JP2019030859A - Coating device and coating method - Google Patents

Abstract

To provide a coating device which can coat a coating film with no occurrence of coating streaks.SOLUTION: A coating device comprising: a first manifold 11 comprising a space which so accumulates a coating liquid as to be longer in a width direction; a die 10 provided with a discharge port 18 which is connected to the first manifold 11 via a slit 12, which is wide in the width direction, and discharges a coating liquid 3 onto a base material 2, and plural drainage ports 31 which are provided in the width direction of the slit 12 between the first manifold 11 and the discharge port 18 and drains the coating liquid; and supply means 20 which supplies the coating liquid to the first manifold 11 from an inflow part 16 communicated with the first manifold 11. A cross section of an opening on the slit 12 side in the drainage port 31 is a width wide shape which has a longer dimension in the width direction than that in a direction orthogonal to said width direction.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a coating apparatus and a coating method for coating a substrate with a coating liquid.

  2. Description of the Related Art A battery plate or the like is manufactured by applying a coating liquid from a die discharge port onto a substrate that is fed by roll-to-roll. For example, in the case of a battery, the thickness of the coating film formed on the base material directly affects the charge / discharge amount of the battery. Therefore, it is very important to control the thickness of the coating liquid applied to the base material. It becomes. That is, the coating liquid needs to be applied with a uniform thickness along the width direction and the feeding direction of the substrate.

  Patent Document 1 describes a configuration in which the thickness of a coating film formed on a substrate is made uniform even when the coating liquid is discharged for a long time.

  Patent Document 1: Japanese Patent Laid-Open No. 2015-97198

  However, in the one described in Patent Document 1, the flow rate of the coating liquid at the central portion of the cross section of the discharge port (adjustment unit) for returning the coating liquid from the die to the tank is faster than the peripheral portion of the cross section, and the fluctuation of the coating liquid discharge occurs. There has been a problem that coating stripes are generated on the coating surface at the position in the width direction where the discharge port exists.

This invention solves the said problem and makes it a subject to apply the coating film which a coating stripe does not generate | occur | produce.

In order to solve the above-described problems, the present invention is connected to the first manifold including a space in which the coating liquid is accumulated in the width direction for a long time, and the first manifold via a wide slit in the width direction. A die formed with a discharge port for discharging the substrate, and a plurality of discharge ports provided in the width direction between the first manifold of the slit and the discharge port, for discharging the coating liquid; ,
A supply means for supplying a coating liquid to the first manifold from an inflow portion communicating with the first manifold,
The cross section of the opening on the slit side in the discharge port is a wide shape having a longer dimension in the width direction than in the direction orthogonal to the width direction. is there.

With this configuration, it is possible to disperse local flow velocity fluctuations, and thus it is possible to apply a coating film in which no coating stripes are generated.

A second manifold that is long in the width direction is provided between the first manifold and the discharge port of the slit, and an opening on the slit side of the discharge port is provided in the second manifold. It is good also as a structure currently provided.

With this configuration, the discharge flow rate can be easily adjusted, and a coating film in which no coating stripes are generated can be applied.

The wide shape may be a long hole having a dimension that is longer in the width direction than in a direction orthogonal to the width direction.

With this configuration, the discharge port can be easily manufactured, and the flow rate of the coating liquid can be effectively leveled.

The end of the discharge port opposite to the opening on the slit side is connected to a pipe having a circular cross section, and the discharge port has the wide shape so that the cross section at the connection portion with the pipe is circular. It is good also as the structure which has comprised the taper shape from the said circular shape.

With this configuration, there is no discontinuous portion in the connection portion from the discharge port to the pipe in the die, and the coating liquid can flow out smoothly. If the discharge port is not tapered from the wide shape to the circular shape and there is a discontinuous portion at the connection portion from the discharge port to the pipe, the coating liquid tends to stay.

In order to solve the above-described problem, the present invention provides a coating liquid stored in a first manifold formed in a die that is long in the width direction through the first slit that is wide in the width direction. A coating method in which a substrate is discharged from a discharge port connected to a manifold and applied to a substrate, and a plurality of coating liquids are provided across the width direction between the first manifold and the discharge port of the slit. Dispersion of local flow velocity fluctuations by making the opening on the slit side in the discharge port for flowing out a wide shape having a longer dimension in the width direction than in the direction orthogonal to the width direction. A coating method characterized by the above is provided.

With this configuration, it is possible to disperse local flow velocity fluctuations, and thus it is possible to apply a coating film in which no coating stripes are generated.

It is a figure explaining schematic structure of the coating apparatus in Example 1 of this invention. It is sectional drawing of arrow a of FIG. (A) is sectional drawing of arrow b of FIG. 1, (b) is a top view of the shim board 15. FIG. BRIEF DESCRIPTION OF THE DRAWINGS It is a figure explaining the discharge port in Example 1 of this invention, (a) is a top view, (b) is BB sectional drawing of (a), (c) is CC sectional drawing of (a). is there. It is a figure explaining the discharge | emission port in a modification, (a) is a top view, (b) is BB sectional drawing of (a), (c) is CC sectional drawing of (a). It is a figure explaining schematic structure of the coating apparatus in Example 2 of this invention.

A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a diagram illustrating a schematic configuration of a coating apparatus according to a first embodiment of the present invention. 2 is a cross-sectional view taken along arrow a in FIG. 3A is a cross-sectional view taken along the arrow b in FIG. 1, and FIG. 3B is a plan view of the shim plate 15. FIGS. 4A and 4B are diagrams illustrating the discharge port according to the first embodiment of the present invention, in which FIG. 4A is a top view, FIG. 4B is a cross-sectional view along line BB in FIG. 4A, and FIG. It is C sectional drawing. 5A and 5B are diagrams illustrating a discharge port in a modified example, in which FIG. 5A is a top view, FIG. 5B is a cross-sectional view along line BB in FIG. 5A, and FIG. 5C is a cross-sectional view along line CC in FIG. is there.

The coating apparatus 1 is an apparatus for applying the coating liquid 3 to the base material 2 fed by roll-to-roll. The coating liquid 3 is applied with a uniform thickness (uniform coating amount) along the feed direction MD of the substrate 2. In addition, the width direction TD of the base material 2 is a direction orthogonal to the feed direction MD of the base material 2, and the Y-axis direction in FIG.

The coating apparatus 1 includes a die 10 that is long along the width direction of the substrate 2 and a supply unit 20 that supplies the coating liquid 3 to the die 10. In the die 10, the longitudinal direction (Y-axis direction in FIG. 1) is referred to as a width direction TD. In this coating apparatus 1, a roller 5 facing the die 10 is installed, and the width direction of the die 10 and the direction of the rotation center line of the roller 5 are parallel. The base material 2 is guided by this roller 5, and the space | interval (gap) of the base material 2 and die | dye 10 (tip of the slit 12 mentioned later) is kept constant, and the coating liquid 3 is applied in this state. .

The die 10 includes a first divided body 13 having a first lip 13a having a tapered shape and a second divided body 14 having a second lip 14a having a tapered shape, with a shim plate 15 interposed therebetween, It consists of a combined configuration. 2 is a cross-sectional view taken along arrow a in FIG. 3A is a cross-sectional view taken along the arrow b in FIG. 1, and the shim plate 15 is shown in FIG. The die 10 is formed therein with a first manifold 11 having a long space in the width direction, and a slit 12 connected to the first manifold 11, and a first lip 13a and a second lip 14a. A discharge port 18 that is an open end of the slit 12 is formed therebetween. That is, the first manifold 11 and the discharge port 18 are connected via the slit 12.

With this configuration, the coating liquid 3 supplied by the supply means 20 is first stored in the first manifold 11 and then discharged from the discharge port 18 via the slit 12.

The slit 12 is formed long in the width direction TD similarly to the first manifold 11, and the width direction dimension of the slit 12 is determined by an inner dimension W (see FIG. 3B) of a shim plate 15 described later. The coating liquid 3 having a width direction dimension substantially the same as the width direction dimension of the slit 12 can be applied on the substrate 2. The clearance dimension (height dimension) of the slit 12 is, for example, 0.4 to 1.5 mm. In the first embodiment, the die 10 is installed in such a posture that the gap direction of the slit 12 is the vertical direction and the width direction is the horizontal direction. That is, the die 10 is installed in such a posture that the first manifold 11 and the slit 12 are arranged side by side in the horizontal direction. Therefore, the direction in which the coating liquid 3 stored in the first manifold 11 flows to the base material 2 through the slit 12 and the discharge port 18 is a horizontal direction.

In addition, by changing the thickness of the shim plate 15, the pressure (coating pressure) inside the first manifold 11 can be adjusted. By this adjustment, a uniform film can be formed with the coating liquid 3 having various characteristics. Thick coating can be performed.

Moreover, in Example 1, although the direction in which the coating liquid 3 flows to the base material 2 through the discharge port 18 was set as the horizontal direction, it is not necessarily limited to this and can be changed appropriately. For example, it may be an upward direction or a downward direction, and can be set in an arbitrary direction.

An inflow portion 16 is provided at the center in the width direction of the die 10, and the inflow portion 16 includes a through hole (inflow port) connected to the first manifold 11 from the outside of the die 10. The supply means 20 includes an inflow pipe 21 having one end connected to the inflow section 16, a tank 22 storing the coating liquid 3, and the coating liquid 3 in the tank 22 to the die 10 through the pipe 21. And a pump 23 for supply. As described above, the supply unit 20 can supply the coating liquid 3 from the inflow portion 16 to the first manifold 11. In Example 1, as shown in FIG. 1, the inflow portion 16 is connected to the bottom portion 17 of the first manifold 11, and the coating liquid 3 is allowed to flow from the bottom portion 17.

The first manifold 11 can store the coating liquid 3 supplied from the supply means 20, and rolls the coating liquid 3 stored in the first manifold 11 from the discharge port 18 through the slit 12. It discharges with respect to the base material 2 sent by a two-roll, and can apply the coating liquid 3 with respect to this base material 2 continuously. The gap dimension of the slit 12 is constant in the width direction, and the thickness of the coating liquid 3 applied on the substrate 2 is constant in the width direction.

The die 10 is provided with a pressure sensor (not shown), and this pressure sensor measures the internal pressure of the coating liquid 3 in the first manifold 11. Based on the measurement result, the supply of the coating liquid 3 by the supply means 20 is controlled, and the internal pressure of the coating liquid 3 in the first manifold 11 is kept constant. The coating liquid 3 having a constant internal pressure in the first manifold 11 is ejected from the slit 12 in an equal amount over the entire length in the width direction, and based on the measurement result of the pressure sensor, the coating liquid 3 is ejected from the slit 12. The amount of the liquid 3 is controlled so as not to fluctuate, and the thickness of the coating liquid 3 applied on the substrate 2 in the feeding direction is made constant. Although not shown, a filter for the coating liquid 3 is provided in the middle of the pipe 21.

The slit 12 is provided with discharge ports 31, 32, 33, 34 through which the coating liquid 3 of the first manifold 11 flows out of the die 10 from other than the discharge port 18. In the first embodiment, first and second discharge ports 31 and 32 are provided at both end portions 12a and 12b in the width direction of the slit 12, and second intermediate portions 12c and 12d between the both end portions 12a and 12b 3 and fourth discharge ports 33 and 34 are provided.

The discharge ports 31, 32, 33, 34 include a through hole that connects the slit 12 and the outside of the die 10, and pipes 51, 52, 53, 54 having a circular cross section connected to the through hole. One ends of the pipes 51, 52, 53, 54 are connected to the tank 22, and the coating liquid 3 stored in the tank 22 flows into the first manifold 11 from the inflow portion 16, and the discharge ports 31, 32, 33. , 34, the coating liquid 3 can be returned to the tank 22.

The cross section of the opening on the slit side of the discharge ports 31, 32, 33, 34 has a wide shape having a dimension that is longer in the width direction TD than in the direction orthogonal to the width direction TD. This is to avoid fluctuations in the local flow rate of the coating liquid 3 at the discharge ports 31, 32, 33 and 34. In general, when a liquid is flowed in a circular cross section, the flow velocity at the central portion of the circular shape is increased, and local fluctuations in the flow velocity occur. When such local fluctuations in the flow velocity occur at the discharge ports 31, 32, 33, and 34, a coating streak may occur at the position of the discharge port for a long time in the feed direction MD of the coating film. In Example 1, in order to prevent the occurrence of the coating streaks, the cross section of the opening on the slit side of the discharge ports 31, 32, 33, 34 is longer in the width direction TD than in the direction orthogonal to the width direction TD. A wide shape with dimensions is devised so that local fluctuations in the flow velocity do not occur.

Further, the cross section of the opening on the slit side of the discharge ports 31, 32, 33, and 34 is more preferably a long hole shape having a dimension that is longer in the width direction TD than in the direction orthogonal to the width direction TD. As a result, the discharge port can be easily manufactured, and the flow rate of the coating liquid can be effectively leveled.

The shape of the discharge port in Example 1 will be described in detail. Since the discharge ports 31, 32, 33, and 34 all have the same shape, the discharge port 32 will be described as an example. 4A is a top view of the discharge port 32 as viewed from the slit 12 side, FIG. 4B is a cross-sectional view of FIG. 4A, and FIG. 4C is a cross-sectional view of FIG.

As shown in FIGS. 3A and 4A, the cross section of the opening on the slit 12 side of the discharge port 32 has a longer dimension in the width direction TD than in the direction orthogonal to the width direction TD. It has the shape of The length in the width direction TD of the cross section of the opening on the slit 12 side of the discharge port 32 is longer than the diameter of the pipe 52, and the length in the direction orthogonal to the width direction TD is shorter than the diameter of the pipe 52. On the other hand, the end of the discharge port 32 opposite to the slit 12 side is connected to a pipe 52 having a circular cross section. Since the cross-sectional shape of the pipe 52 is circular, the discharge port 32 is tapered from a wide elongated hole shape to a circular shape so that the connection portion of the discharge port 32 with the pipe 52 is circular. (See FIGS. 4B and 4C). As a result, the discharge port 32 can be smoothly connected to the pipe 52 having a circular cross section, local fluctuations in flow velocity can be suppressed, and the stay of the coating liquid 3 at the connection portion can be prevented.

In Example 1, the cross section of the opening on the slit 12 side of the discharge port 32 is in the shape of a long hole having a longer dimension in the width direction TD than in the direction orthogonal to the width direction TD. The present invention is not limited to this, and can be changed as appropriate. For example, the cross section of the opening on the slit 12 side of the discharge port 32 may have a rectangular shape having a dimension that is longer in the width direction TD than in a direction orthogonal to the width direction TD, or may have an elliptical shape. The cross section of the opening portion on the slit 12 side of at least the discharge port 32 may be any shape having a longer dimension in the width direction TD than in the direction orthogonal to the width direction TD. Further, the length in the direction orthogonal to the width direction TD of the cross section of the opening on the slit 12 side of the discharge port 32 is a shape having a dimension shorter than the diameter of the pipe 52, but is not necessarily limited thereto, and can be changed as appropriate. It is. For example, the length in the direction orthogonal to the width direction TD may be the same as the diameter of the pipe 52.

If the opening cross section on the slit 12 side of the discharge port 32 has a shape with a shorter dimension in the width direction TD than the direction orthogonal to the width direction TD, the local shape in the discharge port 32 is similar to the circular shape. As a result, the flow rate fluctuates, and the coating surface is uneven due to the fluctuation of the coating amount to form a coating stripe.

Each of the discharge ports 31, 32, 33, and 34 is provided with a control device that adjusts the amount of the coating liquid 3 that flows out from the slit 12. More specifically, as shown in FIG. 2, valves 61, 62, 63, and 64 are connected to the pipes 51, 52, 53, and 54 as the control device. Each of these valves 61, 62, 63, 64 has a function of adjusting the flow rate of the coating liquid 3 flowing out from each of the discharge ports 31, 32, 33, 34. Each of the valves 61, 62, 63, 64 may adjust the pressure of the coating liquid 3 flowing out from the discharge ports 31, 32, 33, 34, respectively. Alternatively, a device (for example, a pump) that performs flow rate management (outflow amount adjustment) of the coating liquid 3 is provided in the middle of the piping 51, 52, 53, 54 that connects the discharge ports 31, 32, 33, 34 and the tank 22. In this case, this device functions as a control device that performs discharge adjustment of the coating liquid 3 that flows out from the slit 12.

Moreover, this coating apparatus 1 is provided with the sensor 36 which measures the film thickness of the coating liquid 3 apply | coated on the base material 2 (refer FIG. 1). A plurality of sensors 36 may be provided along the width direction. The sensor 36 is a non-contact type, and can measure the film thickness of the coating liquid 3 on the substrate 2 at a plurality of locations along the width direction or over the entire length in the width direction TD. The data is output to a control device (computer) 37 provided in the device 1. The control device 37 performs feedback control based on the measurement result from the sensor 36 and adjusts the opening degree of the valves 61, 62, 63, 64. That is, the control device 37 outputs a control signal to each of the valves 61, 62, 63, 64 according to the measurement result of the film thickness of the coating liquid 3, and the opening degree of each of the valves 61, 62, 63, 64. Adjust. Thereby, the film thickness of the coating liquid 3 can be kept constant in the width direction.

Note that the opening degree of the valves 61, 62, 63, 64 may be controlled by a timer function of the control device 37 instead of the sensor 36. In other words, when a certain time has elapsed from the start of application, precipitation and aggregation of the solid component of the coating liquid 3 becomes a problem. Therefore, a predetermined time before this time elapses is measured with a timer, and when the predetermined time elapses, control is performed. The device 37 may perform control to increase the opening degree of the valves 61, 62, 63, 64.

In the first embodiment, the number of discharge ports is four. However, the number is not necessarily limited to this, and can be changed as appropriate. For example, the number may be two or three, or may be five or more, and can be any number depending on the length of the die 10 in the width direction TD and the strictness of the film thickness management.

Furthermore, in the first embodiment, the cross sections of the pipes 51, 52, 53, and 54 are circular, but the invention is not necessarily limited to this and can be changed as appropriate. For example, an elongated hole shape or a rectangular shape has the same shape as the cross section of the discharge ports 31, 32, 33, 34, and the piping 51, 52, 53, 54 without tapering the discharge ports 31, 32, 33, 34. You may comprise so that it may connect.

(Modification) The shape of the discharge port in the modification will be described. FIGS. 5A and 5B are diagrams illustrating a discharge port in a modified example, where FIG. 5A is a top view, FIG. 5B is a cross-sectional view along line BB in FIG. 5A, and FIG. 5C is a cross-sectional view along line CC in FIG. It is. Since the discharge ports 32, 33, 34, and 35 all have the same shape, the discharge port 32 will be described as an example.

The cross section of the opening portion on the slit 12 side of the discharge port 32 in the modification has a shape of a long hole having a longer dimension in the width direction TD than in the direction orthogonal to the width direction TD. The length in the width direction TD of the cross section of the opening on the slit 12 side of the discharge port 32 is longer than the diameter of the pipe 52, and the length in the direction orthogonal to the width direction TD is shorter than the diameter of the pipe 52. And the edge part on the opposite side to the slit 12 side also has the shape of a long hole with the dimension of the width direction TD longer than the direction orthogonal to the width direction TD. Further, the length in the width direction TD of the end of the discharge port 32 opposite to the slit 12 side is longer than the diameter of the pipe 52, and the length in the direction orthogonal to the width direction TD is shorter than the diameter of the pipe 52. That is, the discharge port 32 of the modified example does not have a taper shape that changes from a long hole shape to a circular shape in order to connect to the pipe 52 having a circular cross section, and has a cylindrical shape having a long hole shape in cross section. The portion other than the portion connected to 52 has a bottom.

Therefore, the connection portion between the discharge port 32 and the pipe 52 in the modified example is discontinuous. For this reason, in the bottom portion of the discharge port 32 of the modified example, the flow velocity of the coating liquid 3 is disturbed, but since it is a distance away from the slit 12, there is little influence, and no coating stripes on the coating surface are generated. . However, since the connection portion between the discharge port 32 and the pipe 52 is discontinuous, the coating liquid 3 is retained. Therefore, it is preferable that the discharge port 32 is tapered and connected to the pipe 52 so as not to provide a discontinuous portion. More preferred.

In the modified example of the first embodiment, the length in the direction perpendicular to the width direction TD of the cross section of the opening on the slit 12 side of the discharge port 32 is set to be shorter than the diameter of the pipe 52. The present invention is not limited to this, and can be changed as appropriate. For example, the length in the direction orthogonal to the width direction TD may be the same as the diameter of the pipe 52.

Thus, in Example 1, it connects with the said 1st manifold via the 1st manifold which consists of the space which accumulates a coating liquid long in the width direction, and the said width direction, and a coating liquid is used as a base material. A die formed with a plurality of discharge ports for discharging the coating liquid, and a plurality of discharge ports for discharging the coating liquid provided in the width direction between the first manifold of the slits and the discharge ports; A supply means for supplying a coating liquid to the first manifold from an inflow portion communicating with the first manifold, and a cross section of the opening on the slit side in the discharge port is a direction perpendicular to the width direction. Since the coating apparatus is characterized in that it has a wide shape with a longer dimension in the width direction than the local flow rate fluctuations can be dispersed, a coating film that does not generate coating stripes Painting It can be.

In addition, the coating liquid stored in the first manifold that is long in the width direction formed on the die is discharged from a discharge port connected to the first manifold via the wide slit in the width direction, The slit side opening in the discharge port for allowing a coating liquid to flow out is provided between the first manifold and the discharge port of the slit in the width direction. By applying a coating method characterized in that local flow velocity fluctuations are dispersed by forming the portion into a wide shape having a dimension that is longer in the width direction than in the direction perpendicular to the width direction. It is possible to apply a coating film that does not generate any of the above.

The second embodiment of the present invention is different from the first embodiment in that the second manifold is provided in the die and the opening on the slit side in the discharge port is provided in the second manifold. A second embodiment will be described with reference to FIG. FIG. 6 is a diagram illustrating a schematic configuration of a coating apparatus according to the second embodiment of the present invention.

In the second embodiment, as shown in FIG. 6, a second manifold 24 is provided in the middle of the slit 12 (between the first manifold 11 and the discharge port 18), and a discharge port 31 is provided in the second manifold 24. , 32, 33, 34 are provided.

The length of the second manifold 24 in the width direction TD is equal to that of the first manifold 11 and the slit 12, and the cross-sectional area in the width direction is smaller than that of the first manifold 11. That is, the volume is smaller than that of the first manifold 11.

The opening on the slit side in the discharge ports 31, 32, 33, 34 is provided in the second manifold 24. Also in the second embodiment, the cross section of the opening portion on the slit 12 side of the discharge port 32 has a shape of a long hole having a longer dimension in the width direction TD than in a direction orthogonal to the width direction TD. On the other hand, the end of the discharge port 32 opposite to the slit 12 side is connected to a pipe 52 having a circular cross section. Since the cross-sectional shape of the pipe 52 is circular, the discharge port 32 is tapered from a wide elongated hole shape to a circular shape so that the connection portion of the discharge port 32 with the pipe 52 is circular. (See FIGS. 4B and 4C). Thereby, while suppressing the fluctuation | variation of the local flow velocity in the discharge port 32, it can connect smoothly to the piping 52 of circular cross section.

Thus, by providing the discharge ports 31, 32, 33, 34 in the second manifold 24, if the discharge ports 31, 32, 33, 34 are provided directly in the slit 12, the sensitivity of flow rate adjustment is too good, and the discharge port When it is difficult to control the discharge amount of the coating liquid 3 from 18, the adjustment sensitivity can be moderately moderated to easily control the discharge amount of the coating liquid 3.

Thus, in the second embodiment, a second manifold that is long in the width direction is provided between the first manifold and the discharge port of the slit, and the opening on the slit side in the discharge port is provided. Since the portion is provided in the second manifold, the discharge flow rate can be easily adjusted, and a coating film in which no coating stripe is generated can be applied.

The present invention can be widely applied to a coating apparatus and a coating method for coating a substrate with a coating liquid.

DESCRIPTION OF SYMBOLS 1: Coating apparatus 2: Base material 3: Coating liquid 5: Roller 10: Die 11: 1st manifold 12: Slit 16: Inflow part 17: Bottom part 18: Discharge port 20: Supply means 22: Tank 23: Pump 31 : Discharge port 32: Discharge port 33: Discharge port 34: Discharge port 36: Sensor 37: Control device 61: Valve 62: Valve 63: Valve 64: Valve

Claims (5)

A first manifold comprising a space for storing a coating liquid long in the width direction, a discharge port connected to the first manifold via a wide slit in the width direction, and discharging the coating liquid to the substrate; A die formed with a plurality of discharge ports for allowing the coating liquid to flow out, provided in the width direction between the first manifold of the slit and the discharge port;
A supply means for supplying a coating liquid to the first manifold from an inflow portion communicating with the first manifold,
The opening section on the slit side in the discharge port has a wide shape having a dimension that is longer in the width direction than in a direction orthogonal to the width direction.   A second manifold that is long in the width direction is provided between the first manifold and the discharge port of the slit, and an opening on the slit side of the discharge port is provided in the second manifold. The coating apparatus according to claim 1, wherein the coating apparatus is provided.   The coating apparatus according to claim 1, wherein the wide shape is an elongated hole having a dimension that is longer in the width direction than in a direction orthogonal to the width direction.    The end of the discharge port opposite to the opening on the slit side is connected to a pipe having a circular cross section, and the discharge port has the wide shape so that the cross section at the connection portion with the pipe is circular. The coating device according to claim 1, wherein the coating device is tapered from a circular shape to the circular shape. The coating liquid stored in the first manifold that is long in the width direction formed on the die is discharged from the discharge port connected to the first manifold via the wide slit in the width direction, and applied to the substrate. A coating method to work,
A plurality of openings in the width direction are provided between the first manifold and the discharge port of the slit, and the opening on the slit side in the discharge port for allowing the coating liquid to flow out from the direction perpendicular to the width direction. A coating method characterized in that local flow rate fluctuations are dispersed by forming a wide shape having a longer dimension in the width direction.

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