * | 2005-04-12 | 2006-07-11 | Eaton Corporation | LED driver circuit |
US7859803B2 (en) * | 2005-09-19 | 2010-12-28 | The Regents Of The University Of California | Voltage overload protection circuits |
US7773355B2 (en) * | 2005-09-19 | 2010-08-10 | The Regents Of The University Of California | ESD protection circuits for RF input pins |
DE102006026691B4 (de) * | 2006-06-08 | 2018-02-01 | Infineon Technologies Ag | ESD-Schutzschaltung und -verfahren |
US8144441B2 (en) * | 2006-08-30 | 2012-03-27 | Triquint Semiconductor, Inc. | Electrostatic discharge protection circuit for compound semiconductor devices and circuits |
EP1914669B1 (en) | 2006-10-18 | 2011-04-20 | Semiconductor Energy Laboratory Co., Ltd. | RFID tag |
US20080144244A1 (en) * | 2006-12-11 | 2008-06-19 | Benjamin Van Camp | Well potential triggered esd protection |
US7826185B2 (en) * | 2007-03-28 | 2010-11-02 | International Business Machines Corporation | Structure and circuit technique for uniform triggering of multifinger semiconductor devices with tunable trigger voltage |
US7714356B2 (en) * | 2007-10-31 | 2010-05-11 | International Business Machines Corporation | Design structure for uniform triggering of multifinger semiconductor devices with tunable trigger voltage |
US8064176B2 (en) * | 2007-04-06 | 2011-11-22 | Intersil Americas Inc. | EOS robust bipolar transient clamp |
US7842971B2 (en) | 2008-02-22 | 2010-11-30 | Intersil Americas Inc. | Silicon-controlled rectifier (SCR) device for high-voltage electrostatic discharge (ESD) applications |
US7800128B2 (en) | 2008-06-12 | 2010-09-21 | Infineon Technologies Ag | Semiconductor ESD device and method of making same |
US9225481B2 (en) * | 2008-08-11 | 2015-12-29 | Qualcomm Incorporated | Downlink grants in a multicarrier wireless communication system |
US8670376B2 (en) | 2008-08-12 | 2014-03-11 | Qualcomm Incorporated | Multi-carrier grant design |
TW201013925A (en) * | 2008-09-17 | 2010-04-01 | Grand Gem Semiconductor Co Ltd | MOS transistor having reverse current limiting and a voltage converter applied with the MOS transistor |
KR101006097B1 (ko) * | 2008-11-10 | 2011-01-07 | 주식회사 하이닉스반도체 | 정전기 보호회로 |
US8531805B2 (en) * | 2009-03-13 | 2013-09-10 | Qualcomm Incorporated | Gated diode having at least one lightly-doped drain (LDD) implant blocked and circuits and methods employing same |
US8665570B2 (en) | 2009-03-13 | 2014-03-04 | Qualcomm Incorporated | Diode having a pocket implant blocked and circuits and methods employing same |
US8072721B2 (en) * | 2009-06-10 | 2011-12-06 | Hong Kong Applied Science And Technology Research Institute Co., Ltd. | ESD protection using a capacitivly-coupled clamp for protecting low-voltage core transistors from high-voltage outputs |
US9520486B2 (en) | 2009-11-04 | 2016-12-13 | Analog Devices, Inc. | Electrostatic protection device |
WO2011093150A1 (en) | 2010-01-29 | 2011-08-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8456785B2 (en) | 2010-10-25 | 2013-06-04 | Infineon Technologies Ag | Semiconductor ESD device and method |
US10199482B2 (en) | 2010-11-29 | 2019-02-05 | Analog Devices, Inc. | Apparatus for electrostatic discharge protection |
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US9165891B2 (en) * | 2010-12-28 | 2015-10-20 | Industrial Technology Research Institute | ESD protection circuit |
US9025296B2 (en) * | 2011-01-06 | 2015-05-05 | Littelfuse, Inc. | Transient voltage suppressor |
US8906751B2 (en) | 2011-01-06 | 2014-12-09 | International Business Machines Corporation | Silicon controlled rectifiers (SCR), methods of manufacture and design structures |
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US8803193B2 (en) | 2011-05-11 | 2014-08-12 | Analog Devices, Inc. | Overvoltage and/or electrostatic discharge protection device |
US8816389B2 (en) | 2011-10-21 | 2014-08-26 | Analog Devices, Inc. | Overvoltage and/or electrostatic discharge protection device |
US8885305B2 (en) * | 2012-04-25 | 2014-11-11 | Globalfoundries Singapore Pte. Ltd. | Method and apparatus for ESD circuits |
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US20180159318A1 (en) * | 2016-12-07 | 2018-06-07 | Novatek Microelectronics Corp. | Power Rail Clamp Circuit |
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Family Cites Families (66)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3855518A (en) | 1973-12-26 | 1974-12-17 | Honeywell Inf Systems | Switching regulator using gate-turn-off scr |
US5465189A (en) | 1990-03-05 | 1995-11-07 | Texas Instruments Incorporated | Low voltage triggering semiconductor controlled rectifiers |
US5262344A (en) | 1990-04-27 | 1993-11-16 | Digital Equipment Corporation | N-channel clamp for ESD protection in self-aligned silicided CMOS process |
US5414479A (en) | 1990-12-17 | 1995-05-09 | Ginsburg; Arthur P. | Spatial frequency and contrast sensitivity test chart and protocol |
JP3375659B2 (ja) | 1991-03-28 | 2003-02-10 | テキサス インスツルメンツ インコーポレイテツド | 静電放電保護回路の形成方法 |
EP0529949B1 (en) | 1991-08-27 | 1996-06-26 | AT&T Corp. | Common mode voltage surge protection circuitry |
US5272371A (en) | 1991-11-19 | 1993-12-21 | Sgs-Thomson Microelectronics, Inc. | Electrostatic discharge protection structure |
US5591661A (en) | 1992-04-07 | 1997-01-07 | Shiota; Philip | Method for fabricating devices for electrostatic discharge protection and voltage references, and the resulting structures |
US5272097A (en) | 1992-04-07 | 1993-12-21 | Philip Shiota | Method for fabricating diodes for electrostatic discharge protection and voltage references |
US5452171A (en) | 1992-06-15 | 1995-09-19 | Hewlett-Packard Company | Electrostatic discharge protection circuit for integrated circuits |
US5400202A (en) | 1992-06-15 | 1995-03-21 | Hewlett-Packard Company | Electrostatic discharge protection circuit for integrated circuits |
US5276582A (en) | 1992-08-12 | 1994-01-04 | National Semiconductor Corporation | ESD protection using npn bipolar transistor |
US5404041A (en) | 1993-03-31 | 1995-04-04 | Texas Instruments Incorporated | Source contact placement for efficient ESD/EOS protection in grounded substrate MOS integrated circuit |
US5311391A (en) | 1993-05-04 | 1994-05-10 | Hewlett-Packard Company | Electrostatic discharge protection circuit with dynamic triggering |
US5369041A (en) | 1993-07-14 | 1994-11-29 | Texas Instruments Incorporated | Method for forming a silicon controlled rectifier |
US5498892A (en) | 1993-09-29 | 1996-03-12 | Ncr Corporation | Lightly doped drain ballast resistor |
US5430595A (en) * | 1993-10-15 | 1995-07-04 | Intel Corporation | Electrostatic discharge protection circuit |
US5594611A (en) | 1994-01-12 | 1997-01-14 | Lsi Logic Corporation | Integrated circuit input/output ESD protection circuit with gate voltage regulation and parasitic zener and junction diode |
US5561577A (en) | 1994-02-02 | 1996-10-01 | Hewlett-Packard Company | ESD protection for IC's |
US5550699A (en) | 1994-08-15 | 1996-08-27 | Hewlett-Packard Co. | Hot plug tolerant ESD protection for an IC |
US5625522A (en) | 1994-08-29 | 1997-04-29 | Cypress Semiconductor Corp. | Apparatus for smart power supply ESD protection structure |
US5907462A (en) | 1994-09-07 | 1999-05-25 | Texas Instruments Incorporated | Gate coupled SCR for ESD protection circuits |
US5602404A (en) | 1995-01-18 | 1997-02-11 | National Semiconductor Corporation | Low voltage triggering silicon controlled rectifier structures for ESD protection |
US5610425A (en) * | 1995-02-06 | 1997-03-11 | Motorola, Inc. | Input/output electrostatic discharge protection circuit for an integrated circuit |
US5528188A (en) * | 1995-03-13 | 1996-06-18 | International Business Machines Corporation | Electrostatic discharge suppression circuit employing low-voltage triggering silicon-controlled rectifier |
US5473169A (en) * | 1995-03-17 | 1995-12-05 | United Microelectronics Corp. | Complementary-SCR electrostatic discharge protection circuit |
US5754380A (en) | 1995-04-06 | 1998-05-19 | Industrial Technology Research Institute | CMOS output buffer with enhanced high ESD protection capability |
US5615073A (en) | 1995-06-22 | 1997-03-25 | National Semiconductor Corporation | Electrostatic discharge protection apparatus |
US5675469A (en) * | 1995-07-12 | 1997-10-07 | Motorola, Inc. | Integrated circuit with electrostatic discharge (ESD) protection and ESD protection circuit |
US5671111A (en) | 1995-10-30 | 1997-09-23 | Motorola, Inc. | Apparatus for electro-static discharge protection in a semiconductor device |
US5708288A (en) | 1995-11-02 | 1998-01-13 | Motorola, Inc. | Thin film silicon on insulator semiconductor integrated circuit with electrostatic damage protection and method |
US5856214A (en) | 1996-03-04 | 1999-01-05 | Winbond Electronics Corp. | Method of fabricating a low voltage zener-triggered SCR for ESD protection in integrated circuits |
EP0803955A3 (en) | 1996-04-25 | 1998-05-20 | Texas Instruments Incorporated | An electrostatic discharge protection circuit |
US6125021A (en) | 1996-04-30 | 2000-09-26 | Texas Instruments Incorporated | Semiconductor ESD protection circuit |
US5744839A (en) | 1996-06-11 | 1998-04-28 | Micron Technology, Inc. | ESD protection using selective siliciding techniques |
US5728612A (en) | 1996-07-19 | 1998-03-17 | Lsi Logic Corporation | Method for forming minimum area structures for sub-micron CMOS ESD protection in integrated circuit structures without extra implant and mask steps, and articles formed thereby |
US5781388A (en) | 1996-09-03 | 1998-07-14 | Motorola, Inc. | Non-breakdown triggered electrostatic discharge protection circuit for an integrated circuit and method therefor |
US5877927A (en) | 1996-10-01 | 1999-03-02 | Intel Corporation | Method and apparatus for providing electrostatic discharge protection for high voltage inputs |
US5821572A (en) | 1996-12-17 | 1998-10-13 | Symbios, Inc. | Simple BICMOS process for creation of low trigger voltage SCR and zener diode pad protection |
US5780905A (en) | 1996-12-17 | 1998-07-14 | Texas Instruments Incorporated | Asymmetrical, bidirectional triggering ESD structure |
TW423160B (en) | 1997-04-03 | 2001-02-21 | Winbond Electronics Corp | Lateral silicon controlled rectifier for electrostatic discharge protection |
US5872378A (en) | 1997-04-07 | 1999-02-16 | International Business Machines Corporation | Dual thin oxide ESD network for nonvolatile memory applications |
US6002567A (en) | 1997-10-17 | 1999-12-14 | Lsi Logic Corporation | ESD protection for high voltage level input for analog application |
US5870268A (en) | 1997-10-22 | 1999-02-09 | Winbond Electronics Corp. | Early trigger of ESD protection device by a current spike generator |
US6172404B1 (en) | 1997-10-31 | 2001-01-09 | Texas Instruments Incorporated | Tuneable holding voltage SCR ESD protection |
US5978192A (en) | 1997-11-05 | 1999-11-02 | Harris Corporation | Schmitt trigger-configured ESD protection circuit |
TW373316B (en) | 1998-01-09 | 1999-11-01 | Winbond Electronic Corp | Electrostatic discharge protect circuit having erasable coding ROM device |
JPH11204737A (ja) | 1998-01-19 | 1999-07-30 | Denso Corp | 集積回路用保護装置 |
US5959488A (en) | 1998-01-24 | 1999-09-28 | Winbond Electronics Corp. | Dual-node capacitor coupled MOSFET for improving ESD performance |
US5962876A (en) | 1998-04-06 | 1999-10-05 | Winbond Electronics Corporation | Low voltage triggering electrostatic discharge protection circuit |
US6034388A (en) | 1998-05-15 | 2000-03-07 | International Business Machines Corporation | Depleted polysilicon circuit element and method for producing the same |
US5959821A (en) | 1998-07-02 | 1999-09-28 | Xilinx, Inc. | Triple-well silicon controlled rectifier with dynamic holding voltage |
US6304127B1 (en) | 1998-07-30 | 2001-10-16 | Winbond Electronics Corp. | Negative-voltage-trigger SCR with a stack-gate ESD transient switch |
US6233130B1 (en) * | 1998-07-30 | 2001-05-15 | Winbond Electronics Corp. | ESD Protection device integrated with SCR |
US5982601A (en) | 1998-07-30 | 1999-11-09 | Winbond Electronics Corp. | Direct transient-triggered SCR for ESD protection |
US6069782A (en) | 1998-08-26 | 2000-05-30 | Integrated Device Technology, Inc. | ESD damage protection using a clamp circuit |
US6072677A (en) * | 1998-11-03 | 2000-06-06 | United Microelectronics Corp. | Electrostatic discharge protective circuit formed by use of a silicon controlled rectifier |
US6157530A (en) | 1999-01-04 | 2000-12-05 | International Business Machines Corporation | Method and apparatus for providing ESD protection |
US6268992B1 (en) * | 1999-04-15 | 2001-07-31 | Taiwan Semiconductor Manufacturing Company | Displacement current trigger SCR |
US6411485B1 (en) | 1999-11-04 | 2002-06-25 | United Microelectrics Corp. | Electrostatic discharge protection circuit for multi-voltage power supply circuit |
US6621126B2 (en) | 2000-10-10 | 2003-09-16 | Sarnoff Corporation | Multifinger silicon controlled rectifier structure for electrostatic discharge protection |
EP1348236B1 (en) | 2000-11-06 | 2007-08-15 | Sarnoff Corporation | Silicon controlled rectifier electrostatic discharge protection device with external on-chip triggering and compact internal dimensions for fast triggering |
TW479342B (en) * | 2001-01-05 | 2002-03-11 | Macronix Int Co Ltd | Electrostatic discharge protection circuit of input/output pad |
JP3983067B2 (ja) * | 2001-03-19 | 2007-09-26 | Necエレクトロニクス株式会社 | 半導体集積回路の静電保護回路 |
KR100441116B1 (ko) * | 2001-07-21 | 2004-07-19 | 삼성전자주식회사 | 낮은 트리거 전압에서 동작 가능한 반도체-제어 정류기구조의 정전 방전 보호 회로 |
US7285458B2 (en) * | 2004-02-11 | 2007-10-23 | Chartered Semiconductor Manufacturing Ltd. | Method for forming an ESD protection circuit |
-
2004
- 2004-07-26 US US10/899,383 patent/US7589944B2/en not_active Expired - Lifetime
-
2005
- 2005-07-25 JP JP2007523694A patent/JP2008507857A/ja not_active Withdrawn
- 2005-07-25 CN CN200580025414A patent/CN100594647C/zh not_active Expired - Fee Related
- 2005-07-25 WO PCT/US2005/026332 patent/WO2006014875A2/en active Application Filing
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Also Published As
Publication number | Publication date |
---|---|
CN100594647C (zh) | 2010-03-17 |
JP2008507857A (ja) | 2008-03-13 |
WO2006014875A2 (en) | 2006-02-09 |
WO2006014875A3 (en) | 2006-09-08 |
US7589944B2 (en) | 2009-09-15 |
US20050057866A1 (en) | 2005-03-17 |
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