CN100343971C - 基板保持工具、电子仪器制造方法、光掩膜的制造方法 - Google Patents
基板保持工具、电子仪器制造方法、光掩膜的制造方法 Download PDFInfo
- Publication number
- CN100343971C CN100343971C CNB2004100327749A CN200410032774A CN100343971C CN 100343971 C CN100343971 C CN 100343971C CN B2004100327749 A CNB2004100327749 A CN B2004100327749A CN 200410032774 A CN200410032774 A CN 200410032774A CN 100343971 C CN100343971 C CN 100343971C
- Authority
- CN
- China
- Prior art keywords
- substrate
- instrument
- keeps
- keep
- supporting zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 280
- 238000000034 method Methods 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 claims abstract description 36
- 238000012423 maintenance Methods 0.000 claims description 23
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Images
Classifications
-
- E—FIXED CONSTRUCTIONS
- E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
- E01D—CONSTRUCTION OF BRIDGES, ELEVATED ROADWAYS OR VIADUCTS; ASSEMBLY OF BRIDGES
- E01D19/00—Structural or constructional details of bridges
- E01D19/06—Arrangement, construction or bridging of expansion joints
- E01D19/062—Joints having intermediate beams
-
- E—FIXED CONSTRUCTIONS
- E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
- E01D—CONSTRUCTION OF BRIDGES, ELEVATED ROADWAYS OR VIADUCTS; ASSEMBLY OF BRIDGES
- E01D19/00—Structural or constructional details of bridges
- E01D19/06—Arrangement, construction or bridging of expansion joints
- E01D19/065—Joints having sliding plates
-
- E—FIXED CONSTRUCTIONS
- E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
- E01D—CONSTRUCTION OF BRIDGES, ELEVATED ROADWAYS OR VIADUCTS; ASSEMBLY OF BRIDGES
- E01D19/00—Structural or constructional details of bridges
- E01D19/08—Damp-proof or other insulating layers; Drainage arrangements or devices ; Bridge deck surfacings
- E01D19/086—Drainage arrangements or devices
Landscapes
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Packaging Frangible Articles (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003115999A JP2004323130A (ja) | 2003-04-21 | 2003-04-21 | 基板保持具、電子デバイスの製造方法、フォトマスクの製造方法 |
JP115999/2003 | 2003-04-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1540737A CN1540737A (zh) | 2004-10-27 |
CN100343971C true CN100343971C (zh) | 2007-10-17 |
Family
ID=33496386
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100327749A Expired - Fee Related CN100343971C (zh) | 2003-04-21 | 2004-04-21 | 基板保持工具、电子仪器制造方法、光掩膜的制造方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2004323130A (ko) |
KR (1) | KR100581689B1 (ko) |
CN (1) | CN100343971C (ko) |
TW (1) | TWI267113B (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008260535A (ja) * | 2005-07-29 | 2008-10-30 | Nippon Sheet Glass Co Ltd | 板状体搬送具 |
KR100978261B1 (ko) * | 2005-12-29 | 2010-08-26 | 엘지디스플레이 주식회사 | 액정표시소자의 카세트 |
JP6050038B2 (ja) * | 2012-06-29 | 2016-12-21 | Hoya株式会社 | ガラス基板ホルダ、及び電子機器用カバーガラスのガラス基板の製造方法 |
JP7205325B2 (ja) * | 2019-03-19 | 2023-01-17 | 大日本印刷株式会社 | 被加工基板、インプリントモールド用基板及びインプリントモールド |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4191295A (en) * | 1978-08-14 | 1980-03-04 | Rca Corporation | Processing rack |
JPH02296351A (ja) * | 1989-05-10 | 1990-12-06 | Seiko Epson Corp | ワーク整列収納用カセット |
JPH0597172A (ja) * | 1991-10-03 | 1993-04-20 | Yodogawa Kasei Kk | 基板支持棒およびそれを用いた基板用カセツト |
JPH09306983A (ja) * | 1996-05-10 | 1997-11-28 | Kaijo Corp | 基板受台並びにこれを具備した基板抜出し収容装置及び基板転移装置 |
CN1181621A (zh) * | 1996-01-23 | 1998-05-13 | 日本电气株式会社 | 具有减少空间尘粒附着功效的半导体晶片容器 |
-
2003
- 2003-04-21 JP JP2003115999A patent/JP2004323130A/ja active Pending
-
2004
- 2004-04-20 KR KR1020040027168A patent/KR100581689B1/ko not_active IP Right Cessation
- 2004-04-21 TW TW093111095A patent/TWI267113B/zh active
- 2004-04-21 CN CNB2004100327749A patent/CN100343971C/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4191295A (en) * | 1978-08-14 | 1980-03-04 | Rca Corporation | Processing rack |
JPH02296351A (ja) * | 1989-05-10 | 1990-12-06 | Seiko Epson Corp | ワーク整列収納用カセット |
JPH0597172A (ja) * | 1991-10-03 | 1993-04-20 | Yodogawa Kasei Kk | 基板支持棒およびそれを用いた基板用カセツト |
CN1181621A (zh) * | 1996-01-23 | 1998-05-13 | 日本电气株式会社 | 具有减少空间尘粒附着功效的半导体晶片容器 |
JPH09306983A (ja) * | 1996-05-10 | 1997-11-28 | Kaijo Corp | 基板受台並びにこれを具備した基板抜出し収容装置及び基板転移装置 |
Also Published As
Publication number | Publication date |
---|---|
CN1540737A (zh) | 2004-10-27 |
TW200425249A (en) | 2004-11-16 |
TWI267113B (en) | 2006-11-21 |
JP2004323130A (ja) | 2004-11-18 |
KR20040091570A (ko) | 2004-10-28 |
KR100581689B1 (ko) | 2006-05-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071017 Termination date: 20130421 |