CN100343624C - 位置测量装置 - Google Patents

位置测量装置 Download PDF

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Publication number
CN100343624C
CN100343624C CNB200410056762XA CN200410056762A CN100343624C CN 100343624 C CN100343624 C CN 100343624C CN B200410056762X A CNB200410056762X A CN B200410056762XA CN 200410056762 A CN200410056762 A CN 200410056762A CN 100343624 C CN100343624 C CN 100343624C
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CN
China
Prior art keywords
detector
detector set
trend
bearing
measurement device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB200410056762XA
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English (en)
Chinese (zh)
Other versions
CN1584492A (zh
Inventor
E·迈尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of CN1584492A publication Critical patent/CN1584492A/zh
Application granted granted Critical
Publication of CN100343624C publication Critical patent/CN100343624C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Vehicle Body Suspensions (AREA)
  • Body Structure For Vehicles (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
CNB200410056762XA 2003-08-18 2004-08-18 位置测量装置 Expired - Fee Related CN100343624C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10338991.1 2003-08-18
DE10338991A DE10338991A1 (de) 2003-08-18 2003-08-18 Positionsmesseinrichtung

Publications (2)

Publication Number Publication Date
CN1584492A CN1584492A (zh) 2005-02-23
CN100343624C true CN100343624C (zh) 2007-10-17

Family

ID=34129600

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB200410056762XA Expired - Fee Related CN100343624C (zh) 2003-08-18 2004-08-18 位置测量装置

Country Status (6)

Country Link
US (1) US7084390B2 (https=)
EP (1) EP1515123B1 (https=)
JP (1) JP4746294B2 (https=)
CN (1) CN100343624C (https=)
AT (1) ATE456785T1 (https=)
DE (2) DE10338991A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070024865A1 (en) * 2005-07-26 2007-02-01 Mitchell Donald K Optical encoder having slanted optical detector elements for harmonic suppression
DE102010002902A1 (de) * 2010-03-16 2011-09-22 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine optische Positionsmesseinrichtung
JP5574899B2 (ja) * 2010-09-24 2014-08-20 キヤノン株式会社 ロータリーエンコーダ及びこれを備えた光学機器
ES2701307T3 (es) * 2016-06-07 2019-02-21 Heidenhain Gmbh Dr Johannes Medida materializada así como dispositivo de medición de posición
US10168189B1 (en) * 2017-06-29 2019-01-01 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration for providing displacement signal having a plurality of spatial phase detectors arranged in a spatial phase sequence along a direction transverse to the measuring axis
DE102018202556A1 (de) * 2018-02-20 2019-08-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
CN108444506B (zh) * 2018-05-31 2024-03-22 苏州汇川技术有限公司 编码器码盘、绝对值编码器、位置获取方法及系统

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19508700C1 (de) * 1995-03-02 1996-08-14 Huebner Elektromasch Ag Vorrichtung zum Gewinnen weitgehend oberwellenfreier periodischer Signale
US5619132A (en) * 1993-04-10 1997-04-08 Johannes Heidenhain Gmbh Position measuring device employing primary and auxiliary magnetic fields
US5981942A (en) * 1996-10-25 1999-11-09 Okuma Corporation Optical encoder for detecting relative displacement based on signals having predetermined phase differences
US6259249B1 (en) * 1997-12-03 2001-07-10 Mitutoyo Corporation Induction-type position measuring apparatus
US20020008195A1 (en) * 2000-07-03 2002-01-24 Mitutoyo Corporation Optical encoder and method of fabricating its sensor head
US6492806B2 (en) * 2000-06-14 2002-12-10 Pentax Corporation Magnetic encoder and survey instrument having magnetic encoder

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS629218A (ja) * 1985-07-08 1987-01-17 Hitachi Metals Ltd 磁気式回転検出器
DE3616144A1 (de) * 1986-05-14 1987-11-19 Heidenhain Gmbh Dr Johannes Fotoelektrische messeinrichtung
JPH075954B2 (ja) * 1987-12-10 1995-01-25 九築工業株式会社 転炉ライニング築造装置
JPH02193003A (ja) * 1989-01-23 1990-07-30 Fujitsu Ltd リニアパルスモータの位置センサ機構
JPH03128418A (ja) * 1989-07-20 1991-05-31 Yokogawa Electric Corp 光学式エンコーダ
JP2670193B2 (ja) * 1991-02-25 1997-10-29 オークマ株式会社 位置検出器
EP0541827B1 (de) * 1991-11-04 1995-04-12 Dr. Johannes Heidenhain GmbH Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale
JPH0626885A (ja) * 1992-07-07 1994-02-04 Tamagawa Seiki Co Ltd 光学式エンコーダにおけるエンコーダ信号の歪除去方法
DE59306689D1 (de) * 1993-08-07 1997-07-10 Heidenhain Gmbh Dr Johannes Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale
CH690971A5 (de) * 1994-02-25 2001-03-15 Hera Rotterdam Bv Verfahren zur Messung und Verwertung einer Verschiebung eines Abtastkopfes gegenüber einer Massverkörperung und optischer Messgeber zur Durchführung dieses Verfahrens.
JP2695623B2 (ja) * 1994-11-25 1998-01-14 株式会社ミツトヨ 光学式エンコーダ
JP3327718B2 (ja) * 1995-01-23 2002-09-24 オークマ株式会社 光学式エンコーダ
DE19511068A1 (de) * 1995-03-25 1996-09-26 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
JP3215289B2 (ja) * 1995-04-17 2001-10-02 オークマ株式会社 スケール及びエンコーダ
DE59508231D1 (de) * 1995-06-22 2000-05-31 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
DE19532246A1 (de) * 1995-09-01 1997-03-06 Heidenhain Gmbh Dr Johannes Vorrichtung zur Filterung von Oberwellen-Signalanteilen
JPH09196705A (ja) * 1996-01-23 1997-07-31 Mitsutoyo Corp 変位測定装置
JP3209914B2 (ja) * 1996-03-19 2001-09-17 オークマ株式会社 光学式エンコーダ
US6094307A (en) * 1996-05-17 2000-07-25 Okuma Corporation Optical grating and encoder
DE19628602A1 (de) * 1996-07-16 1998-01-22 Heidenhain Gmbh Dr Johannes Vorrichtung zur Filterung von Oberwellen-Signalanteilen
DE59806597D1 (de) * 1997-08-07 2003-01-23 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmesseinrichtung
AUPP777898A0 (en) * 1998-12-17 1999-01-21 Bishop Innovation Pty Limited Position sensor
DE19962278A1 (de) * 1999-12-23 2001-08-02 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
DE10020575A1 (de) * 2000-04-28 2001-10-31 Heidenhain Gmbh Dr Johannes Abtasteinheit für eine optische Positionsmesseinrichtung
WO2003021197A1 (en) * 2001-08-30 2003-03-13 Microe Systems Corporation Harmonic suppressing photodetector array
US6794638B2 (en) * 2001-09-13 2004-09-21 Mitutoyo Corporation Photoelectric encoder having improved light-emitting and photoreceptive sections
US6727493B2 (en) 2001-11-06 2004-04-27 Renco Incoders, Inc. Multiple resolution photodiode sensor array for an optical encoder

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5619132A (en) * 1993-04-10 1997-04-08 Johannes Heidenhain Gmbh Position measuring device employing primary and auxiliary magnetic fields
DE19508700C1 (de) * 1995-03-02 1996-08-14 Huebner Elektromasch Ag Vorrichtung zum Gewinnen weitgehend oberwellenfreier periodischer Signale
US5981942A (en) * 1996-10-25 1999-11-09 Okuma Corporation Optical encoder for detecting relative displacement based on signals having predetermined phase differences
US6259249B1 (en) * 1997-12-03 2001-07-10 Mitutoyo Corporation Induction-type position measuring apparatus
US6492806B2 (en) * 2000-06-14 2002-12-10 Pentax Corporation Magnetic encoder and survey instrument having magnetic encoder
US20020008195A1 (en) * 2000-07-03 2002-01-24 Mitutoyo Corporation Optical encoder and method of fabricating its sensor head

Also Published As

Publication number Publication date
EP1515123A1 (de) 2005-03-16
US20050051716A1 (en) 2005-03-10
JP2005062194A (ja) 2005-03-10
ATE456785T1 (de) 2010-02-15
EP1515123B1 (de) 2010-01-27
CN1584492A (zh) 2005-02-23
DE502004010699D1 (de) 2010-03-18
US7084390B2 (en) 2006-08-01
JP4746294B2 (ja) 2011-08-10
DE10338991A1 (de) 2005-03-17

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20071017

Termination date: 20200818

CF01 Termination of patent right due to non-payment of annual fee