JPS4850677A - - Google Patents

Info

Publication number
JPS4850677A
JPS4850677A JP47104839A JP10483972A JPS4850677A JP S4850677 A JPS4850677 A JP S4850677A JP 47104839 A JP47104839 A JP 47104839A JP 10483972 A JP10483972 A JP 10483972A JP S4850677 A JPS4850677 A JP S4850677A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47104839A
Other languages
Japanese (ja)
Other versions
JPS5234193B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4850677A publication Critical patent/JPS4850677A/ja
Publication of JPS5234193B2 publication Critical patent/JPS5234193B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/40—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
    • H10D84/401—Combinations of FETs or IGBTs with BJTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP47104839A 1971-10-20 1972-10-19 Expired JPS5234193B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US19071971A 1971-10-20 1971-10-20

Publications (2)

Publication Number Publication Date
JPS4850677A true JPS4850677A (enrdf_load_stackoverflow) 1973-07-17
JPS5234193B2 JPS5234193B2 (enrdf_load_stackoverflow) 1977-09-01

Family

ID=22702482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47104839A Expired JPS5234193B2 (enrdf_load_stackoverflow) 1971-10-20 1972-10-19

Country Status (5)

Country Link
JP (1) JPS5234193B2 (enrdf_load_stackoverflow)
CA (1) CA969290A (enrdf_load_stackoverflow)
DE (1) DE2250570A1 (enrdf_load_stackoverflow)
GB (1) GB1384153A (enrdf_load_stackoverflow)
IT (1) IT968985B (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258360A (en) * 1975-11-10 1977-05-13 Toshiba Corp Production of semiconductor device
JPS5423386A (en) * 1977-07-22 1979-02-21 Hitachi Ltd Manufacture of semiconductor device
JPH02207538A (ja) * 1989-02-08 1990-08-17 Hitachi Ltd 半導体装置の製造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7612883A (nl) * 1976-11-19 1978-05-23 Philips Nv Halfgeleiderinrichting, en werkwijze ter ver- vaardiging daarvan.
JPS57100949U (enrdf_load_stackoverflow) * 1980-12-09 1982-06-21
GB8507624D0 (en) * 1985-03-23 1985-05-01 Standard Telephones Cables Ltd Semiconductor devices

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258360A (en) * 1975-11-10 1977-05-13 Toshiba Corp Production of semiconductor device
JPS5423386A (en) * 1977-07-22 1979-02-21 Hitachi Ltd Manufacture of semiconductor device
JPH02207538A (ja) * 1989-02-08 1990-08-17 Hitachi Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5234193B2 (enrdf_load_stackoverflow) 1977-09-01
IT968985B (it) 1974-03-20
GB1384153A (en) 1975-02-19
CA969290A (en) 1975-06-10
DE2250570A1 (de) 1973-04-26

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