CN100559028C - 在限制能耗的同时能迅速抽空的外罩 - Google Patents

在限制能耗的同时能迅速抽空的外罩 Download PDF

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Publication number
CN100559028C
CN100559028C CN200610072638.1A CN200610072638A CN100559028C CN 100559028 C CN100559028 C CN 100559028C CN 200610072638 A CN200610072638 A CN 200610072638A CN 100559028 C CN100559028 C CN 100559028C
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CN
China
Prior art keywords
section
sections
pump
inhaled
during
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200610072638.1A
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English (en)
Chinese (zh)
Other versions
CN1847660A (zh
Inventor
让·吕克·里瓦尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Alcatel Lucent NV
Original Assignee
Alcatel NV
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Publication of CN1847660A publication Critical patent/CN1847660A/zh
Application granted granted Critical
Publication of CN100559028C publication Critical patent/CN100559028C/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/10—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by changing the positions of the inlet or outlet openings with respect to the working chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/05—Speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/58—Valve parameters

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
CN200610072638.1A 2005-04-05 2006-04-05 在限制能耗的同时能迅速抽空的外罩 Expired - Fee Related CN100559028C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0503352A FR2883934B1 (fr) 2005-04-05 2005-04-05 Pompage rapide d'enceinte avec limitation d'energie
FR0503352 2005-04-05

Publications (2)

Publication Number Publication Date
CN1847660A CN1847660A (zh) 2006-10-18
CN100559028C true CN100559028C (zh) 2009-11-11

Family

ID=35427303

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200610072638.1A Expired - Fee Related CN100559028C (zh) 2005-04-05 2006-04-05 在限制能耗的同时能迅速抽空的外罩

Country Status (5)

Country Link
US (1) US20060222506A1 (fr)
EP (1) EP1710440A3 (fr)
JP (1) JP2006291952A (fr)
CN (1) CN100559028C (fr)
FR (1) FR2883934B1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105829723A (zh) * 2013-11-19 2016-08-03 厄利孔莱博尔德真空有限责任公司 真空泵系统和用于操作真空泵系统的方法
CN111542699A (zh) * 2018-04-16 2020-08-14 爱德华兹有限公司 多级真空泵和差异化地抽吸多个真空室的方法

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DE102006050943B4 (de) * 2006-10-28 2020-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe und Verfahren zum Betrieb derselben
JP4820304B2 (ja) * 2007-01-18 2011-11-24 株式会社荏原製作所 真空ポンプユニット
US8864476B2 (en) * 2011-08-31 2014-10-21 Flow Control Llc. Portable battery operated bilge pump
EP2594801B1 (fr) * 2011-11-18 2017-10-11 Flow Control LLC. Pompe électrique alimentée par une batterie rechargeable avec une configuration de pompe centrifuge en séries
FR2984423A1 (fr) * 2011-12-15 2013-06-21 Adixen Vacuum Products Dispositif de pompage et equipement de fabrication d'ecrans plats correspondant
JP5099573B1 (ja) * 2012-01-23 2012-12-19 有限会社スコットプランニング 複数の真空装置の省エネルギ−化を図る真空ポンプシステム
DE102012220442A1 (de) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems
WO2015109048A1 (fr) * 2014-01-15 2015-07-23 Eaton Corporation Procédé d'optimisation de performances d'un compresseur d'alimentation
FR3017425A1 (fr) * 2014-02-12 2015-08-14 Adixen Vacuum Products Systeme de pompage et procede de descente en pression dans un sas de chargement et de dechargement
DE202015004596U1 (de) * 2015-06-26 2015-09-21 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem
WO2017031807A1 (fr) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 Pompe à vide non coaxiale à multiples chambres d'entraînement
DE202016001950U1 (de) * 2016-03-30 2017-07-03 Leybold Gmbh Vakuumpumpe
GB2558626A (en) * 2017-01-11 2018-07-18 Edwards Ltd A multiple stage vacuum pump and pump configuring method
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
DE202017003212U1 (de) * 2017-06-17 2018-09-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
EP3489516B1 (fr) * 2017-11-24 2021-09-01 Pfeiffer Vacuum Gmbh Pompe à vide
CN108194353B (zh) * 2018-02-02 2019-12-13 中山市天元真空设备技术有限公司 一种成对转子转轴独立的直排大气的多级罗茨干式真空泵
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
FR3094762B1 (fr) * 2019-04-05 2021-04-09 Pfeiffer Vacuum Pompe à vide de type sèche et installation de pompage
CN210629269U (zh) 2019-09-23 2020-05-26 兑通真空技术(上海)有限公司 一种罗茨泵的电机连接传动结构
CN110594156B (zh) 2019-09-23 2021-05-25 兑通真空技术(上海)有限公司 一种三轴多级罗茨泵的驱动结构
CN110500275B (zh) 2019-09-23 2021-03-16 兑通真空技术(上海)有限公司 一种三轴多级罗茨泵的泵壳体结构
CN110685912A (zh) 2019-10-10 2020-01-14 兑通真空技术(上海)有限公司 一种多轴多级罗茨泵转子连接的结构
BE1028087B1 (nl) * 2020-02-24 2021-09-21 Atlas Copco Airpower Nv Werkwijze voor het aansturen van een vacuümsysteem en vacuümsysteem
CN112594544B (zh) * 2020-12-11 2022-07-19 宜春市富锐气体有限责任公司 一种氩气生产的充灌排抽真空设备
FR3128747A1 (fr) * 2021-11-03 2023-05-05 Pfeiffer Vacuum Pompe à vide multi-étagée

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105829723A (zh) * 2013-11-19 2016-08-03 厄利孔莱博尔德真空有限责任公司 真空泵系统和用于操作真空泵系统的方法
CN105829723B (zh) * 2013-11-19 2018-02-16 莱宝有限公司 真空泵系统和用于操作真空泵系统的方法
CN111542699A (zh) * 2018-04-16 2020-08-14 爱德华兹有限公司 多级真空泵和差异化地抽吸多个真空室的方法
US11326604B2 (en) 2018-04-16 2022-05-10 Edwards Limited Multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers

Also Published As

Publication number Publication date
FR2883934B1 (fr) 2010-08-20
CN1847660A (zh) 2006-10-18
JP2006291952A (ja) 2006-10-26
US20060222506A1 (en) 2006-10-05
EP1710440A2 (fr) 2006-10-11
FR2883934A1 (fr) 2006-10-06
EP1710440A3 (fr) 2008-02-06

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Termination date: 20110405