EP3489516B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3489516B1
EP3489516B1 EP17203509.9A EP17203509A EP3489516B1 EP 3489516 B1 EP3489516 B1 EP 3489516B1 EP 17203509 A EP17203509 A EP 17203509A EP 3489516 B1 EP3489516 B1 EP 3489516B1
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EP
European Patent Office
Prior art keywords
vacuum pump
pump
working
accordance
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP17203509.9A
Other languages
German (de)
English (en)
Other versions
EP3489516A1 (fr
Inventor
Florian Schneider
Steffen Herrmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP17203509.9A priority Critical patent/EP3489516B1/fr
Priority to JP2018216103A priority patent/JP6796630B2/ja
Publication of EP3489516A1 publication Critical patent/EP3489516A1/fr
Application granted granted Critical
Publication of EP3489516B1 publication Critical patent/EP3489516B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F04C28/065—Capacity control using a multiplicity of units or pumping capacities, e.g. multiple chambers, individually switchable or controllable
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/12—Fluid auxiliary
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/70—Use of multiplicity of similar components; Modular construction

Definitions

  • the present invention relates to a vacuum pump having a first working pump section and at least one second working pump section.
  • a known vacuum pump of the type mentioned is designed in such a way that the working pump sections are connected in parallel. In this way, a relatively high pumping speed is achieved at the beginning of a pumping process.
  • the parallel connection of the working pump sections is disadvantageous with regard to the final pressure that can be achieved, that is to say the minimum pressure that can be achieved at the inlet of the vacuum pump.
  • Vacuum pumps of the type mentioned above that operate in parallel are therefore suitable for applications in which rapid pumping out has priority over a low achievable final pressure.
  • vacuum pumps working in series are particularly suitable for applications in which rapid pumping is less important, but a particularly low final pressure should be achievable.
  • the U.S. 3,837,764 A discloses a special type of vacuum pump with orbiting conveying elements, two working pump sections being provided and it being possible to switch between a parallel and a series connection of the working pump sections.
  • the EP 0 730 093 A1 discloses a further special type of vacuum pump with orbiting conveying elements, namely a dry-running scroll pump, with two working pump sections being provided and it being possible to switch between a parallel and a series connection of the working pump sections.
  • the DE 20 2015 004 596 U1 discloses switching between parallel and series connection of separate vacuum pumps.
  • the DE 42 43 793 A1 , the JP S57 157785 U and the DE 40 01 668 A1 disclose multi-stage rotary vane pumps with means for switching between parallel and series connection of two working pump sections.
  • the goal conflict described should be resolved.
  • a vacuum pump with the features of claim 1, and in particular in that a control device is provided with which the working pump sections can be switched between a series connection and a parallel connection.
  • the vacuum pump can therefore be used to For example, at the beginning of a pumping process, the working pumping sections can be operated in parallel in order to achieve a high pumping speed, and later, in particular as soon as the pumping speed in series operation exceeds that of parallel operation, switch to series operation in order to achieve further effective evacuation down to a particularly low one To ensure final pressure.
  • the vacuum pump according to the invention can be used flexibly for various applications.
  • the manufacturer can dispense with offering mechanically different vacuum pumps on the one hand with parallel connection and on the other hand with series connection. This can drastically reduce the number of parts and thus save costs.
  • the additional design effort for the control device, on the other hand, can be kept low.
  • high or low pressures relate to the specific vacuum application and are not to be understood as absolute.
  • high pressure refers in particular to values close to atmospheric pressure.
  • the following description refers primarily to vacuum pumps with exactly two working pump sections that work according to the same pumping principle.
  • the examples mentioned can, however, also be transferred to pumps with three or more working pump sections and, in particular, also to pumps with different types of working pump sections.
  • the vacuum pump is a rotary displacement vacuum pump, in particular a rotary vane pump.
  • both or all of the work pump sections operate according to the rotary displacement or rotary slide principle.
  • the work pumping sections are driven by a common shaft. This is a structurally simple and therefore inexpensive solution.
  • control device is designed to carry out the switchover when a predefined and / or predefinable switchover gas pressure is reached. This is advantageous because the pumping speed is dependent on the operating pressure prevailing at the time and the pumping speed can therefore be selected precisely.
  • the switching gas pressure can be, for example, a gas pressure prevailing at an inlet of the vacuum pump. This makes it possible to take advantage of the fact that the inlet pressure of a vacuum pump is usually monitored anyway, so that no additional pressure-determining devices are necessary.
  • Advantageous values for the switching gas pressure are below 1 hPa and / or above 0.01 hPa, preferably above 0.10 hPa.
  • control device is designed to switch over as a function of known pumping speed curves of the vacuum pump with series connection and with parallel connection in each case as a function of a gas pressure prevailing at an inlet of the vacuum pump.
  • switching between series and parallel connection can take place at or at an intersection of the pumping speed curves.
  • control device is designed to start a pumping process with a parallel connection of the working pumping sections and to switch to a series connection of the working pump sections as soon as the pumping speed of the vacuum pump connected in parallel is less than or at least substantially equal to a pumping speed of the vacuum pump connected in series. In this way, an advantageous pumping speed can be set in each case.
  • the control device comprises at least one switchover valve, in particular a solenoid valve.
  • switchover valve in particular a solenoid valve.
  • Such switching valves allow simple, reliable control or switching.
  • a three-way valve in particular with an operating voltage of 24V, can be provided.
  • the switching valve has two switching positions, one of which is assigned to the series connection and the other to the parallel connection.
  • the switching valve has at least one third switching position in which the working pump sections are separated from an inlet of the vacuum pump.
  • the working pump sections and an outlet of the vacuum pump can be securely separated from the inlet.
  • the function of an inlet or safety valve can also be taken over by the switchover valve.
  • the vacuum pump therefore in particular has no additional inlet or safety valve. This not only saves costs, but also avoids a disadvantage that is frequently encountered with inlet valves, namely that low differential pressures often lead to insufficient closure of the inlet in differential pressure inlet valves.
  • the switching valve can effectively close the inlet at any differential pressures.
  • a high level of operational reliability can be achieved, for example, if the switchover valve is de-energized in the third switching position or if the switchover valve is designed in such a way that it automatically switches to the third in the de-energized state Switch position assumes and holds. In the event of a power failure, this prevents the process gas from flowing back into the recipient and, in particular, prevents the pump shaft from rotating in the opposite direction.
  • the switching valve can be designed as a 5/3-way valve, for example. This allows a structurally simple design.
  • a drive for at least one of the, in particular both or all, of the working pump sections comprises a direct current motor which is electrically connected in series with the switching valve.
  • the motor can be controlled synchronously with the switchover valve in a simple manner.
  • the currentless state can lead to the switching of the switchover valve in a safety position or the third switching position.
  • control device comprises at least one further valve which, in order to implement the series connection, separates the first working pump section from an outlet of the vacuum pump.
  • a rotary displacement vacuum pump of the prior art designed as a rotary vane vacuum pump and hereinafter referred to as vacuum pump 10 is shown.
  • the vacuum pump 10 sucks in a working medium at an inlet 28 and conveys it to an outlet 30, which is open to the atmosphere, for example.
  • FIG. 11 shows a sectional view of the vacuum pump 10 along the section line AA according to FIG Fig. 1 .
  • the section runs parallel along an axis of rotation of a rotor 12 of the vacuum pump 10.
  • the vacuum pump 10 comprises a safety valve 20, which prevents the working medium from flowing back if the pump fails.
  • the safety valve 20 is pilot controlled by a pressure pilot control.
  • the vacuum pump 10 also includes a motor 26 for driving the rotor 12 of the vacuum pump 10.
  • a coupling 27 is provided between the motor 26 and the rotor 12, which coupling can in particular be designed as a magnetic coupling.
  • a first work pumping section is defined by a slide 14 and a delivery chamber 15.
  • a second work pumping section is defined by a slide 16 and a delivery chamber 17.
  • the rotor has a slide 18 which rotates in a delivery chamber 19 to a To promote control fluid for the pressure pilot control.
  • the vacuum pump 10 shown thus works in the first working pump section, in the second working pump section and in the control pump section, in each case according to the rotary vane pump principle.
  • a plurality of slides 14 and 18 can also be provided in a respective pumping section.
  • the rotor 12 is received with its control section 18, 19 in a receiving part 24 and is supported and rotatably mounted therein.
  • the receiving part 24 forms with an outer surface 32 a cylindrical basic shape which is aligned concentrically to the axis of rotation of the rotor 12.
  • FIG. 3 The diagram shown represents the abscissa an inlet pressure of a vacuum pump according to the invention in logarithmic scale graduation.
  • the ordinate shows the pumping speed of the pump on a simple scale.
  • the diagram shows two pumping speed curves depending on the inlet pressure, namely a first pumping speed curve SP, which shows the pumping speed curve when the work pump sections are connected in parallel, and a second pumping speed curve SR, which shows the pumping speed curve when the work pump sections are connected in series.
  • Fig. 3 impressively illustrates that the pumping speed at a high inlet pressure, i.e. especially at the beginning of a pumping process starting from atmospheric pressure, is significantly greater in parallel operation than in series operation. However, only a significantly higher final pressure is achieved in parallel operation.
  • the pumping speed curves intersect - in the example shown here - at an inlet pressure of 0.15 hPA.
  • the point of intersection and the courses themselves are, however, dependent on the structural design of the respective working pump sections and on their relative size to one another. The following applies that the smaller the size differences of the working pumping sections, the greater the gains in pumping speed.
  • the point of intersection can advantageously be used as a switching point for the control device of the vacuum pump to switch between parallel and series operation.
  • a switching gas pressure corresponding to the point of intersection is determined and used as a basis for the control.
  • the diagram is used to describe a pumping process Fig. 3 read from right to left.
  • An advantageous pumping process in particular starting from atmospheric pressure, proceeds in such a way that parallel operation is started and there the high pumping speed according to SP is used for rapid evacuation.
  • the system switches to series operation so that the higher pumping speed according to SR can be used in the lower pressure range and a lower final pressure can be achieved.
  • a switching valve 40 is shown, which is designed as a 5/3-way valve and controls a vacuum pump according to the invention.
  • the switching valve 40 has three switching positions (a), (b) and (c), in which two working pump sections 42 and 44 are connected in different ways.
  • the switching valve 40 is designed as a solenoid valve for the purpose of selecting the desired switching position, although a corresponding solenoid arrangement is not shown in more detail.
  • a number of fluid channels which connect an inlet 28 of the vacuum pump via the switchover valve 40 and the working pump sections 42, 44 to an outlet 30 of the vacuum pump. Furthermore, a switching valve 46 is provided, which can optionally be shut off.
  • switching position (a) all connections of the switching valve 40 are separated from one another. In this position, no fluid can consequently flow from inlet 28 to outlet 30 and vice versa.
  • This switch position corresponds in particular to the third switch position described above. In particular, it can be assumed when the switching valve 40 is de-energized.
  • switching position (b) of the switching valve 40 the working pump sections are connected in parallel.
  • the switching valve 46 is open. In this position, a high pumping speed can be achieved for high inlet pressures.
  • the switching valve 46 is closed, which is indicated by a cross line.
  • This switching position is preferably selected at low inlet pressures in order to be able to achieve a particularly low final pressure.
  • the changeover valve 40 thus realizes the changeover between series and parallel operation to increase performance on the one hand and at the same time a function as a safety valve on the other hand.
  • the diverse advantages described herein can be achieved. If the invention for the development of the vacuum pump 10 according to Fig. 1 and 2 should be used, the safety valve 20 and the control pump section 18, 19 for the pressure pilot control of the safety valve 20 can be saved in particular by the safety function of the switching valve.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (12)

  1. Pompe à vide, comprenant
    une première portion de pompage de travail (42),
    au moins une deuxième portion de pompage de travail (44), et
    un dispositif de commande (40, 46) permettant de commuter entre un montage en série et un montage en parallèle des portions de pompage de travail,
    dans laquelle le dispositif de commande comprend au moins une vanne de commutation (40) qui présente deux positions de commutation dont l'une est associée au montage en série et dont l'autre est associée au montage en parallèle,
    caractérisée en ce que
    la vanne de commutation (40) présente au moins une troisième position de commutation dans laquelle les portions de pompage de travail (42, 44) sont séparées d'une entrée (28) de la pompe à vide.
  2. Pompe à vide selon la revendication 1,
    caractérisée en ce que
    la pompe à vide est une pompe à vide volumétrique rotative, en particulier une pompe rotative à palettes.
  3. Pompe à vide selon la revendication 1 ou 2,
    caractérisée en ce que
    le dispositif de commande (40, 46) est réalisé pour effectuer la commutation lorsqu'une pression de gaz de commutation prédéfinie et/ou prédéfinissable est atteinte.
  4. Pompe à vide selon la revendication 3,
    caractérisée en ce que
    la pression de gaz de commutation est une pression de gaz qui règne à une entrée (28) de la pompe à vide.
  5. Pompe à vide selon la revendication 3 ou 4,
    caractérisée en ce que
    la pression de gaz de commutation est inférieure à 1 hPa et/ou supérieure à 0,01 hPa, de préférence supérieure à 0,10 hPa.
  6. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    le dispositif de commande (40, 46) est réalisé pour effectuer la commutation en fonction des évolutions connues de la capacité d'aspiration de la pompe à vide dans le cas d'un montage en série et dans le cas d'un montage en parallèle, respectivement en fonction d'une pression de gaz régnant à une entrée (28) de la pompe à vide.
  7. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    le dispositif de commande (40, 46) est réalisé pour démarrer une opération de pompage avec un montage en parallèle des portions de pompage de travail (42, 44) et pour passer à un montage en série des portions de pompage de travail dès que la capacité d'aspiration de la pompe à vide en montage en parallèle est inférieure ou au moins sensiblement égale à une capacité d'aspiration de la pompe à vide en montage en série.
  8. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    la vanne de commutation (40) est une vanne magnétique.
  9. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    dans la troisième position de commutation, la vanne de commutation (40) est sans courant.
  10. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    la vanne de commutation (40) est réalisée sous forme de vanne à 5 voies/3 positions.
  11. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    un entraînement pour l'une au moins des portions de pompage de travail (42, 44) comprend un moteur à courant continu qui est électriquement connecté en série avec la vanne de commutation (40).
  12. Pompe à vide selon l'une au moins des revendications précédentes,
    caractérisée en ce que
    le dispositif de commande comprend au moins une autre vanne (46) qui sépare la première portion de pompage de travail (42) d'une sortie (30) de la pompe à vide afin de réaliser le montage en série.
EP17203509.9A 2017-11-24 2017-11-24 Pompe à vide Active EP3489516B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP17203509.9A EP3489516B1 (fr) 2017-11-24 2017-11-24 Pompe à vide
JP2018216103A JP6796630B2 (ja) 2017-11-24 2018-11-19 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP17203509.9A EP3489516B1 (fr) 2017-11-24 2017-11-24 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3489516A1 EP3489516A1 (fr) 2019-05-29
EP3489516B1 true EP3489516B1 (fr) 2021-09-01

Family

ID=60480181

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17203509.9A Active EP3489516B1 (fr) 2017-11-24 2017-11-24 Pompe à vide

Country Status (2)

Country Link
EP (1) EP3489516B1 (fr)
JP (1) JP6796630B2 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57157785U (fr) * 1981-03-30 1982-10-04
DE4001668A1 (de) * 1989-05-09 1990-11-15 Medizin Labortechnik Veb K Mehrstufige vakuumpumpe
DE4243793A1 (de) * 1992-12-23 1994-06-30 Zwetko Zwetkow Stufenschmierung für mehrstufige Vakuumpumpen

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3837764A (en) * 1972-05-11 1974-09-24 Robinair Mfg Corp Multi-stage rotary vacuum pump with separate oil reservoir
US3791780A (en) * 1972-05-11 1974-02-12 Robinair Mfg Corp Vacuum pump
JPH06249187A (ja) * 1993-02-23 1994-09-06 Sony Corp 真空ポンプおよびその駆動方法
US5591014A (en) * 1993-11-29 1997-01-07 Copeland Corporation Scroll machine with reverse rotation protection
JP3580890B2 (ja) * 1995-02-28 2004-10-27 アネスト岩田株式会社 オイルレス真空ポンプ装置とその運転制御方法
US5961297A (en) * 1995-02-28 1999-10-05 Iwata Air Compressor Mfg. Co., Ltd. Oil-free two stage scroll vacuum pump and method for controlling the same pump
FR2883934B1 (fr) * 2005-04-05 2010-08-20 Cit Alcatel Pompage rapide d'enceinte avec limitation d'energie
JP6078748B2 (ja) * 2013-11-26 2017-02-15 オリオン機械株式会社 吸引システムおよび吸引方法
DE202015004596U1 (de) * 2015-06-26 2015-09-21 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57157785U (fr) * 1981-03-30 1982-10-04
DE4001668A1 (de) * 1989-05-09 1990-11-15 Medizin Labortechnik Veb K Mehrstufige vakuumpumpe
DE4243793A1 (de) * 1992-12-23 1994-06-30 Zwetko Zwetkow Stufenschmierung für mehrstufige Vakuumpumpen

Also Published As

Publication number Publication date
EP3489516A1 (fr) 2019-05-29
JP2019094896A (ja) 2019-06-20
JP6796630B2 (ja) 2020-12-09

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