CN105983511A - A coating device and a coating method - Google Patents

A coating device and a coating method Download PDF

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Publication number
CN105983511A
CN105983511A CN201610148078.7A CN201610148078A CN105983511A CN 105983511 A CN105983511 A CN 105983511A CN 201610148078 A CN201610148078 A CN 201610148078A CN 105983511 A CN105983511 A CN 105983511A
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China
Prior art keywords
slit
coating
decompression
pressure
upstream side
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CN201610148078.7A
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Chinese (zh)
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CN105983511B (en
Inventor
谷野圣
谷尚树
岸谷征典
木田威
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Dongli Film Apex Processing Co Ltd
Toray Advanced Film Co Ltd
Toray Engineering Co Ltd
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Dongli Film Apex Processing Co Ltd
Toray Engineering Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254Coating heads with slot-shaped outlet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0291Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work the material being discharged on the work through discrete orifices as discrete droplets, beads or strips that coalesce on the work or are spread on the work so as to form a continuous coating

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  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The objective of the invention is to provide a coating device and a coating method which stably maintain liquid beads even if a substrate conveying speed is increased and thickness of a coating film is thinned, thus stably forming uniform coating films. The coating device is provided with a slit mold (10) and a decompression unit (20). The slit mold (10) is provide with a spraying slit (13) used for spraying a coating liquid. The decompression unit (20) is disposed at an upstream side of the slit mold (10) and is provided with a decompression slit (21) adjacent to the spraying slit (13) and a decompression chamber (22) connected to the decompression slit (21). A distance (L) between the upstream side edge part (13a) of an opening surface of the spraying slit (13) and a downstream side edge part (21b) of an opening surface (21a) of the decompression slit (21) is less than 1.0 mm. The opening width (W) of the decompression slit (21) is less than 1.0 mm.

Description

Apparatus for coating and coating process
Technical field
The present invention relates to a kind of apparatus for coating and coating process, this apparatus for coating possesses slit die (slit die), should Slit die has ejection slit.
Background technology
In the existing apparatus for coating possessing slit die, make to supply the coating fluid come at manifold from supply mouth Middle towards laterally scattering, and make the coating fluid being extruded from manifold spray from ejection slit, thus at base material Surface on formed coated film.Here, in order to be stably formed uniform coated film, it is necessary to stably protect Handle the liquid pearl (bead) formed between slit die and base material by the coating fluid sprayed from ejection slit.
But, once improve the relative velocity between slit die and base material, just cannot stably maintain liquid pearl, Thus cannot be stably formed uniform coated film.Then, as settling mode, it is known that road has as described below Method: the upstream side (with the carrying direction in opposite direction of base material) in slit die adds pressure-reducing chamber, by this Pressure-reducing chamber makes the upstream side of liquid pearl reduce pressure, and thus carrys out stably to maintain liquid pearl (such as patent documentation 1).
But, there is following problems: in order to the upstream side on liquid pearl produces uniform negative pressure, be necessary for arranging greatly Pressure-reducing chamber to a certain degree, its result is to cause overall apparatus for coating to maximize.
Then, Patent Document 2 discloses a kind of apparatus for coating, in this apparatus for coating, by spray Go out and form recess with the upstream side of slit, and in this recess, install adjustment block, thus in recess Composition pressure-reducing chamber, a part of region.So, it is possible to be simply formed pressure-reducing chamber, and it can be considered that To reduce pressure to the kind of coating fluid, the thickness etc. of coated film by adjusting the installation position of adjustment block The A/F (A/F of decompression slit) of room is set as optimal value.
Patent documentation 1: Japanese Laid-Open Patent Publication Laid-Open flat 1-213641 publication
Patent documentation 2: Japanese Laid-Open Patent Publication Laid-Open 2008-23405 publication
Summary of the invention
-invention to solve the technical problem that-
But, when using apparatus for coating described in patent documentation 2 to form coated film, there is following problems: Once improve the relative velocity (coating speed) between slit die and base material, and make the film of the coated film of formation Thick thinning, even if then adjusting the installation position of adjustment block, also cannot stably keep liquid pearl, thus difficult To be stably formed uniform coated film.This problem particularly use low-viscosity (such as 30mPa s with Under) coating fluid formed during the relatively thin coated film of thickness the most notable.
The present invention completes to solve the problems referred to above, and its main purpose is to provide a kind of painting to arrange Put and coating process, though the relative velocity (coating speed) improved between slit die and base material, and make shape The thickness of the coated film become is thinning, and this apparatus for coating and this coating process also are able to stably keep liquid pearl, from And uniform coated film can be stably formed.
-in order to solve the technical scheme of technical problem-
Apparatus for coating involved in the present invention is characterised by: apparatus for coating possesses slit die and decompressing unit, narrow Slit die has the ejection slit for spraying coating fluid, and decompressing unit is located at the upstream side of slit die, decompression Unit possesses decompression slit and pressure-reducing chamber, and decompression slit is adjacent with ejection slit and sets, pressure-reducing chamber with Decompression slit is connected, the upstream side edge of the opening surface of ejection slit and the opening surface of decompression slit Edge, downstream between distance less than 1.0mm, the A/F of decompression slit is less than 1.0mm.
Coating process involved in the present invention is to utilize above-mentioned apparatus for coating, sprays coating fluid from ejection slit, Thus the method forming coated film on base material, it is characterised in that: from the liquid of the coating fluid that ejection sprays with slit The upstream-side-end (upstream side meniscus) of pearl is controlled as being positioned at the downstream lateral margin of the opening surface of decompression slit Portion.
-effect of invention-
In accordance with the invention it is possible to provide a kind of apparatus for coating and coating process, even if improving slit die and base material Between relative velocity (coating speed), and make the thickness of the coated film of formation thinning, this apparatus for coating and This coating process also is able to stably keep liquid pearl such that it is able to be stably formed uniform coated film.
Accompanying drawing explanation
Fig. 1 is the sectional view of the structure schematically illustrating the apparatus for coating in one embodiment of the present invention;
Fig. 2 is amplification view with the part shown in A in FIG.
-symbol description-
10-slit die;11-downstream lip;12-upstream side lip;12a-labial surface;13-ejection slit; 13a-upstream side edge;14-manifold;15-exhaust flow path;16-downstream block;17-upstream side block;20- Decompressing unit;21-decompression slit;21a-opening surface;Edge, 21b-downstream;22-pressure-reducing chamber;23-subtracts Pressure block;24-aspirating hole;30-base material;40-liquid pearl;40a-upstream side meniscus;50-coated film.
Detailed description of the invention
Below, with reference to the accompanying drawings embodiments of the present invention are described in detail.It should be noted that, originally Invention is not limited to following embodiment.Additionally, in the scope of the scope without departing from the effect with the present invention In, it is possible to do and suitably change.
Fig. 1 is the sectional view of the structure schematically illustrating the apparatus for coating in one embodiment of the present invention, figure 2 is amplification view with the part shown in A in FIG.It should be noted that in fig. 1 and 2 The arrow X illustrated represents the carrying direction of base material 30.Additionally, in the following description, will be with base material 30 Direction contrary for carrying direction X be referred to as " upstream side ", and will be referred to as with the identical direction of carrying direction X " downstream ".Additionally, in fig. 1 and 2, exaggerate the part of the structure showing apparatus for coating, do not have Have according to actual size to illustrate the structure of this apparatus for coating.
Apparatus for coating in present embodiment is coated with for being formed on the surface of the base material 30 carried towards X-direction Cloth film, as it is shown in figure 1, apparatus for coating possesses slit die 10 and decompressing unit 20, this slit die 10 has For spraying the ejection slit 13 of coating fluid, this decompressing unit 20 is located at the upstream side of slit die 10.
Slit die 10 is made up of upstream side block 17 and downstream block 16, by upstream side block 17 With positioned spacers (shim plate) (illustrating the most in the drawings) between downstream block 16, or by upstream side Jump is set on block and/or downstream block, thus forms ejection slit 13.Upstream side block 17 Having the upstream side lip 12 being positioned at leading section, downstream block 16 has the downstream lateral lip being positioned at leading section Portion 11.
Additionally, be formed with manifold 14 in slit die 10, this manifold 14 is used for making from supply mouth (the most in the drawings Illustrate) supply the coating fluid come in the width (side orthogonal with the carrying direction X of base material 30 of coated film To) on scatter.And, the coating fluid being extruded from manifold 14 sprays from ejection slit 13, thus at base Coated film 50 is formed on the surface of material 30.
As it is shown in figure 1, the decompressing unit 20 being located at the upstream side of slit die 10 possesses decompression slit 21 With pressure-reducing chamber 22, this decompression slit 21 is adjacent with ejection slit 13 and sets, this pressure-reducing chamber 22 with subtract Pressure slit 21 is connected.Here, decompression slit 21 and pressure-reducing chamber 22 are by upstream side block Base material 30 side of 17 arranges that decompression block 23 is constituted.Additionally, be provided with multiple in pressure-reducing chamber 22 Aspirating hole 24, pressure-reducing chamber 22 is via the exhaust flow path 15 being formed in upstream side block 17 with vacuum pump (no Illustrate in the drawings) it is connected.
As in figure 2 it is shown, the coating fluid sprayed with slit 13 from ejection is while at slit die 10 and base material 30 Between form liquid pearl 40 while being applied on the surface of base material 30, thus form coated film 50.Now, Vacuum pump is utilized to make decompression slit 21 reduce pressure via pressure-reducing chamber 22, so that the upstream side decompression of liquid pearl 40.
But, it may occur that following problems: once improve the transporting velocity (coating speed) of base material 30, and make shape The thickness of the coated film 50 become is thinning, then make the upstream side of liquid pearl 40 subtract even with decompression slit 21 Pressure, also cannot stably keep liquid pearl 40, and its result is to be difficult to be stably formed uniform coated film.Especially Being that once the viscosity of coating fluid reduces, the hold mode of liquid pearl 40 just becomes unstable, thus is difficult to stable Landform uniformly coated film.
The reason that the problems referred to above occur is inquired into by present inventor, thus obtains as described below Find.
It is to say, as in figure 2 it is shown, at the upstream side of liquid pearl 40, air is from decompression block 23 and base Gap between material 30 is risen by decompression slit 21, pressure-reducing chamber 22, the sequential flowing of exhaust flow path 15.This Time, the transporting velocity (coating speed) of base material 30 is the fastest, for subtracting required for stably keeping liquid pearl 40 Pressure pressure is the biggest.Therefore, in this case, if do not made between decompression block 23 and base material 30 Distance D1Narrow and carry out build-up of pressure loss fully, the upstream side of liquid pearl 40 just cannot be made fully to reduce pressure, Thus be difficult to stably keep liquid pearl 40.
Additionally, due to the decompression of the upstream side of liquid pearl 40 is carried out by decompression slit 21, therefore liquid The decompressed pressure of the upstream side of pearl 40 largely by air from decompression with between block 23 and base material 30 Gap rise by decompression slit 21, pressure-reducing chamber 22, exhaust flow path 15 sequential flowing time dynamic pressure big The control of little (speed of air-flow).On the other hand, the upstream side on liquid pearl 40 is provided with situation as pressure-reducing chamber Under, the decompressed pressure of the upstream side of liquid pearl 40 largely controlling by the static pressure size in pressure-reducing chamber. Therefore, arrange in the case of decompression slit 21 reduces pressure at the upstream side of liquid pearl 40, once at sky Gas flows to from the gap between decompression block 23 and base material 30 produce the disorderly of air-flow during decompression slit 21 Disorderly, the size of dynamic pressure will change.As it has been described above, promoting transporting velocity (the coating speed of base material 30 Degree) in the case of, in order to the decompressed pressure required for stably keeping liquid pearl 40 will uprise.Therefore, excellent Choosing makes distance D between decompression block 23 and base material 301Reduce and cause sufficient pressure loss.But, Once make gap (distance D between decompression block 23 and base material 301) reduce, flow velocity air faster is just Can be from this less gap (distance D1) flow to the decompression slit 21 that A/F is bigger, thus air-flow is easy Produce disorder, it becomes difficult to control dynamic pressure.As a result of which it is, the decompressed pressure of the upstream side of liquid pearl 40 becomes not Stable, thus be difficult to stably keep liquid pearl 40.And, this phenomenon has the viscosity of coating fluid the lowest the most aobvious The tendency write.
In order to lower the disorder of air-flow as described above, as in figure 2 it is shown, preferably make opening of decompression slit 21 Mouth width W reduces.So, it becomes possible to lower and work as air from decompression with between block 23 and base material 30 Gap (decompression distance D between block 23 and base material 301) flow to the gas of generation during decompression slit 21 The disorder of stream.
It is preferably less than 1.0mm by the optimal range set of the A/F W of decompression slit 21. If A/F W is more than 1.0mm, then (subtract from the gap between decompression block 23 and base material 30 Pressure distance D between block 23 and base material 301) flow into the decompression main flow (central part of the air of slit 21 Air-flow) and the upstream side meniscus 40a of liquid pearl 40 between distance will become big, say, that decompression Liquid pearl 40 is left in position.As a result of which it is, the upstream side meniscus 40a of liquid pearl 40 becomes unstable, upstream Lateral bending liquid level 40a can vibrate or toward side, downstream retreat (at upstream side labial surface 12a, upstream side meniscus 40a Locking (pinning) position toward downstream (direction of arrow X indication) retreat).
Additionally, as described above, it is preferred to decompression distance D between block 23 and base material 301For less value, And if A/F W is more than 1.0mm, then distance D1And the difference between A/F W just becomes big, Thus in decompression is with slit 21, easily produce the disorder of air-flow.As a result of which it is, the upstream side of liquid pearl 40 Decompressed pressure becomes unstable, thus is difficult to stably keep liquid pearl 40.
And, this phenomenon has that the viscosity of coating fluid is the lowest to be the most significantly inclined to.Therefore, by making decompression use The A/F W of slit 21 is less than 1.0mm, even if the viscosity of coating fluid is below 30mPa s, also Can stably keep liquid pearl 40.
On the other hand, when using slit die to be coated with coated film, as in figure 2 it is shown, preferably to application conditions etc. It is set, makes the upstream side meniscus 40a of liquid pearl 40 be positioned at the opening of (being locked in) decompression slit 21 Edge, the downstream 21b (the upstream side edge of the labial surface 12a of upstream side lip 12) of face 21a.It is to say, Wet-film thickness according to coated film, the physical property (surface tension, viscosity) of coating fluid are to application conditions (such as Interval (distance D between slit die 10 and base material 302), coating speed) be set, so that liquid pearl 40 The latched position of upstream side meniscus 40a be positioned at edge, downstream 21b.
And, under this application conditions, decompressed pressure is controlled, so that the upstream lateral bending liquid of liquid pearl 40 Face 40a can be positioned at edge, the downstream 21b of the opening surface 21a of (being locked in) decompression slit 21.
If the upstream side meniscus 40a not making liquid pearl 40 is positioned at (being locked in) edge, downstream 21b, liquid pearl 40 will become unstable, and the bad order (crawling, thickness are abnormal) being susceptible to coated film is this existing As.
The ejection opening surface 21a of the upstream side edge 13a of the opening surface of slit 13 with decompression slit 21 Edge, downstream 21b between the optimal scope of distance L be designed as the most as described above: liquid pearl The upstream side meniscus 40a of 40 is positioned at the edge, downstream of the opening surface 21a of (being locked in) decompression slit 21 21b.From this angle, such as when the wet-film thickness of the coated film when being coated is below 20 μm, Preferably will be set smaller than 1.0mm apart from L.
If distance L is more than 1.0mm, then the upstream side meniscus 40a of liquid pearl 40 is not at (lock Schedule) edge, the downstream 21b of the opening surface 21a of decompression slit 21, but can be toward the downstream of labial surface 12a Side (direction of arrow X indication) retreats.Such liquid pearl is easily subject to extrinsic factor (such as substrate surface state Minor variations, the minor variations etc. of decompressed pressure) impact, thus cannot be stably formed liquid pearl, its knot Fruit is to be formed uniformly coated film.
As described above, the apparatus for coating in the present invention possesses slit die 10 and decompressing unit 20, This slit die 10 has the ejection slit 13 for spraying coating fluid, and this decompressing unit 20 is located at slit die The upstream side of 10, and this decompressing unit 20 possesses decompression slit that is adjacent with ejection slit 13 and that set 21 and the pressure-reducing chamber 22 that is connected with decompression slit 21.Here, preferably: by opening of ejection slit 13 The upstream side edge 13a of actinal surface and decompression are used between edge, the downstream 21b of opening surface 21a of slit 21 Distance L is set smaller than 1.0mm, and is set smaller than by the A/F W of decompression slit 21 1.0mm.According to such structure, even if improving the transporting velocity (coating speed) of base material 30, and make shape The thickness of the coated film become is thinning, it is also possible to stably keep liquid pearl 40, so, it becomes possible to stably Form uniform coated film.
In the present embodiment, by making the A/F W of decompression slit 21 lower less than 1.0mm The decompression disorder of the air-flow in slit 21 but it also may as shown in Figure 2, make decompression slit 21 Roll tiltedly towards pressure-reducing chamber 22 towards upstream.So, the air flowed in decompression slit 21 just can Spread rapidly in decompression slit 21.As a result of which it is, the air-flow that can lower in decompression slit 21 Disorder, thereby, it is possible to stably keep liquid pearl 40.
Decompression slit can be suitably determined according to the size etc. of the A/F W of decompression slit 21 The tiltangleθ of 21, preferably is set as the tiltangleθ of decompression slit 21 falling relative to decompression slit In the range of the opening surface 21a of 21 becomes 30~60 °.Tilt corner within the range in the case of, it is possible to have Make Diffusion of gas stream to effect.
In the present embodiment, owing to can use by arranging in base material 30 side of upstream side block 17 to reduce pressure Block 23 constitutes decompression slit 21 and pressure-reducing chamber 22, therefore, it is possible to make decompressing unit 20 miniaturization, The most just can seek the miniaturization of apparatus for coating.
It should be noted that the volume in pressure-reducing chamber 22 has no particular limits, but in order to seek apparatus for coating Miniaturization, preferably every with on the width of decompression slit 21 (with the orthogonal direction of carrying direction X) The volume in the pressure-reducing chamber 22 that 1m length is corresponding is less than 0.002m3.And, from above-mentioned angle, excellent Choosing is less than 0.001m3.On the other hand, if the volume in pressure-reducing chamber 22 becomes the least, it is easy in decompression single The disorder of air-flow occurs in unit 20, and therefore the lower limit of the volume in preferred pressure-reducing chamber 22 is: with decompression slit 21 Width (with the orthogonal direction of carrying direction X) on the appearance in the corresponding pressure-reducing chamber 22 of every 1m length Amass as 0.0001m3Above.
Additionally, as it is shown in figure 1, be provided with multiple aspirating hole 24 in pressure-reducing chamber 22, in order to along pressure-reducing chamber The width of 22 makes pressure-reducing chamber 22 reduce pressure equably, preferably every on the width of decompression slit 21 The quantity of aspirating hole 24 set in 1m length is more than four.So, it becomes possible to make decompression with narrow Decompressed pressure homogenization on the width (direction orthogonal with carrying direction X) of seam 21.Aspirating hole 24 The upper limit of quantity have no particular limits, but from the angle of the miniaturization of apparatus for coating, be preferably: Every 1m length on the width of decompression slit 21 is provided with the aspirating hole 24 of less than 12.
Coating process in other embodiments of the present invention is characterised by: use above-mentioned apparatus for coating, from spray Go out and spray coating fluid with slit 13, thus form coated film 50 on the substrate 30.Here, preferably will be from spray The upstream side meniscus 40a of the liquid pearl 40 going out the coating fluid with slit 13 ejection controls as being positioned at (being locked in) Decompression edge, the downstream 21b of the opening surface 21a of slit 21.
It should be noted that the coating process in present embodiment is applicable to situations below, it may be assumed that sticking of coating fluid Degree is below 30mPa s, and the wet-film thickness of coated film when being coated is below 20 μm.And, Coating process in present embodiment is applicable to following situation, it may be assumed that the viscosity of coating fluid is below 20mPa s; The wet-film thickness of coated film when being coated is below 10 μm.
Above by preferred embodiment describing the present invention, but such description is not to this Bright restriction, it is of course possible to the present invention is carried out various change.
Such as, in the above-described embodiment, preferably by backing roll (illustrating the most in the drawings) supporting substrate 30 while carrying base material 30 towards X-direction but it also may utilizes and does not use the mode of backing roll to carry base Material 30.
Additionally, in the above-described embodiment, aspirating hole 24 and exhaust flow path 15 are formed at upstream side block 17 In, but aspirating hole 24 and exhaust flow path 15 can also be located at the bottom of decompression block 23.
Additionally, the viscosity of the coating fluid in present embodiment is to use Type B viscosimeter (Brookfield viscometer) being coated with Measure, at cloth liquid temp 23 DEG C, the viscosity obtained.
Additionally, in fig. 2, from the angle of film coated (being coated with in the way of wet-film thickness is below 20 μm) Set out, distance D between labial surface 11a and the base material 30 of downstream lip 112It is preferably below 200 μm, Below more preferably 100 μm, below particularly preferably 50 μm.The labial surface 11a of downstream lip 11 and base Distance D between material 302Lower limit be preferably more than 15 μm, more than particularly preferably 20 μm.
As described above, it is preferred to decompression distance D between labial surface 23a and the base material 30 of block 231For less Value, specifically, below preferably 200 μm, below more preferably 100 μm, particularly preferably 50 μm Below.Decompression distance D between labial surface 23a and the base material 30 of block 231Lower limit be preferably 15 μm Above, more than particularly preferably 20 μm.
Additionally, distance D between the labial surface 11a of downstream lip 11 and base material 302With decompression block 23 Labial surface 23a and base material 30 between distance D1Can be equal distance, it is possible to so that distance D1It is more than Distance D2.From the structure of apparatus for coating (in design) for, preferred distance D2With distance D1For equal Distance.
Additionally, the decompression block 23 being arranged in base material 30 side of upstream side block 17 can also be with upstream side Block 17 forms as one.

Claims (7)

1. an apparatus for coating, it possesses slit die and decompressing unit,
Described slit die has the ejection slit for spraying coating fluid,
Described decompressing unit is located at the upstream side of described slit die,
Described apparatus for coating is characterised by:
Described decompressing unit possesses decompression slit and pressure-reducing chamber,
Described decompression slit is adjacent with described ejection slit and sets,
Described pressure-reducing chamber is connected with described decompression slit,
The downstream of the opening surface of the upstream side edge of the opening surface of described ejection slit and described decompression slit Distance between side edge part is less than 1.0mm,
The A/F of described decompression slit is less than 1.0mm.
Apparatus for coating the most according to claim 1, it is characterised in that:
Described decompression slit rolls tiltedly towards described pressure-reducing chamber towards upstream.
Apparatus for coating the most according to claim 2, it is characterised in that:
The corner that tilts of described decompression slit is becoming 30~60 ° relative to the opening surface of this decompression slit In the range of.
4. according to the apparatus for coating according to any one of Claim 1-3, it is characterised in that:
The volume in the described pressure-reducing chamber corresponding with the every 1m length on the width of described decompression slit Less than 0.002m3
5. according to the apparatus for coating according to any one of Claim 1-3, it is characterised in that:
Described pressure-reducing chamber possesses the multiple aspirating holes for making this pressure-reducing chamber reduce pressure,
The quantity of described aspirating hole set in the every 1m length on the width of described decompression slit is More than four.
6. a coating process, its utilize according to the apparatus for coating according to any one of claim 1 to 5, Spray coating fluid from described ejection slit, thus on base material, form coated film, the feature of this coating process It is:
It is controlled as being positioned at from the upstream side meniscus of the liquid pearl of the described coating fluid of described ejection slit ejection The edge, downstream of the opening surface of described decompression slit.
Coating process the most according to claim 6, it is characterised in that:
The viscosity of described coating fluid is below 30mPa s,
The wet-film thickness of described coated film when being coated is below 20 μm.
CN201610148078.7A 2015-03-19 2016-03-15 Apparatus for coating and coating method Active CN105983511B (en)

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