CN100505288C - 包括将电极连接到衬底内的其它导电元件的导电元件的电子器件及其形成工艺 - Google Patents

包括将电极连接到衬底内的其它导电元件的导电元件的电子器件及其形成工艺 Download PDF

Info

Publication number
CN100505288C
CN100505288C CNB200580045246XA CN200580045246A CN100505288C CN 100505288 C CN100505288 C CN 100505288C CN B200580045246X A CNB200580045246X A CN B200580045246XA CN 200580045246 A CN200580045246 A CN 200580045246A CN 100505288 C CN100505288 C CN 100505288C
Authority
CN
China
Prior art keywords
conductive element
electrode
conductive
organic layer
electronic device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB200580045246XA
Other languages
English (en)
Chinese (zh)
Other versions
CN101091254A (zh
Inventor
俞钢
S·帕卡什
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of CN101091254A publication Critical patent/CN101091254A/zh
Application granted granted Critical
Publication of CN100505288C publication Critical patent/CN100505288C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10Substrates, e.g. flexible substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/01Manufacture or treatment
    • H10D64/013Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator
    • H10D64/01302Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H10D64/01304Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
    • H10D64/01326Aspects related to lithography, isolation or planarisation of the conductor
    • H10D64/01328Aspects related to lithography, isolation or planarisation of the conductor by defining the conductor using a sidewall spacer mask, a transformation under a mask or a plating at a sidewall
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/14Carrier transporting layers
    • H10K50/15Hole transporting layers
    • H10K50/156Hole transporting layers comprising a multilayered structure
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/40Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/44Conductive materials thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • H10W72/07231Techniques
    • H10W72/07236Soldering or alloying
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
CNB200580045246XA 2004-12-29 2005-12-29 包括将电极连接到衬底内的其它导电元件的导电元件的电子器件及其形成工艺 Expired - Fee Related CN100505288C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/025,110 US7189991B2 (en) 2004-12-29 2004-12-29 Electronic devices comprising conductive members that connect electrodes to other conductive members within a substrate and processes for forming the electronic devices
US11/025,110 2004-12-29

Publications (2)

Publication Number Publication Date
CN101091254A CN101091254A (zh) 2007-12-19
CN100505288C true CN100505288C (zh) 2009-06-24

Family

ID=36610342

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB200580045246XA Expired - Fee Related CN100505288C (zh) 2004-12-29 2005-12-29 包括将电极连接到衬底内的其它导电元件的导电元件的电子器件及其形成工艺

Country Status (7)

Country Link
US (2) US7189991B2 (https=)
EP (1) EP1839336A4 (https=)
JP (1) JP5255279B2 (https=)
KR (1) KR101261653B1 (https=)
CN (1) CN100505288C (https=)
TW (1) TWI377711B (https=)
WO (1) WO2006072024A2 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7189991B2 (en) * 2004-12-29 2007-03-13 E. I. Du Pont De Nemours And Company Electronic devices comprising conductive members that connect electrodes to other conductive members within a substrate and processes for forming the electronic devices
US7563392B1 (en) * 2004-12-30 2009-07-21 E.I. Du Pont De Nemours And Company Organic conductive compositions and structures
DE102005037290A1 (de) * 2005-08-08 2007-02-22 Siemens Ag Flachbilddetektor
US7642109B2 (en) * 2005-08-29 2010-01-05 Eastman Kodak Company Electrical connection in OLED devices
US7700471B2 (en) * 2005-12-13 2010-04-20 Versatilis Methods of making semiconductor-based electronic devices on a wire and articles that can be made thereby
US7638416B2 (en) * 2005-12-13 2009-12-29 Versatilis Llc Methods of making semiconductor-based electronic devices on a wire and articles that can be made using such devices
JP5191650B2 (ja) * 2005-12-16 2013-05-08 シャープ株式会社 窒化物半導体発光素子および窒化物半導体発光素子の製造方法
US8247824B2 (en) * 2005-12-19 2012-08-21 Matthew Stainer Electronic devices comprising electrodes that connect to conductive members within a substrate and processes for forming the electronic devices
US7314786B1 (en) * 2006-06-16 2008-01-01 International Business Machines Corporation Metal resistor, resistor material and method
US8153029B2 (en) * 2006-12-28 2012-04-10 E.I. Du Pont De Nemours And Company Laser (230NM) ablatable compositions of electrically conducting polymers made with a perfluoropolymeric acid applications thereof
US8227877B2 (en) * 2010-07-14 2012-07-24 Macronix International Co., Ltd. Semiconductor bio-sensors and methods of manufacturing the same
CN114616515A (zh) * 2019-10-10 2022-06-10 康宁公司 用于形成包覆电极的系统及方法
US11929388B2 (en) * 2021-09-23 2024-03-12 Apple Inc. Local passive matrix displays

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1295349A (zh) * 1999-10-26 2001-05-16 株式会社半导体能源研究所 电光装置
CN1412854A (zh) * 2001-10-10 2003-04-23 株式会社日立制作所 图像显示设备
CN1437177A (zh) * 2002-02-06 2003-08-20 株式会社日立制作所 有机发光显示器

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3530362B2 (ja) * 1996-12-19 2004-05-24 三洋電機株式会社 自発光型画像表示装置
KR100257811B1 (ko) * 1997-10-24 2000-06-01 구본준 액정표시장치의 기판의 제조방법
TW484238B (en) * 2000-03-27 2002-04-21 Semiconductor Energy Lab Light emitting device and a method of manufacturing the same
KR100437475B1 (ko) * 2001-04-13 2004-06-23 삼성에스디아이 주식회사 평판 디스플레이 장치용 표시 소자 제조 방법
KR100495702B1 (ko) * 2001-04-13 2005-06-14 삼성에스디아이 주식회사 유기 전계 발광 표시 장치 및 그 제조 방법
US6900470B2 (en) * 2001-04-20 2005-05-31 Kabushiki Kaisha Toshiba Display device and method of manufacturing the same
KR100682377B1 (ko) * 2001-05-25 2007-02-15 삼성전자주식회사 유기 전계발광 디바이스 및 이의 제조 방법
KR100443831B1 (ko) * 2001-12-20 2004-08-09 엘지.필립스 엘시디 주식회사 액정표시소자의 제조 방법
KR100941129B1 (ko) * 2002-03-26 2010-02-09 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광장치 및 그의 제조방법
KR100435054B1 (ko) * 2002-05-03 2004-06-07 엘지.필립스 엘시디 주식회사 유기전계 발광소자와 그 제조방법
KR100478759B1 (ko) * 2002-08-20 2005-03-24 엘지.필립스 엘시디 주식회사 유기전계 발광소자와 그 제조방법
US7049636B2 (en) * 2002-10-28 2006-05-23 Universal Display Corporation Device including OLED controlled by n-type transistor
KR100905473B1 (ko) 2002-12-03 2009-07-02 삼성전자주식회사 유기 이엘 표시판 및 그 제조 방법
JP3861816B2 (ja) 2003-01-24 2006-12-27 住友電気工業株式会社 光送受信モジュール及びその製造方法
CA2419704A1 (en) * 2003-02-24 2004-08-24 Ignis Innovation Inc. Method of manufacturing a pixel with organic light-emitting diode
JP3915734B2 (ja) * 2003-05-12 2007-05-16 ソニー株式会社 蒸着マスクおよびこれを用いた表示装置の製造方法、ならびに表示装置
US6953705B2 (en) * 2003-07-22 2005-10-11 E. I. Du Pont De Nemours And Company Process for removing an organic layer during fabrication of an organic electronic device
CN1890698B (zh) * 2003-12-02 2011-07-13 株式会社半导体能源研究所 显示器件及其制造方法和电视装置
US7189991B2 (en) * 2004-12-29 2007-03-13 E. I. Du Pont De Nemours And Company Electronic devices comprising conductive members that connect electrodes to other conductive members within a substrate and processes for forming the electronic devices
KR100700650B1 (ko) * 2005-01-05 2007-03-27 삼성에스디아이 주식회사 유기 전계 발광 장치 및 그 제조 방법
US7554261B2 (en) * 2006-05-05 2009-06-30 Eastman Kodak Company Electrical connection in OLED devices

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1295349A (zh) * 1999-10-26 2001-05-16 株式会社半导体能源研究所 电光装置
CN1412854A (zh) * 2001-10-10 2003-04-23 株式会社日立制作所 图像显示设备
CN1437177A (zh) * 2002-02-06 2003-08-20 株式会社日立制作所 有机发光显示器

Also Published As

Publication number Publication date
WO2006072024A3 (en) 2007-05-18
KR20070093137A (ko) 2007-09-17
WO2006072024A2 (en) 2006-07-06
CN101091254A (zh) 2007-12-19
US20060138401A1 (en) 2006-06-29
JP2008527424A (ja) 2008-07-24
US20070085077A1 (en) 2007-04-19
KR101261653B1 (ko) 2013-05-06
TW200633283A (en) 2006-09-16
EP1839336A4 (en) 2010-12-15
TWI377711B (en) 2012-11-21
EP1839336A2 (en) 2007-10-03
JP5255279B2 (ja) 2013-08-07
US7488975B2 (en) 2009-02-10
US7189991B2 (en) 2007-03-13

Similar Documents

Publication Publication Date Title
CN1998097B (zh) 在制造有机电子器件的过程中除去有机层的方法和用该方法制造的有机电子器件
US8604463B2 (en) Organic light emitting diode display and method of manufacturing the same
CN100505288C (zh) 包括将电极连接到衬底内的其它导电元件的导电元件的电子器件及其形成工艺
KR101084588B1 (ko) 유기 el 발광 소자, 그 제조 방법 및 표시 장치
US8395160B2 (en) Organic light emitting display apparatus and method of manufacturing the same
US20080074041A1 (en) Organic electroluminescent display device and method for producing the same
KR101469026B1 (ko) 표시 장치 및 그 표시판의 제조 방법
US11678522B2 (en) Organic light-emitting display apparatus and method of manufacturing the same
US6757031B2 (en) Metal contact structure and method for thin film transistor array in liquid crystal display
CN105321980A (zh) 有机发光装置及该装置的制造方法
US9972777B1 (en) MTJ device process/integration method with pre-patterned seed layer
CN119012817A (zh) 显示面板、显示装置和显示面板的制备方法
US7851800B2 (en) Thin film transistor and organic electro-luminescent display device
EP1647064B1 (en) Process for removing an organic layer during fabrication of an organic electronic device
US12581892B2 (en) Method of manufacturing display apparatus
US20230209937A1 (en) Organic light emitting display device and manufacturing method thereof
CN114141852B (zh) 柔性显示面板及柔性显示装置
JP2025164762A (ja) 表示パネル及び表示パネルの製造方法
KR100970258B1 (ko) 표시장치 및 이의 제조 방법
KR20140071091A (ko) 마스크 기판의 제조 방법 및 이를 이용하여 유기전계발광 표시장치를 제조하는 방법

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090624

Termination date: 20151229

EXPY Termination of patent right or utility model