CN100520290C - 检查装置和检查方法 - Google Patents

检查装置和检查方法 Download PDF

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Publication number
CN100520290C
CN100520290C CNB2007101023123A CN200710102312A CN100520290C CN 100520290 C CN100520290 C CN 100520290C CN B2007101023123 A CNB2007101023123 A CN B2007101023123A CN 200710102312 A CN200710102312 A CN 200710102312A CN 100520290 C CN100520290 C CN 100520290C
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China
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unit
conductive region
transmission line
inspection object
inspection
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Chinese (zh)
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CN101063609A (zh
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尾内敏彦
笠井信太郎
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Canon Inc
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Canon Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Toxicology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CNB2007101023123A 2006-04-28 2007-04-27 检查装置和检查方法 Expired - Fee Related CN100520290C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006125670A JP4709059B2 (ja) 2006-04-28 2006-04-28 検査装置及び検査方法
JP2006125670 2006-04-28

Publications (2)

Publication Number Publication Date
CN101063609A CN101063609A (zh) 2007-10-31
CN100520290C true CN100520290C (zh) 2009-07-29

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CNB2007101023123A Expired - Fee Related CN100520290C (zh) 2006-04-28 2007-04-27 检查装置和检查方法

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US (2) US7557588B2 (cg-RX-API-DMAC10.html)
EP (1) EP1850115B1 (cg-RX-API-DMAC10.html)
JP (1) JP4709059B2 (cg-RX-API-DMAC10.html)
CN (1) CN100520290C (cg-RX-API-DMAC10.html)
AT (1) ATE426798T1 (cg-RX-API-DMAC10.html)
DE (1) DE602007000740D1 (cg-RX-API-DMAC10.html)

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JP4402026B2 (ja) 2005-08-30 2010-01-20 キヤノン株式会社 センシング装置
JP4773839B2 (ja) * 2006-02-15 2011-09-14 キヤノン株式会社 対象物の情報を検出する検出装置
JP4898472B2 (ja) 2006-04-11 2012-03-14 キヤノン株式会社 検査装置
JP5006642B2 (ja) 2006-05-31 2012-08-22 キヤノン株式会社 テラヘルツ波発振器
JP5196750B2 (ja) 2006-08-25 2013-05-15 キヤノン株式会社 発振素子
JP4873746B2 (ja) * 2006-12-21 2012-02-08 キヤノン株式会社 発振素子
US7869036B2 (en) * 2007-08-31 2011-01-11 Canon Kabushiki Kaisha Analysis apparatus for analyzing a specimen by obtaining electromagnetic spectrum information
JP5144175B2 (ja) * 2007-08-31 2013-02-13 キヤノン株式会社 電磁波を用いる検査装置及び検査方法
JP5186176B2 (ja) * 2007-10-19 2013-04-17 株式会社ジェーシービー 認証システム及び認証用可搬媒体
JP4807707B2 (ja) * 2007-11-30 2011-11-02 キヤノン株式会社 波形情報取得装置
JP4975001B2 (ja) * 2007-12-28 2012-07-11 キヤノン株式会社 波形情報取得装置及び波形情報取得方法
JP4834718B2 (ja) * 2008-01-29 2011-12-14 キヤノン株式会社 パルスレーザ装置、テラヘルツ発生装置、テラヘルツ計測装置及びテラヘルツトモグラフィー装置
JP5357531B2 (ja) * 2008-02-05 2013-12-04 キヤノン株式会社 情報取得装置及び情報取得方法
JP5178398B2 (ja) * 2008-08-27 2013-04-10 キヤノン株式会社 光伝導素子
JP5665305B2 (ja) * 2008-12-25 2015-02-04 キヤノン株式会社 分析装置
JP5612842B2 (ja) 2009-09-07 2014-10-22 キヤノン株式会社 発振器
JP5654760B2 (ja) 2010-03-02 2015-01-14 キヤノン株式会社 光素子
JP2013167591A (ja) * 2012-02-17 2013-08-29 Murata Mfg Co Ltd 物質センシング方法及び物質センシング装置
DE202013003163U1 (de) * 2013-04-04 2013-05-27 Hübner GmbH Vorrichtung zur Identifizierung von Stoffen in z. B. einer Postsendung
CN103604985B (zh) * 2013-10-25 2016-04-27 西北核技术研究所 一种大功率微波脉冲圆波导探测结构及方法
EP3069120B1 (en) * 2013-11-15 2024-08-14 Luna Innovations Incorporated System for determining at least one property of a sheet dielectric sample using terahertz radiation
CN105057231B (zh) * 2015-08-21 2017-07-28 爱德森（厦门）电子有限公司 一种在线电磁材质分选的方法
CN106353634A (zh) * 2016-10-17 2017-01-25 深圳市太赫兹科技创新研究院 太赫兹时域反射系统
KR102285056B1 (ko) * 2019-10-31 2021-08-04 주식회사 마인즈아이 테라헤르츠파 분광기술 기반 계측시스템
CN115468928B (zh) * 2021-06-10 2025-09-16 上海理工大学 光检测载片及所适用的检测处理方法
CN115121550B (zh) * 2022-06-27 2025-02-14 江苏大学 一种晶圆清洗装置及其方法
CN115825582B (zh) * 2022-11-01 2023-11-03 深圳技术大学 一种便携式微气象电磁参数测试装置

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JP3950820B2 (ja) * 2003-06-25 2007-08-01 キヤノン株式会社 高周波電気信号制御装置及びセンシングシステム
JP4533044B2 (ja) 2003-08-27 2010-08-25 キヤノン株式会社 センサ
JP4136858B2 (ja) 2003-09-12 2008-08-20 キヤノン株式会社 位置検出装置、及び情報入力装置
JP2005157601A (ja) 2003-11-25 2005-06-16 Canon Inc 電磁波による積層状物体計数装置及び計数方法
JP4505629B2 (ja) * 2004-01-19 2010-07-21 国立大学法人静岡大学 界面検出装置及び界面検出方法
JP4217646B2 (ja) 2004-03-26 2009-02-04 キヤノン株式会社 認証方法及び認証装置
JP4546326B2 (ja) 2004-07-30 2010-09-15 キヤノン株式会社 センシング装置
JP4390147B2 (ja) 2005-03-28 2009-12-24 キヤノン株式会社 周波数可変発振器
JP4250603B2 (ja) 2005-03-28 2009-04-08 キヤノン株式会社 テラヘルツ波の発生素子、及びその製造方法
JP2006275910A (ja) 2005-03-30 2006-10-12 Canon Inc 位置センシング装置及び位置センシング方法
JP4402026B2 (ja) 2005-08-30 2010-01-20 キヤノン株式会社 センシング装置
JP4773839B2 (ja) 2006-02-15 2011-09-14 キヤノン株式会社 対象物の情報を検出する検出装置
JP4481946B2 (ja) 2006-03-17 2010-06-16 キヤノン株式会社 検出素子及び画像形成装置
JP5132146B2 (ja) 2006-03-17 2013-01-30 キヤノン株式会社 分析方法、分析装置、及び検体保持部材
JP4898472B2 (ja) 2006-04-11 2012-03-14 キヤノン株式会社 検査装置
JP5196750B2 (ja) 2006-08-25 2013-05-15 キヤノン株式会社 発振素子

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
CN1614391A (zh) * 2003-11-03 2005-05-11 中国科学院上海应用物理研究所 中草药真伪及质量鉴别的快速无损分析方法

Also Published As

Publication number Publication date
JP4709059B2 (ja) 2011-06-22
US7557588B2 (en) 2009-07-07
EP1850115A1 (en) 2007-10-31
JP2007298358A (ja) 2007-11-15
ATE426798T1 (de) 2009-04-15
EP1850115B1 (en) 2009-03-25
US7782067B2 (en) 2010-08-24
DE602007000740D1 (de) 2009-05-07
US20070252604A1 (en) 2007-11-01
CN101063609A (zh) 2007-10-31
US20090201030A1 (en) 2009-08-13

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Granted publication date: 20090729

Termination date: 20170427