CN100440438C - 结晶设备、结晶方法及调相装置 - Google Patents
结晶设备、结晶方法及调相装置 Download PDFInfo
- Publication number
- CN100440438C CN100440438C CNB2005100685194A CN200510068519A CN100440438C CN 100440438 C CN100440438 C CN 100440438C CN B2005100685194 A CNB2005100685194 A CN B2005100685194A CN 200510068519 A CN200510068519 A CN 200510068519A CN 100440438 C CN100440438 C CN 100440438C
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- phase modulation
- light distribution
- light intensity
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- Recrystallisation Techniques (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP226668/2004 | 2004-08-03 | ||
JP226669/2004 | 2004-08-03 | ||
JP2004226668A JP4711166B2 (ja) | 2004-08-03 | 2004-08-03 | 結晶化装置、および結晶化方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2008101679029A Division CN101404251A (zh) | 2004-08-03 | 2005-04-28 | 结晶设备、结晶方法及调相装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1734720A CN1734720A (zh) | 2006-02-15 |
CN100440438C true CN100440438C (zh) | 2008-12-03 |
Family
ID=36027709
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2008101679029A Pending CN101404251A (zh) | 2004-08-03 | 2005-04-28 | 结晶设备、结晶方法及调相装置 |
CNB2005100685194A Expired - Fee Related CN100440438C (zh) | 2004-08-03 | 2005-04-28 | 结晶设备、结晶方法及调相装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2008101679029A Pending CN101404251A (zh) | 2004-08-03 | 2005-04-28 | 结晶设备、结晶方法及调相装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4711166B2 (ja) |
CN (2) | CN101404251A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI577840B (zh) * | 2014-04-29 | 2017-04-11 | 中美矽晶製品股份有限公司 | 多晶矽鑄錠與來自其的矽晶圓 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8780629B2 (en) * | 2010-01-15 | 2014-07-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
TWI578443B (zh) | 2015-09-22 | 2017-04-11 | 友達光電股份有限公司 | 多晶矽薄膜電晶體元件及其製作方法 |
WO2019195080A1 (en) * | 2018-04-02 | 2019-10-10 | Stealth Biotherapeutics Corp. | Crystalline dipeptides useful in the synthesis of elamipretide |
CN108919499B (zh) * | 2018-07-05 | 2020-07-10 | 鲁东大学 | 一种产生位置和强度独立可控多个聚焦光斑的方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5477554A (en) * | 1990-09-14 | 1995-12-19 | Canon Kabushiki Kaisha | Phase shift device and laser apparatus utilizing the same |
JP2000306859A (ja) * | 1999-04-19 | 2000-11-02 | Sony Corp | 半導体薄膜の結晶化方法及びレーザ照射装置 |
US6177302B1 (en) * | 1990-11-09 | 2001-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a thin film transistor using multiple sputtering chambers |
CN1476059A (zh) * | 2002-06-28 | 2004-02-18 | ��ʽ����Һ���ȶ˼����������� | 晶化设备、用于晶化设备的光学部件、晶化方法、薄膜晶体管和显示器 |
CN1477677A (zh) * | 2002-07-24 | 2004-02-25 | ��ʽ����Һ���ȶ˼����������� | 结晶装置、结晶方法、薄膜晶体管以及显示装置 |
CN1495847A (zh) * | 2002-09-20 | 2004-05-12 | ��ʽ����Һ���ȶ˼����������� | 结晶装置、结晶方法及所使用的相移掩模和滤波器 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2749945B2 (ja) * | 1990-04-10 | 1998-05-13 | キヤノン株式会社 | 固相結晶成長法 |
WO2003092061A1 (en) * | 2002-04-23 | 2003-11-06 | Advanced Lcd Technologies Development Center Co., Ltd. | Crystallization device and crystallization method, and phase shift mask |
JP2003318127A (ja) * | 2002-04-23 | 2003-11-07 | Advanced Lcd Technologies Development Center Co Ltd | 結晶化半導体膜の製造装置および製造方法ならびに位相シフトマスク |
JP4358570B2 (ja) * | 2002-07-24 | 2009-11-04 | 株式会社 液晶先端技術開発センター | 結晶化装置及び結晶化方法 |
-
2004
- 2004-08-03 JP JP2004226668A patent/JP4711166B2/ja not_active Expired - Fee Related
-
2005
- 2005-04-28 CN CNA2008101679029A patent/CN101404251A/zh active Pending
- 2005-04-28 CN CNB2005100685194A patent/CN100440438C/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5477554A (en) * | 1990-09-14 | 1995-12-19 | Canon Kabushiki Kaisha | Phase shift device and laser apparatus utilizing the same |
US6177302B1 (en) * | 1990-11-09 | 2001-01-23 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a thin film transistor using multiple sputtering chambers |
JP2000306859A (ja) * | 1999-04-19 | 2000-11-02 | Sony Corp | 半導体薄膜の結晶化方法及びレーザ照射装置 |
CN1476059A (zh) * | 2002-06-28 | 2004-02-18 | ��ʽ����Һ���ȶ˼����������� | 晶化设备、用于晶化设备的光学部件、晶化方法、薄膜晶体管和显示器 |
CN1477677A (zh) * | 2002-07-24 | 2004-02-25 | ��ʽ����Һ���ȶ˼����������� | 结晶装置、结晶方法、薄膜晶体管以及显示装置 |
CN1495847A (zh) * | 2002-09-20 | 2004-05-12 | ��ʽ����Һ���ȶ˼����������� | 结晶装置、结晶方法及所使用的相移掩模和滤波器 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI577840B (zh) * | 2014-04-29 | 2017-04-11 | 中美矽晶製品股份有限公司 | 多晶矽鑄錠與來自其的矽晶圓 |
US10029919B2 (en) | 2014-04-29 | 2018-07-24 | Sino-American Silicon Products Inc. | Multicrystalline silicon brick and silicon wafer therefrom |
Also Published As
Publication number | Publication date |
---|---|
JP2006049480A (ja) | 2006-02-16 |
CN1734720A (zh) | 2006-02-15 |
JP4711166B2 (ja) | 2011-06-29 |
CN101404251A (zh) | 2009-04-08 |
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Granted publication date: 20081203 |