CH626121A5 - - Google Patents

Download PDF

Info

Publication number
CH626121A5
CH626121A5 CH1076876A CH1076876A CH626121A5 CH 626121 A5 CH626121 A5 CH 626121A5 CH 1076876 A CH1076876 A CH 1076876A CH 1076876 A CH1076876 A CH 1076876A CH 626121 A5 CH626121 A5 CH 626121A5
Authority
CH
Switzerland
Prior art keywords
chambers
gas
reactor
control points
reactor according
Prior art date
Application number
CH1076876A
Other languages
German (de)
English (en)
Inventor
Roger Norman Anderson
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of CH626121A5 publication Critical patent/CH626121A5/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
CH1076876A 1975-09-02 1976-08-25 CH626121A5 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/609,879 US4048955A (en) 1975-09-02 1975-09-02 Continuous chemical vapor deposition reactor

Publications (1)

Publication Number Publication Date
CH626121A5 true CH626121A5 (ja) 1981-10-30

Family

ID=24442723

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1076876A CH626121A5 (ja) 1975-09-02 1976-08-25

Country Status (10)

Country Link
US (1) US4048955A (ja)
JP (2) JPS5230794A (ja)
CA (1) CA1068582A (ja)
CH (1) CH626121A5 (ja)
DE (1) DE2639553A1 (ja)
FR (1) FR2322634A1 (ja)
GB (1) GB1561753A (ja)
NL (1) NL7609443A (ja)
SE (1) SE7609616L (ja)
SU (1) SU720996A3 (ja)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4048955A (en) * 1975-09-02 1977-09-20 Texas Instruments Incorporated Continuous chemical vapor deposition reactor
FI57975C (fi) * 1979-02-28 1980-11-10 Lohja Ab Oy Foerfarande och anordning vid uppbyggande av tunna foereningshinnor
US4389973A (en) * 1980-03-18 1983-06-28 Oy Lohja Ab Apparatus for performing growth of compound thin films
US4542711A (en) * 1981-03-16 1985-09-24 Sovonics Solar Systems Continuous system for depositing amorphous semiconductor material
US4462332A (en) * 1982-04-29 1984-07-31 Energy Conversion Devices, Inc. Magnetic gas gate
US4450786A (en) * 1982-08-13 1984-05-29 Energy Conversion Devices, Inc. Grooved gas gate
IN161171B (ja) * 1982-09-16 1987-10-10 Energy Conversion Devices Inc
US4537795A (en) * 1982-09-16 1985-08-27 Sovonics Solar Systems Method for introducing sweep gases into a glow discharge deposition apparatus
FR2543165B1 (fr) * 1983-03-21 1987-08-14 Commissariat Energie Atomique Procede et dispositif d'elaboration de couches composites, par superposition, en continu et en atmosphere controlee
US4480585A (en) * 1983-06-23 1984-11-06 Energy Conversion Devices, Inc. External isolation module
JPS6024370A (ja) * 1983-07-19 1985-02-07 Mitaka Denshi Kagaku Kenkyusho:Kk 試料の連続加工装置
EP0173715B1 (en) * 1984-02-13 1992-04-22 SCHMITT, Jerome J. III Method and apparatus for the gas jet deposition of conducting and dielectric thin solid films and products produced thereby
US4798166A (en) * 1985-12-20 1989-01-17 Canon Kabushiki Kaisha Apparatus for continuously preparing a light receiving element for use in photoelectromotive force member or image-reading photosensor
US4852516A (en) * 1986-05-19 1989-08-01 Machine Technology, Inc. Modular processing apparatus for processing semiconductor wafers
US5016562A (en) * 1988-04-27 1991-05-21 Glasstech Solar, Inc. Modular continuous vapor deposition system
US5042423A (en) * 1988-12-20 1991-08-27 Texas Instruments Incorporated Semiconductor wafer carrier design
EP0378815A3 (en) * 1988-12-20 1991-07-31 Texas Instruments Incorporated Continuous chemical vapour deposition system
US4949669A (en) * 1988-12-20 1990-08-21 Texas Instruments Incorporated Gas flow systems in CCVD reactors
US5105762A (en) * 1988-12-20 1992-04-21 Texas Instruments Incorporated Support and seal structure for CCVD reactor
US5052886A (en) * 1988-12-20 1991-10-01 Texas Instruments Incorporated Semiconductor wafer orientation device
US4908495A (en) * 1988-12-20 1990-03-13 Texas Instruments Incorporated Heating lamp assembly for ccvd reactors
US5074736A (en) * 1988-12-20 1991-12-24 Texas Instruments Incorporated Semiconductor wafer carrier design
US4941429A (en) * 1988-12-20 1990-07-17 Texas Instruments Incorporated Semiconductor wafer carrier guide tracks
JPH0659247B2 (ja) * 1989-08-23 1994-08-10 吉田工業株式会社 スライドファスナーの製造方法
JP3115134B2 (ja) * 1992-11-27 2000-12-04 松下電器産業株式会社 薄膜処理装置および薄膜処理方法
US5651868A (en) * 1994-10-26 1997-07-29 International Business Machines Corporation Method and apparatus for coating thin film data storage disks
US5563095A (en) * 1994-12-01 1996-10-08 Frey; Jeffrey Method for manufacturing semiconductor devices
US5997588A (en) * 1995-10-13 1999-12-07 Advanced Semiconductor Materials America, Inc. Semiconductor processing system with gas curtain
US5960158A (en) * 1997-07-11 1999-09-28 Ag Associates Apparatus and method for filtering light in a thermal processing chamber
US5997963A (en) * 1998-05-05 1999-12-07 Ultratech Stepper, Inc. Microchamber
US5970214A (en) * 1998-05-14 1999-10-19 Ag Associates Heating device for semiconductor wafers
US5930456A (en) * 1998-05-14 1999-07-27 Ag Associates Heating device for semiconductor wafers
US6210484B1 (en) 1998-09-09 2001-04-03 Steag Rtp Systems, Inc. Heating device containing a multi-lamp cone for heating semiconductor wafers
US6771895B2 (en) 1999-01-06 2004-08-03 Mattson Technology, Inc. Heating device for heating semiconductor wafers in thermal processing chambers
US6281141B1 (en) 1999-02-08 2001-08-28 Steag Rtp Systems, Inc. Process for forming thin dielectric layers in semiconductor devices
US6399510B1 (en) 2000-09-12 2002-06-04 Applied Materials, Inc. Bi-directional processing chamber and method for bi-directional processing of semiconductor substrates
US7368368B2 (en) * 2004-08-18 2008-05-06 Cree, Inc. Multi-chamber MOCVD growth apparatus for high performance/high throughput
KR100664545B1 (ko) 2005-03-08 2007-01-03 (주)씨엔티 탄소나노튜브 대량합성장치 및 대량합성방법
DE102005045582B3 (de) 2005-09-23 2007-03-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur kontinuierlichen Gasphasenabscheidung unter Atmosphärendruck und deren Verwendung
RU2388690C2 (ru) * 2008-05-22 2010-05-10 Общество с ограниченной ответственностью "Группа СТР" Способ получения поликристаллического кремния
US8034691B2 (en) * 2008-08-18 2011-10-11 Macronix International Co., Ltd. HDP-CVD process, filling-in process utilizing HDP-CVD, and HDP-CVD system
US8865259B2 (en) * 2010-04-26 2014-10-21 Singulus Mocvd Gmbh I.Gr. Method and system for inline chemical vapor deposition
DE102016101003A1 (de) 2016-01-21 2017-07-27 Aixtron Se CVD-Vorrichtung mit einem als Baugruppe aus dem Reaktorgehäuse entnehmbaren Prozesskammergehäuse

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL256300A (ja) * 1959-05-28 1900-01-01
US3314393A (en) * 1962-07-05 1967-04-18 Nippon Electric Co Vapor deposition device
US3240915A (en) * 1962-09-19 1966-03-15 Fostoria Corp Infra-red heater
US3294670A (en) * 1963-10-07 1966-12-27 Western Electric Co Apparatus for processing materials in a controlled atmosphere
US3473510A (en) * 1966-02-23 1969-10-21 Corning Glass Works Method and apparatus for the continuous doping of semiconductor materials
US3486237A (en) * 1967-09-29 1969-12-30 Bausch & Lomb Positioning tool for vacuum chamber workholder
US3523517A (en) * 1968-09-04 1970-08-11 Sloan Instr Corp Rotating workpiece holder
US3650042A (en) * 1969-05-19 1972-03-21 Ibm Gas barrier for interconnecting and isolating two atmospheres
ES378214A1 (es) * 1969-05-19 1973-01-01 Ibm Un sistema para tratar material, especialmente semiconduc- tor.
BE760041A (fr) * 1970-01-02 1971-05-17 Ibm Procede et appareil de transfert de masse gazeuse
US3645545A (en) * 1970-07-30 1972-02-29 Ibm Entrance-exit atmospheric isolation device
US3658032A (en) * 1970-11-05 1972-04-25 Fairchild Camera Instr Co Reactor for the formation of material on a substrate
US3742904A (en) * 1971-06-03 1973-07-03 Motorola Inc Steam generator and gas insertion device
JPS4834798A (ja) * 1971-09-06 1973-05-22
DE2214291B2 (de) * 1972-03-24 1974-02-21 Karl C. Hartung Elektrowaerme, 7902 Blaubeuren Hohllanze zum Einblasen von Spülglas in einen Vakuummuffeldurchlaufofen
JPS5183777A (ja) * 1975-01-21 1976-07-22 Tokyo Shibaura Electric Co Kisoseichosochi
US4048955A (en) * 1975-09-02 1977-09-20 Texas Instruments Incorporated Continuous chemical vapor deposition reactor

Also Published As

Publication number Publication date
US4048955A (en) 1977-09-20
JPS61143578A (ja) 1986-07-01
FR2322634A1 (fr) 1977-04-01
JPS5230794A (en) 1977-03-08
SU720996A3 (ru) 1980-03-08
FR2322634B1 (ja) 1983-01-21
JPS641549B2 (ja) 1989-01-11
GB1561753A (en) 1980-02-27
DE2639553A1 (de) 1977-03-10
CA1068582A (en) 1979-12-25
NL7609443A (nl) 1977-03-04
SE7609616L (sv) 1977-03-03
JPS6112993B2 (ja) 1986-04-11

Similar Documents

Publication Publication Date Title
CH626121A5 (ja)
EP0562250B1 (de) Verfahren und Vorrichtung zum Abschrecken metallischer Werkstücke
DE2720120C2 (de) Vorrichtung zur Behandlung eines organische Substanzen enthaltenden Gases mit Aktivkohle
EP0307581B1 (de) Adsorptionseinrichtung zur Gastrennung
DE2459935A1 (de) Anlage zur reinigung von fluessigkeit, insbesondere zur erzeugung von frischwasser aus meerwasser
DE3736306C1 (de) Rauchgaskanal zur Behandlung eines Rauchgases
CH657632A5 (de) Verfahren zur chemischdampfablagerung von filmen und einrichtung zur durchfuehrung des verfahrens.
DE2363332C3 (de) Verfahren und Vorrichtung zum Konzentrieren von verdünnten Lösungen korrosiver Stoffe
DE69724960T2 (de) Integriertes einschlusssystem für flüchtige organische stoffe für die regenerative oxidation
DE3031454A1 (de) Seitenstrom-kondensationssystem und verfahren zum betreiben desselben
DE3031419C2 (ja)
DE69714923T2 (de) Horizontal angeordnete, regenerative, thermische Oxidationsvorrichtung
DD262063A5 (de) Verfahren und vorrichtung zum erhitzen von aus kuehlwasser gebildetem dampf
DE1751027A1 (de) Waermetauscher mit einer als Zwischenwaermetraeger dienenden Fluessigkeit
DE2244913C2 (de) Verfahren und Vorrichtung zur Wärmebehandlung von Bandstahl
DE2922281A1 (de) Verfahren zur kontinuierlichen entgasung von wasser
DE3780747T2 (de) Vorrichtung zur gasabfuhr.
DE2611454C3 (de) Abtreibkolonne
DE3023094A1 (de) Verfahren und vorrichtung zur dampferzeugung
DE3008481A1 (de) Reinigungsverfahren fuer eine filteranlage fuer staubhaltige gase mit reduzierenden eigenschaften und filteranlage hierfuer
DE69210039T2 (de) Verbrennungsvorrichtung
DE60016479T2 (de) Vorrichtung zum Wärmetauschen mit einem flachen Produkt
DE1138380B (de) Vorrichtung zur katalytischen Entgiftung und Desodorierung von Industrie- und Heizungsabgasen
DE3621814C2 (de) Vorrichtung zur Wärme- und Oberflächenbehandlung von Metallteilen
DE102008030679A1 (de) Vorrichtung zur Diffusionsbehandlung von Werkstücken

Legal Events

Date Code Title Description
PL Patent ceased