CN100387525C - 制备大尺寸高均匀CVD ZnS材料的设备及其工艺 - Google Patents
制备大尺寸高均匀CVD ZnS材料的设备及其工艺 Download PDFInfo
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- CN100387525C CN100387525C CNB2004101025125A CN200410102512A CN100387525C CN 100387525 C CN100387525 C CN 100387525C CN B2004101025125 A CNB2004101025125 A CN B2004101025125A CN 200410102512 A CN200410102512 A CN 200410102512A CN 100387525 C CN100387525 C CN 100387525C
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CNB2004101025125A CN100387525C (zh) | 2004-12-24 | 2004-12-24 | 制备大尺寸高均匀CVD ZnS材料的设备及其工艺 |
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CNB2004101025125A CN100387525C (zh) | 2004-12-24 | 2004-12-24 | 制备大尺寸高均匀CVD ZnS材料的设备及其工艺 |
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CN1796286A CN1796286A (zh) | 2006-07-05 |
CN100387525C true CN100387525C (zh) | 2008-05-14 |
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Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100410177C (zh) * | 2006-10-25 | 2008-08-13 | 国家纳米技术与工程研究院 | 一种利用高压流体磨制备硫化锌纳米晶体颗粒的方法 |
CN101760725B (zh) * | 2008-12-25 | 2011-09-07 | 北京有色金属研究总院 | 一种高光学质量硫化锌头罩的制备方法 |
CN101759161B (zh) * | 2008-12-25 | 2012-06-20 | 北京有色金属研究总院 | 一种高光学质量硒化锌的制备方法 |
CN101956157B (zh) * | 2009-07-21 | 2014-04-30 | 上海欧菲尔光电技术有限公司 | 大口径ZnS红外窗口的镀膜方法 |
CN102583502A (zh) * | 2012-02-25 | 2012-07-18 | 复旦大学 | 基于化学气相沉积法制备形貌可控的纳米铜硫化合物的方法 |
CN103910379B (zh) * | 2012-12-31 | 2016-06-29 | 国家纳米科学中心 | 一种硫化锌纳米材料及其制备方法 |
CN103774117B (zh) * | 2014-01-27 | 2016-08-17 | 张福昌 | 一种化学气相沉积设备的反应系统及沉积设备 |
US10662529B2 (en) * | 2016-01-05 | 2020-05-26 | Applied Materials, Inc. | Cooled gas feed block with baffle and nozzle for HDP-CVD |
CN109250749A (zh) * | 2017-07-14 | 2019-01-22 | 清远先导材料有限公司 | 硫化锌的生产方法 |
CN109207956B (zh) * | 2018-08-30 | 2020-10-20 | 有研国晶辉新材料有限公司 | 制备cvd红外光学材料的设备及工艺 |
CN113321236A (zh) * | 2020-07-31 | 2021-08-31 | 上海交通大学 | 一种利用废旧锌锰电池锌皮制备硫化锌超细粉的方法 |
CN115491654B (zh) * | 2022-08-29 | 2024-01-16 | 江苏布拉维光学科技有限公司 | 一种制备硒化锌硫化锌叠层光学材料的方法 |
CN115465840B (zh) * | 2022-09-30 | 2024-01-23 | 先导薄膜材料(广东)有限公司 | 一种高纯金属硫化物及其制备方法和应用 |
CN115961349A (zh) * | 2022-12-29 | 2023-04-14 | 安徽光智科技有限公司 | 一种高均匀性硫化锌多晶红外材料的生长方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4978577A (en) * | 1989-04-12 | 1990-12-18 | Cvd Incorporated | Method for preparing laminates of ZnSe and ZnS |
JPH05310423A (ja) * | 1992-05-11 | 1993-11-22 | Nisshin Steel Co Ltd | 粒径が制御されたZnS結晶の作製方法 |
JPH06272047A (ja) * | 1993-03-16 | 1994-09-27 | Mitsubishi Cable Ind Ltd | 被覆粉体の製造方法及びその装置 |
US5476549A (en) * | 1995-01-24 | 1995-12-19 | Cvd, Inc. | Process for an improved laminate of ZnSe and ZnS |
US6221482B1 (en) * | 1999-04-07 | 2001-04-24 | Cvd Inc. | Low stress, water-clear zinc sulfide |
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2004
- 2004-12-24 CN CNB2004101025125A patent/CN100387525C/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4978577A (en) * | 1989-04-12 | 1990-12-18 | Cvd Incorporated | Method for preparing laminates of ZnSe and ZnS |
JPH05310423A (ja) * | 1992-05-11 | 1993-11-22 | Nisshin Steel Co Ltd | 粒径が制御されたZnS結晶の作製方法 |
JPH06272047A (ja) * | 1993-03-16 | 1994-09-27 | Mitsubishi Cable Ind Ltd | 被覆粉体の製造方法及びその装置 |
US5476549A (en) * | 1995-01-24 | 1995-12-19 | Cvd, Inc. | Process for an improved laminate of ZnSe and ZnS |
US6221482B1 (en) * | 1999-04-07 | 2001-04-24 | Cvd Inc. | Low stress, water-clear zinc sulfide |
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CN1796286A (zh) | 2006-07-05 |
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