CA2365804A1 - Dispositif de commande de trajet optique a section reflechissante, et methode de fabrication - Google Patents
Dispositif de commande de trajet optique a section reflechissante, et methode de fabrication Download PDFInfo
- Publication number
- CA2365804A1 CA2365804A1 CA002365804A CA2365804A CA2365804A1 CA 2365804 A1 CA2365804 A1 CA 2365804A1 CA 002365804 A CA002365804 A CA 002365804A CA 2365804 A CA2365804 A CA 2365804A CA 2365804 A1 CA2365804 A1 CA 2365804A1
- Authority
- CA
- Canada
- Prior art keywords
- mirror
- section
- optical path
- substrate
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 199
- 238000004519 manufacturing process Methods 0.000 title claims description 28
- 239000000758 substrate Substances 0.000 claims abstract description 135
- 239000010410 layer Substances 0.000 claims description 115
- 239000010408 film Substances 0.000 claims description 59
- 238000000034 method Methods 0.000 claims description 41
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 18
- 229910052802 copper Inorganic materials 0.000 claims description 18
- 239000010949 copper Substances 0.000 claims description 18
- 230000001131 transforming effect Effects 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 239000002344 surface layer Substances 0.000 claims description 9
- 239000012530 fluid Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 7
- 230000009466 transformation Effects 0.000 claims description 7
- 230000004044 response Effects 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000005415 magnetization Effects 0.000 claims description 3
- 230000000750 progressive effect Effects 0.000 claims description 3
- 239000013307 optical fiber Substances 0.000 description 32
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 18
- 239000010931 gold Substances 0.000 description 18
- 229910052710 silicon Inorganic materials 0.000 description 18
- 239000010703 silicon Substances 0.000 description 18
- 238000007747 plating Methods 0.000 description 12
- 238000004544 sputter deposition Methods 0.000 description 12
- 239000007788 liquid Substances 0.000 description 11
- 230000008569 process Effects 0.000 description 10
- 238000005530 etching Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 230000006854 communication Effects 0.000 description 5
- 238000004891 communication Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000001015 X-ray lithography Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 229960002050 hydrofluoric acid Drugs 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000001846 repelling effect Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- QIVUCLWGARAQIO-OLIXTKCUSA-N (3s)-n-[(3s,5s,6r)-6-methyl-2-oxo-1-(2,2,2-trifluoroethyl)-5-(2,3,6-trifluorophenyl)piperidin-3-yl]-2-oxospiro[1h-pyrrolo[2,3-b]pyridine-3,6'-5,7-dihydrocyclopenta[b]pyridine]-3'-carboxamide Chemical compound C1([C@H]2[C@H](N(C(=O)[C@@H](NC(=O)C=3C=C4C[C@]5(CC4=NC=3)C3=CC=CN=C3NC5=O)C2)CC(F)(F)F)C)=C(F)C=CC(F)=C1F QIVUCLWGARAQIO-OLIXTKCUSA-N 0.000 description 1
- 241001481828 Glyptocephalus cynoglossus Species 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000007175 bidirectional communication Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000005001 laminate film Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/352—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element having a shaped reflective surface, e.g. a reflective element comprising several reflective surfaces or facets that function together
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12145—Switch
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3572—Magnetic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3574—Mechanical force, e.g. pressure variations
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3578—Piezoelectric force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3598—Switching means directly located between an optoelectronic element and waveguides, including direct displacement of either the element or the waveguide, e.g. optical pulse generation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000389991 | 2000-12-22 | ||
| JP389991/2000 | 2000-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2365804A1 true CA2365804A1 (fr) | 2002-06-22 |
Family
ID=33486985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002365804A Abandoned CA2365804A1 (fr) | 2000-12-22 | 2001-12-21 | Dispositif de commande de trajet optique a section reflechissante, et methode de fabrication |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US6829079B2 (fr) |
| CA (1) | CA2365804A1 (fr) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1450190A1 (fr) * | 2003-02-21 | 2004-08-25 | C.S.E.M. Centre Suisse D'electronique Et De Microtechnique Sa | Appareil et méthode pour le couplage en temps réel de fibres optiques |
| JP2004362144A (ja) * | 2003-06-03 | 2004-12-24 | Hitachi Ltd | 運用管理方法及び実施装置並びに処理プログラム |
| JP4727916B2 (ja) * | 2003-10-22 | 2011-07-20 | 富士通株式会社 | 光デバイスモジュール |
| WO2005085929A1 (fr) * | 2004-03-09 | 2005-09-15 | Fujitsu Limited | Dispositif de miroir, contrôleur optique, méthode de contrôle de miroir et élément de miroir |
| TWI323801B (en) * | 2004-03-12 | 2010-04-21 | Hon Hai Prec Ind Co Ltd | A reflective display |
| JP4452560B2 (ja) * | 2004-06-07 | 2010-04-21 | 富士フイルム株式会社 | 透過型光変調素子及び透過型光変調アレイ素子 |
| US7061660B1 (en) * | 2005-04-13 | 2006-06-13 | Hewlett-Packard Development Company, L.P. | MEMs device with feedback control |
| JPWO2012115264A1 (ja) * | 2011-02-25 | 2014-07-07 | 日本電気株式会社 | 光走査装置 |
| WO2021197779A1 (fr) | 2020-03-30 | 2021-10-07 | British Telecommunications Public Limited Company | Interrupteur optique, procédé et système de routage optique |
| US11774785B2 (en) | 2020-03-30 | 2023-10-03 | British Telecommunications Public Limited Company | Optical limiter and method for limiting radiant flux |
| CN115903146A (zh) * | 2022-11-10 | 2023-04-04 | 西安近代化学研究所 | 一种基于数字驱动原理的光开关 |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS597916A (ja) | 1982-07-07 | 1984-01-17 | Sumitomo Electric Ind Ltd | レ−ザ−ダイオ−ド・シングルモ−ド光フアイバ−結合システム |
| JPS6417015A (en) | 1987-07-10 | 1989-01-20 | Saeki Mitsuhiro | Laser beam spectroscopic device |
| JPS6459303A (en) | 1987-08-31 | 1989-03-07 | Nippon Telegraph & Telephone | Optical coupling part for optical waveguide and light receiving/emitting element |
| US5684616A (en) * | 1988-04-18 | 1997-11-04 | Brotz; Gregory R. | Moving mirror apparatus |
| CA2011303C (fr) * | 1989-03-02 | 1996-10-15 | Shintaro Sentsui | Appareil et methode d'identification de support de transmission optique, et methode de telecommunication par voie optique |
| JPH0376465A (ja) | 1989-08-18 | 1991-04-02 | Brother Ind Ltd | 画像形成装置 |
| NL9100354A (nl) * | 1991-02-27 | 1992-09-16 | Philips Nv | Systeem voor het instellen van omgevingsparameters. |
| JPH04333004A (ja) | 1991-05-08 | 1992-11-20 | Nec Corp | 光導波装置 |
| JP3218414B2 (ja) | 1992-07-15 | 2001-10-15 | キヤノン株式会社 | 微小ティップ及びその製造方法、並びに該微小ティップを用いたプローブユニット及び情報処理装置 |
| US5450246A (en) * | 1992-11-04 | 1995-09-12 | Anvik Corporation | Remotely adjustable anti-glare vehicle mirror |
| JP3302141B2 (ja) * | 1993-11-16 | 2002-07-15 | キヤノン株式会社 | 光空間通信方法 |
| JPH07159658A (ja) | 1993-12-07 | 1995-06-23 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路−光素子結合構造およびその製造方法 |
| JP3365591B2 (ja) | 1995-06-21 | 2003-01-14 | 日本電信電話株式会社 | 光接続集積回路 |
| JP3679519B2 (ja) | 1995-09-14 | 2005-08-03 | キヤノン株式会社 | トンネル電流または微小力または磁気力検出用の微小ティップの製造方法、並びにその微小ティップを有するプローブの製造方法とそのプローブ、該プローブを有するプローブユニットと走査型プローブ顕微鏡及び情報記録再生装置 |
| JPH09218304A (ja) | 1995-12-08 | 1997-08-19 | Victor Co Of Japan Ltd | マイクロミラーの製造方法 |
| US5743640A (en) | 1996-02-06 | 1998-04-28 | Crossley; Jimmy L. | Ice cream twisting apparatus |
| DE19641531A1 (de) | 1996-10-09 | 1998-04-16 | Bosch Gmbh Robert | Mikromechanisches Bauelement und ein Verfahren zu dessen Herstellung |
| JPH10170765A (ja) | 1996-12-06 | 1998-06-26 | Nec Corp | 光導波路 |
| GB2321114B (en) | 1997-01-10 | 2001-02-21 | Lasor Ltd | An optical modulator |
| US5915063A (en) | 1997-01-15 | 1999-06-22 | Colbourne; Paul | Variable optical attenuator |
| US6031648A (en) * | 1997-05-01 | 2000-02-29 | At&T Corp. | Automatic gain control for free-space optical telecommunications links |
| US6075239A (en) | 1997-09-10 | 2000-06-13 | Lucent Technologies, Inc. | Article comprising a light-actuated micromechanical photonic switch |
| JP4001436B2 (ja) * | 1998-07-23 | 2007-10-31 | 三菱電機株式会社 | 光スイッチ及び光スイッチを用いた光路切換装置 |
| JP3418863B2 (ja) | 1999-03-05 | 2003-06-23 | 日本航空電子工業株式会社 | 光スイッチの製造方法 |
| JP3451395B2 (ja) | 1998-10-16 | 2003-09-29 | 日本航空電子工業株式会社 | 光スイッチおよびその製造方法 |
| DE19855140A1 (de) * | 1998-11-30 | 2000-08-10 | Univ Hannover | Vorrichtung zum Abtasten eines Objektes |
| US6154586A (en) | 1998-12-24 | 2000-11-28 | Jds Fitel Inc. | Optical switch mechanism |
| US6283601B1 (en) * | 2000-04-14 | 2001-09-04 | C Speed Corporation | Optical mirror system with multi-axis rotational control |
| US6670208B2 (en) * | 2000-06-23 | 2003-12-30 | Nec Corporation | Optical circuit in which fabrication is easy |
-
2001
- 2001-12-21 US US10/028,238 patent/US6829079B2/en not_active Expired - Lifetime
- 2001-12-21 CA CA002365804A patent/CA2365804A1/fr not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| US6829079B2 (en) | 2004-12-07 |
| US20030117690A1 (en) | 2003-06-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Discontinued |