CN110997159A

CN110997159A - Coating device and coating method

Info

Publication number: CN110997159A
Application number: CN201880051608.3A
Authority: CN
Inventors: 北岛贤司; 元井昌司; 野村和夫; 藤田和彦
Original assignee: Toray Engineering Co Ltd
Current assignee: Toray Engineering Co Ltd
Priority date: 2017-08-10
Filing date: 2018-07-31
Publication date: 2020-04-10
Anticipated expiration: 2038-07-31
Also published as: KR102476172B1; JP6425776B1; WO2019031313A1; JP2019030859A; CN110997159B; KR20200039674A

Abstract

The invention aims to coat a coating film without generating coating stripes. Specifically, the coating device (1) is characterized by comprising: a die (10) in which a 1 st manifold (11) including a space that stores a coating liquid and is long in a width direction (TD), an ejection port (18) that is connected to the 1 st manifold (11) via a slit (12) that is wide in the width direction and ejects the coating liquid (3) onto a substrate (2), and ejection ports (31, 32, 33, 34) that discharge the coating liquid are formed, the ejection ports being provided in the width direction between the 1 st manifold (11) and the ejection port (18) of the slit (12); and a supply unit (20) that supplies the coating liquid to the 1 st manifold (11) from an inflow portion (16) that communicates with the 1 st manifold (11), wherein the cross section of the opening of the discharge ports (31, 32, 33, 34) on the slit (12) side has a wide shape in which the dimension in the width direction (TD) is longer than the dimension in the direction perpendicular to the width direction (TD).

Description

Coating device and coating method

Technical Field

The present invention relates to a coating apparatus and a coating method for coating a coating liquid on a substrate.

Background

The coating liquid is applied to a substrate transported in a roll-to-roll manner from a nozzle of a die to manufacture a battery electrode plate or the like. For example, in the case of a battery, since the thickness of a coating film formed on a substrate directly affects the charge/discharge amount of the battery, it is very important to control the film thickness of a coating liquid applied to the substrate. That is, the coating liquid needs to be applied in a uniform thickness along the width direction and the feeding direction of the substrate.

Patent document 1 describes the following structure: even if the discharge operation of the coating liquid is continued for a long time, the thickness of the coating film formed on the substrate can be made uniform.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2015-97198

Disclosure of Invention

Problems to be solved by the invention

However, the structure described in patent document 1 has the following problems: the flow rate of the coating liquid at the center portion of the cross section of the discharge port (adjustment portion) for returning the coating liquid from the die to the tank is higher than the flow rate at the peripheral portion of the cross section, and the amount of the coating liquid discharged varies, so that coating streaks are generated on the coating surface at the position in the width direction where the discharge port exists.

The present invention has been made to solve the above problems, and an object of the present invention is to coat a coating film in which coating streaks are not generated.

Means for solving the problems

In order to solve the above problem, the present invention provides a coating apparatus, comprising: a die in which a 1 st manifold including a space that is long in a width direction and stores a coating liquid, an ejection port that is connected to the 1 st manifold via a wide gap in the width direction and ejects the coating liquid onto a substrate, and an ejection port that allows the coating liquid to flow out are formed, the ejection port being provided in a plurality of the ejection ports in the width direction between the 1 st manifold and the ejection port in the gap; and a supply unit that supplies the coating liquid to the 1 st manifold from an inflow portion communicating with the 1 st manifold, wherein a cross section of an opening of the discharge port on the slit side has a wide shape in which a dimension in the width direction is longer than a dimension in a direction perpendicular to the width direction.

According to this configuration, since local flow rate fluctuations can be dispersed, a coating film in which coating streaks do not occur can be coated.

A 2 nd manifold that is long in the width direction may be provided between the 1 st manifold and the discharge port of the slit, and an opening of the discharge port on the slit side may be provided in the 2 nd manifold.

With this configuration, the ejection flow rate can be easily adjusted, and a coating film free from coating streaks can be coated.

The wide shape may be an elongated hole having a dimension in the width direction longer than a dimension in a direction perpendicular to the width direction.

According to this configuration, the discharge port can be easily manufactured, and the flow velocity of the coating liquid can be effectively equalized.

The discharge port may be connected to a pipe having a circular cross section at an end opposite to the opening on the slit side, and the discharge port may be tapered from the wide width shape to the circular cross section such that the discharge port has a circular cross section at a connection portion with the pipe.

According to this configuration, there is no discontinuous portion at the connecting portion from the discharge port to the pipe in the die, and the coating liquid can smoothly flow out. If the outlet is not tapered from the wide shape to a circular shape and if there is a discontinuous portion at the connection portion from the outlet to the pipe, the coating liquid is likely to be retained.

In order to solve the above-described problems, the present invention provides a coating method in which a coating liquid accumulated in a 1 st manifold formed in a mold and long in a width direction is discharged from a discharge port connected to the 1 st manifold through a wide slit in the width direction to coat a substrate, wherein a flow rate variation in a local area is dispersed by setting an opening portion on the slit side of a discharge port for discharging the coating liquid to a wide shape having a dimension in the width direction longer than a dimension in a direction perpendicular to the width direction, wherein a plurality of the discharge ports are provided between the 1 st manifold and the discharge port in the width direction of the slit.

According to this configuration, since local flow rate fluctuations can be dispersed, a coating film that does not cause coating streaks can be coated.

Drawings

Fig. 1 is a diagram illustrating a schematic configuration of a coating apparatus in example 1 of the present invention.

Fig. 2 is a sectional view as viewed along the arrow a in fig. 1.

Fig. 3 (a) is a cross-sectional view taken along the arrow b in fig. 1, and fig. 3 (b) is a plan view of the tie plate 15.

Fig. 4 is a view illustrating a discharge port in example 1 of the present invention, fig. 4 (a) is a plan view, fig. 4 (B) is a sectional view taken along line B-B of fig. 4 (a), and fig. 4 (C) is a sectional view taken along line C-C of fig. 4 (a).

Fig. 5 is a view illustrating a discharge port in a modification, fig. 5 (a) is a plan view, fig. 5 (B) is a sectional view B-B of fig. 5 (a), and fig. 5 (C) is a sectional view C-C of fig. 5 (a).

Fig. 6 is a diagram illustrating a schematic configuration of a coating apparatus in example 2 of the present invention.

Detailed Description

[ example 1]

Embodiment 1 of the present invention will be described with reference to fig. 1 to 5. Fig. 1 is a diagram illustrating a schematic configuration of a coating apparatus in example 1 of the present invention. Fig. 2 is a sectional view as viewed along the arrow a in fig. 1. Fig. 3 (a) is a cross-sectional view taken along the arrow b in fig. 1, and fig. 3 (b) is a plan view of the tie plate 15. Fig. 4 is a view illustrating a discharge port in example 1 of the present invention, fig. 4 (a) is a plan view, fig. 4 (B) is a sectional view taken along line B-B of fig. 4 (a), and fig. 4 (C) is a sectional view taken along line C-C of fig. 4 (a). Fig. 5 is a view illustrating a discharge port in a modification, fig. 5 (a) is a plan view, fig. 5 (B) is a sectional view B-B of fig. 5 (a), and fig. 5 (C) is a sectional view C-C of fig. 5 (a).

The coating apparatus 1 is an apparatus for coating a coating liquid 3 on a substrate 2 transported in a roll-to-roll manner. The coating liquid 3 is applied with a uniform thickness (uniform application amount) along the feeding direction MD of the base material 2. The width direction TD of the base material 2 is a direction perpendicular to the feeding direction MD of the base material 2, and the Y-axis direction in fig. 1 corresponds to the width direction TD.

The coating device 1 includes: a mold 10 formed to be long in the width direction of the base material 2; and a supply unit 20 for supplying the coating liquid 3 to the die 10. In the mold 10, the longitudinal direction (Y-axis direction in fig. 1) thereof is referred to as a width direction TD. In the coating apparatus 1, a roller 5 is provided to face a die 10, and the width direction of the die 10 is parallel to the direction of the rotation center line of the roller 5. The substrate 2 is guided by the roller 5, and the coating liquid 3 is applied while keeping a gap (clearance) between the substrate 2 and the die 10 (the end of the slit 12 described later) constant.

The mold 10 is constituted by a structure that: the shim plate 15 is sandwiched between the first divided body 13 having the first lip 13a of the tapered shape and the second divided body 14 having the second lip 14a of the tapered shape, and they are combined together. Fig. 2 is a sectional view as viewed along the arrow a in fig. 1. Fig. 3 (a) is a cross-sectional view taken along the arrow b in fig. 1, and the tie plate 15 is shown in fig. 3 (b). Inside the mold 10 are formed: a 1 st manifold 11 constituted by a space long in the width direction; and a slit 12 connected to the 1 st manifold 11, and further, between the first lip 13a and the second lip 14a, an ejection port 18 as a discharge end of the slit 12 is formed. That is, the 1 st manifold 11 and the ejection port 18 are connected via the slit 12.

According to this configuration, the coating liquid 3 supplied from the supply unit 20 is first accumulated in the 1 st manifold 11 and then discharged from the discharge port 18 through the slit 12.

The slit 12 is formed to be long in the width direction TD in the same manner as the first manifold 11, and the width direction dimension of the slit 12 is determined by the internal dimension W (see fig. 3 b) of the backing plate 15 described later, and the coating liquid 3 having the width direction dimension substantially the same as the width direction dimension of the slit 12 can be applied to the substrate 2. The gap (height) of the slit 12 is, for example, 0.4 to 1.5 mm. In example 1, the mold 10 was set in a posture in which the gap direction of the slit 12 was the vertical direction and the width direction was the horizontal direction. That is, the mold 10 is set in a posture in which the 1 st manifold 11 and the slit 12 are arranged in the horizontal direction. Therefore, the direction in which the coating liquid 3 accumulated in the 1 st manifold 11 flows toward the substrate 2 through the slit 12 and the ejection port 18 becomes the horizontal direction.

Further, by changing the thickness of the backing plate 15, the pressure (coating pressure) inside the first manifold 11 can be adjusted, and by this adjustment, coating with a uniform film thickness can be performed by the coating liquid 3 having various characteristics.

In example 1, the direction in which the coating liquid 3 flows through the discharge ports 18 toward the substrate 2 is set to be the horizontal direction, but the direction is not necessarily limited thereto, and can be appropriately changed. For example, the direction may be upward, downward, or any other direction.

An inflow portion 16 is provided at the center of the die 10 in the width direction, and the inflow portion 16 is formed of a through hole (inflow port) connected to the 1 st manifold 11 from the outside of the die 10. The supply unit 20 includes: an inflow pipe 21 having one end connected to the inflow portion 16; a tank 22 for storing the coating liquid 3; and a pump 23 for supplying the coating liquid 3 in the tank 22 to the die 10 through the inflow pipe 21. As described above, the supply unit 20 can supply the coating liquid 3 from the inflow portion 16 to the 1 st manifold 11. In example 1, as shown in fig. 1, the inflow portion 16 is connected to the bottom portion 17 of the 1 st manifold 11, and the coating liquid 3 is configured to flow in from the bottom portion 17.

The 1 st manifold 11 can store the coating liquid 3 supplied from the supply unit 20, and the coating liquid 3 stored in the 1 st manifold 11 can be discharged from the discharge port 18 to the substrate 2 transported in a roll-to-roll manner through the slit 12, thereby continuously applying the coating liquid 3 to the substrate 2. The gap size of the slit 12 is constant in the width direction, and the thickness of the coating liquid 3 applied to the substrate 2 is constant in the width direction.

The die 10 is provided with a pressure sensor (not shown) for measuring the internal pressure of the coating liquid 3 in the 1 st manifold 11. Then, the supply of the coating liquid 3 by the supply means 20 is controlled based on the measurement result, and the internal pressure of the coating liquid 3 in the 1 st manifold 11 is kept constant. The coating liquid 3 whose internal pressure is fixed in the 1 st manifold 11 is discharged from the slit 12 in a uniform amount over the entire length in the width direction, and the thickness of the coating liquid 3 coated on the substrate 2 in the feed direction is controlled so that the amount of the coating liquid 3 discharged from the slit 12 does not vary based on the measurement result of the pressure sensor. A filter for the coating liquid 3 is provided in the middle of the inlet pipe 21, and is not shown.

The slit 12 is provided with

discharge ports

31, 32, 33, and 34 for discharging the coating liquid 3 of the 1 st manifold 11 from a portion other than the discharge port 18 to the outside of the die 10. In example 1, the 1 st discharge port 31 and the 2 nd discharge port 32 are provided at both

end portions

12a and 12b in the width direction of the slit 12, and the 3 rd discharge port 33 and the 4 th discharge port 34 are provided at

intermediate portions

12c and 12d between the both

end portions

12a and 12 b.

The

discharge ports

31, 32, 33, 34 are constituted by: a through hole connecting the slit 12 to the outside of the mold 10; and

pipes

51, 52, 53, and 54 connected to the through-holes and having a circular cross section. One end of each of the

pipes

51, 52, 53, and 54 is connected to the tank 22, and the coating liquid 3 stored in the tank 22 can be made to flow from the inflow portion 16 into the 1 st manifold 11, and the coating liquid 3 can be returned from the

discharge ports

31, 32, 33, and 34 to the tank 22.

The cross section of the opening portions on the slit sides of the

discharge ports

31, 32, 33, and 34 has a wide shape in which the dimension in the width direction TD is longer than the dimension in the direction perpendicular to the width direction TD. This is to avoid local flow rate fluctuations of the coating liquid 3 at the

discharge ports

31, 32, 33, and 34. In general, when a liquid is caused to flow in a circular cross-sectional shape, the flow velocity at the center of the circular shape becomes high, and local flow velocity fluctuation occurs. When such local flow rate variations are caused at the

discharge ports

31, 32, 33, 34, coating streaks may be generated in the coating film long in the feed direction MD at the positions of the discharge ports. In example 1, in order to prevent the occurrence of the coating streaks, the following design was made: the cross-section of the opening on the slit side of the

discharge ports

31, 32, 33, and 34 is formed in a wide shape in which the dimension in the width direction TD is longer than the dimension in the direction perpendicular to the width direction TD, so as to avoid local flow rate variation.

More preferably, the cross-section of the opening on the slit side of the

discharge ports

31, 32, 33, and 34 is an elongated hole shape in which the dimension in the width direction TD is longer than the dimension in the direction perpendicular to the width direction TD. This facilitates the production of the discharge port, and effectively equalizes the flow velocity of the coating liquid.

The shape of the discharge port in example 1 is explained in detail. The

discharge ports

31, 32, 33, and 34 all have the same shape, and therefore, the discharge port 32 will be described as an example. Fig. 4 (a) is a plan view of the discharge port 32 viewed from the slit 12 side, fig. 4 (b) is a cross-sectional view of fig. 4 (a), and fig. 4 (C) is a cross-sectional view of fig. 4 (a) taken along the line C-C.

As shown in fig. 3 (a) and 4 (a), the cross section of the opening portion of the discharge port 32 on the slit 12 side has a long hole shape in which the dimension in the width direction TD is longer than the dimension in the direction perpendicular to the width direction TD. The length of the opening section of the discharge port 32 on the slit 12 side in the width direction TD is longer than the diameter of the pipe 52, and the length in the direction perpendicular to the width direction TD is shorter than the diameter of the pipe 52. On the other hand, a pipe 52 having a circular cross section is connected to an end of the discharge port 32 opposite to the slit 12. Since the cross-sectional shape of the pipe 52 is circular, the discharge port 32 has a structure in which the wide elongated hole is tapered into a circular shape, and the connection portion of the discharge port 32 to the pipe 52 is circular (see fig. 4 (b) and (c)). This allows smooth connection between the discharge port 32 and the pipe 52 having a circular cross section, and can suppress local flow rate fluctuations and prevent the coating liquid 3 from staying at the connection portion.

In example 1, the cross section of the opening portion of the discharge port 32 on the slit 12 side is formed in a long hole shape in which the dimension in the width direction TD is longer than the dimension in the direction perpendicular to the width direction TD. For example, the cross section of the opening of the discharge port 32 on the slit 12 side may be formed in a rectangular shape having a dimension in the width direction TD longer than a dimension in a direction perpendicular to the width direction TD, or may be formed in an elliptical shape. At least the cross section of the opening of the discharge port 32 on the slit 12 side may have any shape in which the dimension in the width direction TD is longer than the dimension in the direction perpendicular to the width direction TD. Further, the following shape is formed: the length of the cross section of the opening portion of the discharge port 32 on the slit 12 side in the direction perpendicular to the width direction TD is smaller than the diameter of the pipe 52, but is not necessarily limited thereto, and can be changed as appropriate. For example, the length in the direction perpendicular to the width direction TD may be the same size as the diameter of the pipe 52.

If the cross section of the opening of the discharge port 32 on the slit 12 side is a shape having a dimension in the width direction TD shorter than a dimension in a direction perpendicular to the width direction TD, local flow rate variation occurs in the discharge port 32 similarly to the circular shape, and unevenness is formed on the coating surface due to variation in the coating amount to form coating streaks.

The

outlets

31, 32, 33, and 34 are provided with control devices for adjusting the amount of the coating liquid 3 flowing out from the slit 12. Specifically, as shown in fig. 2,

valves

61, 62, 63, and 64 are connected to the

pipes

51, 52, 53, and 54, respectively, to serve as the control devices. These

valves

61, 62, 63, and 64 have a function of adjusting the flow rates of the coating liquid 3 flowing out from the

outlets

31, 32, 33, and 34, respectively. The

valves

61, 62, 63, and 64 may also adjust the pressure of the coating liquid 3 flowing out from the

outlets

31, 32, 33, and 34, respectively. Alternatively, a device (for example, a pump) for managing the flow rate of the coating liquid 3 (adjusting the outflow amount) may be provided in the middle of the

pipes

51, 52, 53, 54 connecting the

outlets

31, 32, 33, 34 to the tank 22, and in this case, the device may function as a control device for adjusting the discharge of the coating liquid 3 flowing out from the slit 12.

The coating apparatus 1 further includes a sensor 36 (see fig. 1) for measuring the film thickness of the coating liquid 3 applied to the substrate 2. A plurality of sensors 36 may be provided along the width direction. The sensor 36 is a noncontact type, and can measure the film thickness of the coating liquid 3 on the substrate 2 at a plurality of positions along the width direction, or can measure the film thickness of the coating liquid 3 on the substrate 2 over the entire length in the width direction TD, and the measurement result is output to a control device (computer) 37 provided in the coating apparatus 1. The controller 37 performs feedback control based on the measurement result from the sensor 36, and adjusts the opening degrees of the

valves

61, 62, 63, and 64. That is, the controller 37 outputs control signals to the

valves

61, 62, 63, and 64 based on the measurement result of the film thickness of the coating liquid 3, and adjusts the respective opening degrees of the

valves

61, 62, 63, and 64. This can keep the thickness of the coating liquid 3 constant in the width direction.

Instead of the sensor 36, the opening degrees of the

valves

61, 62, 63, and 64 may be controlled by a timer function of the controller 37. That is, since precipitation and aggregation of the solid components of the coating liquid 3 become a problem after a certain time has elapsed from the start of coating, a predetermined time before the elapse of the time can be measured by a timer, and when the predetermined time has elapsed, the controller 37 performs control to increase the opening degrees of the

valves

61, 62, 63, and 64.

In example 1, the number of discharge ports is set to 4, but the number is not necessarily limited thereto, and can be changed as appropriate. For example, the number of the dies may be 2 or 3, or may be 5 or more, and the number may be any number according to the length of the die 10 in the width direction TD and the tightness of film thickness management.

In example 1, the cross-sections of the

pipes

51, 52, 53, and 54 are circular, but the cross-sections are not necessarily limited thereto, and can be appropriately modified. For example, the following may be configured: the

discharge ports

31, 32, 33, and 34 are connected to the

pipes

51, 52, 53, and 54 in a state of not being tapered by forming the

discharge ports

31, 32, 33, and 34 to have a long hole shape or a rectangular shape and a shape identical to the cross section of the

discharge ports

31, 32, 33, and 34.

(modification example)

The shape of the discharge port in the modified example will be described. Fig. 5 is a view for explaining a discharge port in a modification, fig. 5 (a) is a plan view, fig. 5 (B) is a sectional view B-B of fig. 5 (a), and fig. 5 (C) is a sectional view C-C of fig. 5 (a). Since all of the

outlets

32, 33, 34, and 35 have the same shape, the outlet 32 will be described as an example.

The cross section of the opening portion of the discharge port 32 on the slit 12 side in the modification has a long hole shape in which the dimension in the width direction TD is longer than the dimension in the direction perpendicular to the width direction TD. The length of the opening section of the discharge port 32 on the slit 12 side in the width direction TD is longer than the diameter of the pipe 52, and the length in the direction perpendicular to the width direction TD is shorter than the diameter of the pipe 52. The end portion on the opposite side to the slit 12 also has an elongated hole shape in which the dimension in the width direction TD is longer than the dimension in the direction perpendicular to the width direction TD. The length of the end of the discharge port 32 on the side opposite to the slit 12 in the width direction TD is longer than the diameter of the pipe 52, and the length in the direction perpendicular to the width direction TD is shorter than the diameter of the pipe 52. That is, the discharge port 32 of the modified example does not have a tapered shape that changes from a long hole shape to a circular shape in order to connect to the pipe 52 having a circular shape in cross section, but has a cylindrical shape having a long hole shape in cross section, and has a bottom in a portion other than a portion connected to the pipe 52.

Therefore, the discharge port 32 of the modified example is not continuous with the connection portion of the pipe 52. Therefore, although the flow rate of the coating liquid 3 is disturbed at the bottom of the discharge port 32 in the modified example, the influence is small because the flow rate is a distance away from the slit 12, and coating streaks do not occur on the coating surface. However, since the connection portion between the discharge port 32 and the pipe 52 is discontinuous, the coating liquid 3 is accumulated, and therefore, it is more preferable that the discharge port 32 is tapered and connected to the pipe 52, and the discontinuous portion is not provided.

In addition, the modification in embodiment 1 is formed in a shape such that: the length of the cross section of the opening portion of the discharge port 32 on the slit 12 side in the direction perpendicular to the width direction TD is smaller than the diameter of the pipe 52, but is not necessarily limited thereto, and can be changed as appropriate. For example, the length in the direction perpendicular to the width direction TD may be the same size as the diameter of the pipe 52.

As described above, in example 1, there is provided a coating apparatus including: a die in which a 1 st manifold including a space for storing the coating liquid, which is long in a width direction, an ejection port connected to the 1 st manifold through a slit which is wide in the width direction, and which ejects the coating liquid onto the base material, and an ejection port through which the coating liquid is ejected are formed, the ejection port being provided in plurality in the width direction between the 1 st manifold and the ejection port in the slit; and a supply unit that supplies the coating liquid to the 1 st manifold from an inflow portion communicating with the 1 st manifold, wherein a cross section of an opening of the discharge port on the slit side has a wide shape in which a dimension in the width direction is longer than a dimension in a direction perpendicular to the width direction, and the coating device can disperse local flow rate variations, and thus a coating film without coating streaks can be coated.

Further, the present invention provides an application method in which an application liquid accumulated in a 1 st manifold formed in a die and long in a width direction is discharged from a discharge port connected to the 1 st manifold through a wide slit in the width direction to be applied to a substrate, wherein local flow rate variations are dispersed by setting an opening portion on the slit side of a discharge port for discharging the application liquid to a wide shape having a dimension in the width direction longer than a dimension in a direction perpendicular to the width direction, and a plurality of discharge ports are provided between the 1 st manifold and the discharge port in the width direction in the slit, and the application method enables application of an application film in which application streaks are not generated.

[ example 2]

Example 2 of the present invention is different from example 1 in that: the mold is provided with a 2 nd manifold, and the opening portion on the slit side of the discharge port is provided in the 2 nd manifold. Example 2 is explained with reference to fig. 6. Fig. 6 is a diagram illustrating a schematic configuration of a coating apparatus in example 2 of the present invention.

In example 2, as shown in fig. 6, the 2 nd manifold 24 is provided in the middle of the slit 12 (between the 1 st manifold 11 and the ejection port 18), and the 2 nd manifold 24 is provided with the

ejection ports

31, 32, 33, and 34.

The length of the 2 nd manifold 24 in the width direction TD is the same as the length of the 1 st manifold 11 and the slit 12 in the width direction TD, and the cross-sectional area of the 2 nd manifold 24 in the width direction is smaller than the cross-sectional area of the 1 st manifold 11 in the width direction. I.e. smaller in volume than the 1 st manifold 11.

The

discharge ports

31, 32, 33, and 34 are provided in the 2 nd manifold 24 at the aperture portions on the slit side. In example 2, the cross section of the opening portion of the discharge port 32 on the slit 12 side also has a long hole shape in which the dimension in the width direction TD is longer than the dimension in the direction perpendicular to the width direction TD. On the other hand, a pipe 52 having a circular cross section is connected to an end of the discharge port 32 opposite to the slit 12. Since the cross-sectional shape of the pipe 52 is circular, the discharge port 32 has a structure in which the wide long hole shape is changed into a circular shape in a tapered manner, and the connection portion of the discharge port 32 to the pipe 52 is circular (see fig. 4 (b) and (c)). This can suppress local flow velocity fluctuations at the discharge port 32, and can smoothly connect to the pipe 52 having a circular cross section.

By providing the

discharge ports

31, 32, 33, and 34 in the second manifold 24 as described above, if the

discharge ports

31, 32, 33, and 34 are directly provided in the slit 12, the sensitivity of flow rate adjustment is too sensitive to control the discharge amount of the coating liquid 3 discharged from the discharge port 18, and thus the adjustment sensitivity can be appropriately lowered, and the discharge amount of the coating liquid 3 can be easily controlled.

As described above, in example 2, the 2 nd manifold long in the width direction is provided between the 1 st manifold and the ejection port of the slit, and the ejection port is provided in the 2 nd manifold at the opening portion on the slit side, whereby the ejection flow rate can be easily adjusted, and a coating film free from coating streaks can be coated.

Industrial applicability

The present invention can be widely applied to a coating apparatus and a coating method for coating a coating liquid on a substrate.

Description of the reference symbols

1: a coating device; 2: a substrate; 3: coating liquid; 5: a roller; 10: a mold; 11: a 1 st manifold; 12: a gap; 16: an inflow section; 17: a bottom; 18: an ejection port; 20: a supply unit; 22: a tank; 23: a pump; 31: an outlet port; 32: an outlet port; 33: an outlet port; 34: an outlet port; 36: a sensor; 37: a control device; 61: a valve; 62: a valve; 63: a valve; 64: and (4) a valve.

Claims

1. A coating device, characterized in that,

the coating device is provided with:

a die in which a 1 st manifold including a space that is long in a width direction and stores a coating liquid, an ejection port that is connected to the 1 st manifold via a wide gap in the width direction and ejects the coating liquid onto a substrate, and an ejection port that allows the coating liquid to flow out are formed, the ejection port being provided in a plurality of the ejection ports in the width direction between the 1 st manifold and the ejection port in the gap; and

a supply unit for supplying the coating liquid to the 1 st manifold from an inflow part communicated with the 1 st manifold,

the cross section of the opening of the discharge port on the slit side has a wide shape in which the dimension in the width direction is longer than the dimension in the direction perpendicular to the width direction.

2. Coating device according to claim 1,

a 2 nd manifold that is long in the width direction is provided between the 1 st manifold and the discharge port of the slit, and an opening of the discharge port on the slit side is provided in the 2 nd manifold.

3. Coating device according to claim 1 or 2,

the wide-width shape is an elongated hole having a dimension in the width direction longer than a dimension in a direction perpendicular to the width direction.

4. Coating apparatus according to any one of claims 1 to 3,

the discharge port is connected to a pipe having a circular cross section at an end opposite to the opening on the slit side, and the discharge port is tapered from the wide width shape to the circular shape such that the discharge port has a circular cross section at a connecting portion with the pipe.

5. A coating method in which a coating liquid stored in a 1 st manifold formed in a mold and elongated in a width direction is discharged from a discharge port connected to the 1 st manifold through a wide gap in the width direction and applied on a substrate,

it is characterized in that the preparation method is characterized in that,

the flow velocity variation is locally dispersed by making the opening on the slit side of the discharge port for discharging the coating liquid, which is provided in a plurality across the width direction between the 1 st manifold and the discharge port of the slit, a wider shape having a dimension in the width direction longer than a dimension in a direction perpendicular to the width direction.