CA940019A - Manufacture of silicon monocrystals - Google Patents

Manufacture of silicon monocrystals

Info

Publication number
CA940019A
CA940019A CA117,081A CA117081A CA940019A CA 940019 A CA940019 A CA 940019A CA 117081 A CA117081 A CA 117081A CA 940019 A CA940019 A CA 940019A
Authority
CA
Canada
Prior art keywords
manufacture
silicon monocrystals
monocrystals
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA117,081A
Other versions
CA117081S (en
Inventor
Norbert Schink
Konrad Reuschel
Herbert Sandmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of CA940019A publication Critical patent/CA940019A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CA117,081A 1970-07-02 1971-06-30 Manufacture of silicon monocrystals Expired CA940019A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702032878 DE2032878A1 (en) 1970-07-02 1970-07-02 Process for the production of low dislocation silicon single crystals

Publications (1)

Publication Number Publication Date
CA940019A true CA940019A (en) 1974-01-15

Family

ID=5775642

Family Applications (1)

Application Number Title Priority Date Filing Date
CA117,081A Expired CA940019A (en) 1970-07-02 1971-06-30 Manufacture of silicon monocrystals

Country Status (7)

Country Link
BE (1) BE769427A (en)
CA (1) CA940019A (en)
DE (1) DE2032878A1 (en)
FR (1) FR2100102A5 (en)
GB (1) GB1336189A (en)
NL (1) NL7107163A (en)
SE (1) SE362016B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2508802A1 (en) * 1975-02-28 1976-09-09 Siemens Ag METHOD OF DEPOSITING ELEMENTAL SILICON
JPS60200523A (en) * 1984-03-26 1985-10-11 Agency Of Ind Science & Technol Manufacture of silicon thin film
CN117702269A (en) * 2023-02-23 2024-03-15 隆基绿能科技股份有限公司 High-service-life silicon wafer and silicon wafer gettering method

Also Published As

Publication number Publication date
SE362016B (en) 1973-11-26
DE2032878A1 (en) 1972-01-05
BE769427A (en) 1971-11-16
GB1336189A (en) 1973-11-07
FR2100102A5 (en) 1972-03-17
NL7107163A (en) 1972-01-04

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