SE362016B - - Google Patents

Info

Publication number
SE362016B
SE362016B SE863171A SE863171A SE362016B SE 362016 B SE362016 B SE 362016B SE 863171 A SE863171 A SE 863171A SE 863171 A SE863171 A SE 863171A SE 362016 B SE362016 B SE 362016B
Authority
SE
Sweden
Application number
SE863171A
Inventor
K Reuschel
H Sandmann
N Schink
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of SE362016B publication Critical patent/SE362016B/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
SE863171A 1970-07-02 1971-07-02 SE362016B (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702032878 DE2032878A1 (de) 1970-07-02 1970-07-02 Verfahren zum Herstellen von versetzungsarmen Siliciumeinkristallen

Publications (1)

Publication Number Publication Date
SE362016B true SE362016B (fr) 1973-11-26

Family

ID=5775642

Family Applications (1)

Application Number Title Priority Date Filing Date
SE863171A SE362016B (fr) 1970-07-02 1971-07-02

Country Status (7)

Country Link
BE (1) BE769427A (fr)
CA (1) CA940019A (fr)
DE (1) DE2032878A1 (fr)
FR (1) FR2100102A5 (fr)
GB (1) GB1336189A (fr)
NL (1) NL7107163A (fr)
SE (1) SE362016B (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2508802A1 (de) * 1975-02-28 1976-09-09 Siemens Ag Verfahren zum abscheiden von elementarem silicium
JPS60200523A (ja) * 1984-03-26 1985-10-11 Agency Of Ind Science & Technol シリコン薄膜の製造法

Also Published As

Publication number Publication date
DE2032878A1 (de) 1972-01-05
CA940019A (en) 1974-01-15
BE769427A (fr) 1971-11-16
FR2100102A5 (fr) 1972-03-17
NL7107163A (fr) 1972-01-04
GB1336189A (en) 1973-11-07

Similar Documents

Publication Publication Date Title
AR204384A1 (fr)
ATA96471A (fr)
AU1146470A (fr)
AU1473870A (fr)
FR2097015B1 (fr)
AU1517670A (fr)
AU1336970A (fr)
AU1716970A (fr)
AU1833270A (fr)
AU1326870A (fr)
AR195465A1 (fr)
AU1872870A (fr)
AU1918570A (fr)
AU1235770A (fr)
AU1189670A (fr)
AU1591370A (fr)
AU1247570A (fr)
AU1343870A (fr)
AU1277070A (fr)
AU1879170A (fr)
AU1974970A (fr)
AU1086670A (fr)
AU1881070A (fr)
AU1083170A (fr)
AU1603270A (fr)