CN100407397C - 静电吸附电极、基板处理装置和静电吸附电极的制造方法 - Google Patents

静电吸附电极、基板处理装置和静电吸附电极的制造方法 Download PDF

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Publication number
CN100407397C
CN100407397C CN2006100879052A CN200610087905A CN100407397C CN 100407397 C CN100407397 C CN 100407397C CN 2006100879052 A CN2006100879052 A CN 2006100879052A CN 200610087905 A CN200610087905 A CN 200610087905A CN 100407397 C CN100407397 C CN 100407397C
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China
Prior art keywords
insulating barrier
film
electrode
spraying
synthetic resin
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Expired - Fee Related
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CN2006100879052A
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Chinese (zh)
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CN1897243A (zh
Inventor
林圣�
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication of CN1897243A publication Critical patent/CN1897243A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
CN2006100879052A 2005-07-14 2006-06-06 静电吸附电极、基板处理装置和静电吸附电极的制造方法 Expired - Fee Related CN100407397C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005205716A JP4542959B2 (ja) 2005-07-14 2005-07-14 静電吸着電極、基板処理装置および静電吸着電極の製造方法
JP2005205716 2005-07-14

Publications (2)

Publication Number Publication Date
CN1897243A CN1897243A (zh) 2007-01-17
CN100407397C true CN100407397C (zh) 2008-07-30

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ID=37609704

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2006100879052A Expired - Fee Related CN100407397C (zh) 2005-07-14 2006-06-06 静电吸附电极、基板处理装置和静电吸附电极的制造方法

Country Status (4)

Country Link
JP (1) JP4542959B2 (ko)
KR (1) KR20070009448A (ko)
CN (1) CN100407397C (ko)
TW (1) TW200710269A (ko)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008035395A1 (fr) * 2006-09-19 2008-03-27 Creative Technology Corporation Structure d'alimentation d'un mandrin électrostatique, procédé de fabrication et procédé de regénération de la structure d'alimentation du mandrin électrostatique
JP2008235735A (ja) * 2007-03-23 2008-10-02 Sumitomo Precision Prod Co Ltd 静電チャック及びこれを備えたプラズマ処理装置
KR101286724B1 (ko) * 2011-10-17 2013-07-18 (주)제니스월드 분할 엠보싱 구조 정전척
CN104241181B (zh) * 2013-06-08 2018-05-29 中微半导体设备(上海)有限公司 静电吸盘的制造方法，静电吸盘及等离子体处理装置
JP6230477B2 (ja) * 2014-04-25 2017-11-15 株式会社ディスコ 切削装置
JP6560150B2 (ja) * 2016-03-28 2019-08-14 日本碍子株式会社 ウエハ載置装置
JP7038497B2 (ja) * 2017-07-07 2022-03-18 東京エレクトロン株式会社 静電チャックの製造方法
JP7224096B2 (ja) * 2017-07-13 2023-02-17 東京エレクトロン株式会社 プラズマ処理装置用部品の溶射方法及びプラズマ処理装置用部品
JP7401266B2 (ja) * 2018-12-27 2023-12-19 東京エレクトロン株式会社 基板載置台、及び、基板処理装置
TWI813840B (zh) * 2018-12-27 2023-09-01 日商巴川製紙所股份有限公司 靜電夾頭裝置
WO2020172785A1 (en) 2019-02-26 2020-09-03 Yangtze Memory Technologies Co., Ltd. Method and device for wafer taping
JP7324677B2 (ja) 2019-10-02 2023-08-10 株式会社巴川製紙所 静電チャック装置およびその製造方法
CN111455355A (zh) * 2020-04-13 2020-07-28 艾华(无锡)半导体科技有限公司 一种静电辅助外延生长的方法
EP4213183A1 (en) * 2020-09-08 2023-07-19 NHK Spring Co., Ltd. Stage and method for manufacturing same
WO2024014528A1 (ja) * 2022-07-15 2024-01-18 大日本印刷株式会社 電子デバイスの製造方法、導電性フィルム、第１積層体及び第２積層体

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6023405A (en) * 1994-02-22 2000-02-08 Applied Materials, Inc. Electrostatic chuck with improved erosion resistance
JP2003163146A (ja) * 1999-06-09 2003-06-06 Ibiden Co Ltd 半導体製造・検査装置用セラミック基板
JP2004031479A (ja) * 2002-06-24 2004-01-29 Taiheiyo Cement Corp 静電チャック
JP2004241668A (ja) * 2003-02-07 2004-08-26 Taiheiyo Cement Corp 静電チャック及びその製造方法
CN1581460A (zh) * 2003-08-08 2005-02-16 株式会社巴川制纸所 静电卡盘装置用电极片、静电卡盘装置及吸附方法
CN1612314A (zh) * 2003-10-31 2005-05-04 东京毅力科创株式会社 静电吸附装置、等离子体处理装置及等离子体处理方法
CN2708497Y (zh) * 2003-04-03 2005-07-06 应用材料公司 用于静电吸盘的防护装置
CN1638084A (zh) * 2003-11-14 2005-07-13 爱德牌工程有限公司 静电卡盘、基片支持、夹具和电极结构及其制造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07335732A (ja) * 1994-06-14 1995-12-22 Tokyo Electron Ltd 静電チャック、これを用いたプラズマ処理装置及びこの製造方法
JP2001284328A (ja) * 2000-03-31 2001-10-12 Taiheiyo Cement Corp セラミック部品
JP4272373B2 (ja) * 2001-12-11 2009-06-03 太平洋セメント株式会社 静電チャック
JP4326874B2 (ja) * 2003-08-07 2009-09-09 太平洋セメント株式会社 静電チャック及びその製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6023405A (en) * 1994-02-22 2000-02-08 Applied Materials, Inc. Electrostatic chuck with improved erosion resistance
JP2003163146A (ja) * 1999-06-09 2003-06-06 Ibiden Co Ltd 半導体製造・検査装置用セラミック基板
JP2004031479A (ja) * 2002-06-24 2004-01-29 Taiheiyo Cement Corp 静電チャック
JP2004241668A (ja) * 2003-02-07 2004-08-26 Taiheiyo Cement Corp 静電チャック及びその製造方法
CN2708497Y (zh) * 2003-04-03 2005-07-06 应用材料公司 用于静电吸盘的防护装置
CN1581460A (zh) * 2003-08-08 2005-02-16 株式会社巴川制纸所 静电卡盘装置用电极片、静电卡盘装置及吸附方法
CN1612314A (zh) * 2003-10-31 2005-05-04 东京毅力科创株式会社 静电吸附装置、等离子体处理装置及等离子体处理方法
CN1638084A (zh) * 2003-11-14 2005-07-13 爱德牌工程有限公司 静电卡盘、基片支持、夹具和电极结构及其制造方法

Also Published As

Publication number Publication date
KR20070009448A (ko) 2007-01-18
JP2007027315A (ja) 2007-02-01
TW200710269A (en) 2007-03-16
JP4542959B2 (ja) 2010-09-15
CN1897243A (zh) 2007-01-17

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Granted publication date: 20080730

Termination date: 20120606