CA969290A - Fabrication of semiconductor devices incorporating polycrystalline silicon - Google Patents
Fabrication of semiconductor devices incorporating polycrystalline siliconInfo
- Publication number
- CA969290A CA969290A CA152,188A CA152188A CA969290A CA 969290 A CA969290 A CA 969290A CA 152188 A CA152188 A CA 152188A CA 969290 A CA969290 A CA 969290A
- Authority
- CA
- Canada
- Prior art keywords
- fabrication
- semiconductor devices
- polycrystalline silicon
- devices incorporating
- incorporating polycrystalline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/40—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
- H10D84/401—Combinations of FETs or IGBTs with BJTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US19071971A | 1971-10-20 | 1971-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA969290A true CA969290A (en) | 1975-06-10 |
Family
ID=22702482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA152,188A Expired CA969290A (en) | 1971-10-20 | 1972-09-20 | Fabrication of semiconductor devices incorporating polycrystalline silicon |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS5234193B2 (enrdf_load_stackoverflow) |
| CA (1) | CA969290A (enrdf_load_stackoverflow) |
| DE (1) | DE2250570A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1384153A (enrdf_load_stackoverflow) |
| IT (1) | IT968985B (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5258360A (en) * | 1975-11-10 | 1977-05-13 | Toshiba Corp | Production of semiconductor device |
| NL7612883A (nl) * | 1976-11-19 | 1978-05-23 | Philips Nv | Halfgeleiderinrichting, en werkwijze ter ver- vaardiging daarvan. |
| JPS5423386A (en) * | 1977-07-22 | 1979-02-21 | Hitachi Ltd | Manufacture of semiconductor device |
| JPS57100949U (enrdf_load_stackoverflow) * | 1980-12-09 | 1982-06-21 | ||
| GB8507624D0 (en) * | 1985-03-23 | 1985-05-01 | Standard Telephones Cables Ltd | Semiconductor devices |
| JPH07101694B2 (ja) * | 1989-02-08 | 1995-11-01 | 株式会社日立製作所 | 半導体装置の製造方法 |
-
1972
- 1972-09-20 CA CA152,188A patent/CA969290A/en not_active Expired
- 1972-10-12 GB GB4721772A patent/GB1384153A/en not_active Expired
- 1972-10-14 DE DE2250570A patent/DE2250570A1/de active Pending
- 1972-10-16 IT IT30531/72A patent/IT968985B/it active
- 1972-10-19 JP JP47104839A patent/JPS5234193B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4850677A (enrdf_load_stackoverflow) | 1973-07-17 |
| JPS5234193B2 (enrdf_load_stackoverflow) | 1977-09-01 |
| IT968985B (it) | 1974-03-20 |
| GB1384153A (en) | 1975-02-19 |
| DE2250570A1 (de) | 1973-04-26 |
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