CN100403507C - 切削槽的测量方法 - Google Patents

切削槽的测量方法 Download PDF

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Publication number
CN100403507C
CN100403507C CNB2005100038391A CN200510003839A CN100403507C CN 100403507 C CN100403507 C CN 100403507C CN B2005100038391 A CNB2005100038391 A CN B2005100038391A CN 200510003839 A CN200510003839 A CN 200510003839A CN 100403507 C CN100403507 C CN 100403507C
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cutting
cut
cutting slot
slot
wafer
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Chinese (zh)
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CN1638083A (zh
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山本直子
根岸克治
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Disco Corp
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Disco Corp
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CNB2005100038391A 2004-01-08 2005-01-07 切削槽的测量方法 Active CN100403507C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP002766/2004 2004-01-08
JP2004002766A JP4377702B2 (ja) 2004-01-08 2004-01-08 切削溝の計測方法

Publications (2)

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CN1638083A CN1638083A (zh) 2005-07-13
CN100403507C true CN100403507C (zh) 2008-07-16

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107186891A (zh) * 2016-03-15 2017-09-22 株式会社迪思科 被加工物的切削方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4640731B2 (ja) * 2005-10-18 2011-03-02 株式会社ディスコ 切削装置オペレーションシステム
JP4767702B2 (ja) * 2006-01-23 2011-09-07 株式会社ディスコ ウエーハの分割方法
JP5457660B2 (ja) * 2008-11-07 2014-04-02 アピックヤマダ株式会社 切断方法及び切断装置
JP5762005B2 (ja) * 2011-01-13 2015-08-12 株式会社ディスコ 加工位置調製方法及び加工装置
JP6037705B2 (ja) * 2012-08-06 2016-12-07 株式会社ディスコ 被加工物の加工方法
JP6120644B2 (ja) * 2013-04-01 2017-04-26 株式会社ディスコ 切削溝の検出方法
JP6061776B2 (ja) * 2013-05-16 2017-01-18 株式会社ディスコ 切削溝の検出方法
JP6228044B2 (ja) 2014-03-10 2017-11-08 株式会社ディスコ 板状物の加工方法
JP6282194B2 (ja) * 2014-07-30 2018-02-21 株式会社ディスコ ウェーハの加工方法
JP6498073B2 (ja) * 2015-08-14 2019-04-10 株式会社ディスコ 切削ブレードの位置ずれ検出方法
JP6607639B2 (ja) * 2015-12-24 2019-11-20 株式会社ディスコ ウェーハの加工方法
JP6629086B2 (ja) * 2016-02-08 2020-01-15 株式会社ディスコ 積層ウェーハの分割方法
JP7313253B2 (ja) 2019-10-10 2023-07-24 株式会社ディスコ ウエーハの加工方法
JP2023163591A (ja) 2022-04-28 2023-11-10 株式会社ディスコ 被加工物の検査方法、及び検査装置、加工方法、加工装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5919351A (ja) * 1982-07-23 1984-01-31 Hitachi Ltd 半導体レ−ザヘキ開装置
US20020104422A1 (en) * 2001-02-07 2002-08-08 Katsuharu Negishi Dual-cutting method devoid of useless strokes
CN1420529A (zh) * 2001-11-21 2003-05-28 株式会社迪思科 切削机
JP2003334751A (ja) * 2003-06-27 2003-11-25 Disco Abrasive Syst Ltd 切削方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5919351A (ja) * 1982-07-23 1984-01-31 Hitachi Ltd 半導体レ−ザヘキ開装置
US20020104422A1 (en) * 2001-02-07 2002-08-08 Katsuharu Negishi Dual-cutting method devoid of useless strokes
CN1420529A (zh) * 2001-11-21 2003-05-28 株式会社迪思科 切削机
JP2003334751A (ja) * 2003-06-27 2003-11-25 Disco Abrasive Syst Ltd 切削方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107186891A (zh) * 2016-03-15 2017-09-22 株式会社迪思科 被加工物的切削方法
CN107186891B (zh) * 2016-03-15 2021-04-23 株式会社迪思科 被加工物的切削方法

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Publication number Publication date
JP2005197492A (ja) 2005-07-21
CN1638083A (zh) 2005-07-13
JP4377702B2 (ja) 2009-12-02

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