CN100376330C - Slit nozzle and treating liquid supplying device with such nozzle - Google Patents
Slit nozzle and treating liquid supplying device with such nozzle Download PDFInfo
- Publication number
- CN100376330C CN100376330C CNB2004100329674A CN200410032967A CN100376330C CN 100376330 C CN100376330 C CN 100376330C CN B2004100329674 A CNB2004100329674 A CN B2004100329674A CN 200410032967 A CN200410032967 A CN 200410032967A CN 100376330 C CN100376330 C CN 100376330C
- Authority
- CN
- China
- Prior art keywords
- treatment fluid
- nozzle
- gap nozzle
- halfbody
- slit nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007788 liquid Substances 0.000 title 1
- 239000000463 material Substances 0.000 claims abstract description 24
- 239000011347 resin Substances 0.000 claims abstract description 8
- 229920005989 resin Polymers 0.000 claims abstract description 8
- 239000007769 metal material Substances 0.000 claims abstract description 7
- 239000012530 fluid Substances 0.000 claims description 46
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 239000007779 soft material Substances 0.000 abstract description 3
- 230000004087 circulation Effects 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 description 12
- 238000000576 coating method Methods 0.000 description 12
- 239000000758 substrate Substances 0.000 description 7
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 239000004734 Polyphenylene sulfide Substances 0.000 description 3
- 229920000069 polyphenylene sulfide Polymers 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 239000011122 softwood Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- E—FIXED CONSTRUCTIONS
- E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
- E02B—HYDRAULIC ENGINEERING
- E02B3/00—Engineering works in connection with control or use of streams, rivers, coasts, or other marine sites; Sealings or joints for engineering works in general
- E02B3/04—Structures or apparatus for, or methods of, protecting banks, coasts, or harbours
- E02B3/12—Revetment of banks, dams, watercourses, or the like, e.g. the sea-floor
- E02B3/129—Polyhedrons, tetrapods or similar bodies, whether or not threaded on strings
-
- E—FIXED CONSTRUCTIONS
- E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
- E02B—HYDRAULIC ENGINEERING
- E02B2201/00—Devices, constructional details or methods of hydraulic engineering not otherwise provided for
-
- E—FIXED CONSTRUCTIONS
- E02—HYDRAULIC ENGINEERING; FOUNDATIONS; SOIL SHIFTING
- E02B—HYDRAULIC ENGINEERING
- E02B3/00—Engineering works in connection with control or use of streams, rivers, coasts, or other marine sites; Sealings or joints for engineering works in general
- E02B3/04—Structures or apparatus for, or methods of, protecting banks, coasts, or harbours
- E02B3/06—Moles; Piers; Quays; Quay walls; Groynes; Breakwaters ; Wave dissipating walls; Quay equipment
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Coating Apparatus (AREA)
- Ocean & Marine Engineering (AREA)
- Environmental & Geological Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nozzles (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
A slit nozzle and a treating solution supplying device using the slit nozzle are provided, to allow a slit nozzle to be processed simply and to obtain a slit nozzle free from a capillary phenomenon. The slit nozzle(1) for supplying a treating solution to the surface of a matter to be treated with a certain width, comprises left and right hemi-bodies(2, 3) whose one body(2) is made of a hard material (metallic material) and whose the other body(3) is made of a soft material (resin material). The treating solution supplying device comprises the slit nozzle on the circulation path(8) of a temperature-controlled treating solution. Preferably the treating solution supplying device comprises a plurality of slit nozzles.
Description
[technical field]
The present invention relates to the different gap nozzle of left and right sides halfbody material and use the treatment fluid feedway of this gap nozzle.
[background technology]
In the past, the crowd knows that nozzle itself offers the coating fluid ejiction opening of Fixed width degree, by to object being treated relatively moving nozzle and on the object being treated surface by the gap nozzle of setting width coating coating fluid.If use the gap nozzle of the coating fluid ejiction opening that this setting width is arranged, then do not waste coating fluid and be coated with effectively.
Yet along with the maximization of object being treated, its service time of gap nozzle and quantity delivered are restricted.For example, treatment fluid from supply begin to supply with to finish the used time produce when oversize handle inhomogeneous.This also causes same phenomenon when supplying with treatment fluid than heavy back.
Therefore, when having proposed to supply with treatment fluid, uses the dispense tip that two left and right sides half member merge (promptly, gap nozzle), be coated with the method that is coated with 2 coating fluids on the object than heavy back.(Patent Document 1)
In addition, proposed not produce and handled uneven and form the thickness contour shape that sets for the middle body of not only filming but also in the close limit of end is filmed in qualification, be coated with the head mould head (promptly by what the parts that use the different left and right sides halfbody of two slit widths merged, gap nozzle), laterally back spreading area difference is moved in the coating position of coating fluid, and the result can form horizontal thickness profile.(Patent Document 2)
Proposed to make the coating fluid of spreader ejection not overlapping on applied parts at coating coating fluid on the applied parts simultaneously by the coating die head of two left and right sides half member merging again.(Patent Document 3)
[Patent Document 1]
Specially permit No. 3236703 (the 4th page the-the 6th page, Fig. 9)
[Patent Document 2]
Te Kaiping 2000-102759 communique (the 5th page the-the 10th page, Fig. 4)
[Patent Document 3]
Te Kaiping 2001-907 communique (the 4th page the-the 8th page, Fig. 2)
Yet, because of the ejiction opening and the ejection width of the gap nozzle of reality ejection treatment fluid are quite accurate, so gap nozzle use hard stainless steel or this metal material of SUS are processed into accurately.This processing consumes considerable time and labor, and price is very high.
In addition,, but also only form the atomic little gap of a part, cause capillarity infiltration treatment fluid by this gap at the face that merges because widen the width of gap nozzle even improve machining accuracy without end.After solidifying, this atomic little treatment fluid becomes particle etc.
[summary of the invention]
The present invention is the research of finishing in view of the above-mentioned problems, and its purpose is to provide can process gap nozzle simply and do not cause the gap nozzle of capillarity and use the treatment fluid feedway of this gap nozzle.
For solve above-mentioned problem gap nozzle of the present invention adopt with about halfbody merge and constitute, wherein Yi Bian material is a metal material, and the material of another side is a resin material.
Like this, use hard material (metal material) by gap nozzle material on one side, the material of another side is used soft material (resin material), because soft material was close to hard material when both merged, so do not form the similar gap that causes capillarity, owing to do not need picture machining accuracy in the past, therefore also can shorten the needed time of processing simultaneously.
In addition, have the treatment fluid feedway of the gap nozzle that a plurality of above-mentioned left and right sides unlike materials constitute, can shorten the service time of treatment fluid, even thick filming simultaneously also can be finished at short notice by use.
In addition,, the service time of treatment fluid can be shortened on the closed circuit of the treatment fluid of temperature adjustment, the temperature of setting can be at short notice treatment fluid be adjusted to simultaneously by the gap nozzle that above-mentioned left and right sides unlike material constitutes is set.
[simple declaration of accompanying drawing]
Fig. 1 (A) reaches (B) side view and the amplification sectional view of expression gap nozzle of the present invention.
Fig. 2 (A) reaches (B) expression and uses a plurality of gap nozzles of the present invention to supply with the sketch of treatment fluids.
Fig. 3 represents to act on the direct temperature adjustment sketch of gap nozzle of the present invention.
Fig. 4 represents to use the indirect temperature adjustment sketch of gap nozzle.
It is 23 ℃ the direct temperature adjustment and the Temperature Distribution of the circular form pipe arrangement of indirect temperature adjustment that Fig. 5 represents to adopt design temperature.
It is 20 ℃ the direct temperature adjustment and the Temperature Distribution of the circular form pipe arrangement of indirect temperature adjustment that Fig. 6 represents to adopt design temperature.
[symbol description]
1,1 ' ... the left halfbody of gap nozzle, 2... titanium system, the right halfbody of 3...PPS system, 4... recess, 5... plane, 6... treatment fluid, 7... substrate, 8... circular form pipe arrangement, 9... storage tank, 10... pump, 11... thermoregulator, 12... valve.
[invention embodiment]
Embodiment of the present invention below are described with reference to the accompanying drawings.Here, Fig. 1 (A), (B) are the side view and the amplification sectional views of gap nozzle of the present invention, Fig. 2 (A), (B) are to use a plurality of gap nozzles of the present invention, supply with the schematic drawing of treatment fluid, and Fig. 3 is the sketch with direct temperature adjustment of gap nozzle of the present invention and thermoregulator.Fig. 4 is the sketch of the indirect temperature adjustment of past device.
As shown in Figure 1, gap nozzle 1 is that the right halfbody 3 of left halfbody 2 and PPS (polyphenylene sulfide) system of titanium system merges and constitutes, and right halfbody 3 is provided with recess 4 that forms manifold (lateral flow path) usefulness and the plane 5 that forms the vertical stream more shallow than these recess 4 bottom surfaces.Moreover left halfbody 2 also can be stainless steel.
Like this, be metal system, make right halfbody 3 be resin system,, also do not cause capillarity so do not produce the gap because the metal system of hard is close on soft resin system non-resistance ground by making left halfbody 2.In addition, because the alignment surface that the round C of Fig. 1 represents part can driving fit, therefore also can make left halfbody 2 be resin system, make right halfbody 3 for metal be, be side formation manifold at metal.
In the past, gap nozzle is because of accuracy that must be strict, so the metal material of the harder stainless steel of use material etc.The parts of left and right sides halfbody are merged this formation of formation.This occasion then will sandwich pad or form concavo-convex on any one side, the left and right sides of halfbody or both sides for the opening that forms slit-shaped.But, the part that the figure C of Fig. 1 represents, even no matter if be the many high planes that form of metal accuracy each other, it is laterally long because of the width of nozzle, ooze out because of capillarity so produce small gap, treatment fluid, but adopt formation of the present invention just to eliminate this unfavorable phenomenon from this alignment surface.
Shown in Fig. 2 (A), use two gap nozzles 1,1 ' time, just the service time that need not prolong treatment fluid 6 to large substrate 7 can solve.That is, if side by side supply with treatment fluid 6, even then substrate its service time that maximizes is also identical from the diverse location of substrate 7 by identical thickness.For example, be 2 places by the supply starting point that makes the above large substrate of 1100 * 1300mm, can adopt the time identical to supply with treatment fluid 6 with the small-sized substrate of 550 * 650mm
Again, shown in Fig. 2 (B), use two gap nozzles 1,1 ', when the same position of substrate 7 begins to supply with treatment fluid 6, supply with a large amount of treatment fluids 6 with the identical time.That is, compare, if use a plurality of gap nozzle multilayers overlapping, even then thick film need not prolong service time and just can finish with thick being coated with of gap nozzle of initial usefulness.
Fig. 3 represents to have the circular form pipe arrangement 8 of gap nozzle 1.Storage tank 9, pump 10, thermoregulator 11 and valve 12 are set in the way of circular form pipe arrangement 8.And Fig. 4 represents to have a direction flow model pipe arrangement 13 of gap nozzle 1.Storage tank 9, pump 10, thermoregulator 11 and valve 12 are set in the way of this direction flow model pipe arrangement 13.
Fig. 3 represents that 11 temperature adjustments of serviceability temperature adjuster are to the treatment fluid 6 of the design temperature situation through 8 circulations of circular form pipe arrangement.Treatment fluid 6 circulates through circular form pipe arrangement 8 after thermoregulator 11 temperature adjustments to 23 ℃, and when turning back to thermoregulator 11, even temperature is more some than 23 ℃ low, because temperature adjustment to 23 ℃ circulates again, so shown in Fig. 5 and table 1, circular form pipe arrangement 8 integral body reach 23 ℃ at short notice.So-called directly temperature adjustment that Here it is.
Fig. 4 represents that 11 temperature adjustments of serviceability temperature adjuster supply with the situation of gap nozzles 1 by a direction flow model pipe arrangement 13 to the treatment fluid 6 of design temperature.From storage tank 9 treatment fluid 6,, be lower than 23 ℃ when arriving gap nozzle 1 through thermoregulator 11 temperature adjustments to 23 ℃ by pump 10.Because supply with new treatment fluid 6 in this wise in succession, thus shown in Fig. 5 and table 1, even in any case a direction flow model of spended time pipe arrangement 13 does not reach 23 ℃ yet, so-called temperature adjustment indirectly that Here it is.
[table 1]
| |
0 | 1 | 2 | 3 | 4 | 5 | 6 |
| Directly | 20.0 | 20.2 | 20.5 | 22.0 | 22.5 | 22.8 | 23.0 |
| Indirectly | 20.0 | 20.1 | 20.5 | 20.8 | 20.9 | 21.0 | 21.2 |
Similarly, shown in Fig. 6 and table 2,, also reproduce the above-mentioned direct temperature adjustment and the phenomenon of indirect temperature adjustment even set 20 ℃ when the target.
[table 2]
| |
0 | 1 | 2 | 3 | 4 | 5 | 6 |
| Directly | 23.0 | 22.5 | 22.5 | 21.5 | 20.8 | 20.4 | 20.1 |
| Indirectly | 23.0 | 22.8 | 22.5 | 22.0 | 22.0 | 21.9 | 21.6 |
As discussed above, according to the present invention, use hard material (metal material) by gap nozzle material on one side, the another side material is used softwood matter (resin material), when both merge since softwood matter while being close to hard material, so do not form this gap that causes capillarity, can shorten the time that processing needs simultaneously yet.
In addition, have the treatment fluid feedway of the gap nozzle that a plurality of above-mentioned left and right sides unlike materials constitutes, can shorten the service time of treatment fluid, even thick filming simultaneously also can be finished at short notice by use.
In addition, the gap nozzle that above-mentioned left and right sides unlike material constitutes is set, can be adjusted to treatment fluid the temperature of setting at short notice by setting position at the treatment fluid closed circuit of temperature adjustment.
Claims (3)
1. gap nozzle, supply with treatment fluid according to set width on the object being treated surface, it is characterized in that, this gap nozzle adopts left and right sides halfbody to merge formation, the material of halfbody is a metal material on one side, the material of another side halfbody is a resin material, does not cause that with the alignment surface place at the aforementioned left and right sides halfbody mode of capillarity directly is close to.
2. a treatment fluid feedway is characterized in that, is the treatment fluid feedway with the described gap nozzle of claim 1, on the closed circuit of the treatment fluid of temperature adjustment the aforementioned slots nozzle is set.
3. treatment fluid feedway as claimed in claim 2 is characterized in that, this treatment fluid feedway has a plurality of aforementioned slots nozzles.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP108952/03 | 2003-04-14 | ||
| JP108952/2003 | 2003-04-14 | ||
| JP2003108952A JP3838990B2 (en) | 2003-04-14 | 2003-04-14 | Slit nozzle and treatment liquid supply apparatus using the slit nozzle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1541779A CN1541779A (en) | 2004-11-03 |
| CN100376330C true CN100376330C (en) | 2008-03-26 |
Family
ID=33470265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100329674A Expired - Fee Related CN100376330C (en) | 2003-04-14 | 2004-04-14 | Slit nozzle and treating liquid supplying device with such nozzle |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP3838990B2 (en) |
| KR (1) | KR101070041B1 (en) |
| CN (1) | CN100376330C (en) |
| TW (1) | TWI286673B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4619139B2 (en) * | 2005-01-19 | 2011-01-26 | 東京応化工業株式会社 | Slit nozzle |
| KR100782539B1 (en) * | 2006-06-15 | 2007-12-06 | 세메스 주식회사 | Slit nozzle and chemical-coating apparatus having the same |
| CN101495241B (en) * | 2006-06-16 | 2012-09-19 | 曼泰克株式会社 | Nozzle device, method of imparting chemical using it |
| KR100898570B1 (en) * | 2006-12-28 | 2009-05-19 | 주식회사 나래나노텍 | Improved Nozzle Dispenser |
| CN103464315B (en) * | 2013-08-28 | 2015-12-09 | 清华大学深圳研究生院 | A kind of technique nozzle that can form even water curtain |
| CN104635437A (en) * | 2013-11-07 | 2015-05-20 | 沈阳芯源微电子设备有限公司 | Curtain-like developing nozzle |
| US10766041B2 (en) | 2014-12-24 | 2020-09-08 | Illinois Tool Works Inc. | Flow diverter in fluid application device |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH021907A (en) * | 1988-06-09 | 1990-01-08 | Nec Kyushu Ltd | In-line type semiconductor heat treatment device |
| JPH10174922A (en) * | 1996-12-19 | 1998-06-30 | Konica Corp | Coating apparatus and coating method |
| JPH11197576A (en) * | 1998-01-08 | 1999-07-27 | Konica Corp | Coater and coating method |
| JPH11319865A (en) * | 1998-05-18 | 1999-11-24 | Sumitomo Heavy Ind Ltd | Biological filter facility |
| JP2000102759A (en) * | 1998-07-31 | 2000-04-11 | Toray Ind Inc | Coating method and coating device as well as production of plasma display and member for display and apparatus for production thereof |
| JP2002086041A (en) * | 2000-09-12 | 2002-03-26 | Nitto Denko Corp | Die for extrusion |
| JP2002219399A (en) * | 2001-01-29 | 2002-08-06 | Nec Corp | Die coater |
| JP2002336763A (en) * | 2001-05-15 | 2002-11-26 | Sony Corp | Coating apparatus and coating method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3530361B2 (en) * | 1997-11-12 | 2004-05-24 | 大日本スクリーン製造株式会社 | Developing device |
-
2003
- 2003-04-14 JP JP2003108952A patent/JP3838990B2/en not_active Expired - Lifetime
-
2004
- 2004-04-12 TW TW093110126A patent/TWI286673B/en not_active IP Right Cessation
- 2004-04-12 KR KR1020040024826A patent/KR101070041B1/en not_active IP Right Cessation
- 2004-04-14 CN CNB2004100329674A patent/CN100376330C/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH021907A (en) * | 1988-06-09 | 1990-01-08 | Nec Kyushu Ltd | In-line type semiconductor heat treatment device |
| JPH10174922A (en) * | 1996-12-19 | 1998-06-30 | Konica Corp | Coating apparatus and coating method |
| JPH11197576A (en) * | 1998-01-08 | 1999-07-27 | Konica Corp | Coater and coating method |
| JPH11319865A (en) * | 1998-05-18 | 1999-11-24 | Sumitomo Heavy Ind Ltd | Biological filter facility |
| JP2000102759A (en) * | 1998-07-31 | 2000-04-11 | Toray Ind Inc | Coating method and coating device as well as production of plasma display and member for display and apparatus for production thereof |
| JP2002086041A (en) * | 2000-09-12 | 2002-03-26 | Nitto Denko Corp | Die for extrusion |
| JP2002219399A (en) * | 2001-01-29 | 2002-08-06 | Nec Corp | Die coater |
| JP2002336763A (en) * | 2001-05-15 | 2002-11-26 | Sony Corp | Coating apparatus and coating method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101070041B1 (en) | 2011-10-04 |
| CN1541779A (en) | 2004-11-03 |
| JP2004313873A (en) | 2004-11-11 |
| JP3838990B2 (en) | 2006-10-25 |
| KR20040089562A (en) | 2004-10-21 |
| TW200506541A (en) | 2005-02-16 |
| TWI286673B (en) | 2007-09-11 |
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| PB01 | Publication | ||
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| C14 | Grant of patent or utility model | ||
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| CF01 | Termination of patent right due to non-payment of annual fee |
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