CN100376330C - 狭缝喷嘴及使用该狭缝喷嘴的处理液供给装置 - Google Patents

狭缝喷嘴及使用该狭缝喷嘴的处理液供给装置 Download PDF

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Publication number
CN100376330C
CN100376330C CNB2004100329674A CN200410032967A CN100376330C CN 100376330 C CN100376330 C CN 100376330C CN B2004100329674 A CNB2004100329674 A CN B2004100329674A CN 200410032967 A CN200410032967 A CN 200410032967A CN 100376330 C CN100376330 C CN 100376330C
Authority
CN
China
Prior art keywords
treatment fluid
nozzle
gap nozzle
halfbody
slit nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2004100329674A
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English (en)
Chinese (zh)
Other versions
CN1541779A (zh
Inventor
岛井太
河田茂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of CN1541779A publication Critical patent/CN1541779A/zh
Application granted granted Critical
Publication of CN100376330C publication Critical patent/CN100376330C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • E—FIXED CONSTRUCTIONS
    • E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
    • E02B—HYDRAULIC ENGINEERING
    • E02B3/00—Engineering works in connection with control or use of streams, rivers, coasts, or other marine sites; Sealings or joints for engineering works in general
    • E02B3/04—Structures or apparatus for, or methods of, protecting banks, coasts, or harbours
    • E02B3/12—Revetment of banks, dams, watercourses, or the like, e.g. the sea-floor
    • E02B3/129—Polyhedrons, tetrapods or similar bodies, whether or not threaded on strings
    • E—FIXED CONSTRUCTIONS
    • E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
    • E02B—HYDRAULIC ENGINEERING
    • E02B2201/00—Devices, constructional details or methods of hydraulic engineering not otherwise provided for
    • E—FIXED CONSTRUCTIONS
    • E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
    • E02B—HYDRAULIC ENGINEERING
    • E02B3/00—Engineering works in connection with control or use of streams, rivers, coasts, or other marine sites; Sealings or joints for engineering works in general
    • E02B3/04—Structures or apparatus for, or methods of, protecting banks, coasts, or harbours
    • E02B3/06—Moles; Piers; Quays; Quay walls; Groynes; Breakwaters ; Wave dissipating walls; Quay equipment

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Coating Apparatus (AREA)
  • Ocean & Marine Engineering (AREA)
  • Environmental & Geological Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nozzles (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
CNB2004100329674A 2003-04-14 2004-04-14 狭缝喷嘴及使用该狭缝喷嘴的处理液供给装置 Expired - Fee Related CN100376330C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP108952/2003 2003-04-14
JP2003108952A JP3838990B2 (ja) 2003-04-14 2003-04-14 スリットノズル及びそのスリットノズルを用いた処理液供給装置
JP108952/03 2003-04-14

Publications (2)

Publication Number Publication Date
CN1541779A CN1541779A (zh) 2004-11-03
CN100376330C true CN100376330C (zh) 2008-03-26

Family

ID=33470265

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004100329674A Expired - Fee Related CN100376330C (zh) 2003-04-14 2004-04-14 狭缝喷嘴及使用该狭缝喷嘴的处理液供给装置

Country Status (4)

Country Link
JP (1) JP3838990B2 (ja)
KR (1) KR101070041B1 (ja)
CN (1) CN100376330C (ja)
TW (1) TWI286673B (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4619139B2 (ja) * 2005-01-19 2011-01-26 東京応化工業株式会社 スリットノズル
KR100782539B1 (ko) * 2006-06-15 2007-12-06 세메스 주식회사 슬릿 노즐 및 이를 포함하는 약액 도포 장치
CN101495241B (zh) * 2006-06-16 2012-09-19 曼泰克株式会社 喷嘴装置、使用该喷嘴装置的药液的供给方法
KR100898570B1 (ko) * 2006-12-28 2009-05-19 주식회사 나래나노텍 개선된 노즐 디스펜서
CN103464315B (zh) * 2013-08-28 2015-12-09 清华大学深圳研究生院 一种能形成均匀水幕的工艺喷嘴
CN104635437A (zh) * 2013-11-07 2015-05-20 沈阳芯源微电子设备有限公司 幕状显影喷嘴
US10766041B2 (en) * 2014-12-24 2020-09-08 Illinois Tool Works Inc. Flow diverter in fluid application device

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021907A (ja) * 1988-06-09 1990-01-08 Nec Kyushu Ltd インライン型半導体熱処理装置
JPH10174922A (ja) * 1996-12-19 1998-06-30 Konica Corp 塗布装置及び塗布方法
JPH11197576A (ja) * 1998-01-08 1999-07-27 Konica Corp 塗布装置及び塗布方法
JPH11319865A (ja) * 1998-05-18 1999-11-24 Sumitomo Heavy Ind Ltd 生物ろ過設備
JP2000102759A (ja) * 1998-07-31 2000-04-11 Toray Ind Inc 塗布方法および塗布装置並びにプラズマディスプレイおよびディスプレイ用部材の製造方法および製造装置
JP2002086041A (ja) * 2000-09-12 2002-03-26 Nitto Denko Corp エクストリュージョン用ダイ
JP2002219399A (ja) * 2001-01-29 2002-08-06 Nec Corp ダイコータ
JP2002336763A (ja) * 2001-05-15 2002-11-26 Sony Corp 塗布装置及び塗布方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3530361B2 (ja) * 1997-11-12 2004-05-24 大日本スクリーン製造株式会社 現像装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021907A (ja) * 1988-06-09 1990-01-08 Nec Kyushu Ltd インライン型半導体熱処理装置
JPH10174922A (ja) * 1996-12-19 1998-06-30 Konica Corp 塗布装置及び塗布方法
JPH11197576A (ja) * 1998-01-08 1999-07-27 Konica Corp 塗布装置及び塗布方法
JPH11319865A (ja) * 1998-05-18 1999-11-24 Sumitomo Heavy Ind Ltd 生物ろ過設備
JP2000102759A (ja) * 1998-07-31 2000-04-11 Toray Ind Inc 塗布方法および塗布装置並びにプラズマディスプレイおよびディスプレイ用部材の製造方法および製造装置
JP2002086041A (ja) * 2000-09-12 2002-03-26 Nitto Denko Corp エクストリュージョン用ダイ
JP2002219399A (ja) * 2001-01-29 2002-08-06 Nec Corp ダイコータ
JP2002336763A (ja) * 2001-05-15 2002-11-26 Sony Corp 塗布装置及び塗布方法

Also Published As

Publication number Publication date
JP3838990B2 (ja) 2006-10-25
KR101070041B1 (ko) 2011-10-04
JP2004313873A (ja) 2004-11-11
TWI286673B (en) 2007-09-11
TW200506541A (en) 2005-02-16
CN1541779A (zh) 2004-11-03
KR20040089562A (ko) 2004-10-21

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080326

Termination date: 20170414

CF01 Termination of patent right due to non-payment of annual fee