CN100383594C - 微振荡元件 - Google Patents

微振荡元件 Download PDF

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Publication number
CN100383594C
CN100383594C CNB2005101250857A CN200510125085A CN100383594C CN 100383594 C CN100383594 C CN 100383594C CN B2005101250857 A CNB2005101250857 A CN B2005101250857A CN 200510125085 A CN200510125085 A CN 200510125085A CN 100383594 C CN100383594 C CN 100383594C
Authority
CN
China
Prior art keywords
electrode
teeth
comb
electrode teeth
oscillation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2005101250857A
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English (en)
Chinese (zh)
Other versions
CN1782779A (zh
Inventor
高马悟觉
壶井修
曾根田弘光
上田知史
佐胁一平
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Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of CN1782779A publication Critical patent/CN1782779A/zh
Application granted granted Critical
Publication of CN100383594C publication Critical patent/CN100383594C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00142—Bridges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0154—Torsion bars
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CNB2005101250857A 2004-12-02 2005-11-18 微振荡元件 Expired - Fee Related CN100383594C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004349793A JP4138736B2 (ja) 2004-12-02 2004-12-02 マイクロ揺動素子
JP2004349793 2004-12-02

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN2008100833221A Division CN101241228B (zh) 2004-12-02 2005-11-18 微振荡元件及微振荡元件阵列

Publications (2)

Publication Number Publication Date
CN1782779A CN1782779A (zh) 2006-06-07
CN100383594C true CN100383594C (zh) 2008-04-23

Family

ID=36573416

Family Applications (2)

Application Number Title Priority Date Filing Date
CNB2005101250857A Expired - Fee Related CN100383594C (zh) 2004-12-02 2005-11-18 微振荡元件
CN2008100833221A Expired - Fee Related CN101241228B (zh) 2004-12-02 2005-11-18 微振荡元件及微振荡元件阵列

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN2008100833221A Expired - Fee Related CN101241228B (zh) 2004-12-02 2005-11-18 微振荡元件及微振荡元件阵列

Country Status (5)

Country Link
US (2) US20060119216A1 (https=)
JP (1) JP4138736B2 (https=)
KR (2) KR100811703B1 (https=)
CN (2) CN100383594C (https=)
TW (1) TWI286611B (https=)

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JP4138736B2 (ja) * 2004-12-02 2008-08-27 富士通株式会社 マイクロ揺動素子
JP4365308B2 (ja) * 2004-12-02 2009-11-18 富士通株式会社 マイクロ揺動素子
JP4477659B2 (ja) * 2007-06-29 2010-06-09 富士通株式会社 マイクロ揺動素子およびマイクロ揺動素子アレイ
EP2216288A4 (en) 2007-10-31 2013-07-03 Fujitsu Ltd MICROMOVABLE ELEMENT AND MICROMANUAL ELEMENT ARRAY
JP2009113128A (ja) * 2007-11-02 2009-05-28 Fujitsu Ltd マイクロ揺動素子およびマイクロ揺動素子製造方法
JP5223381B2 (ja) 2008-03-04 2013-06-26 富士通株式会社 マイクロ可動素子、光スイッチング装置、およびマイクロ可動素子製造方法
JP2009258631A (ja) * 2008-03-26 2009-11-05 Fujitsu Ltd 電極およびミラー駆動装置
DE102008001058A1 (de) * 2008-04-08 2009-10-15 Robert Bosch Gmbh Mikromechanische Elektrodenstruktur, entsprechendes Herstellungsverfahren und Mikroaktuatorvorrichtung
JP5056633B2 (ja) * 2008-07-14 2012-10-24 富士通株式会社 マイクロ揺動素子、マイクロ揺動素子アレイ、および光スイッチング装置
JP5029551B2 (ja) * 2008-09-18 2012-09-19 富士通株式会社 マイクロ揺動素子、マイクロ揺動素子アレイ、および光スイッチング装置
DE102008043796B4 (de) * 2008-11-17 2023-12-21 Robert Bosch Gmbh Drehratensensor
JP5444746B2 (ja) 2009-02-13 2014-03-19 富士通株式会社 マイクロ可動素子および光干渉計
DE102009026507A1 (de) * 2009-05-27 2010-12-02 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
DE102009028924A1 (de) * 2009-08-27 2011-03-03 Robert Bosch Gmbh Kapazitiver Sensor und Aktor
JP2011180534A (ja) * 2010-03-03 2011-09-15 Furukawa Electric Co Ltd:The Ｍｅｍｓ素子、可動式ミラー、および光スイッチ装置
JP5560806B2 (ja) 2010-03-19 2014-07-30 セイコーエプソン株式会社 ジャイロ素子、ジャイロセンサー、および電子機器
DE102013225364A1 (de) * 2013-12-10 2015-06-11 Robert Bosch Gmbh Kammantrieb mit einem verschwenkbaren Spiegelelement
CN105712288B (zh) 2014-12-02 2017-10-27 无锡华润上华半导体有限公司 Mems扭转式静电驱动器的制作方法
US10523134B2 (en) * 2015-03-12 2019-12-31 Mems Drive, Inc. Comb drive with non-parallel overlapping comb fingers
CN107188108B (zh) * 2017-05-23 2023-07-21 深迪半导体(绍兴)有限公司 一种mems器件及其防吸附方法
US10895713B2 (en) * 2018-10-18 2021-01-19 Microsoft Technology Licensing, Llc Actuator frame for scanning mirror
DE102019210020A1 (de) 2019-07-08 2021-01-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mems-aktuator-element und mems-aktuator-array mit einer mehrzahl von mems-aktuator-elementen

Citations (6)

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JPH09219423A (ja) * 1996-02-13 1997-08-19 Kokusai Electric Co Ltd マイクロパッケージ構造
JPH10190007A (ja) * 1996-12-25 1998-07-21 Mitsubishi Materials Corp 半導体慣性センサの製造方法
JPH10270714A (ja) * 1997-03-26 1998-10-09 Mitsubishi Materials Corp 半導体慣性センサの製造方法
US6287885B1 (en) * 1998-05-08 2001-09-11 Denso Corporation Method for manufacturing semiconductor dynamic quantity sensor
US6449406B1 (en) * 1999-05-28 2002-09-10 Omm, Inc. Micromachined optomechanical switching devices
US6671078B2 (en) * 2001-05-23 2003-12-30 Axsun Technologies, Inc. Electrostatic zipper actuator optical beam switching system and method of operation

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JP4138736B2 (ja) 2004-12-02 2008-08-27 富士通株式会社 マイクロ揺動素子
JP4573676B2 (ja) * 2005-03-11 2010-11-04 富士通株式会社 櫛歯電極対形成方法
JP4598795B2 (ja) * 2007-03-30 2010-12-15 富士通株式会社 マイクロ揺動素子およびマイクロ揺動素子アレイ
JP4477659B2 (ja) * 2007-06-29 2010-06-09 富士通株式会社 マイクロ揺動素子およびマイクロ揺動素子アレイ
JP2009113128A (ja) * 2007-11-02 2009-05-28 Fujitsu Ltd マイクロ揺動素子およびマイクロ揺動素子製造方法
JP5223381B2 (ja) * 2008-03-04 2013-06-26 富士通株式会社 マイクロ可動素子、光スイッチング装置、およびマイクロ可動素子製造方法
JP5056633B2 (ja) * 2008-07-14 2012-10-24 富士通株式会社 マイクロ揺動素子、マイクロ揺動素子アレイ、および光スイッチング装置
JP5029551B2 (ja) * 2008-09-18 2012-09-19 富士通株式会社 マイクロ揺動素子、マイクロ揺動素子アレイ、および光スイッチング装置
JP5176146B2 (ja) * 2008-10-08 2013-04-03 富士通株式会社 マイクロ可動素子および光スイッチング装置
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Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09219423A (ja) * 1996-02-13 1997-08-19 Kokusai Electric Co Ltd マイクロパッケージ構造
JPH10190007A (ja) * 1996-12-25 1998-07-21 Mitsubishi Materials Corp 半導体慣性センサの製造方法
JPH10270714A (ja) * 1997-03-26 1998-10-09 Mitsubishi Materials Corp 半導体慣性センサの製造方法
US6287885B1 (en) * 1998-05-08 2001-09-11 Denso Corporation Method for manufacturing semiconductor dynamic quantity sensor
US6449406B1 (en) * 1999-05-28 2002-09-10 Omm, Inc. Micromachined optomechanical switching devices
US6671078B2 (en) * 2001-05-23 2003-12-30 Axsun Technologies, Inc. Electrostatic zipper actuator optical beam switching system and method of operation

Also Published As

Publication number Publication date
KR20070114671A (ko) 2007-12-04
US20100231087A1 (en) 2010-09-16
CN101241228B (zh) 2011-07-20
KR20060061885A (ko) 2006-06-08
TW200628835A (en) 2006-08-16
CN101241228A (zh) 2008-08-13
CN1782779A (zh) 2006-06-07
US20060119216A1 (en) 2006-06-08
JP4138736B2 (ja) 2008-08-27
KR100808999B1 (ko) 2008-03-05
US8049394B2 (en) 2011-11-01
KR100811703B1 (ko) 2008-03-11
TWI286611B (en) 2007-09-11
JP2006162663A (ja) 2006-06-22

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