CN100488044C - 滤波器和双工器中具有两个压电层作为平衡-不平衡变换器的体声波谐振器 - Google Patents
滤波器和双工器中具有两个压电层作为平衡-不平衡变换器的体声波谐振器 Download PDFInfo
- Publication number
- CN100488044C CN100488044C CNB038020483A CN03802048A CN100488044C CN 100488044 C CN100488044 C CN 100488044C CN B038020483 A CNB038020483 A CN B038020483A CN 03802048 A CN03802048 A CN 03802048A CN 100488044 C CN100488044 C CN 100488044C
- Authority
- CN
- China
- Prior art keywords
- electrode
- resonator
- balanced
- signal output
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000008878 coupling Effects 0.000 claims description 64
- 238000010168 coupling process Methods 0.000 claims description 64
- 238000005859 coupling reaction Methods 0.000 claims description 64
- 239000000758 substrate Substances 0.000 claims description 27
- 238000009413 insulation Methods 0.000 claims description 11
- 230000003071 parasitic effect Effects 0.000 claims description 6
- 230000000630 rising effect Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 92
- 238000010586 diagram Methods 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 230000000694 effects Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000014509 gene expression Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 238000010897 surface acoustic wave method Methods 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000005083 Zinc sulfide Substances 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229940096118 ella Drugs 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- OOLLAFOLCSJHRE-ZHAKMVSLSA-N ulipristal acetate Chemical compound C1=CC(N(C)C)=CC=C1[C@@H]1C2=C3CCC(=O)C=C3CC[C@H]2[C@H](CC[C@]2(OC(C)=O)C(C)=O)[C@]2(C)C1 OOLLAFOLCSJHRE-ZHAKMVSLSA-N 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910012463 LiTaO3 Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0566—Constructional combinations of supports or holders with electromechanical or other electronic elements for duplexers
- H03H9/0571—Constructional combinations of supports or holders with electromechanical or other electronic elements for duplexers including bulk acoustic wave [BAW] devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/42—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/0023—Balance-unbalance or balance-balance networks
- H03H9/0095—Balance-unbalance or balance-balance networks using bulk acoustic wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
- H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/589—Acoustic mirrors
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
- H03H9/703—Networks using bulk acoustic wave devices
- H03H9/706—Duplexers
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
Claims (38)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/045,645 | 2002-01-09 | ||
US10/045,645 US6670866B2 (en) | 2002-01-09 | 2002-01-09 | Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1695298A CN1695298A (zh) | 2005-11-09 |
CN100488044C true CN100488044C (zh) | 2009-05-13 |
Family
ID=21939111
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB038020483A Expired - Fee Related CN100488044C (zh) | 2002-01-09 | 2003-01-03 | 滤波器和双工器中具有两个压电层作为平衡-不平衡变换器的体声波谐振器 |
Country Status (8)
Country | Link |
---|---|
US (1) | US6670866B2 (zh) |
EP (1) | EP1464115B1 (zh) |
KR (1) | KR100901954B1 (zh) |
CN (1) | CN100488044C (zh) |
AT (1) | ATE445931T1 (zh) |
AU (1) | AU2003201047A1 (zh) |
DE (1) | DE60329654D1 (zh) |
WO (1) | WO2003058809A2 (zh) |
Families Citing this family (191)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10123369A1 (de) * | 2001-05-14 | 2002-12-05 | Infineon Technologies Ag | Filteranordnung für, symmetrische und unsymmetrische Leitungssysteme |
DE10147075A1 (de) * | 2001-09-25 | 2003-04-30 | Infineon Technologies Ag | Piezoelektrisches Bauelement und Verfahren zu dessen Herstellung |
DE10149542A1 (de) * | 2001-10-08 | 2003-04-17 | Infineon Technologies Ag | BAW-Resonator |
US7283793B1 (en) | 2002-05-15 | 2007-10-16 | Broadcom Corporation | Package filter and combiner network |
US6844792B1 (en) * | 2002-05-15 | 2005-01-18 | Zeevo | Single ended tuning of a differential power amplifier output |
US6982609B1 (en) * | 2002-05-15 | 2006-01-03 | Zeevo | System method and apparatus for a three-line balun with power amplifier bias |
JP2005526442A (ja) * | 2002-05-20 | 2005-09-02 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | フィルタ構造 |
KR100506729B1 (ko) * | 2002-05-21 | 2005-08-08 | 삼성전기주식회사 | 박막 벌크 어코스틱 공진기(FBARs)소자 및 그제조방법 |
US7276994B2 (en) * | 2002-05-23 | 2007-10-02 | Murata Manufacturing Co., Ltd. | Piezoelectric thin-film resonator, piezoelectric filter, and electronic component including the piezoelectric filter |
DE10234685A1 (de) * | 2002-07-30 | 2004-02-19 | Infineon Technologies Ag | Filterschaltung |
WO2004025832A1 (en) * | 2002-09-12 | 2004-03-25 | Philips Intellectual Property & Standards Gmbh | Bulk acoustic wave resonator with means for suppression of pass-band ripple in bulk acoustic wave filters |
FR2848036B1 (fr) * | 2002-11-28 | 2005-08-26 | St Microelectronics Sa | Support pour resonateur acoustique, resonateur acoustique et circuit integre correspondant |
DE10256937B4 (de) * | 2002-12-05 | 2018-02-01 | Snaptrack, Inc. | Mit akustischen Volumenwellen arbeitendes Bauelement mit unsymmetrisch/symmetrischer Beschaltung |
DE10305379A1 (de) * | 2003-02-10 | 2004-08-19 | Epcos Ag | Frontendschaltung |
KR100486627B1 (ko) * | 2003-02-21 | 2005-05-03 | 엘지전자 주식회사 | 반도체 패키지 |
US7275292B2 (en) | 2003-03-07 | 2007-10-02 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Method for fabricating an acoustical resonator on a substrate |
DE10317969B4 (de) * | 2003-04-17 | 2005-06-16 | Epcos Ag | Duplexer mit erweiterter Funktionalität |
US7123883B2 (en) * | 2003-09-26 | 2006-10-17 | Nokia Corporation | Systems and methods that employ a balanced duplexer |
US7155252B2 (en) * | 2003-10-17 | 2006-12-26 | Nokia Corporation | Mimo and diversity front-end arrangements for multiband multimode communication engines |
US7400217B2 (en) * | 2003-10-30 | 2008-07-15 | Avago Technologies Wireless Ip Pte Ltd | Decoupled stacked bulk acoustic resonator band-pass filter with controllable pass bandwith |
US7242270B2 (en) * | 2003-10-30 | 2007-07-10 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Decoupled stacked bulk acoustic resonator-based band-pass filter |
US7019605B2 (en) * | 2003-10-30 | 2006-03-28 | Larson Iii John D | Stacked bulk acoustic resonator band-pass filter with controllable pass bandwidth |
EP1528676B1 (en) * | 2003-10-30 | 2006-09-13 | Avago Technologies General IP (Singapore) Pte. Ltd | Film acoustically-coupled transformer with reverse c-axis piezoelectric material |
US7358831B2 (en) * | 2003-10-30 | 2008-04-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator (FBAR) devices with simplified packaging |
DE602004000851T2 (de) * | 2003-10-30 | 2007-05-16 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Akustisch gekoppelter Dünnschicht-Transformator mit zwei piezoelektrischen Elementen, welche entgegengesetzte C-Axen Orientierung besitzten |
US6946928B2 (en) * | 2003-10-30 | 2005-09-20 | Agilent Technologies, Inc. | Thin-film acoustically-coupled transformer |
US20050093652A1 (en) * | 2003-10-31 | 2005-05-05 | Qing Ma | Size scaling of film bulk acoustic resonator (FBAR) filters using impedance transformer (IT) or balun |
DE102004002133A1 (de) * | 2004-01-15 | 2005-08-04 | Robert Bosch Gmbh | Piezoelektrischer Aktor |
US7038559B2 (en) | 2004-02-23 | 2006-05-02 | Ruby Richard C | Vertically separated acoustic filters and resonators |
US6963257B2 (en) | 2004-03-19 | 2005-11-08 | Nokia Corporation | Coupled BAW resonator based duplexers |
JP4586404B2 (ja) * | 2004-04-28 | 2010-11-24 | ソニー株式会社 | フィルタ装置及び送受信機 |
CN1947333A (zh) * | 2004-04-30 | 2007-04-11 | 株式会社村田制作所 | 压电薄膜谐振器 |
KR100635268B1 (ko) * | 2004-05-17 | 2006-10-19 | 삼성전자주식회사 | 인덕터가 내장된 필터, 듀플렉서 및 그 제조방법 |
DE102004031397A1 (de) * | 2004-06-29 | 2006-01-26 | Epcos Ag | Duplexer |
US20060019611A1 (en) * | 2004-07-21 | 2006-01-26 | Nokia Corporation | Distributed balanced duplexer |
US7446629B2 (en) * | 2004-08-04 | 2008-11-04 | Matsushita Electric Industrial Co., Ltd. | Antenna duplexer, and RF module and communication apparatus using the same |
KR100649497B1 (ko) * | 2004-09-23 | 2006-11-28 | 삼성전기주식회사 | 불평형-평형 입출력 구조의 fbar필터 |
US7388454B2 (en) | 2004-10-01 | 2008-06-17 | Avago Technologies Wireless Ip Pte Ltd | Acoustic resonator performance enhancement using alternating frame structure |
DE102004049499B4 (de) * | 2004-10-11 | 2017-12-21 | Snaptrack, Inc. | Mit akustischen Volumenwellen arbeitende Schaltung und Bauelement mit der Schaltung |
DE102004049498A1 (de) * | 2004-10-11 | 2006-04-13 | Epcos Ag | Mit akustischen Wellen arbeitendes Bauelement und Verfahren zu dessen Herstellung |
US7187255B2 (en) * | 2004-10-26 | 2007-03-06 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Arrangement of lattice filter |
DE102004054895B4 (de) * | 2004-11-12 | 2007-04-19 | Infineon Technologies Ag | Dünnschicht-BAW-Filter sowie Verfahren zur Herstellung eines Dünnschicht-BAW-Filters |
US8981876B2 (en) | 2004-11-15 | 2015-03-17 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Piezoelectric resonator structures and electrical filters having frame elements |
US7202560B2 (en) | 2004-12-15 | 2007-04-10 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Wafer bonding of micro-electro mechanical systems to active circuitry |
US7791434B2 (en) | 2004-12-22 | 2010-09-07 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric |
TWI256194B (en) * | 2004-12-30 | 2006-06-01 | Delta Electronics Inc | Filter assembly with unbalanced to balanced conversion |
US7369013B2 (en) | 2005-04-06 | 2008-05-06 | Avago Technologies Wireless Ip Pte Ltd | Acoustic resonator performance enhancement using filled recessed region |
US7274270B2 (en) | 2005-04-13 | 2007-09-25 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Resonator matching network |
US7436269B2 (en) * | 2005-04-18 | 2008-10-14 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustically coupled resonators and method of making the same |
US7934884B2 (en) * | 2005-04-27 | 2011-05-03 | Lockhart Industries, Inc. | Ring binder cover |
JP2006339873A (ja) * | 2005-05-31 | 2006-12-14 | Toshiba Corp | 薄膜圧電共振器、フィルタ及び電圧制御発振器 |
US7562429B2 (en) * | 2005-06-20 | 2009-07-21 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Suspended device and method of making |
DE102005028927B4 (de) * | 2005-06-22 | 2007-02-15 | Infineon Technologies Ag | BAW-Vorrichtung |
US7443269B2 (en) | 2005-07-27 | 2008-10-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Method and apparatus for selectively blocking radio frequency (RF) signals in a radio frequency (RF) switching circuit |
FR2890490A1 (fr) * | 2005-09-05 | 2007-03-09 | St Microelectronics Sa | Support de resonateur acoustique et circuit integre correspondant |
US7868522B2 (en) | 2005-09-09 | 2011-01-11 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Adjusted frequency temperature coefficient resonator |
US7391286B2 (en) * | 2005-10-06 | 2008-06-24 | Avago Wireless Ip Pte Ltd | Impedance matching and parasitic capacitor resonance of FBAR resonators and coupled filters |
US20070085632A1 (en) * | 2005-10-18 | 2007-04-19 | Larson John D Iii | Acoustic galvanic isolator |
US7737807B2 (en) | 2005-10-18 | 2010-06-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators |
US7675390B2 (en) * | 2005-10-18 | 2010-03-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator |
US7425787B2 (en) * | 2005-10-18 | 2008-09-16 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator |
US7423503B2 (en) * | 2005-10-18 | 2008-09-09 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating film acoustically-coupled transformer |
US7463499B2 (en) | 2005-10-31 | 2008-12-09 | Avago Technologies General Ip (Singapore) Pte Ltd. | AC-DC power converter |
WO2007056277A2 (en) * | 2005-11-04 | 2007-05-18 | Cornell Research Foundation, Inc. | Dielectrically transduced single-ended to differential mems filter |
US7561009B2 (en) * | 2005-11-30 | 2009-07-14 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator (FBAR) devices with temperature compensation |
KR100718095B1 (ko) * | 2005-12-19 | 2007-05-16 | 삼성전자주식회사 | 결합 공진 필터 및 그 제작 방법 |
US7612636B2 (en) * | 2006-01-30 | 2009-11-03 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Impedance transforming bulk acoustic wave baluns |
US7746677B2 (en) | 2006-03-09 | 2010-06-29 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | AC-DC converter circuit and power supply |
US7479685B2 (en) | 2006-03-10 | 2009-01-20 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Electronic device on substrate with cavity and mitigated parasitic leakage path |
FR2901708A1 (fr) * | 2006-06-02 | 2007-12-07 | Ela Medical Soc Par Actions Si | Dispositif medical actif tel qu'implant actif ou programmateur pour un tel implant, comprenant des moyens de telemetrie rf |
US7598827B2 (en) * | 2006-06-19 | 2009-10-06 | Maxim Integrated Products | Harmonic termination of power amplifiers using BAW filter output matching circuits |
US7586389B2 (en) * | 2006-06-19 | 2009-09-08 | Maxim Integrated Products, Inc. | Impedance transformation and filter using bulk acoustic wave technology |
FR2905207B1 (fr) * | 2006-08-28 | 2009-01-30 | St Microelectronics Sa | Filtre commutable a resonateurs. |
US7508286B2 (en) * | 2006-09-28 | 2009-03-24 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | HBAR oscillator and method of manufacture |
JP4968900B2 (ja) * | 2006-10-17 | 2012-07-04 | 太陽誘電株式会社 | ラダー型フィルタの製造方法 |
US20080101263A1 (en) * | 2006-10-30 | 2008-05-01 | Skyworks Solutions, Inc. | Single-ended to differential duplexer filter |
JP4401380B2 (ja) * | 2006-11-22 | 2010-01-20 | 富士通メディアデバイス株式会社 | フィルタデバイス |
WO2009025056A1 (ja) * | 2007-08-23 | 2009-02-26 | Fujitsu Limited | デュープレクサ、通信モジュール、および通信装置 |
US20090079520A1 (en) * | 2007-09-20 | 2009-03-26 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustically coupled resonators having resonant transmission minima |
US20090079514A1 (en) * | 2007-09-24 | 2009-03-26 | Tiberiu Jamneala | Hybrid acoustic resonator-based filters |
US7791435B2 (en) * | 2007-09-28 | 2010-09-07 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Single stack coupled resonators having differential output |
US7786826B2 (en) * | 2007-10-12 | 2010-08-31 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Apparatus with acoustically coupled BAW resonators and a method for matching impedances |
US7855618B2 (en) | 2008-04-30 | 2010-12-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator electrical impedance transformers |
US7732977B2 (en) | 2008-04-30 | 2010-06-08 | Avago Technologies Wireless Ip (Singapore) | Transceiver circuit for film bulk acoustic resonator (FBAR) transducers |
JP4871966B2 (ja) * | 2009-01-30 | 2012-02-08 | 太陽誘電株式会社 | 高周波デバイス、フィルタ、デュープレクサ、通信モジュール、通信装置 |
DE102009014068B4 (de) * | 2009-03-20 | 2011-01-13 | Epcos Ag | Kompaktes, hochintegriertes elektrisches Modul mit Verschaltung aus BAW-Filter und Symmetrierschaltung und Herstellungsverfahren |
EP2237416A1 (en) * | 2009-03-30 | 2010-10-06 | Nxp B.V. | Device comprising an electroacoustic balun |
US8198958B1 (en) * | 2009-03-30 | 2012-06-12 | Triquint Semiconductor, Inc. | Power amplifier matching RF system and method using bulk acoustics wave device |
US8248185B2 (en) | 2009-06-24 | 2012-08-21 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic resonator structure comprising a bridge |
US8902023B2 (en) | 2009-06-24 | 2014-12-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator structure having an electrode with a cantilevered portion |
KR101565995B1 (ko) | 2009-07-16 | 2015-11-05 | 삼성전자주식회사 | 듀얼-입력 듀얼-출력의 필터를 이용한 멀티-대역의 라디오 주파수 신호 송수신 시스템 |
KR101628240B1 (ko) | 2009-10-28 | 2016-06-08 | 삼성전자주식회사 | 박막 벌크 음향 공진기를 이용한 발룬 |
US8193877B2 (en) | 2009-11-30 | 2012-06-05 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Duplexer with negative phase shifting circuit |
US9243316B2 (en) | 2010-01-22 | 2016-01-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Method of fabricating piezoelectric material with selected c-axis orientation |
US8796904B2 (en) | 2011-10-31 | 2014-08-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer |
US8576024B2 (en) * | 2010-02-11 | 2013-11-05 | Hollinworth Fund, L.L.C. | Electro-acoustic filter |
JP5519326B2 (ja) * | 2010-02-25 | 2014-06-11 | 太陽誘電株式会社 | フィルタ、デュープレクサ、通信モジュール、通信装置 |
US8792836B2 (en) * | 2010-06-03 | 2014-07-29 | Broadcom Corporation | Front end module with compensating duplexer |
US8655299B2 (en) * | 2010-06-03 | 2014-02-18 | Broadcom Corporation | Saw-less receiver with RF frequency translated BPF |
US20110304412A1 (en) * | 2010-06-10 | 2011-12-15 | Hao Zhang | Acoustic Wave Resonators and Methods of Manufacturing Same |
US8674789B2 (en) * | 2010-07-07 | 2014-03-18 | Wei Pang | Serially connected first and second coupled resonator filters configured to provide at least one feedback capacitor |
CN101958696B (zh) * | 2010-09-27 | 2013-04-17 | 张�浩 | 温度补偿薄膜体波谐振器及加工方法 |
TWI430569B (zh) * | 2010-10-11 | 2014-03-11 | Richwave Technology Corp | 體聲波共振元件與體聲波濾波器與製作體聲波共振元件的方法 |
FI20106063A (fi) | 2010-10-14 | 2012-06-08 | Valtion Teknillinen | Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin |
US8962443B2 (en) | 2011-01-31 | 2015-02-24 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Semiconductor device having an airbridge and method of fabricating the same |
US9148117B2 (en) | 2011-02-28 | 2015-09-29 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Coupled resonator filter comprising a bridge and frame elements |
US9048812B2 (en) | 2011-02-28 | 2015-06-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer |
US9154112B2 (en) | 2011-02-28 | 2015-10-06 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Coupled resonator filter comprising a bridge |
US9203374B2 (en) | 2011-02-28 | 2015-12-01 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator comprising a bridge |
US9083302B2 (en) | 2011-02-28 | 2015-07-14 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator |
US9425764B2 (en) | 2012-10-25 | 2016-08-23 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Accoustic resonator having composite electrodes with integrated lateral features |
US9136818B2 (en) | 2011-02-28 | 2015-09-15 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked acoustic resonator comprising a bridge |
US8575820B2 (en) | 2011-03-29 | 2013-11-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Stacked bulk acoustic resonator |
US9444426B2 (en) | 2012-10-25 | 2016-09-13 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Accoustic resonator having integrated lateral feature and temperature compensation feature |
FR2973970B1 (fr) | 2011-04-07 | 2013-04-12 | Commissariat Energie Atomique | Dispositif utilisant un filtre a base de resonateurs |
DE102011100468B4 (de) | 2011-05-04 | 2013-07-04 | Epcos Ag | Mit akustischen Volumenwellen arbeitendes BAW-Filter, Herstellungsverfahren hierfür und Duplexer |
US8350445B1 (en) | 2011-06-16 | 2013-01-08 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator comprising non-piezoelectric layer and bridge |
KR101853740B1 (ko) | 2011-07-27 | 2018-06-14 | 삼성전자주식회사 | 체적 음향 공진기 및 체적 음향 공진기를 이용한 듀플렉서 |
KR101868988B1 (ko) | 2011-08-05 | 2018-06-20 | 삼성전자주식회사 | 체적 음향 공진기 |
US8922302B2 (en) | 2011-08-24 | 2014-12-30 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator formed on a pedestal |
US8923794B2 (en) * | 2011-11-02 | 2014-12-30 | Triquint Semiconductor, Inc. | Temperature compensation of acoustic resonators in the electrical domain |
KR101919115B1 (ko) | 2012-02-29 | 2018-11-15 | 삼성전자주식회사 | Bawr 을 이용한 필터 |
RU2015104054A (ru) * | 2012-07-09 | 2016-08-27 | Телефонактиеболагет Л М Эрикссон (Пабл) | Выходной каскад приемопередатчика |
US9680521B2 (en) | 2012-07-09 | 2017-06-13 | Telefonaktiebolaget Lm Ericsson (Publ) | Transceiver front-end for blocking transmit or receive frequency signals |
EP2870699B1 (en) * | 2012-07-09 | 2017-09-06 | Telefonaktiebolaget LM Ericsson (publ) | Transceiver front-end |
EP2733855B1 (en) | 2012-11-15 | 2016-07-27 | Telefonaktiebolaget LM Ericsson (publ) | Transceiver front-end |
CN105191156B (zh) | 2013-03-14 | 2017-08-08 | 瑞典爱立信有限公司 | 适于频分双工通信的收发机和用于控制收发机的方法 |
WO2014165441A1 (en) * | 2013-04-01 | 2014-10-09 | Cymatics Laboratories Corp. | Temperature drift compensation of mems resonators |
EP2989724B1 (en) | 2013-04-26 | 2018-08-08 | Telefonaktiebolaget LM Ericsson (publ) | Transceiver arrangement, communication device, method and computer program |
US9871552B2 (en) | 2013-04-30 | 2018-01-16 | Telefonaktiebolaget Lm Ericsson (Publ) | Transceiver arrangement, communication device, method and computer program |
WO2015110149A1 (en) | 2014-01-21 | 2015-07-30 | Telefonaktiebolaget L M Ericsson (Publ) | Transceiver arrangement and communication device |
WO2015137251A1 (ja) * | 2014-03-10 | 2015-09-17 | 積水化学工業株式会社 | 圧電センサ |
WO2015191719A1 (en) * | 2014-06-10 | 2015-12-17 | Massachusetts Institute Of Technology | Unreleased coupled mems resonators and transmission filters |
US10200079B2 (en) | 2014-10-29 | 2019-02-05 | Telefonaktiebolaget Lm Ericsson (Publ) | Transceiver arrangement and communication device |
KR102264255B1 (ko) * | 2014-12-10 | 2021-06-14 | 엘지이노텍 주식회사 | Rf 모듈 |
US9698756B2 (en) | 2014-12-24 | 2017-07-04 | Qorvo Us, Inc. | Acoustic RF resonator parallel capacitance compensation |
US9602076B1 (en) * | 2015-05-19 | 2017-03-21 | Qorvo Us, Inc. | Resonators with balancing capacitor |
US10367471B2 (en) * | 2015-05-21 | 2019-07-30 | Samsung Electro-Mechanics Co., Ltd. | Resonator package and method of manufacturing the same |
JP6415419B2 (ja) * | 2015-12-02 | 2018-10-31 | 太陽誘電株式会社 | 弾性波フィルタ、デュプレクサ、及びモジュール |
US10979022B2 (en) * | 2016-03-11 | 2021-04-13 | Akoustis, Inc. | 5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit |
US11476825B2 (en) * | 2016-03-11 | 2022-10-18 | Akoustis, Inc. | 5.5 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit |
US11418169B2 (en) * | 2016-03-11 | 2022-08-16 | Akoustis, Inc. | 5G n41 2.6 GHz band acoustic wave resonator RF filter circuit |
US10979025B2 (en) * | 2016-03-11 | 2021-04-13 | Akoustis, Inc. | 5G band n79 acoustic wave resonator RF filter circuit |
US10979024B2 (en) * | 2016-03-11 | 2021-04-13 | Akoustis, Inc. | 5.2 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit |
US10979026B2 (en) * | 2016-03-11 | 2021-04-13 | Akoustis, Inc. | 5.5 GHz Wi-fi 5G coexistence acoustic wave resonator RF filter circuit |
US11451213B2 (en) * | 2016-03-11 | 2022-09-20 | Akoustis, Inc. | 5G n79 Wi-Fi acoustic triplexer circuit |
US10985732B2 (en) * | 2016-03-11 | 2021-04-20 | Akoustis, Inc. | 5.6 GHz Wi-Fi acoustic wave resonator RF filter circuit |
US10979023B2 (en) * | 2016-03-11 | 2021-04-13 | Akoustis, Inc. | 5.9 GHz c-V2X and DSRC acoustic wave resonator RF filter circuit |
DE102016107658A1 (de) * | 2016-04-25 | 2017-10-26 | Infineon Technologies Ag | Abstimmbares resonatorelement, filterschaltkreis und verfahren |
US10581156B2 (en) | 2016-05-04 | 2020-03-03 | Qorvo Us, Inc. | Compensation circuit to mitigate antenna-to-antenna coupling |
US10581403B2 (en) | 2016-07-11 | 2020-03-03 | Qorvo Us, Inc. | Device having a titanium-alloyed surface |
US11050412B2 (en) | 2016-09-09 | 2021-06-29 | Qorvo Us, Inc. | Acoustic filter using acoustic coupling |
US10928614B2 (en) | 2017-01-11 | 2021-02-23 | Searete Llc | Diffractive concentrator structures |
CN110178308B (zh) * | 2017-01-30 | 2024-04-26 | 京瓷株式会社 | 弹性波滤波器、分波器以及通信装置 |
US11165412B2 (en) | 2017-01-30 | 2021-11-02 | Qorvo Us, Inc. | Zero-output coupled resonator filter and related radio frequency filter circuit |
US11165413B2 (en) * | 2017-01-30 | 2021-11-02 | Qorvo Us, Inc. | Coupled resonator structure |
US10873318B2 (en) | 2017-06-08 | 2020-12-22 | Qorvo Us, Inc. | Filter circuits having acoustic wave resonators in a transversal configuration |
US10498001B2 (en) | 2017-08-21 | 2019-12-03 | Texas Instruments Incorporated | Launch structures for a hermetically sealed cavity |
US10775422B2 (en) | 2017-09-05 | 2020-09-15 | Texas Instruments Incorporated | Molecular spectroscopy cell with resonant cavity |
US10589986B2 (en) | 2017-09-06 | 2020-03-17 | Texas Instruments Incorporated | Packaging a sealed cavity in an electronic device |
US10131115B1 (en) * | 2017-09-07 | 2018-11-20 | Texas Instruments Incorporated | Hermetically sealed molecular spectroscopy cell with dual wafer bonding |
US10551265B2 (en) | 2017-09-07 | 2020-02-04 | Texas Instruments Incorporated | Pressure sensing using quantum molecular rotational state transitions |
US10424523B2 (en) | 2017-09-07 | 2019-09-24 | Texas Instruments Incorporated | Hermetically sealed molecular spectroscopy cell with buried ground plane |
US10444102B2 (en) | 2017-09-07 | 2019-10-15 | Texas Instruments Incorporated | Pressure measurement based on electromagnetic signal output of a cavity |
US10549986B2 (en) | 2017-09-07 | 2020-02-04 | Texas Instruments Incorporated | Hermetically sealed molecular spectroscopy cell |
US10544039B2 (en) | 2017-09-08 | 2020-01-28 | Texas Instruments Incorporated | Methods for depositing a measured amount of a species in a sealed cavity |
US11894621B2 (en) * | 2017-12-18 | 2024-02-06 | Silicon Laboratories Inc. | Radio-frequency apparatus with multi-band balun with improved performance and associated methods |
CN107979353A (zh) * | 2018-01-08 | 2018-05-01 | 杭州左蓝微电子技术有限公司 | Rf mems滤波器及其制备方法 |
CN108449068A (zh) * | 2018-01-31 | 2018-08-24 | 湖北宙讯科技有限公司 | 双工器 |
US11323089B2 (en) | 2018-06-15 | 2022-05-03 | Resonant Inc. | Filter using piezoelectric film bonded to high resistivity silicon substrate with trap-rich layer |
US11323090B2 (en) | 2018-06-15 | 2022-05-03 | Resonant Inc. | Transversely-excited film bulk acoustic resonator using Y-X-cut lithium niobate for high power applications |
US11152913B2 (en) | 2018-03-28 | 2021-10-19 | Qorvo Us, Inc. | Bulk acoustic wave (BAW) resonator |
US10819309B1 (en) * | 2019-04-05 | 2020-10-27 | Resonant Inc. | Transversely-excited film bulk acoustic resonator package and method |
US11349452B2 (en) | 2018-06-15 | 2022-05-31 | Resonant Inc. | Transversely-excited film bulk acoustic filters with symmetric layout |
US11967945B2 (en) | 2018-06-15 | 2024-04-23 | Murata Manufacturing Co., Ltd. | Transversly-excited film bulk acoustic resonators and filters |
US10911016B2 (en) | 2019-01-08 | 2021-02-02 | Analog Devices, Inc. | Wideband balun |
US11611330B2 (en) * | 2019-01-15 | 2023-03-21 | University Of Florida Research Foundation, Incorporated | Micro-electro-mechanical resonators |
US10938115B2 (en) * | 2019-03-21 | 2021-03-02 | Elwha, Llc | Resonance-frequency diverse metamaterials and metasurfaces |
US11101227B2 (en) | 2019-07-17 | 2021-08-24 | Analog Devices International Unlimited Company | Coupled line structures for wideband applications |
US11146247B2 (en) | 2019-07-25 | 2021-10-12 | Qorvo Us, Inc. | Stacked crystal filter structures |
CN111146327A (zh) * | 2019-12-25 | 2020-05-12 | 诺思(天津)微系统有限责任公司 | 单晶压电结构及其制造方法、单晶压电层叠结构的电子设备 |
CN111146328A (zh) * | 2019-12-31 | 2020-05-12 | 诺思(天津)微系统有限责任公司 | 单晶压电结构及具有其的电子设备 |
US11757430B2 (en) | 2020-01-07 | 2023-09-12 | Qorvo Us, Inc. | Acoustic filter circuit for noise suppression outside resonance frequency |
US11146245B2 (en) | 2020-01-13 | 2021-10-12 | Qorvo Us, Inc. | Mode suppression in acoustic resonators |
US11146246B2 (en) | 2020-01-13 | 2021-10-12 | Qorvo Us, Inc. | Phase shift structures for acoustic resonators |
WO2022061746A1 (zh) * | 2020-09-25 | 2022-03-31 | 京东方科技集团股份有限公司 | 巴伦组件、微波射频器件及天线 |
US11632097B2 (en) | 2020-11-04 | 2023-04-18 | Qorvo Us, Inc. | Coupled resonator filter device |
US11575363B2 (en) | 2021-01-19 | 2023-02-07 | Qorvo Us, Inc. | Hybrid bulk acoustic wave filter |
US11581853B2 (en) * | 2021-01-27 | 2023-02-14 | Avago Technologies International Sales Pte. Limited | Wideband filter for direct connection to differential power amplifier |
CN113783548B (zh) * | 2021-11-08 | 2022-04-01 | 深圳新声半导体有限公司 | 谐振器及滤波器 |
CN115425377B (zh) * | 2022-09-29 | 2023-09-08 | 河南科技大学 | 一种基于环形谐振器加载的双通带平衡滤波器 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3321648A (en) * | 1964-06-04 | 1967-05-23 | Sonus Corp | Piezoelectric filter element |
US3422371A (en) * | 1967-07-24 | 1969-01-14 | Sanders Associates Inc | Thin film piezoelectric oscillator |
US5185589A (en) * | 1991-05-17 | 1993-02-09 | Westinghouse Electric Corp. | Microwave film bulk acoustic resonator and manifolded filter bank |
US5361077A (en) * | 1992-05-29 | 1994-11-01 | Iowa State University Research Foundation, Inc. | Acoustically coupled antenna utilizing an overmoded configuration |
US5864261A (en) * | 1994-05-23 | 1999-01-26 | Iowa State University Research Foundation | Multiple layer acoustical structures for thin-film resonator based circuits and systems |
US5692279A (en) * | 1995-08-17 | 1997-12-02 | Motorola | Method of making a monolithic thin film resonator lattice filter |
US5910756A (en) | 1997-05-21 | 1999-06-08 | Nokia Mobile Phones Limited | Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators |
JP3531522B2 (ja) * | 1999-04-19 | 2004-05-31 | 株式会社村田製作所 | 圧電共振子 |
US6441539B1 (en) * | 1999-11-11 | 2002-08-27 | Murata Manufacturing Co., Ltd. | Piezoelectric resonator |
-
2002
- 2002-01-09 US US10/045,645 patent/US6670866B2/en not_active Expired - Lifetime
-
2003
- 2003-01-03 WO PCT/IB2003/000010 patent/WO2003058809A2/en not_active Application Discontinuation
- 2003-01-03 KR KR1020047010670A patent/KR100901954B1/ko active IP Right Grant
- 2003-01-03 CN CNB038020483A patent/CN100488044C/zh not_active Expired - Fee Related
- 2003-01-03 EP EP03729291A patent/EP1464115B1/en not_active Expired - Lifetime
- 2003-01-03 DE DE60329654T patent/DE60329654D1/de not_active Expired - Lifetime
- 2003-01-03 AT AT03729291T patent/ATE445931T1/de not_active IP Right Cessation
- 2003-01-03 AU AU2003201047A patent/AU2003201047A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1464115A4 (en) | 2005-04-13 |
EP1464115A2 (en) | 2004-10-06 |
EP1464115B1 (en) | 2009-10-14 |
ATE445931T1 (de) | 2009-10-15 |
KR20040079412A (ko) | 2004-09-14 |
WO2003058809A8 (en) | 2004-06-24 |
WO2003058809B1 (en) | 2004-01-29 |
DE60329654D1 (de) | 2009-11-26 |
WO2003058809A2 (en) | 2003-07-17 |
AU2003201047A8 (en) | 2003-07-24 |
CN1695298A (zh) | 2005-11-09 |
AU2003201047A1 (en) | 2003-07-24 |
KR100901954B1 (ko) | 2009-06-10 |
WO2003058809A3 (en) | 2003-11-13 |
US20030128081A1 (en) | 2003-07-10 |
US6670866B2 (en) | 2003-12-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100488044C (zh) | 滤波器和双工器中具有两个压电层作为平衡-不平衡变换器的体声波谐振器 | |
CN100511998C (zh) | 基于耦合baw谐振器的双工器 | |
US5910756A (en) | Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators | |
JP4326063B2 (ja) | 薄膜バルク弾性波装置を利用したモノリシック・フィルタ、および通過帯域レスポンスの形状と幅を制御するための最小受動素子 | |
US6917261B2 (en) | Component operating with bulk acoustic waves, and having asymmetric/symmetrical circuitry | |
US7825747B2 (en) | Thin-film BAW filter, and a method for production of a thin-film BAW filter | |
EP1998444B1 (en) | Bulk acoustic wave device with coupled resonators | |
US7825749B2 (en) | Integrated coupled resonator filter and bulk acoustic wave devices | |
EP1998445A2 (en) | Coupled resonator filter with a filter section | |
US7518410B2 (en) | Duplexer | |
US20020093394A1 (en) | Filter structure and arrangement comprising piezoelectric resonators | |
US7319371B2 (en) | Resonator filter structure having equal resonance frequencies | |
JP2006094457A (ja) | 不平衡−平衡入出力構造のfbarフィルター | |
EP1292026B1 (en) | Filter structure comprising piezoelectric resonators | |
WO2004066495A1 (en) | Circuit arrangement providing impedance transformation | |
WO2004066494A1 (en) | Resonator filter structure with improved balance |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE)PRIVATE Free format text: FORMER OWNER: NOKIA OY; APPLICANT Effective date: 20080613 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20080613 Address after: Singapore, Singapore Applicant after: WAVICS, Inc. Co-applicant after: INFINEON TECHNOLOGIES AG Address before: Espoo, Finland Applicant before: NOKIA Corp. Co-applicant before: INFINEON TECHNOLOGIES AG |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20081219 Address after: Singapore Singapore Applicant after: WAVICS, Inc. Address before: Singapore, Singapore Applicant before: WAVICS, Inc. Co-applicant before: INFINEON TECHNOLOGIES AG |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) CORPORAT Free format text: FORMER OWNER: AVAGO TECHNOLOGIES WIRELESS IP Effective date: 20130509 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20130509 Address after: Singapore Singapore Patentee after: Avago Technologies General IP (Singapore) Pte. Ltd. Address before: Singapore Singapore Patentee before: WAVICS, Inc. |
|
TR01 | Transfer of patent right |
Effective date of registration: 20181011 Address after: Singapore Singapore Patentee after: Avago Technologies General IP (Singapore) Pte. Ltd. Address before: Singapore Singapore Patentee before: Avago Technologies General IP (Singapore) Pte. Ltd. |
|
TR01 | Transfer of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090513 Termination date: 20220103 |
|
CF01 | Termination of patent right due to non-payment of annual fee |