NL7107163A - - Google Patents

Info

Publication number
NL7107163A
NL7107163A NL7107163A NL7107163A NL7107163A NL 7107163 A NL7107163 A NL 7107163A NL 7107163 A NL7107163 A NL 7107163A NL 7107163 A NL7107163 A NL 7107163A NL 7107163 A NL7107163 A NL 7107163A
Authority
NL
Netherlands
Application number
NL7107163A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7107163A publication Critical patent/NL7107163A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
NL7107163A 1970-07-02 1971-05-25 NL7107163A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702032878 DE2032878A1 (de) 1970-07-02 1970-07-02 Verfahren zum Herstellen von versetzungsarmen Siliciumeinkristallen

Publications (1)

Publication Number Publication Date
NL7107163A true NL7107163A (fr) 1972-01-04

Family

ID=5775642

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7107163A NL7107163A (fr) 1970-07-02 1971-05-25

Country Status (7)

Country Link
BE (1) BE769427A (fr)
CA (1) CA940019A (fr)
DE (1) DE2032878A1 (fr)
FR (1) FR2100102A5 (fr)
GB (1) GB1336189A (fr)
NL (1) NL7107163A (fr)
SE (1) SE362016B (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2508802A1 (de) * 1975-02-28 1976-09-09 Siemens Ag Verfahren zum abscheiden von elementarem silicium
JPS60200523A (ja) * 1984-03-26 1985-10-11 Agency Of Ind Science & Technol シリコン薄膜の製造法

Also Published As

Publication number Publication date
DE2032878A1 (de) 1972-01-05
CA940019A (en) 1974-01-15
SE362016B (fr) 1973-11-26
BE769427A (fr) 1971-11-16
FR2100102A5 (fr) 1972-03-17
GB1336189A (en) 1973-11-07

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