FR2100102A5 - - Google Patents

Info

Publication number
FR2100102A5
FR2100102A5 FR7124070A FR7124070A FR2100102A5 FR 2100102 A5 FR2100102 A5 FR 2100102A5 FR 7124070 A FR7124070 A FR 7124070A FR 7124070 A FR7124070 A FR 7124070A FR 2100102 A5 FR2100102 A5 FR 2100102A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7124070A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of FR2100102A5 publication Critical patent/FR2100102A5/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
FR7124070A 1970-07-02 1971-07-01 Expired FR2100102A5 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702032878 DE2032878A1 (de) 1970-07-02 1970-07-02 Verfahren zum Herstellen von versetzungsarmen Siliciumeinkristallen

Publications (1)

Publication Number Publication Date
FR2100102A5 true FR2100102A5 (fr) 1972-03-17

Family

ID=5775642

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7124070A Expired FR2100102A5 (fr) 1970-07-02 1971-07-01

Country Status (7)

Country Link
BE (1) BE769427A (fr)
CA (1) CA940019A (fr)
DE (1) DE2032878A1 (fr)
FR (1) FR2100102A5 (fr)
GB (1) GB1336189A (fr)
NL (1) NL7107163A (fr)
SE (1) SE362016B (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2508802A1 (de) * 1975-02-28 1976-09-09 Siemens Ag Verfahren zum abscheiden von elementarem silicium
JPS60200523A (ja) * 1984-03-26 1985-10-11 Agency Of Ind Science & Technol シリコン薄膜の製造法

Also Published As

Publication number Publication date
DE2032878A1 (de) 1972-01-05
CA940019A (en) 1974-01-15
SE362016B (fr) 1973-11-26
BE769427A (fr) 1971-11-16
NL7107163A (fr) 1972-01-04
GB1336189A (en) 1973-11-07

Similar Documents

Publication Publication Date Title
AR204384A1 (fr)
ATA96471A (fr)
AU2044470A (fr)
AU1146470A (fr)
AU1473870A (fr)
AU1326870A (fr)
AU2017870A (fr)
AU2085370A (fr)
AU1833270A (fr)
AU1716970A (fr)
AU2130570A (fr)
AU1517670A (fr)
AU1336970A (fr)
AR195465A1 (fr)
AU1603270A (fr)
AU1086670A (fr)
AU2144270A (fr)
AU1343870A (fr)
AU2131570A (fr)
AU2130770A (fr)
AU2061170A (fr)
AU1277070A (fr)
AU1581370A (fr)
AU1591370A (fr)
AU1247570A (fr)

Legal Events

Date Code Title Description
ST Notification of lapse