CN100403507C - 切削槽的测量方法 - Google Patents
切削槽的测量方法 Download PDFInfo
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- CN100403507C CN100403507C CNB2005100038391A CN200510003839A CN100403507C CN 100403507 C CN100403507 C CN 100403507C CN B2005100038391 A CNB2005100038391 A CN B2005100038391A CN 200510003839 A CN200510003839 A CN 200510003839A CN 100403507 C CN100403507 C CN 100403507C
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- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000005520 cutting process Methods 0.000 title claims description 271
- 238000005259 measurement Methods 0.000 claims abstract description 26
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- 238000003384 imaging method Methods 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 description 81
- 235000012431 wafers Nutrition 0.000 description 81
- 230000008093 supporting effect Effects 0.000 description 24
- 238000006073 displacement reaction Methods 0.000 description 22
- 238000001179 sorption measurement Methods 0.000 description 18
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- 238000012545 processing Methods 0.000 description 12
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- 238000010586 diagram Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000012360 testing method Methods 0.000 description 5
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- 238000012423 maintenance Methods 0.000 description 1
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP002766/2004 | 2004-01-08 | ||
JP2004002766A JP4377702B2 (ja) | 2004-01-08 | 2004-01-08 | 切削溝の計測方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1638083A CN1638083A (zh) | 2005-07-13 |
CN100403507C true CN100403507C (zh) | 2008-07-16 |
Family
ID=34817860
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100038391A Active CN100403507C (zh) | 2004-01-08 | 2005-01-07 | 切削槽的测量方法 |
Country Status (2)
Country | Link |
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JP (1) | JP4377702B2 (ja) |
CN (1) | CN100403507C (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107186891A (zh) * | 2016-03-15 | 2017-09-22 | 株式会社迪思科 | 被加工物的切削方法 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4640731B2 (ja) * | 2005-10-18 | 2011-03-02 | 株式会社ディスコ | 切削装置オペレーションシステム |
JP4767702B2 (ja) * | 2006-01-23 | 2011-09-07 | 株式会社ディスコ | ウエーハの分割方法 |
JP5457660B2 (ja) * | 2008-11-07 | 2014-04-02 | アピックヤマダ株式会社 | 切断方法及び切断装置 |
JP5762005B2 (ja) * | 2011-01-13 | 2015-08-12 | 株式会社ディスコ | 加工位置調製方法及び加工装置 |
JP6037705B2 (ja) * | 2012-08-06 | 2016-12-07 | 株式会社ディスコ | 被加工物の加工方法 |
JP6120644B2 (ja) * | 2013-04-01 | 2017-04-26 | 株式会社ディスコ | 切削溝の検出方法 |
JP6061776B2 (ja) * | 2013-05-16 | 2017-01-18 | 株式会社ディスコ | 切削溝の検出方法 |
JP6228044B2 (ja) | 2014-03-10 | 2017-11-08 | 株式会社ディスコ | 板状物の加工方法 |
JP6282194B2 (ja) * | 2014-07-30 | 2018-02-21 | 株式会社ディスコ | ウェーハの加工方法 |
JP6498073B2 (ja) * | 2015-08-14 | 2019-04-10 | 株式会社ディスコ | 切削ブレードの位置ずれ検出方法 |
JP6607639B2 (ja) * | 2015-12-24 | 2019-11-20 | 株式会社ディスコ | ウェーハの加工方法 |
JP6629086B2 (ja) * | 2016-02-08 | 2020-01-15 | 株式会社ディスコ | 積層ウェーハの分割方法 |
JP7313253B2 (ja) | 2019-10-10 | 2023-07-24 | 株式会社ディスコ | ウエーハの加工方法 |
JP2023163591A (ja) | 2022-04-28 | 2023-11-10 | 株式会社ディスコ | 被加工物の検査方法、及び検査装置、加工方法、加工装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5919351A (ja) * | 1982-07-23 | 1984-01-31 | Hitachi Ltd | 半導体レ−ザヘキ開装置 |
US20020104422A1 (en) * | 2001-02-07 | 2002-08-08 | Katsuharu Negishi | Dual-cutting method devoid of useless strokes |
CN1420529A (zh) * | 2001-11-21 | 2003-05-28 | 株式会社迪思科 | 切削机 |
JP2003334751A (ja) * | 2003-06-27 | 2003-11-25 | Disco Abrasive Syst Ltd | 切削方法 |
-
2004
- 2004-01-08 JP JP2004002766A patent/JP4377702B2/ja not_active Expired - Lifetime
-
2005
- 2005-01-07 CN CNB2005100038391A patent/CN100403507C/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5919351A (ja) * | 1982-07-23 | 1984-01-31 | Hitachi Ltd | 半導体レ−ザヘキ開装置 |
US20020104422A1 (en) * | 2001-02-07 | 2002-08-08 | Katsuharu Negishi | Dual-cutting method devoid of useless strokes |
CN1420529A (zh) * | 2001-11-21 | 2003-05-28 | 株式会社迪思科 | 切削机 |
JP2003334751A (ja) * | 2003-06-27 | 2003-11-25 | Disco Abrasive Syst Ltd | 切削方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107186891A (zh) * | 2016-03-15 | 2017-09-22 | 株式会社迪思科 | 被加工物的切削方法 |
CN107186891B (zh) * | 2016-03-15 | 2021-04-23 | 株式会社迪思科 | 被加工物的切削方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2005197492A (ja) | 2005-07-21 |
CN1638083A (zh) | 2005-07-13 |
JP4377702B2 (ja) | 2009-12-02 |
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