IN161171B - - Google Patents

Info

Publication number
IN161171B
IN161171B IN1084/CAL/83A IN1084CA1983A IN161171B IN 161171 B IN161171 B IN 161171B IN 1084CA1983 A IN1084CA1983 A IN 1084CA1983A IN 161171 B IN161171 B IN 161171B
Authority
IN
India
Prior art keywords
chambers
gas
sweep
gases
process gases
Prior art date
Application number
IN1084/CAL/83A
Other languages
English (en)
Inventor
Prem Nath
Kevin Richard Hoffman
Timothy Dean Laarman
Original Assignee
Energy Conversion Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23660124&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IN161171(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Energy Conversion Devices Inc filed Critical Energy Conversion Devices Inc
Publication of IN161171B publication Critical patent/IN161171B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
  • Photovoltaic Devices (AREA)
IN1084/CAL/83A 1982-09-16 1983-09-06 IN161171B (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US41892982A 1982-09-16 1982-09-16

Publications (1)

Publication Number Publication Date
IN161171B true IN161171B (ja) 1987-10-10

Family

ID=23660124

Family Applications (1)

Application Number Title Priority Date Filing Date
IN1084/CAL/83A IN161171B (ja) 1982-09-16 1983-09-06

Country Status (9)

Country Link
EP (1) EP0106521B1 (ja)
JP (1) JPS5968925A (ja)
AT (1) ATE26309T1 (ja)
AU (1) AU556652B2 (ja)
CA (1) CA1214751A (ja)
DE (1) DE3370655D1 (ja)
IL (1) IL69711A0 (ja)
IN (1) IN161171B (ja)
PH (1) PH21147A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4678679A (en) * 1984-06-25 1987-07-07 Energy Conversion Devices, Inc. Continuous deposition of activated process gases
GB2223699A (en) * 1988-08-25 1990-04-18 S G Owen An air knife
US6159300A (en) 1996-12-17 2000-12-12 Canon Kabushiki Kaisha Apparatus for forming non-single-crystal semiconductor thin film, method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device
MX366096B (es) 2010-10-22 2019-06-27 Agc Glass Europe Separacion de maquina de recubrimiento modular.

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2949498A (en) 1955-10-31 1960-08-16 Texas Instruments Inc Solar energy converter
BE760041A (fr) * 1970-01-02 1971-05-17 Ibm Procede et appareil de transfert de masse gazeuse
US3753809A (en) * 1970-01-09 1973-08-21 Ibm Method for obtaining optimum phosphorous concentration in semiconductor wafers
US3868104A (en) * 1973-07-26 1975-02-25 Little Inc A Contactless fluid seal
US4048955A (en) * 1975-09-02 1977-09-20 Texas Instruments Incorporated Continuous chemical vapor deposition reactor
US4217374A (en) 1978-03-08 1980-08-12 Energy Conversion Devices, Inc. Amorphous semiconductors equivalent to crystalline semiconductors
US4410558A (en) * 1980-05-19 1983-10-18 Energy Conversion Devices, Inc. Continuous amorphous solar cell production system

Also Published As

Publication number Publication date
AU556652B2 (en) 1986-11-13
IL69711A0 (en) 1983-12-30
DE3370655D1 (en) 1987-05-07
ATE26309T1 (de) 1987-04-15
EP0106521B1 (en) 1987-04-01
EP0106521A2 (en) 1984-04-25
AU1897783A (en) 1984-03-22
JPH0365653B2 (ja) 1991-10-14
PH21147A (en) 1987-07-27
EP0106521A3 (en) 1984-07-11
CA1214751A (en) 1986-12-02
JPS5968925A (ja) 1984-04-19

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