JP2009106904A - Thin film applying apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin film applying apparatus capable of solving a problem that the dimensional reproducibility in the assembly of a nozzle body is damaged by catching soil or dust between a pair of nozzle half bodies. <P>SOLUTION: In the thin film applying apparatus, placing surfaces 1a, 2a of a pair of the nozzle half bodies 1, 2 constituting the nozzle body A are placed one upon another to form a slit like gap as a nozzle inner liquid passage 3, the tip of the nozzle inner liquid passage 3 is made as a tip discharge port 4 and a coating liquid (a) is discharged from the tip discharge prot 4 through the inner liquid passage 3 and applied on a body 5 to be coated 5. The placing surfaces 1a, 2a of a pair of the nozzle half bodies 1, 2 are not such flat surfaces that the whole surfaces are in sufficiently close contact with each other, and at least one of the placing surfaces 1a (2a) comprises a close contact projecting part 6 where is in close contact with another placing surface 2a (1a) and non-contact recessed parts 7 where is not in close contact with the another placing surface 2a (1a) to get soil, the dust and the like. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a thin film coating apparatus that applies a coating liquid to a coated body in a thin film shape.

  As an apparatus for applying a coating liquid to a coated body in a thin film, for example, as disclosed in Patent Document 1, there is a thin film coating apparatus called a die coater or a slot coater. For example, as shown in FIG. 5, this has a nozzle body A that discharges the coating liquid a supplied from the liquid supply unit from the slit-like tip discharge port 4 and is supported by a backup roll or the like. The coating liquid a is discharged from the tip discharge port 4 while continuously transporting the coating target 5 in a state where the tip discharge port 4 of the nozzle body A is opposed to and close to the substrate 5 to be applied. Thus, the coating liquid a is applied to the coated body 5 in a thin film shape, and is used for various purposes such as surface coating of the coated body 5 and production of a thin film (for example, The same components as those of the present invention to be described later are denoted by the same reference numerals).

  In general, the nozzle body A in this type of thin film coating apparatus has a configuration in which a pair of nozzle halves 1 and 2 are assembled in a polymerized state. Specifically, a pair of nozzle halves 1 and 2 are polymerized. A manifold 10 (a liquid reservoir) or a slit-like gap is formed between the nozzle halves 1 and 2, the slit-like gap is used as a liquid passage 3 in the nozzle, and the tip thereof is connected to the slit-like tip discharge port 4. This is the configuration. The coating liquid a supplied from the liquid supply unit is supplied to the nozzle liquid passage 3 through the manifold 10 and is discharged from the tip discharge port 4 through the nozzle liquid passage 3.

  The nozzle body A includes a type in which an intervening member called a shim is sandwiched between the nozzle halves 1 and 2 (hereinafter referred to as “shim type”) and a type that does not use an intervening member (hereinafter referred to as “shimless type”). is there.

  For example, as disclosed in Patent Document 1, a shim type sandwiches a thin plate-like interposition member called a shim between a pair of nozzle halves 1 and 2, thereby forming a slit-like shape between the nozzle halves 1 and 2. A gap is formed, and this is configured as the nozzle liquid passage 3.

  On the other hand, as disclosed in, for example, Patent Document 2, the shimless type is provided with a level difference as shown in FIG. 5 on the surfaces of the pair of nozzle halves 1 and 2 facing each other (for example, the nozzle halves). 1 is formed with a low step surface on the front side (front side) and a high step surface on the rear side) to form a slit-like gap between the polymerized nozzle halves 1 and 2, The passage 3 is configured.

JP 2007-167773 A Japanese Patent Laid-Open No. 11-156265

  By the way, the thin film coating apparatus described above adjusts the film thickness so that the film thickness of the coating liquid a discharged from the tip discharge port 4 of the nozzle body A is uniform in the width direction when performing the coating operation.

  This type of film thickness applicator is an apparatus that requires extremely high film thickness accuracy, for example, on the order of several nanometers. Therefore, this film thickness adjustment is also required to have high accuracy, so much skill, a lot of labor and time. Therefore, it can be said that this film thickness adjustment is troublesome and troublesome.

  Moreover, even if the film thickness is adjusted with much effort and time, for example, the nozzle body A is once disassembled for cleaning, and the nozzle halves 1 and 2 are superposed again to form the nozzle body A. When assembled, the film thickness that should have been adjusted changes greatly. As described above, the nozzle body A has poor dimensional reproducibility at the time of assembly, and even if the film thickness is adjusted, once the nozzle body A is disassembled, the film thickness greatly changes (insanely). Therefore, when reassembling and performing the coating operation, it was necessary to adjust the film thickness again by taking a lot of time and effort again.

  In particular, the shim type described above has a very thin shim, and folds and deformations can easily occur during cleaning, and there are many cases where fine fluffing occurs on the surface of the shim. This is the dimension reproducibility when the nozzle body A is assembled. It will be damaged.

  In this respect, the shimless type cannot cause the problem of dimensional reproducibility due to the shim, but nevertheless, the dimensional reproducibility of the nozzle body A is also extremely low.

  Therefore, until now, in both the shim type and the shimless type, every time the nozzle body A is disassembled and reassembled, the film thickness is adjusted again by taking much time and effort again. This is a major factor that impairs the work efficiency, mass productivity, and cost of the coating operation using the thin film coating apparatus.

  In the course of developing and researching this thin film coating apparatus, the present inventor puts foreign matter such as dust and dust between the nozzle halves 1 and 2 when the nozzle body A is assembled. It has been found that reproducibility may be impaired.

  That is, a very small foreign object that cannot be seen with the naked eye is sandwiched between the nozzle halves 1 and 2 and the superposition angle of the nozzle halves 1 and 2 changes very slightly, such as an order of several nm. It has been found that this type of apparatus, which requires high film thickness accuracy, has a great influence and greatly impairs the dimensional reproducibility.

  Therefore, the present inventors focused on the above-mentioned problems found at the end of such research, and after repeating the research of the thin film coating apparatus, when assembling the nozzle body A by superposing the nozzle halves 1 and 2, This prevents foreign matter such as dust and dust from being sandwiched between the nozzle halves 1 and 2, thereby realizing high dimensional reproducibility that has not been achieved in the past, and a great deal of film thickness adjustment required for this type of thin film coating apparatus. An epoch-making thin film coating device that can reduce labor and time and improve workability and mass productivity.

  The gist of the present invention will be described with reference to the accompanying drawings.

  The nozzle body A includes a pair of nozzle halves 1 and 2, and the nozzle body A overlaps the overlapping surfaces 1 a and 2 a of the pair of nozzle halves 1 and 2 with each other to form a pair of nozzle halves 1 and 2. A slit-like gap is formed between the bodies 1 and 2, and the slit-like gap is configured as a nozzle internal liquid passage 3, and the tip of the nozzle internal liquid passage 3 is configured as a slit-shaped tip discharge port 4. In the thin film coating apparatus, the coating liquid a supplied from the supply unit is discharged from the tip discharge port 4 through the nozzle internal liquid passage 3 to apply the coating liquid a to the coated body 5 in the form of a thin film. The overlapping surfaces 1a and 2a of the pair of nozzle halves 1 and 2 constituting the main body A do not have a flat surface shape that is in close contact with each other, and at least one of the overlapping surfaces 1a (2a) Adhesion convexity that adheres closely to the polymerization surface 2a (1a) A thin film coating apparatus characterized in that it is formed in a concavo-convex surface shape composed of 6 and a non-contact concave surface portion 7 into which foreign matter such as dust or dust enters without contacting the other overlapping surface 2a (1a). It is related.

  In addition, the one overlapping surface 1a (2a) formed in an uneven surface shape forms a plurality of closely contacting convex surface portions 6A that are in close contact with a part of the other overlapping surface 2a (1a). 6. The thin film coating apparatus according to claim 1, wherein the portion 6 </ b> A is configured as the close contact convex portion 6, and the concave portion between the close contact convex surface portions 6 </ b> A is configured as the non-contact concave surface portion 7. is there.

  The nozzle body A has a bolt through hole 8 in communication with the pair of nozzle halves 1 and 2, and a nut 9B is screwed and fixed to a tightening bolt 9A inserted through the bolt through hole 8. The pair of nozzle halves 1 and 2 are clamped and fixed, and the bolt through hole 8 is located at a position penetrating the close contact convex surface portion 6A of the one overlapping surface 1a (2a) formed in an uneven surface shape. The close contact convex surface portion 6A formed with the bolt through hole 8 and a part of the other overlapping surface 2a (1a) in close contact therewith are fastened and fixed by the tightening bolt 9A and the nut 9B. The thin film coating apparatus according to claim 2, wherein the thin film coating apparatus is configured as a fastening fixing surface.

  Further, the one overlapping surface 1a (2a) formed in an uneven surface shape is formed with the close contact convex portion 6 extending in the width direction of the nozzle body A, and extending in the width direction. The close contact convex part 6 is configured as a liquid flow path closing convex part 11 that closes the rear side of the nozzle liquid passage 3 opposite to the side on which the tip discharge port 4 is formed. 4. The thin film coating apparatus according to claim 1, wherein the liquid passage closing projection 11 prevents the liquid passage 3 from flowing backward. 5. It is.

  In addition, the one overlapping surface 1a (2a) formed in the uneven surface shape includes the liquid channel blocking convex portion 11 extending in the width direction and a position on the rear side of the liquid channel blocking convex portion 11 In this way, it is formed in a concavo-convex surface shape composed of a plurality of contact convex surface portions 6A formed through the bolt through holes 8 according to claim 3 and the non-contact concave surface portions 7 between the plurality of contact convex portions 6. The present invention relates to a thin film coating apparatus according to claim 4.

  In addition, the liquid flow path blocking convex portion 11 of the one overlapping surface 1a (2a) formed in an uneven surface shape is in close contact with a part of the other overlapping surface 2a (1a). 6A is configured to extend in the width direction, and the nozzle body A is disposed at a position penetrating the liquid flow path closing convex portion 11 of the one overlapping surface 1a (2a). 6. The thin film coating apparatus according to claim 5, wherein a plurality of the bolt through-holes 8 are formed in a line-up state along the line 11.

  As described above, the present invention does not have a flat surface shape in which the overlapping surfaces of the pair of nozzle halves constituting the nozzle main body are in close contact with each other, and at least one of the overlapping surfaces is in close contact with the other overlapping surface. And a non-adhesive concave surface portion that does not come into close contact with the other overlapping surface, so that the contact area between the overlapping surfaces of the paired nozzle halves can be reduced. The probability that foreign matter such as dust or dust will be sandwiched between the surfaces is reduced, and the conventional problem that the reproducibility is impaired due to the influence (change) of the film thickness dimension due to the inclusion of the foreign matter can be prevented.

  In addition, when a configuration is adopted in which the polymerization surfaces are in close contact with each other in a flat surface shape, a high processing technique is required to process the entire flat surface with high surface accuracy so that polymerization distortion does not occur. In the present invention, since at least one of the overlapping surfaces has an irregular surface shape, the processing is easy, and the nozzle body can be easily manufactured as much.

  Therefore, the present invention prevents the problem that the reproducibility of the nozzle body is impaired by pinching (clogging) foreign matter such as dust and dust, and realizes high reproducibility. For example, the film thickness is adjusted depending on the design. High reproducibility so that when the nozzle body is once disassembled, the nozzle halves are superposed again, and the nozzle body is assembled, it is not necessary to re-adjust the film thickness, which requires a lot of labor and time. This is an epoch-making thin film coating device that is feasible and has excellent work efficiency, mass productivity, and cost.

  Further, in the inventions of claims 2 and 3, since the close contact convex portion is a close contact convex surface portion in close contact with the other overlap surface, the contact area of the overlap surface of the pair of nozzle halves is reduced and reproduced. While exhibiting the above-described effects of enhancing the properties, the superposition adhesion stability is excellent. In particular, in the invention according to claim 3, the tightly protruding convex portion is fastened when fastened with a fastening bolt and a nut. Since it will also function as a substitute, the nozzle halves can be clamped and fixed well.

  In the inventions according to claims 4, 5, and 6, the gap between the paired nozzle halves which are superposed by the close contact convex portion (liquid flow path closing convex portion) formed in the extending state in the width direction of the nozzle main body portion. Therefore, it is not necessary to separately provide a blocking member and a blocking structure for sealing the leakage flow of the coating liquid to the rear side of the nozzle main body. In particular, in the inventions according to the fifth and sixth aspects, the contact convex portions other than the liquid flow path closing convex portion among the plurality of close contact convex portions are formed in the rear part of the liquid flow passage closed convex portion. The liquid flow passage blocking projection prevents contact with the coating liquid, so that the coating liquid does not adhere, is easy to clean, and the coating liquid remains attached and the nozzle body is assembled. The problem that the reproducibility is impaired due to being sometimes inserted as a foreign substance between the polymerization surfaces can be prevented.

  Embodiments of the present invention that are considered suitable (how to carry out the invention) will be briefly described with reference to the drawings, illustrating the operation of the present invention.

  The present invention is a thin film coating apparatus that discharges a coating liquid a supplied from a liquid supply section from a tip discharge port 4 through a nozzle internal liquid passage 3 of a nozzle main body A and applies it to a coated body 5 in a thin film form. is there.

  The nozzle body A is composed of a pair of nozzle halves 1 and 2. Specifically, the overlapping surfaces 1a and 2a of the pair of nozzle halves 1 and 2 are superposed on each other to form a pair of nozzle halves. A slit-like gap is formed between the bodies 1 and 2, and this slit-like gap is configured as a nozzle liquid passage 3, and the tip of the nozzle liquid passage 3 is formed as a slit-like tip discharge port 4. Yes.

  When superposing the pair of nozzle halves 1 and 2 constituting the nozzle body A, foreign matter such as dust or dust is sandwiched (biting) between the overlapping surfaces 1a and 2a of the nozzle halves 1 and 2. During the coating operation, the film thickness dimension of the coating liquid a discharged from the tip discharge port 4 of the nozzle body A changes. That is, foreign matters are interposed between the overlapping surfaces 1a and 2a of the nozzle halves 1 and 2 and a slight deviation occurs in, for example, the overlapping angle and the overlapping position of the nozzle halves 1 and 2, thereby A change occurs in the opening shape of the tip discharge port 4, and as a result, a large change in film thickness that cannot be ignored in this apparatus that requires extremely high film thickness accuracy, for example, on the order of several nanometers.

  However, in the present invention, the overlapping surfaces 1a and 2a of the pair of nozzle halves 1 and 2 do not have the same flat surface shape that is in close contact with each other as in the prior art, and at least one overlapping surface 1a (2a ) Is a close contact convex portion 6 that is in close contact with the other overlapping surface 2a (1a), and a non-adhesive concave portion 7 that is in close contact with the other overlapped surface 2a (1a) and into which foreign matter such as dust or dust enters. It is formed in the uneven surface shape which consists of.

  Accordingly, the non-contact concave surface portion 7 of the one overlapping surface 1a (2a) formed in the uneven surface shape does not closely polymerize with the other polymerization surface 2a (1a). Even if foreign substances such as dust enter, there is no effect on the superposition angle and position of the nozzle halves 1 and 2. That is, even if a foreign matter such as fine dust or dust floating in the air adheres to either of the overlapping surfaces 1a and 2a, the attachment position of the foreign matter is the non-contact concave surface portion 7 or the non-contact concave surface portion 7 and If it is a part of the other overlapping polymerization surface 2a (1a) (that is, if the polymerization surfaces 1a and 2a are not in close contact with each other), the adhered foreign matter is sandwiched between the polymerization surfaces 1a and 2a in a pressed state. Since there is no biting, there is no effect on the gap film thickness.

  In other words, the present invention reduces the contact area between the overlapping surfaces 1a and 2a of the pair of nozzle halves 1 and 2 by making the one overlapping surface 1a (2a) into an irregular surface shape. It is possible to reduce the probability of pinching (clogging) foreign matter such as the overlapping surfaces 1a and 2a, and to prevent the above-described problem that the dimensional reproducibility is impaired by this foreign matter. Can be realized.

  In addition, when the flat surfaces are polymerized, it is necessary to process the entire flat surface with high surface accuracy so as not to cause polymerization strain, and so much labor and cost are required for processing. As described above, at least one of the superposed surfaces 1a and 2a is formed in a concavo-convex shape, and surface processing is simpler than a flat surface (at least the non-contact concave surface portion 7 requires high surface accuracy. Therefore, it is easy to manufacture.

  Further, for example, as in the example described later, the one overlapping surface 1a (2a) formed in a concavo-convex surface shape is in close contact with the part of the other overlapping surface 2a (1a) on the surface 6A. Are formed as the close contact convex portion 6, and the concave surface portion between the close contact convex portion 6 A is configured as the non close contact concave surface portion 7. Since the contact area 6a of one overlapping surface 1a (2a) and the other overlapping surface 2a (1a) are in close contact with each other while reliably reducing the contact area between the two members, the nozzle half 1 , It will also be excellent in the adhesion stability of the two comrades.

  Further, for example, the nozzle body A is provided with a bolt through hole 8 in communication with the pair of nozzle halves 1 and 2, and a nut 9B is screwed and fixed to a tightening bolt 9A inserted through the bolt through hole 8. The pair of nozzle halves 1 and 2 are clamped and fixed, and the bolt through hole 8 is located at a position penetrating the close contact convex surface portion 6A of the one overlapping surface 1a (2a) formed in an uneven surface shape. The close contact convex surface portion 6A formed with the bolt through hole 8 and a part of the other overlapping surface 2a (1a) in close contact therewith are fastened and fixed by the tightening bolt 9A and the nut 9B. If it is configured as a fastening surface, it is possible to surely reduce the contact area between the overlapping surfaces 1a and 2a, while also securely tightening the overlapping surfaces 1a and 2a with the tightening bolt 9A and the nut 9B. Na . That is, the close contact convex surface portion 6A and a part of the other overlapping surface 2a (1a) in close contact therewith serve as a tightening allowance between the tightening bolt 9A and the nut 9B, and the tightening between the tightening bolt 9A and the nut 9B. The pressure can be exhibited well.

  Specific embodiments of the present invention will be described with reference to the drawings.

  The present embodiment has a nozzle main body A composed of a pair of nozzle halves 1 and 2, and this nozzle main body A superposes the overlapping surfaces 1a and 2a of the pair of nozzle halves 1 and 2 on each other. A slit-like gap is formed between the pair of nozzle halves 1 and 2, and the slit-like gap is configured as the nozzle internal liquid passage 3, and the tip of the nozzle internal liquid passage 3 is connected to the slit-like tip discharge port 4. The coating liquid a supplied from the liquid supply unit is discharged from the tip discharge port 4 through the nozzle internal liquid passage 3, and the coating liquid a is applied to the coated body 5 in the form of a thin film. In the apparatus, the overlapping surfaces 1a and 2a of the pair of nozzle halves 1 and 2 constituting the nozzle body A do not have a flat surface shape that is in close contact with each other, but at least one overlapping surface 1a (2a). ) Is dense with the other polymerization surface 2a (1a). An adhesion protrusion 6 which is obtained by forming the uneven surface shape consisting of a non-contact concave portion 7 for foreign matter entering the dust and dirt without adhesion contact with the other polymer surface 2a (1a).

  Hereinafter, the present embodiment will be specifically described.

  The nozzle body A is provided with a bolt through hole 8 in communication with the pair of nozzle halves 1 and 2, and a nut 9 B is screwed and fixed to a tightening bolt 9 A inserted through the bolt through hole 8. In this configuration, a pair of nozzle halves 1 and 2 are fastened and fixed. In the illustrated embodiment, the lower half of the pair of upper and lower nozzle halves 1 and 2 is the nozzle half 1 and the upper half is the nozzle half 2.

  Specifically, as illustrated in FIG. 1, the bolt through holes 8 are arranged in a plurality (five places) in a row in the width direction of the nozzle body A in a plurality of rows (two rows) before and after the nozzle body A. Form.

  In addition, a stepped portion with which the bolt head portion of the tightening bolt 9A comes into contact with and is in contact with the upper surface of the upper nozzle half 2 as the upper opening portion of each bolt through hole 8 is provided.

  Further, the nut 9B is formed in a rectangular shape instead of an annular shape, and although not shown in the drawing, the lower opening of the plurality of bolt through-holes 8 is formed on the lower surface of the lower nozzle half 1, A rectangular stepped portion is formed in which the nut 9B formed in a rectangular ring shape is fitted and prevented from rotating, and the tightening bolt 9A is locked in a state in which the nut 9B is prevented from rotating in the rectangular stepped portion. Is configured to be able to be tightened and screwed well.

  In this embodiment, a film thickness adjusting mechanism 13 that adjusts the film thickness on the order of nm is provided. The film thickness adjusting mechanism 13 is for finely deforming the shape of the tip discharge port 4 and finely adjusting the degree of opening in advance so as to adjust the film thickness to be uniform in the width direction. This setting takes a long time, and once the adjustment is set, the adjustment mechanism does not want to be readjusted as much as possible. Therefore, in this embodiment, the nozzle halves 1 and 2 are divided in order to clean the inside of the nozzle, and even when assembled again after cleaning, the uniformity of the film thickness does not change, and the film thickness adjusting mechanism 13 is readjusted. It is configured so that the setting is unnecessary.

  More specifically, in this embodiment, the upper half of the nozzle half 2 (a plurality of adjustment grooves 13C opened forward in the width direction of the upper position of the tip discharge port 4 is formed at the upper portion) is arranged in the width direction. The provided adjustment screw 13A is provided, and the film thickness adjusting mechanism 13 is configured to adjust the film thickness in the width direction to be uniform on the nano order by adjusting the screw of the adjustment screw 13A. Specifically, a screw hole 13B in which a female screw for screwing each adjustment screw 13A is formed in the inner peripheral surface is formed through the adjustment groove 13C, and each adjustment screw 13A is inserted into each screw hole 13B. And the tip of the screw passes through the adjusting mechanism 13C and is further screwed into a screw hole 13B provided in the lower part (bottom) of the adjusting groove 13C. For example, the upper and lower screw holes 13B of the adjusting groove 13C By changing the pitch of the adjustment screw 13A, the lower part of the adjustment groove 13C at the tip portion of the upper nozzle half 2 is slightly bent up and down by the forward / backward screwing operation of the adjustment screw 13A. The opening shape of the A front end discharge port 4 is deformed and adjusted, and the film thickness is adjusted in the width direction of the coating liquid a discharged from the front end discharge port 4 so as to be uniform.

  Further, in this embodiment, the pair of upper and lower nozzle halves 1 and 2 constituting the nozzle body A are opposed to each other with a gap in the tip side (front side) region of the opposed surface portions facing each other. As the spaced opposed surface portion, the gap between the separated opposed surface portions is configured as the nozzle internal liquid passage 3 of the nozzle body A, while the side opposite to the tip side, that is, the rear side, is a polymerization surface that is superposed on each other. 1a, 2a.

  As shown in FIGS. 1, 3, and 4, the nozzle body portion A extends in the width direction on the opposing surface portion of the lower nozzle half 1 corresponding to the lower surface of the nozzle liquid passage 3. The manifold 10 is recessed, and an in-nozzle liquid supply path 14 communicating with the liquid supply part connected to the manifold 10 and the rear end of the nozzle body A is provided.

  In this embodiment, of the pair of upper and lower nozzle halves 1 and 2, the overlapping surface 1 a of the lower nozzle half 1 is formed in an uneven surface shape composed of the contact convex portion 6 and the non-contact concave portion 7. . (The overlapping surface 2a of the upper nozzle half 2 may be formed in an uneven surface shape, or the overlapping surfaces 1a, 2a of both the pair of nozzle halves 1 and 2 may be formed in an uneven surface shape. ).

  In addition, each of the plurality of contact protrusions 6 formed on the overlapping surface 1a of the lower nozzle half 1 is, for example, a tip sharply in contact with a part of the overlapping surface 2a of the upper nozzle half 2 at a point. Although it may be formed in a shape, in the present embodiment, it is configured as a close contact convex surface portion 6A that is in close contact with a part of the upper overlapping surface 2a, and a concave surface portion between the plurality of close contact convex surface portions 6A. Is configured as the non-contact concave surface portion 7. That is, for example, a plurality of close contact projections 6 are in close contact with each other as compared with the case where the upper half of the nozzle 2 is formed in a sharp tip shape in close contact with the overlapping surface 2a. Excellent polymerization stability. In addition, it is possible to prevent a trouble that the overlapping surface 2a of the upper nozzle half 2 is deformed by the contact protrusion 6 having a sharp tip shape or the contact protrusion 6 having a sharp tip shape is deformed.

  Further, the bolt through hole 8 of the nozzle body A is formed at a position penetrating the close contact convex surface portion 6A of the one overlapping surface 1a (2a) formed in an uneven surface shape, and this bolt through hole 8 is formed. The close contact convex surface portion 6A and a part of the other overlapping surface 2a (1a) in close contact therewith are configured as a fastening fixing surface that is fastened and fixed by the fastening bolt 9A and the nut 9B.

  That is, the close contact convex surface portion 6A and a part of the other overlapping surface 2a (1a) in close contact therewith serve as a tightening allowance between the tightening bolt 9A and the nut 9B, and the tightening between the tightening bolt 9A and the nut 9B. The pressure can be exhibited well.

  Further, as shown in FIG. 1, the overlapping surface 1 a (2 a) of the lower nozzle half 1 forms the close contact convex portion 6 extending in the width direction of the nozzle body A, and this width. The close contact convex portion 6 extending in the direction is configured as a liquid flow passage closing convex portion 11 that closes the rear side of the nozzle internal liquid passage 3 (see FIG. 3), whereby the coating liquid a is placed in the nozzle. The liquid passage closing projection 11 prevents the liquid passage 3 from flowing to the rear side.

  Further, as shown in FIGS. 1 and 4, the liquid passage blocking convex portion 11 has a convex shape that comes into close contact with the upper overlapping surface 2 a. As shown in FIG. 4, the bolt passage hole 8 formed in the front row of the two front and rear rows of the nozzle main body A and arranged in parallel at five locations in the width direction has the liquid passage blocking convex portion 11. It is formed at a position that penetrates.

  And the said bolt through-hole 8 formed in the back row of the front and back two rows of the nozzle main-body part A and arranged in five places in the width direction is respectively in the position of the back side rather than the said liquid path obstruction | occlusion convex part 11. It forms in the position which penetrates each several contact | adherence convex surface part 6A formed independently.

  That is, the overlapping surface 1a of the lower nozzle half 1 has a close contact convex surface portion 6A as the liquid passage closing convex portion 11 formed in the extending state in the width direction, and a rear side from the liquid passage closing convex portion 11. A plurality of independent contact convex surface portions 6A that are formed in an annular shape by passing through the bolt through holes 8 as a portion are set as the close contact convex portions 6, and other portions are formed in the upper nozzle half 2. It is the structure formed in the uneven | corrugated surface shape as the non-contact | adherence concave surface part 7 which does not contact | abut closely on the superposition | polymerization surface 2a.

  That is, in the overlapping surface 1a of the lower nozzle half 1 formed in the uneven surface shape, the portion through which the bolt through-hole 8 passes is provided as a tightening margin between the tightening bolt 9A and the nut 9B as described above. However, it is desirable to form the remaining portion as the non-contact concave surface portion 7 so that the contact area with the overlapping surface 2a of the upper nozzle half 2 can be reduced.

  For example, if the liquid passage blocking convex portion 11 is also formed into an independent shape that is not continuous in the width direction, like the annular close contact convex surface portions 6A formed at the rear portion thereof, the contact area of the polymerization surfaces 1a and 2a is further increased accordingly. In this case, in order to prevent the coating liquid a supplied to the liquid passage 3 in the nozzle from flowing backward from the nozzle body A and leaking from the rear end of the nozzle body A. It is troublesome because it is necessary to provide a closing member and a closing structure (seal structure). In this respect, in this embodiment, the liquid passage closing projection 11 exhibits both a function as a tightening allowance between the tightening bolt 9A and the nut 9B and a function as a closing structure. There is no need to provide it.

  It should be noted that the formation positions of the plurality of annular close contact convex surface portions 6A formed at the rear portion of the liquid passage closing convex portion 11 are at least exactly the liquid passage closing convex portion 11 and the rear end portion of the nozzle main body A. The position is set closer to the rear end of the nozzle body A than the intermediate position.

  As a result, the liquid passage blocking convex portion 11 and the plurality of contact convex surface portions 6A formed at the rear portion thereof can be separated, and the polymerization stability between the polymerization surfaces 1a and 2a of the nozzle halves 1 and 2 is increased accordingly. Further, high horizontal accuracy is easily obtained when the overlapping surfaces 1a and 2a of the nozzle halves 1 and 2 are overlapped.

  Further, in the figure, reference numeral 15 denotes a side closing member 15 that closes both sides in the width direction of the nozzle body A, and is attached and fixed to the amount in the width direction of the nozzle body A by a screw bolt 15A. Is.

  Note that the present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.

It is a description disassembled perspective view of the nozzle main-body part of the thin film coating device which concerns on a present Example. It is a principal part description division | segmentation perspective view of the thin film coating device which concerns on a present Example. It is a description sectional side view of the thin film coating device which concerns on a present Example. It is a description sectional side view of the thin film coating device which concerns on a present Example. It is explanatory drawing which shows a prior art example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Nozzle half 1a Superposition | polymerization surface 2 Nozzle half 2a Superposition | polymerization surface 3 Nozzle liquid channel | path 4 Discharge port of a tip 5 Coated object 6 Contact | adherence convex part 6A Contact | adherence convex part 7 Non-adhesion concave part 8 Bolt through-hole 9A Tightening bolt 9B
11 Liquid flow path blocking convex part A Nozzle body part a Coating liquid

Claims (6)

  A nozzle body having a pair of nozzle halves, the nozzle body overlapping the overlapping surfaces of the pair of nozzle halves to form a slit-like gap between the pair of nozzle halves; The slit-shaped gap is configured as a nozzle-in-liquid passage, and the tip of the nozzle-in-liquid passage is configured as a slit-shaped tip discharge port. The coating liquid supplied from the liquid supply unit is passed through the nozzle-in-liquid passage. In the thin film coating apparatus for discharging the coating liquid from the tip discharge port and applying the coating liquid to the coated body in a thin film form, the overlapping surfaces of the pair of nozzle halves constituting the nozzle body are flush with each other. Without forming a surface shape, at least one of the overlapping surfaces is a close contact convex portion that is in close contact with the other overlap surface, and a non-adhesive concave surface into which foreign matter such as dust or dust enters without being in close contact with the other overlap surface Concave made up of parts Thin coating apparatus being characterized in that formed on the surface shape.   The one overlapping surface formed in an uneven surface shape forms a plurality of closely contacting convex surface portions that are in close contact with a part of the other overlapping surface, and constitutes each closely contacting convex surface portion as the closely contacting convex portion, 2. The thin film coating apparatus according to claim 1, wherein a concave surface portion between the contact convex surface portions is configured as the non-contact concave surface portion.   The nozzle body is provided with a bolt through hole in communication with the pair of nozzle halves, and a nut is screwed and fixed to a tightening bolt inserted through the bolt through hole to fix the pair of nozzle halves. The bolt through hole is formed at a position penetrating the close contact convex surface portion of the one overlapping surface formed in an uneven surface shape, the close contact convex surface portion having the bolt through hole formed therein, and the close contact contact with the close contact convex surface portion. 3. The thin film coating apparatus according to claim 2, wherein a part of the other overlapping surface in contact is configured as a fastening fixing surface that is fastened and fixed by the fastening bolt and the nut.   The one overlapping surface formed in the uneven surface shape is formed with the close contact convex portion extending in the width direction of the nozzle body portion, and the close contact convex portion extending in the width direction is formed in the nozzle. The liquid passage is formed as a liquid flow passage closing convex portion that closes the rear side opposite to the side on which the tip discharge port is formed, and the coating liquid flows to the rear side of the liquid passage in the nozzle. The thin film coating apparatus according to claim 1, wherein the thin film coating apparatus is configured to be blocked by a passage blocking convex portion.   The said one superposition | polymerization surface formed in the uneven | corrugated surface shape makes the said liquid flow path obstruction | occlusion convex part extended in the width direction, and makes it a position of the back side rather than this liquid flow passage obstruction | occlusion convex part of the said Claim 3. 5. A thin film coating apparatus according to claim 4, wherein said thin film coating device is formed in a concavo-convex surface shape comprising a plurality of closely contacting convex surface portions penetrating through bolt holes and said non-contacting concave surface portion between said plurality of closely contacting convex portions. .   The liquid flow path blocking convex portion of the one overlapping surface formed in an uneven surface shape is configured by extending in the width direction the close convex portion that is in close contact with a part of the other overlapping surface. The nozzle main body has a configuration in which a plurality of the bolt through holes are formed in a juxtaposed manner along the liquid channel blocking convex portion at a position penetrating the liquid channel blocking convex portion of the one polymerization surface. The thin film coating apparatus according to claim 5.

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