BRPI0503947A - método e dispositivo para proteger moduladores interferométricos de descarga eletrostática - Google Patents

método e dispositivo para proteger moduladores interferométricos de descarga eletrostática

Info

Publication number
BRPI0503947A
BRPI0503947A BRPI0503947-9A BRPI0503947A BRPI0503947A BR PI0503947 A BRPI0503947 A BR PI0503947A BR PI0503947 A BRPI0503947 A BR PI0503947A BR PI0503947 A BRPI0503947 A BR PI0503947A
Authority
BR
Brazil
Prior art keywords
protecting
electrostatic discharge
interferometric modulators
mems device
interferometric
Prior art date
Application number
BRPI0503947-9A
Other languages
English (en)
Inventor
Philip D Floyd
Original Assignee
Idc Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idc Llc filed Critical Idc Llc
Publication of BRPI0503947A publication Critical patent/BRPI0503947A/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0012—Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Micromachines (AREA)

Abstract

"MéTODO E DISPOSITIVO PARA PROTEGER MODULADORES INTERFEROMéTRICOS DE DESCARGA ELETROSTáTICA". Um dispositivo MEMS, tal como, um modulador interferométrico, inclui um elemento de proteção ESD capaz de derivar para a terra uma corrente excessiva conduzida pelo condutor elétrico no dispositivo MEMS. O elemento de proteção pode ser um diodo e pode ser formado pela deposição de uma pluralidade de camadas de semicondutor dopadas sobre o substrato sobre o qual o dispositivo MEMS é formado.
BRPI0503947-9A 2004-09-27 2005-09-27 método e dispositivo para proteger moduladores interferométricos de descarga eletrostática BRPI0503947A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61349204P 2004-09-27 2004-09-27
US11/119,651 US7405861B2 (en) 2004-09-27 2005-05-02 Method and device for protecting interferometric modulators from electrostatic discharge

Publications (1)

Publication Number Publication Date
BRPI0503947A true BRPI0503947A (pt) 2006-05-09

Family

ID=35482145

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0503947-9A BRPI0503947A (pt) 2004-09-27 2005-09-27 método e dispositivo para proteger moduladores interferométricos de descarga eletrostática

Country Status (11)

Country Link
US (2) US7405861B2 (pt)
EP (1) EP1640321A3 (pt)
JP (1) JP2006095682A (pt)
KR (1) KR20060092922A (pt)
AU (1) AU2005211605A1 (pt)
BR (1) BRPI0503947A (pt)
CA (1) CA2520622A1 (pt)
MX (1) MXPA05010302A (pt)
RU (1) RU2005129927A (pt)
SG (1) SG121169A1 (pt)
TW (1) TWI353333B (pt)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI289708B (en) 2002-12-25 2007-11-11 Qualcomm Mems Technologies Inc Optical interference type color display
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
JP2006326701A (ja) * 2005-05-23 2006-12-07 Sony Corp 微小電気機械デバイス
WO2007014022A1 (en) * 2005-07-22 2007-02-01 Qualcomm Incorporated Mems devices having support structures and methods of fabricating the same
US7652814B2 (en) 2006-01-27 2010-01-26 Qualcomm Mems Technologies, Inc. MEMS device with integrated optical element
US7450295B2 (en) * 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7529017B1 (en) * 2006-05-25 2009-05-05 Silicon Light Machines Corporation Circuit and method for snapdown prevention in voltage controlled MEMS devices
EP1943551A2 (en) 2006-10-06 2008-07-16 Qualcomm Mems Technologies, Inc. Light guide
KR101535805B1 (ko) 2006-10-06 2015-07-09 퀄컴 엠이엠에스 테크놀로지스, 인크. 디스플레이 장치 및 디스플레이 형성방법
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7595926B2 (en) * 2007-07-05 2009-09-29 Qualcomm Mems Technologies, Inc. Integrated IMODS and solar cells on a substrate
US7570415B2 (en) * 2007-08-07 2009-08-04 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US8022896B2 (en) * 2007-08-08 2011-09-20 Qualcomm Mems Technologies, Inc. ESD protection for MEMS display panels
DE102007044047B4 (de) * 2007-09-14 2017-08-03 Infineon Technologies Ag Schaltungsanordnung mit einem elektronischen Bauelement und einer ESD-Schutzanordnung
US8068710B2 (en) * 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
US7782522B2 (en) * 2008-07-17 2010-08-24 Qualcomm Mems Technologies, Inc. Encapsulation methods for interferometric modulator and MEMS devices
US7864403B2 (en) 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
US8598667B2 (en) * 2009-06-09 2013-12-03 Sharp Kabushiki Kaisha Semiconductor device
US8330224B2 (en) * 2009-09-18 2012-12-11 Meggitt (San Juan Capistrano), Inc. Integrated MEMS and ESD protection devices
EP2316788A1 (en) * 2009-10-29 2011-05-04 Nxp B.V. MEMS device with electrosatic discharge protection
KR101821727B1 (ko) 2010-04-16 2018-01-24 플렉스 라이팅 투 엘엘씨 필름 기반 라이트가이드를 포함하는 프론트 조명 디바이스
JP2013525955A (ja) 2010-04-16 2013-06-20 フレックス ライティング ２，エルエルシー フィルムベースのライトガイドを備える照明デバイス
TWI492359B (zh) * 2013-02-22 2015-07-11 Anova Technologies Co Ltd 半導體雷擊保護裝置
WO2015025691A1 (ja) * 2013-08-19 2015-02-26 浜松ホトニクス株式会社 光干渉計を製造する方法
JP2016097033A (ja) * 2014-11-20 2016-05-30 キヤノン株式会社 静電容量型トランスデューサ、及び被検体情報取得装置
US10825417B2 (en) 2015-04-10 2020-11-03 Ossia Inc. Wirelessly powered electronic display apparatuses
US10529518B2 (en) * 2016-09-19 2020-01-07 Analog Devices Global Protection schemes for MEMS switch devices
DE102017206385A1 (de) * 2017-04-13 2018-10-18 Robert Bosch Gmbh Verfahren zum Schutz einer MEMS-Einheit vor Infrarot-Untersuchungen sowie MEMS-Einheit
US11646576B2 (en) 2021-09-08 2023-05-09 Analog Devices International Unlimited Company Electrical overstress protection of microelectromechanical systems

Family Cites Families (243)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2534846A (en) 1946-06-20 1950-12-19 Emi Ltd Color filter
DE1288651B (de) 1963-06-28 1969-02-06 Siemens Ag Anordnung elektrischer Dipole fuer Wellenlaengen unterhalb 1 mm und Verfahren zur Herstellung einer derartigen Anordnung
US3616312A (en) 1966-04-15 1971-10-26 Ionics Hydrazine manufacture
FR1603131A (pt) 1968-07-05 1971-03-22
US3653741A (en) 1970-02-16 1972-04-04 Alvin M Marks Electro-optical dipolar material
US3813265A (en) 1970-02-16 1974-05-28 A Marks Electro-optical dipolar material
US3725868A (en) 1970-10-19 1973-04-03 Burroughs Corp Small reconfigurable processor for a variety of data processing applications
DE2336930A1 (de) 1973-07-20 1975-02-06 Battelle Institut E V Infrarot-modulator (ii.)
US4099854A (en) 1976-10-12 1978-07-11 The Unites States Of America As Represented By The Secretary Of The Navy Optical notch filter utilizing electric dipole resonance absorption
US4196396A (en) 1976-10-15 1980-04-01 Bell Telephone Laboratories, Incorporated Interferometer apparatus using electro-optic material with feedback
US4389096A (en) 1977-12-27 1983-06-21 Matsushita Electric Industrial Co., Ltd. Image display apparatus of liquid crystal valve projection type
US4445050A (en) 1981-12-15 1984-04-24 Marks Alvin M Device for conversion of light power to electric power
US4663083A (en) 1978-05-26 1987-05-05 Marks Alvin M Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics
US4228437A (en) 1979-06-26 1980-10-14 The United States Of America As Represented By The Secretary Of The Navy Wideband polarization-transforming electromagnetic mirror
NL8001281A (nl) 1980-03-04 1981-10-01 Philips Nv Weergeefinrichting.
DE3012253A1 (de) 1980-03-28 1981-10-15 Hoechst Ag, 6000 Frankfurt Verfahren zum sichtbarmaschen von ladungsbildern und eine hierfuer geeignete vorichtung
US4377324A (en) 1980-08-04 1983-03-22 Honeywell Inc. Graded index Fabry-Perot optical filter device
US4441791A (en) 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
FR2506026A1 (fr) 1981-05-18 1982-11-19 Radant Etudes Procede et dispositif pour l'analyse d'un faisceau de rayonnement d'ondes electromagnetiques hyperfrequence
NL8103377A (nl) 1981-07-16 1983-02-16 Philips Nv Weergeefinrichting.
US4571603A (en) 1981-11-03 1986-02-18 Texas Instruments Incorporated Deformable mirror electrostatic printer
NL8200354A (nl) 1982-02-01 1983-09-01 Philips Nv Passieve weergeefinrichting.
US4500171A (en) 1982-06-02 1985-02-19 Texas Instruments Incorporated Process for plastic LCD fill hole sealing
US4482213A (en) 1982-11-23 1984-11-13 Texas Instruments Incorporated Perimeter seal reinforcement holes for plastic LCDs
US4566935A (en) 1984-07-31 1986-01-28 Texas Instruments Incorporated Spatial light modulator and method
US4710732A (en) 1984-07-31 1987-12-01 Texas Instruments Incorporated Spatial light modulator and method
US4662746A (en) 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US5061049A (en) 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4596992A (en) 1984-08-31 1986-06-24 Texas Instruments Incorporated Linear spatial light modulator and printer
US5096279A (en) 1984-08-31 1992-03-17 Texas Instruments Incorporated Spatial light modulator and method
US4615595A (en) 1984-10-10 1986-10-07 Texas Instruments Incorporated Frame addressed spatial light modulator
US4617608A (en) 1984-12-28 1986-10-14 At&T Bell Laboratories Variable gap device and method of manufacture
US4655554A (en) 1985-03-06 1987-04-07 The United States Of America As Represented By The Secretary Of The Air Force Spatial light modulator having a capacitively coupled photoconductor
US5172262A (en) 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
US4859060A (en) 1985-11-26 1989-08-22 501 Sharp Kabushiki Kaisha Variable interferometric device and a process for the production of the same
US4663181A (en) 1986-02-24 1987-05-05 Conoco Inc. Method for applying protective coatings
GB8610129D0 (en) 1986-04-25 1986-05-29 Secr Defence Electro-optical device
US4748366A (en) 1986-09-02 1988-05-31 Taylor George W Novel uses of piezoelectric materials for creating optical effects
US4786128A (en) 1986-12-02 1988-11-22 Quantum Diagnostics, Ltd. Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction
NL8701138A (nl) 1987-05-13 1988-12-01 Philips Nv Electroscopische beeldweergeefinrichting.
DE3716485C1 (de) 1987-05-16 1988-11-24 Heraeus Gmbh W C Xenon-Kurzbogen-Entladungslampe
US4900136A (en) 1987-08-11 1990-02-13 North American Philips Corporation Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel
US4956619A (en) 1988-02-19 1990-09-11 Texas Instruments Incorporated Spatial light modulator
US4856863A (en) 1988-06-22 1989-08-15 Texas Instruments Incorporated Optical fiber interconnection network including spatial light modulator
US5028939A (en) 1988-08-23 1991-07-02 Texas Instruments Incorporated Spatial light modulator system
JP2700903B2 (ja) * 1988-09-30 1998-01-21 シャープ株式会社 液晶表示装置
US4982184A (en) 1989-01-03 1991-01-01 General Electric Company Electrocrystallochromic display and element
US5162787A (en) 1989-02-27 1992-11-10 Texas Instruments Incorporated Apparatus and method for digitized video system utilizing a moving display surface
US5446479A (en) 1989-02-27 1995-08-29 Texas Instruments Incorporated Multi-dimensional array video processor system
US5079544A (en) 1989-02-27 1992-01-07 Texas Instruments Incorporated Standard independent digitized video system
US5214419A (en) 1989-02-27 1993-05-25 Texas Instruments Incorporated Planarized true three dimensional display
US5170156A (en) 1989-02-27 1992-12-08 Texas Instruments Incorporated Multi-frequency two dimensional display system
US5206629A (en) 1989-02-27 1993-04-27 Texas Instruments Incorporated Spatial light modulator and memory for digitized video display
KR100202246B1 (ko) 1989-02-27 1999-06-15 윌리엄 비. 켐플러 디지탈화 비디오 시스템을 위한 장치 및 방법
US5272473A (en) 1989-02-27 1993-12-21 Texas Instruments Incorporated Reduced-speckle display system
US5287096A (en) 1989-02-27 1994-02-15 Texas Instruments Incorporated Variable luminosity display system
US5192946A (en) 1989-02-27 1993-03-09 Texas Instruments Incorporated Digitized color video display system
US5214420A (en) 1989-02-27 1993-05-25 Texas Instruments Incorporated Spatial light modulator projection system with random polarity light
US4900395A (en) 1989-04-07 1990-02-13 Fsi International, Inc. HF gas etching of wafers in an acid processor
US5022745A (en) 1989-09-07 1991-06-11 Massachusetts Institute Of Technology Electrostatically deformable single crystal dielectrically coated mirror
US4954789A (en) 1989-09-28 1990-09-04 Texas Instruments Incorporated Spatial light modulator
US5381253A (en) * 1991-11-14 1995-01-10 Board Of Regents Of University Of Colorado Chiral smectic liquid crystal optical modulators having variable retardation
US5124834A (en) 1989-11-16 1992-06-23 General Electric Company Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same
US5037173A (en) 1989-11-22 1991-08-06 Texas Instruments Incorporated Optical interconnection network
US5500635A (en) * 1990-02-20 1996-03-19 Mott; Jonathan C. Products incorporating piezoelectric material
JP2867560B2 (ja) 1990-03-02 1999-03-08 富士通株式会社 光導波路デバイス
CH682523A5 (fr) 1990-04-20 1993-09-30 Suisse Electronique Microtech Dispositif de modulation de lumière à adressage matriciel.
GB9012099D0 (en) 1990-05-31 1990-07-18 Kodak Ltd Optical article for multicolour imaging
US5099353A (en) 1990-06-29 1992-03-24 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
DE69113150T2 (de) 1990-06-29 1996-04-04 Texas Instruments Inc Deformierbare Spiegelvorrichtung mit aktualisiertem Raster.
US5018256A (en) 1990-06-29 1991-05-28 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5216537A (en) 1990-06-29 1993-06-01 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US5142405A (en) 1990-06-29 1992-08-25 Texas Instruments Incorporated Bistable dmd addressing circuit and method
US5153771A (en) 1990-07-18 1992-10-06 Northrop Corporation Coherent light modulation and detector
US5192395A (en) 1990-10-12 1993-03-09 Texas Instruments Incorporated Method of making a digital flexure beam accelerometer
US5044736A (en) 1990-11-06 1991-09-03 Motorola, Inc. Configurable optical filter or display
US5331454A (en) 1990-11-13 1994-07-19 Texas Instruments Incorporated Low reset voltage process for DMD
US5602671A (en) * 1990-11-13 1997-02-11 Texas Instruments Incorporated Low surface energy passivation layer for micromechanical devices
FR2669466B1 (fr) 1990-11-16 1997-11-07 Michel Haond Procede de gravure de couches de circuit integre a profondeur fixee et circuit integre correspondant.
US5233459A (en) 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
US5136669A (en) 1991-03-15 1992-08-04 Sperry Marine Inc. Variable ratio fiber optic coupler optical signal processing element
CA2063744C (en) 1991-04-01 2002-10-08 Paul M. Urbanus Digital micromirror device architecture and timing for use in a pulse-width modulated display system
US5142414A (en) 1991-04-22 1992-08-25 Koehler Dale R Electrically actuatable temporal tristimulus-color device
US5226099A (en) 1991-04-26 1993-07-06 Texas Instruments Incorporated Digital micromirror shutter device
FR2679057B1 (fr) 1991-07-11 1995-10-20 Morin Francois Structure d'ecran a cristal liquide, a matrice active et a haute definition.
US5179274A (en) 1991-07-12 1993-01-12 Texas Instruments Incorporated Method for controlling operation of optical systems and devices
US5168406A (en) 1991-07-31 1992-12-01 Texas Instruments Incorporated Color deformable mirror device and method for manufacture
US5254980A (en) 1991-09-06 1993-10-19 Texas Instruments Incorporated DMD display system controller
US5315370A (en) 1991-10-23 1994-05-24 Bulow Jeffrey A Interferometric modulator for optical signal processing
US5563398A (en) 1991-10-31 1996-10-08 Texas Instruments Incorporated Spatial light modulator scanning system
US5233385A (en) 1991-12-18 1993-08-03 Texas Instruments Incorporated White light enhanced color field sequential projection
US5233456A (en) 1991-12-20 1993-08-03 Texas Instruments Incorporated Resonant mirror and method of manufacture
US5228013A (en) 1992-01-10 1993-07-13 Bik Russell J Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays
US5296950A (en) 1992-01-31 1994-03-22 Texas Instruments Incorporated Optical signal free-space conversion board
US5231532A (en) 1992-02-05 1993-07-27 Texas Instruments Incorporated Switchable resonant filter for optical radiation
US5212582A (en) 1992-03-04 1993-05-18 Texas Instruments Incorporated Electrostatically controlled beam steering device and method
EP0562424B1 (en) 1992-03-25 1997-05-28 Texas Instruments Incorporated Embedded optical calibration system
US5312513A (en) * 1992-04-03 1994-05-17 Texas Instruments Incorporated Methods of forming multiple phase light modulators
US5401983A (en) * 1992-04-08 1995-03-28 Georgia Tech Research Corporation Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices
US5311360A (en) 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
US6219015B1 (en) 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
TW245772B (pt) * 1992-05-19 1995-04-21 Akzo Nv
JPH0651250A (ja) * 1992-05-20 1994-02-25 Texas Instr Inc <Ti> モノリシックな空間的光変調器およびメモリのパッケージ
US5818095A (en) * 1992-08-11 1998-10-06 Texas Instruments Incorporated High-yield spatial light modulator with light blocking layer
US5293272A (en) 1992-08-24 1994-03-08 Physical Optics Corporation High finesse holographic fabry-perot etalon and method of fabricating
US5327286A (en) 1992-08-31 1994-07-05 Texas Instruments Incorporated Real time optical correlation system
US5325116A (en) 1992-09-18 1994-06-28 Texas Instruments Incorporated Device for writing to and reading from optical storage media
US5296775A (en) 1992-09-24 1994-03-22 International Business Machines Corporation Cooling microfan arrangements and process
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US5324683A (en) 1993-06-02 1994-06-28 Motorola, Inc. Method of forming a semiconductor structure having an air region
US5489952A (en) * 1993-07-14 1996-02-06 Texas Instruments Incorporated Method and device for multi-format television
US5629790A (en) 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US5497197A (en) * 1993-11-04 1996-03-05 Texas Instruments Incorporated System and method for packaging data into video processor
US5500761A (en) * 1994-01-27 1996-03-19 At&T Corp. Micromechanical modulator
JPH07253594A (ja) * 1994-03-15 1995-10-03 Fujitsu Ltd 表示装置
US6040937A (en) * 1994-05-05 2000-03-21 Etalon, Inc. Interferometric modulation
US7460291B2 (en) * 1994-05-05 2008-12-02 Idc, Llc Separable modulator
US6710908B2 (en) 1994-05-05 2004-03-23 Iridigm Display Corporation Controlling micro-electro-mechanical cavities
US7123216B1 (en) 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US5497172A (en) * 1994-06-13 1996-03-05 Texas Instruments Incorporated Pulse width modulation for spatial light modulator with split reset addressing
US5499062A (en) * 1994-06-23 1996-03-12 Texas Instruments Incorporated Multiplexed memory timing with block reset and secondary memory
US6560018B1 (en) 1994-10-27 2003-05-06 Massachusetts Institute Of Technology Illumination system for transmissive light valve displays
FR2726960B1 (fr) 1994-11-10 1996-12-13 Thomson Csf Procede de realisation de transducteurs magnetoresistifs
US5610624A (en) * 1994-11-30 1997-03-11 Texas Instruments Incorporated Spatial light modulator with reduced possibility of an on state defect
US5726480A (en) * 1995-01-27 1998-03-10 The Regents Of The University Of California Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US6046840A (en) 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
GB9522135D0 (en) 1995-10-30 1996-01-03 John Mcgavigan Holdings Limite Display panels
US5638946A (en) 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
US6624944B1 (en) 1996-03-29 2003-09-23 Texas Instruments Incorporated Fluorinated coating for an optical element
US5710656A (en) * 1996-07-30 1998-01-20 Lucent Technologies Inc. Micromechanical optical modulator having a reduced-mass composite membrane
US5884083A (en) * 1996-09-20 1999-03-16 Royce; Robert Computer system to compile non-incremental computer source code to execute within an incremental type computer system
JPH10260641A (ja) 1997-03-17 1998-09-29 Nec Corp フラットパネル型表示装置用ドライバｉｃの実装構造
EP0877272B1 (en) * 1997-05-08 2002-07-31 Texas Instruments Incorporated Improvements in or relating to spatial light modulators
US5867302A (en) * 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
WO1999023832A1 (en) * 1997-10-31 1999-05-14 Daewoo Electronics Co., Ltd. Method for manufacturing thin film actuated mirror array in an optical projection system
CN1069972C (zh) 1997-11-11 2001-08-22 李韫言 双电极单晶硅电容加速度传感器及其制造方法
US6028690A (en) * 1997-11-26 2000-02-22 Texas Instruments Incorporated Reduced micromirror mirror gaps for improved contrast ratio
US6180428B1 (en) * 1997-12-12 2001-01-30 Xerox Corporation Monolithic scanning light emitting devices using micromachining
WO1999036824A1 (fr) 1998-01-20 1999-07-22 Seiko Epson Corporation Dispositif de commutation optique et dispositif d'affichage d'images
US6016693A (en) * 1998-02-09 2000-01-25 The Regents Of The University Of California Microfabrication of cantilevers using sacrificial templates
US6195196B1 (en) * 1998-03-13 2001-02-27 Fuji Photo Film Co., Ltd. Array-type exposing device and flat type display incorporating light modulator and driving method thereof
US6136630A (en) * 1998-06-04 2000-10-24 The Regents Of The University Of Michigan Method of making a micromechanical device from a single crystal semiconductor substrate and monolithic sensor formed thereby
US6395618B2 (en) 1998-07-10 2002-05-28 Stmicroelectronics S.R.L. Method for manufacturing integrated structures including removing a sacrificial region
JP4074714B2 (ja) * 1998-09-25 2008-04-09 富士フイルム株式会社 アレイ型光変調素子及び平面ディスプレイの駆動方法
US6288824B1 (en) 1998-11-03 2001-09-11 Alex Kastalsky Display device based on grating electromechanical shutter
JP3362714B2 (ja) 1998-11-16 2003-01-07 株式会社豊田中央研究所 静電容量型圧力センサおよびその製造方法
US6391675B1 (en) * 1998-11-25 2002-05-21 Raytheon Company Method and apparatus for switching high frequency signals
US6194323B1 (en) * 1998-12-16 2001-02-27 Lucent Technologies Inc. Deep sub-micron metal etch with in-situ hard mask etch
US6335831B2 (en) * 1998-12-18 2002-01-01 Eastman Kodak Company Multilevel mechanical grating device
US6537427B1 (en) * 1999-02-04 2003-03-25 Micron Technology, Inc. Deposition of smooth aluminum films
JP4377984B2 (ja) 1999-03-10 2009-12-02 キヤノン株式会社 カラーフィルタとその製造方法、該カラーフィルタを用いた液晶素子
JP2000267140A (ja) 1999-03-16 2000-09-29 Fujitsu Ltd 液晶表示装置の製造方法
JP3592136B2 (ja) * 1999-06-04 2004-11-24 キヤノン株式会社 液体吐出ヘッドおよびその製造方法と微小電気機械装置の製造方法
US6201633B1 (en) * 1999-06-07 2001-03-13 Xerox Corporation Micro-electromechanical based bistable color display sheets
US6525310B2 (en) 1999-08-05 2003-02-25 Microvision, Inc. Frequency tunable resonant scanner
US6242707B1 (en) 1999-08-31 2001-06-05 General Electric Company Arc quenching current limiting device including ablative material
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6351329B1 (en) * 1999-10-08 2002-02-26 Lucent Technologies Inc. Optical attenuator
US6960305B2 (en) * 1999-10-26 2005-11-01 Reflectivity, Inc Methods for forming and releasing microelectromechanical structures
US6549338B1 (en) 1999-11-12 2003-04-15 Texas Instruments Incorporated Bandpass filter to reduce thermal impact of dichroic light shift
DE19960094A1 (de) 1999-12-14 2001-07-05 Bosch Gmbh Robert Verfahren zur mikromechanischen Herstellung eines Halbleiterelements, insbesondere Beschleunigungssensors
JP2001249287A (ja) 1999-12-30 2001-09-14 Texas Instr Inc <Ti> 双安定マイクロミラー・アレイを動作させる方法
US6531945B1 (en) * 2000-03-10 2003-03-11 Micron Technology, Inc. Integrated circuit inductor with a magnetic core
US6747775B2 (en) 2000-03-20 2004-06-08 Np Photonics, Inc. Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same
US6335224B1 (en) * 2000-05-16 2002-01-01 Sandia Corporation Protection of microelectronic devices during packaging
TW535024B (en) 2000-06-30 2003-06-01 Minolta Co Ltd Liquid display element and method of producing the same
CA2352729A1 (en) * 2000-07-13 2002-01-13 Creoscitex Corporation Ltd. Blazed micro-mechanical light modulator and array thereof
US6853129B1 (en) * 2000-07-28 2005-02-08 Candescent Technologies Corporation Protected substrate structure for a field emission display device
US6795605B1 (en) * 2000-08-01 2004-09-21 Cheetah Omni, Llc Micromechanical optical switch
US6867897B2 (en) 2003-01-29 2005-03-15 Reflectivity, Inc Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
JP2002062505A (ja) 2000-08-14 2002-02-28 Canon Inc 投影型表示装置及びそれに用いる干渉性変調素子
US7012731B2 (en) 2000-08-30 2006-03-14 Reflectivity, Inc Packaged micromirror array for a projection display
US6643069B2 (en) 2000-08-31 2003-11-04 Texas Instruments Incorporated SLM-base color projection display having multiple SLM's and multiple projection lenses
US6671149B1 (en) * 2000-09-28 2003-12-30 Turnstone Systems, Inc. Systems and methods for protecting vulnerable micro electro-mechanical system (MEMS) and electronic relay devices
US6522801B1 (en) * 2000-10-10 2003-02-18 Agere Systems Inc. Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor
US6859218B1 (en) * 2000-11-07 2005-02-22 Hewlett-Packard Development Company, L.P. Electronic display devices and methods
US6647171B1 (en) 2000-12-01 2003-11-11 Corning Incorporated MEMS optical switch actuator
US6906847B2 (en) 2000-12-07 2005-06-14 Reflectivity, Inc Spatial light modulators with light blocking/absorbing areas
US6847752B2 (en) 2000-12-07 2005-01-25 Bluebird Optical Mems Ltd. Integrated actuator for optical switch mirror array
US6514781B2 (en) * 2001-07-07 2003-02-04 Onix Microsystems, Inc. Maintaining the state of a MEMS device in the event of a power failure
US6555904B1 (en) * 2001-03-05 2003-04-29 Analog Devices, Inc. Electrically shielded glass lid for a packaged device
US20020171610A1 (en) 2001-04-04 2002-11-21 Eastman Kodak Company Organic electroluminescent display with integrated touch-screen
US6531767B2 (en) * 2001-04-09 2003-03-11 Analog Devices Inc. Critically aligned optical MEMS dies for large packaged substrate arrays and method of manufacture
GB2375184A (en) 2001-05-02 2002-11-06 Marconi Caswell Ltd Wavelength selectable optical filter
US6603177B2 (en) * 2001-05-18 2003-08-05 United Microelectronics Corp. Electrostatic discharge protection circuit device
US7106307B2 (en) 2001-05-24 2006-09-12 Eastman Kodak Company Touch screen for use with an OLED display
US6743570B2 (en) 2001-05-25 2004-06-01 Cornell Research Foundation, Inc. Method of using heat-depolymerizable polycarbonate sacrificial layer to create nano-fluidic devices
US7005314B2 (en) * 2001-06-27 2006-02-28 Intel Corporation Sacrificial layer technique to make gaps in MEMS applications
JP4032216B2 (ja) * 2001-07-12 2008-01-16 ソニー株式会社 光学多層構造体およびその製造方法、並びに光スイッチング素子および画像表示装置
KR100452112B1 (ko) 2001-07-18 2004-10-12 한국과학기술원 정전 구동기
US6589625B1 (en) 2001-08-01 2003-07-08 Iridigm Display Corporation Hermetic seal and method to create the same
US6600201B2 (en) 2001-08-03 2003-07-29 Hewlett-Packard Development Company, L.P. Systems with high density packing of micromachines
US6930364B2 (en) * 2001-09-13 2005-08-16 Silicon Light Machines Corporation Microelectronic mechanical system and methods
US20030053078A1 (en) 2001-09-17 2003-03-20 Mark Missey Microelectromechanical tunable fabry-perot wavelength monitor with thermal actuators
US6870581B2 (en) 2001-10-30 2005-03-22 Sharp Laboratories Of America, Inc. Single panel color video projection display using reflective banded color falling-raster illumination
US20030104693A1 (en) 2001-11-30 2003-06-05 Siegel Harry M. Use of fluoropolymer coating for planarizing and passivating integrated circuit devices
US7116459B2 (en) * 2001-12-27 2006-10-03 Texas Instruments Incorporated Field diode detection of excess light conditions for spatial light modulator
US6959990B2 (en) 2001-12-31 2005-11-01 Texas Instruments Incorporated Prism for high contrast projection
KR100439423B1 (ko) 2002-01-16 2004-07-09 한국전자통신연구원 마이크로전자기계 액튜에이터
EP1484635A4 (en) 2002-02-15 2008-02-20 Bridgestone Corp IMAGE DISPLAY UNIT
US6643053B2 (en) 2002-02-20 2003-11-04 The Regents Of The University Of California Piecewise linear spatial phase modulator using dual-mode micromirror arrays for temporal and diffractive fourier optics
US7145143B2 (en) 2002-03-18 2006-12-05 Honeywell International Inc. Tunable sensor
US7027200B2 (en) * 2002-03-22 2006-04-11 Reflectivity, Inc Etching method used in fabrications of microstructures
US6700770B2 (en) * 2002-03-22 2004-03-02 Turnstone Systems, Inc. Protection of double end exposed systems
GB2387480B (en) * 2002-04-09 2005-04-13 Microsaic Systems Ltd Micro-engineered self-releasing switch
US7029829B2 (en) * 2002-04-18 2006-04-18 The Regents Of The University Of Michigan Low temperature method for forming a microcavity on a substrate and article having same
US6741377B2 (en) * 2002-07-02 2004-05-25 Iridigm Display Corporation Device having a light-absorbing mask and a method for fabricating same
US7071289B2 (en) * 2002-07-11 2006-07-04 The University Of Connecticut Polymers comprising thieno [3,4-b]thiophene and methods of making and using the same
US6674033B1 (en) * 2002-08-21 2004-01-06 Ming-Shan Wang Press button type safety switch
US7106066B2 (en) * 2002-08-28 2006-09-12 Teravicta Technologies, Inc. Micro-electromechanical switch performance enhancement
TW544787B (en) * 2002-09-18 2003-08-01 Promos Technologies Inc Method of forming self-aligned contact structure with locally etched gate conductive layer
KR100512960B1 (ko) 2002-09-26 2005-09-07 삼성전자주식회사 플렉서블 ｍｅｍｓ 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 ｍｅｍｓ 무선 마이크로폰
US6806557B2 (en) 2002-09-30 2004-10-19 Motorola, Inc. Hermetically sealed microdevices having a single crystalline silicon getter for maintaining vacuum
US6747785B2 (en) 2002-10-24 2004-06-08 Hewlett-Packard Development Company, L.P. MEMS-actuated color light modulator and methods
TWI289708B (en) 2002-12-25 2007-11-11 Qualcomm Mems Technologies Inc Optical interference type color display
US20040140557A1 (en) 2003-01-21 2004-07-22 United Test & Assembly Center Limited Wl-bga for MEMS/MOEMS devices
TW557395B (en) * 2003-01-29 2003-10-11 Yen Sun Technology Corp Optical interference type reflection panel and the manufacturing method thereof
TW200413810A (en) * 2003-01-29 2004-08-01 Prime View Int Co Ltd Light interference display panel and its manufacturing method
TW567355B (en) * 2003-04-21 2003-12-21 Prime View Int Co Ltd An interference display cell and fabrication method thereof
US6829132B2 (en) * 2003-04-30 2004-12-07 Hewlett-Packard Development Company, L.P. Charge control of micro-electromechanical device
US7072093B2 (en) 2003-04-30 2006-07-04 Hewlett-Packard Development Company, L.P. Optical interference pixel display with charge control
US6819469B1 (en) 2003-05-05 2004-11-16 Igor M. Koba High-resolution spatial light modulator for 3-dimensional holographic display
JP4338442B2 (ja) 2003-05-23 2009-10-07 富士フイルム株式会社 透過型光変調素子の製造方法
TW570896B (en) * 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US6811267B1 (en) 2003-06-09 2004-11-02 Hewlett-Packard Development Company, L.P. Display system with nonvisible data projection
US7173314B2 (en) * 2003-08-13 2007-02-06 Hewlett-Packard Development Company, L.P. Storage device having a probe and a storage cell with moveable parts
TW200506479A (en) * 2003-08-15 2005-02-16 Prime View Int Co Ltd Color changeable pixel for an interference display
TWI251712B (en) * 2003-08-15 2006-03-21 Prime View Int Corp Ltd Interference display plate
TWI305599B (en) * 2003-08-15 2009-01-21 Qualcomm Mems Technologies Inc Interference display panel and method thereof
TW593127B (en) * 2003-08-18 2004-06-21 Prime View Int Co Ltd Interference display plate and manufacturing method thereof
US20050057442A1 (en) 2003-08-28 2005-03-17 Olan Way Adjacent display of sequential sub-images
US7064880B2 (en) 2003-09-25 2006-06-20 Matsushita Electric Industrial Co., Ltd. Projector and projection method
US6982820B2 (en) * 2003-09-26 2006-01-03 Prime View International Co., Ltd. Color changeable pixel
US6912082B1 (en) 2004-03-11 2005-06-28 Palo Alto Research Center Incorporated Integrated driver electronics for MEMS device using high voltage thin film transistors
US7253615B2 (en) * 2004-05-05 2007-08-07 General Electric Company Microelectromechanical system sensor and method for using
US7145213B1 (en) 2004-05-24 2006-12-05 The United States Of America As Represented By The Secretary Of The Air Force MEMS RF switch integrated process
US7256922B2 (en) 2004-07-02 2007-08-14 Idc, Llc Interferometric modulators with thin film transistors
US7126741B2 (en) 2004-08-12 2006-10-24 Hewlett-Packard Development Company, L.P. Light modulator assembly
US7652814B2 (en) * 2006-01-27 2010-01-26 Qualcomm Mems Technologies, Inc. MEMS device with integrated optical element

Also Published As

Publication number Publication date
MXPA05010302A (es) 2006-04-18
TW200628391A (en) 2006-08-16
US7405861B2 (en) 2008-07-29
US20060077504A1 (en) 2006-04-13
EP1640321A3 (en) 2007-12-19
US7951634B2 (en) 2011-05-31
EP1640321A2 (en) 2006-03-29
SG121169A1 (en) 2006-04-26
KR20060092922A (ko) 2006-08-23
RU2005129927A (ru) 2007-04-10
AU2005211605A1 (en) 2006-04-13
US20080268620A1 (en) 2008-10-30
TWI353333B (en) 2011-12-01
JP2006095682A (ja) 2006-04-13
CA2520622A1 (en) 2006-03-27

Similar Documents

Publication Publication Date Title
BRPI0503947A (pt) método e dispositivo para proteger moduladores interferométricos de descarga eletrostática
US9647236B2 (en) Packaging method of organic light emitting display panel, organic light emitting display panel and display device
DE69908194D1 (de) Kapselung für organische leds
CN108155300A (zh) 显示装置
WO2008042843A3 (en) Tapered voltage polysilicon diode electrostatic discharge circuit for power mosfets and ics
TW200507267A (en) Semiconductor diode with reduced leakage
TWI257186B (en) Light-emitting diode chip
TW200609972A (en) Semiconductor device
TW200612541A (en) A light-emitting device with a protecting structure
TW200742025A (en) Seal-ring structure for system-level ESD protection
WO2006138361A3 (en) Method and apparatus for improved esd performance
CO4560443A1 (es) Material con una sustancia protegida por aislamientos de- formables y metodo para hacerla
DE60130297D1 (de) Halbleiterbauelement mit einem ESD-Schutz
TW200611437A (en) Esd protection for high voltage applications
TW200943589A (en) Light emitting diode chip with overvoltage protection
WO2006089128A3 (en) High reliability etched-facet photonic devices
TW200623216A (en) Impurity doped UV protection layer
WO2007087437A3 (en) Post wrap device
KR100824775B1 (ko) 정전 오버스트레스 보호용 트랜지스터 및 이를 포함하는정전 방전 보호회로
BR112015016455A8 (pt) Dispositivo de proteção contra raios, estrutura sensível a raios, e, método para fabricar um dispositivo de proteção contra raios
TWI712148B (zh) 垂直式暫態電壓抑制裝置
WO2021259782A3 (en) Organic compound of formula (i) for use in organic electronic devices, an organic electronic device comprising a compound of formula (i) and a display device comprising the organic electronic device
NO20091033L (no) Utladningsbeskyttet utstyr
KR970072381A (ko) 이에스디(esd) 보호회로의 구조 및 제조방법
WO2008002451A3 (en) Esd and electric surge protected circuit and method of making same

Legal Events

Date Code Title Description
B11A Dismissal acc. art.33 of ipl - examination not requested within 36 months of filing
B11Y Definitive dismissal - extension of time limit for request of examination expired [chapter 11.1.1 patent gazette]