CN100440438C - 结晶设备、结晶方法及调相装置 - Google Patents

结晶设备、结晶方法及调相装置 Download PDF

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Publication number
CN100440438C
CN100440438C CNB2005100685194A CN200510068519A CN100440438C CN 100440438 C CN100440438 C CN 100440438C CN B2005100685194 A CNB2005100685194 A CN B2005100685194A CN 200510068519 A CN200510068519 A CN 200510068519A CN 100440438 C CN100440438 C CN 100440438C
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China
Prior art keywords
area
unit
phase modulation
light distribution
light intensity
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Expired - Fee Related
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CNB2005100685194A
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English (en)
Chinese (zh)
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CN1734720A (zh
Inventor
加藤智也
松村正清
谷口幸夫
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Liguid Crystal Advanced Technology Development Center K K
Advanced LCD Technologies Development Center Co Ltd
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Liguid Crystal Advanced Technology Development Center K K
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Publication of CN1734720A publication Critical patent/CN1734720A/zh
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  • Recrystallisation Techniques (AREA)
  • Thin Film Transistor (AREA)
CNB2005100685194A 2004-08-03 2005-04-28 结晶设备、结晶方法及调相装置 Expired - Fee Related CN100440438C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP226668/2004 2004-08-03
JP226669/2004 2004-08-03
JP2004226668A JP4711166B2 (ja) 2004-08-03 2004-08-03 結晶化装置、および結晶化方法

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CNA2008101679029A Division CN101404251A (zh) 2004-08-03 2005-04-28 结晶设备、结晶方法及调相装置

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CN1734720A CN1734720A (zh) 2006-02-15
CN100440438C true CN100440438C (zh) 2008-12-03

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CNA2008101679029A Pending CN101404251A (zh) 2004-08-03 2005-04-28 结晶设备、结晶方法及调相装置
CNB2005100685194A Expired - Fee Related CN100440438C (zh) 2004-08-03 2005-04-28 结晶设备、结晶方法及调相装置

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CN (2) CN101404251A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI577840B (zh) * 2014-04-29 2017-04-11 中美矽晶製品股份有限公司 多晶矽鑄錠與來自其的矽晶圓

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8780629B2 (en) * 2010-01-15 2014-07-15 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and driving method thereof
TWI578443B (zh) 2015-09-22 2017-04-11 友達光電股份有限公司 多晶矽薄膜電晶體元件及其製作方法
WO2019195080A1 (en) * 2018-04-02 2019-10-10 Stealth Biotherapeutics Corp. Crystalline dipeptides useful in the synthesis of elamipretide
CN108919499B (zh) * 2018-07-05 2020-07-10 鲁东大学 一种产生位置和强度独立可控多个聚焦光斑的方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5477554A (en) * 1990-09-14 1995-12-19 Canon Kabushiki Kaisha Phase shift device and laser apparatus utilizing the same
JP2000306859A (ja) * 1999-04-19 2000-11-02 Sony Corp 半導体薄膜の結晶化方法及びレーザ照射装置
US6177302B1 (en) * 1990-11-09 2001-01-23 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a thin film transistor using multiple sputtering chambers
CN1476059A (zh) * 2002-06-28 2004-02-18 ��ʽ����Һ���ȶ˼����������� 晶化设备、用于晶化设备的光学部件、晶化方法、薄膜晶体管和显示器
CN1477677A (zh) * 2002-07-24 2004-02-25 ��ʽ����Һ���ȶ˼����������� 结晶装置、结晶方法、薄膜晶体管以及显示装置
CN1495847A (zh) * 2002-09-20 2004-05-12 ��ʽ����Һ���ȶ˼����������� 结晶装置、结晶方法及所使用的相移掩模和滤波器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2749945B2 (ja) * 1990-04-10 1998-05-13 キヤノン株式会社 固相結晶成長法
WO2003092061A1 (en) * 2002-04-23 2003-11-06 Advanced Lcd Technologies Development Center Co., Ltd. Crystallization device and crystallization method, and phase shift mask
JP2003318127A (ja) * 2002-04-23 2003-11-07 Advanced Lcd Technologies Development Center Co Ltd 結晶化半導体膜の製造装置および製造方法ならびに位相シフトマスク
JP4358570B2 (ja) * 2002-07-24 2009-11-04 株式会社 液晶先端技術開発センター 結晶化装置及び結晶化方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5477554A (en) * 1990-09-14 1995-12-19 Canon Kabushiki Kaisha Phase shift device and laser apparatus utilizing the same
US6177302B1 (en) * 1990-11-09 2001-01-23 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a thin film transistor using multiple sputtering chambers
JP2000306859A (ja) * 1999-04-19 2000-11-02 Sony Corp 半導体薄膜の結晶化方法及びレーザ照射装置
CN1476059A (zh) * 2002-06-28 2004-02-18 ��ʽ����Һ���ȶ˼����������� 晶化设备、用于晶化设备的光学部件、晶化方法、薄膜晶体管和显示器
CN1477677A (zh) * 2002-07-24 2004-02-25 ��ʽ����Һ���ȶ˼����������� 结晶装置、结晶方法、薄膜晶体管以及显示装置
CN1495847A (zh) * 2002-09-20 2004-05-12 ��ʽ����Һ���ȶ˼����������� 结晶装置、结晶方法及所使用的相移掩模和滤波器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI577840B (zh) * 2014-04-29 2017-04-11 中美矽晶製品股份有限公司 多晶矽鑄錠與來自其的矽晶圓
US10029919B2 (en) 2014-04-29 2018-07-24 Sino-American Silicon Products Inc. Multicrystalline silicon brick and silicon wafer therefrom

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Publication number Publication date
JP2006049480A (ja) 2006-02-16
CN1734720A (zh) 2006-02-15
JP4711166B2 (ja) 2011-06-29
CN101404251A (zh) 2009-04-08

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