CN100392349C - 膜厚测定方法和装置 - Google Patents
膜厚测定方法和装置 Download PDFInfo
- Publication number
- CN100392349C CN100392349C CNB2004101007540A CN200410100754A CN100392349C CN 100392349 C CN100392349 C CN 100392349C CN B2004101007540 A CNB2004101007540 A CN B2004101007540A CN 200410100754 A CN200410100754 A CN 200410100754A CN 100392349 C CN100392349 C CN 100392349C
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- spectral reflectance
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/20—Electrodes used for obtaining electrical discharge
- C01B2201/22—Constructional details of the electrodes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/20—Electrodes used for obtaining electrical discharge
- C01B2201/24—Composition of the electrodes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/60—Feed streams for electrical dischargers
- C01B2201/62—Air
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/60—Feed streams for electrical dischargers
- C01B2201/64—Oxygen
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004060867A JP4216209B2 (ja) | 2004-03-04 | 2004-03-04 | 膜厚測定方法および装置 |
JP2004060867 | 2004-03-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1664493A CN1664493A (zh) | 2005-09-07 |
CN100392349C true CN100392349C (zh) | 2008-06-04 |
Family
ID=35030208
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004101007540A Expired - Fee Related CN100392349C (zh) | 2004-03-04 | 2004-12-13 | 膜厚测定方法和装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4216209B2 (zh) |
KR (1) | KR100624542B1 (zh) |
CN (1) | CN100392349C (zh) |
TW (1) | TWI275772B (zh) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4831814B2 (ja) * | 2006-02-23 | 2011-12-07 | 三菱重工業株式会社 | 透明導電膜評価装置及び透明導電膜の評価方法 |
KR100833798B1 (ko) * | 2006-10-31 | 2008-05-30 | 한국표준과학연구원 | 게이트 절연막의 두께 측정방법 |
TWI386617B (zh) * | 2007-12-31 | 2013-02-21 | Ind Tech Res Inst | 反射式膜厚量測方法 |
KR100988454B1 (ko) * | 2008-01-31 | 2010-10-18 | 에스엔유 프리시젼 주식회사 | 두께 측정방법 |
KR101010189B1 (ko) * | 2008-06-30 | 2011-01-21 | 에스엔유 프리시젼 주식회사 | 두께 또는 표면형상 측정방법 |
WO2010013325A1 (ja) | 2008-07-30 | 2010-02-04 | 株式会社ニレコ | 分光測光装置 |
JP5281335B2 (ja) * | 2008-08-21 | 2013-09-04 | 三菱電機株式会社 | 膜厚測定装置及び膜厚測定方法 |
KR101107507B1 (ko) * | 2009-03-23 | 2012-01-31 | 에스엔유 프리시젼 주식회사 | 반사도분포곡선의 모델링방법 및 이를 이용하는 두께 측정방법, 두께 측정 반사계 |
JP5410806B2 (ja) * | 2009-03-27 | 2014-02-05 | 浜松ホトニクス株式会社 | 膜厚測定装置及び測定方法 |
JP5294938B2 (ja) * | 2009-03-27 | 2013-09-18 | Hoya株式会社 | 膜厚測定方法およびガラス光学素子の製造方法 |
CN101893432B (zh) * | 2009-05-21 | 2014-11-26 | 昆山善思光电科技有限公司 | 无损探伤测厚仪 |
WO2011045967A1 (ja) * | 2009-10-13 | 2011-04-21 | 浜松ホトニクス株式会社 | 膜厚測定装置および膜厚測定方法 |
JP2012063321A (ja) * | 2010-09-17 | 2012-03-29 | Hamamatsu Photonics Kk | 反射率測定装置、反射率測定方法、膜厚測定装置及び膜厚測定方法 |
KR101150943B1 (ko) * | 2011-09-07 | 2012-05-29 | (주)엘립소테크놀러지 | 텍스처가 형성된 시료의 막 두께 측정방법 |
JP5660026B2 (ja) | 2011-12-28 | 2015-01-28 | 信越半導体株式会社 | 膜厚分布測定方法 |
JP5189711B1 (ja) * | 2012-02-15 | 2013-04-24 | 株式会社シンクロン | 光学式膜厚計測装置及び光学式膜厚計測装置を用いた薄膜形成装置 |
CN103575223B (zh) * | 2012-08-09 | 2016-09-21 | 北京智朗芯光科技有限公司 | 利用反射光谱测量硅基太阳能电池增透膜的方法 |
CN103575703B (zh) * | 2012-08-09 | 2016-03-09 | 中国科学院微电子研究所 | 利用反射光谱测量单晶硅基太阳能表面增透膜的方法 |
JP6145342B2 (ja) * | 2013-07-12 | 2017-06-07 | 株式会社荏原製作所 | 膜厚測定装置、膜厚測定方法、および膜厚測定装置を備えた研磨装置 |
KR102401092B1 (ko) * | 2015-11-11 | 2022-05-20 | 엘지디스플레이 주식회사 | 비 반사 필름의 검사 장비 및 이를 이용한 검사 방법 |
JP6285597B1 (ja) * | 2017-06-05 | 2018-02-28 | 大塚電子株式会社 | 光学測定装置および光学測定方法 |
WO2019087848A1 (ja) * | 2017-11-01 | 2019-05-09 | コニカミノルタ株式会社 | 膜厚測定方法、膜厚測定システム、光反射フィルムの製造方法及び光反射フィルムの製造システム |
CN108180846B (zh) * | 2017-11-30 | 2020-11-17 | 广州兴森快捷电路科技有限公司 | 有机保焊膜的工艺控制方法及膜厚获取方法 |
JP6956673B2 (ja) * | 2018-04-09 | 2021-11-02 | 三菱電機株式会社 | 膜厚測定装置 |
CN111879709B (zh) * | 2020-07-15 | 2023-05-30 | 中国科学院空天信息创新研究院 | 湖泊水体光谱反射率检验方法及装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06249620A (ja) * | 1993-02-23 | 1994-09-09 | Dainippon Screen Mfg Co Ltd | 膜厚測定方法 |
JPH07280520A (ja) * | 1994-04-11 | 1995-10-27 | Toray Ind Inc | 薄膜の膜厚測定方法および測定装置ならびに光学フィルターの製造方法ならびに高分子フィルムの製造方法 |
US5564830A (en) * | 1993-06-03 | 1996-10-15 | Fraunhofer Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Method and arrangement for determining the layer-thickness and the substrate temperature during coating |
JP2003114107A (ja) * | 2001-10-04 | 2003-04-18 | Omron Corp | 膜厚測定装置 |
JP2003287408A (ja) * | 2002-03-28 | 2003-10-10 | Shin Meiwa Ind Co Ltd | 光学式膜厚モニタ装置及び膜厚モニタ方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3000303B2 (ja) * | 1991-03-29 | 2000-01-17 | アルバック成膜株式会社 | 真空蒸着装置に於ける光学定数と膜厚の測定方法及び測定装置 |
-
2004
- 2004-03-04 JP JP2004060867A patent/JP4216209B2/ja not_active Expired - Fee Related
- 2004-11-30 TW TW093136948A patent/TWI275772B/zh not_active IP Right Cessation
- 2004-12-13 CN CNB2004101007540A patent/CN100392349C/zh not_active Expired - Fee Related
-
2005
- 2005-02-15 KR KR1020050012395A patent/KR100624542B1/ko not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06249620A (ja) * | 1993-02-23 | 1994-09-09 | Dainippon Screen Mfg Co Ltd | 膜厚測定方法 |
US5564830A (en) * | 1993-06-03 | 1996-10-15 | Fraunhofer Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Method and arrangement for determining the layer-thickness and the substrate temperature during coating |
JPH07280520A (ja) * | 1994-04-11 | 1995-10-27 | Toray Ind Inc | 薄膜の膜厚測定方法および測定装置ならびに光学フィルターの製造方法ならびに高分子フィルムの製造方法 |
JP2003114107A (ja) * | 2001-10-04 | 2003-04-18 | Omron Corp | 膜厚測定装置 |
JP2003287408A (ja) * | 2002-03-28 | 2003-10-10 | Shin Meiwa Ind Co Ltd | 光学式膜厚モニタ装置及び膜厚モニタ方法 |
Also Published As
Publication number | Publication date |
---|---|
KR100624542B1 (ko) | 2006-09-19 |
TW200532164A (en) | 2005-10-01 |
JP4216209B2 (ja) | 2009-01-28 |
TWI275772B (en) | 2007-03-11 |
CN1664493A (zh) | 2005-09-07 |
KR20060041959A (ko) | 2006-05-12 |
JP2005249602A (ja) | 2005-09-15 |
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Owner name: DAINIPPON SCREEN MFG. CO., LTD. Free format text: FORMER NAME: DAINIPPON MESH PLATE MFR. CO., LTD. Owner name: SCREEN GROUP CO., LTD. Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD. |
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Address after: Kyoto Japan Patentee after: Skilling Group Address before: Kyoto Japan Patentee before: DAINIPPON SCREEN MFG Co.,Ltd. Address after: Kyoto Japan Patentee after: DAINIPPON SCREEN MFG Co.,Ltd. Address before: Kyoto Japan Patentee before: Dainippon Screen Mfg. Co.,Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
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Granted publication date: 20080604 Termination date: 20181213 |