AU2003277565A1 - Microactuator provided with diplacement detection function, and deformable mirror provided with this microactuator - Google Patents

Microactuator provided with diplacement detection function, and deformable mirror provided with this microactuator

Info

Publication number
AU2003277565A1
AU2003277565A1 AU2003277565A AU2003277565A AU2003277565A1 AU 2003277565 A1 AU2003277565 A1 AU 2003277565A1 AU 2003277565 A AU2003277565 A AU 2003277565A AU 2003277565 A AU2003277565 A AU 2003277565A AU 2003277565 A1 AU2003277565 A1 AU 2003277565A1
Authority
AU
Australia
Prior art keywords
microactuator
diplacement
detection function
deformable mirror
mirror provided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003277565A
Other languages
English (en)
Inventor
Yoshihiro Kanda
Yoshihiro Mushika
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of AU2003277565A1 publication Critical patent/AU2003277565A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/3466—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on interferometric effect
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AU2003277565A 2002-11-06 2003-11-05 Microactuator provided with diplacement detection function, and deformable mirror provided with this microactuator Abandoned AU2003277565A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2002-322247 2002-11-06
JP2002322247 2002-11-06
JP2003352736 2003-10-10
JP2003-352736 2003-10-10
PCT/JP2003/014125 WO2004041710A1 (fr) 2002-11-06 2003-11-05 Micro-actionneur a fonction de detection de deplacement avec miroir deformable

Publications (1)

Publication Number Publication Date
AU2003277565A1 true AU2003277565A1 (en) 2004-06-07

Family

ID=32314055

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003277565A Abandoned AU2003277565A1 (en) 2002-11-06 2003-11-05 Microactuator provided with diplacement detection function, and deformable mirror provided with this microactuator

Country Status (6)

Country Link
US (2) US7368846B2 (fr)
EP (1) EP1564181A1 (fr)
JP (1) JP4435691B2 (fr)
KR (1) KR100630029B1 (fr)
AU (1) AU2003277565A1 (fr)
WO (1) WO2004041710A1 (fr)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE0200787D0 (sv) * 2002-03-15 2002-03-15 Micronic Laser Systems Ab Improved addressing method
WO2004041710A1 (fr) * 2002-11-06 2004-05-21 Matsushita Electric Industrial Co., Ltd. Micro-actionneur a fonction de detection de deplacement avec miroir deformable
JP4499447B2 (ja) * 2004-03-01 2010-07-07 日本電信電話株式会社 電子部品装置
JP4287324B2 (ja) * 2004-04-28 2009-07-01 日本電信電話株式会社 電子部品装置
US7551159B2 (en) * 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US20060245028A1 (en) * 2005-04-15 2006-11-02 Sriram Ramamoorthi Light modulator device
US7569805B2 (en) 2005-06-10 2009-08-04 Samsung Electro-Mechanics Co., Ltd. Apparatus and method for calibrating a reflecting mirror
KR100905553B1 (ko) * 2005-06-10 2009-07-02 삼성전기주식회사 회절형 광변조기의 미러 위치 보상 장치 및 그 제어 방법
JP4562615B2 (ja) * 2005-08-09 2010-10-13 アオイ電子株式会社 微小試料把持装置
JPWO2007023940A1 (ja) * 2005-08-26 2009-03-26 パナソニック株式会社 アクチュエータ、光ヘッド装置および光情報装置
KR100650851B1 (ko) * 2005-11-15 2006-11-27 현대모비스 주식회사 후륜현가능동제어시스템의 액츄에이터 속도 측정 장치 및방법
US7265936B1 (en) * 2006-03-15 2007-09-04 Samsung Electronics Co., Ltd. Algorithm for DSA/microactuator total loop gain calibration
JP2007330036A (ja) * 2006-06-07 2007-12-20 Seiko Epson Corp 振動体、圧電アクチュエータ、電子機器、および振動体の製造方法
KR100842268B1 (ko) * 2006-06-27 2008-06-30 삼성전기주식회사 마이크로 액츄에이터 제어 방법 및 그 장치
JP4945204B2 (ja) * 2006-09-08 2012-06-06 株式会社東芝 アクチュエータ
JP2008152205A (ja) * 2006-12-20 2008-07-03 Canon Inc 光走査装置
JP4528815B2 (ja) * 2007-09-13 2010-08-25 株式会社東芝 半導体装置、及び静電アクチュエータの制御方法
DE102007051715B4 (de) * 2007-10-30 2011-11-10 Deutsches Zentrum für Luft- und Raumfahrt e.V. Elektrostatisch angetriebener Mikroaktor
JPWO2009069233A1 (ja) * 2007-11-30 2011-04-07 富士通株式会社 光切替装置および光切替方法
JP4847488B2 (ja) * 2008-03-26 2011-12-28 富士通株式会社 ミラー駆動回路および光スイッチ
JP5160935B2 (ja) * 2008-03-31 2013-03-13 日本電信電話株式会社 ミラー装置およびミラーアレイ
US8076893B2 (en) * 2008-09-04 2011-12-13 The Board Of Trustees Of The University Of Illinois Displacement actuation and sensing for an electrostatic drive
US8457794B2 (en) * 2009-08-25 2013-06-04 Analog Devices, Inc. Multi-segment linearization of micro-actuator transfer functions
KR101132657B1 (ko) 2010-04-14 2012-04-02 인제대학교 산학협력단 단일 제어 신호에 의해 구동되는 연동형 마이크로 펌프 및 그 제조 방법
JP5688757B2 (ja) * 2011-01-28 2015-03-25 エヌ・ティ・ティ・アドバンステクノロジ株式会社 回路装置
JP6084974B2 (ja) * 2011-09-02 2017-02-22 キャベンディッシュ・キネティックス・インコーポレイテッドＣａｖｅｎｄｉｓｈ Ｋｉｎｅｔｉｃｓ， Ｉｎｃ． Ｍｅｍｓデバイス用の結合脚及びセミフレキシブルなアンカリング
US8853975B2 (en) * 2011-09-28 2014-10-07 DigitalOptics Corporation MEMS Electrostatic actuator control
EP2618201B1 (fr) * 2012-01-20 2015-11-04 Imec Étalonnage de réseaux de micromiroirs
JP2013238755A (ja) 2012-05-16 2013-11-28 Seiko Epson Corp 光学モジュール、電子機器、食物分析装置、分光カメラ、及び波長可変干渉フィルターの駆動方法
JP6107186B2 (ja) 2013-02-05 2017-04-05 セイコーエプソン株式会社 光学モジュール、電子機器、及び分光カメラ
JP6543884B2 (ja) 2014-01-27 2019-07-17 セイコーエプソン株式会社 アクチュエーター制御装置、光学モジュール、電子機器、及びアクチュエーター制御方法
JP6413325B2 (ja) 2014-05-01 2018-10-31 セイコーエプソン株式会社 アクチュエーター装置、電子機器、及び制御方法
US9413163B2 (en) * 2014-06-19 2016-08-09 Texas Instruments Incorporated Motor fault detector
JP6137100B2 (ja) * 2014-09-29 2017-05-31 富士電機株式会社 アクチュエータ
JP2016186598A (ja) * 2015-03-27 2016-10-27 新電元工業株式会社 制御装置および制御方法
BR112018003579A2 (pt) 2015-08-31 2018-09-25 Koninklijke Philips N.V. sistema e método de detecção
DE102015220291B4 (de) 2015-10-19 2022-01-05 Robert Bosch Gmbh Mikroelektromechanisches System und Steuerverfahren
FR3051263B1 (fr) * 2016-05-10 2018-04-20 Safran Aircraft Engines Procede de commande d'un actionneur et dispositif de commande associe
US10386206B2 (en) * 2017-02-02 2019-08-20 L&P Property Management Company Active mirroring capacitance monitoring system for furniture
DE102018211755A1 (de) * 2018-07-13 2020-01-16 Infineon Technologies Ag Amplitudenerfassung, amplitudenregelung und richtungserfassung einer schwingung eines schwingkörpers
WO2022087307A1 (fr) * 2020-10-21 2022-04-28 Exciting Technology LLC Système, procédé et appareil de compensation atmosphérique non mécanique à grande vitesse
US11835839B2 (en) 2018-10-23 2023-12-05 Exciting Technology LLC System, method and apparatus for high speed non-mechanical atmospheric compensation
JP2022534713A (ja) * 2019-05-28 2022-08-03 ベーウントエル・インダストリアル・オートメイション・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング 運搬装置

Family Cites Families (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4737621A (en) 1985-12-06 1988-04-12 Adaptive Optics Assoc., Inc. Integrated adaptive optical wavefront sensing and compensating system
JPH01253841A (ja) 1988-03-31 1989-10-11 Matsushita Electric Ind Co Ltd ホログラムを用いた受光装置及び光ヘッド装置
US5079544A (en) 1989-02-27 1992-01-07 Texas Instruments Incorporated Standard independent digitized video system
JP3159729B2 (ja) * 1991-05-27 2001-04-23 俊郎 樋口 静電気アクチュエータ及びその制御方法
JP2899133B2 (ja) 1991-06-05 1999-06-02 松下電工株式会社 静電アクチュエータ
JPH0784196A (ja) 1993-09-13 1995-03-31 Canon Inc 光偏向器およびそれを用いた表示装置
JPH09159939A (ja) * 1995-12-13 1997-06-20 Nippon Telegr & Teleph Corp <Ntt> 戻り光制御装置
JPH09237425A (ja) 1995-12-28 1997-09-09 Olympus Optical Co Ltd 光ディスク装置
TW453493U (en) 1996-02-13 2001-09-01 Tokyo Shibaura Electric Co Reproducing device of optical disk
US6057913A (en) 1997-02-05 2000-05-02 Mems Optical Inc. Compact shearing wavefront sensor and method
JPH10222856A (ja) 1997-02-07 1998-08-21 Olympus Optical Co Ltd 光学式情報記録再生装置
JPH10289468A (ja) 1997-04-10 1998-10-27 Konica Corp 光ピックアップ装置及びその光源ユニット
JP3050164B2 (ja) * 1997-05-23 2000-06-12 日本電気株式会社 マイクロアクチュエータおよびその製造方法
JP3420025B2 (ja) 1997-06-23 2003-06-23 株式会社東芝 光ディスク装置
US6185167B1 (en) 1997-06-30 2001-02-06 Matsushita Electric Industrial Co., Ltd. Optical head and information recording and reproduction apparatus
JPH11231234A (ja) 1998-02-12 1999-08-27 Asahi Optical Co Ltd 反射鏡
US6206290B1 (en) * 1998-03-06 2001-03-27 Symbol Technologies, Inc. Control system for oscillating optical element in scanners
JP3023674B2 (ja) 1998-04-17 2000-03-21 セイコーインスツルメンツ株式会社 微小揺動ミラー素子及びこれを用いたレーザ走査装置
EP0984440A3 (fr) 1998-09-04 2000-05-24 Matsushita Electric Industrial Co., Ltd. Système de détection d'aberration et appareil d'enregistrement et de reproduction d'information optique
JP3519618B2 (ja) 1998-10-29 2004-04-19 パイオニア株式会社 収差補償装置、光ピックアップ、情報再生装置及び情報記録装置
JP3666632B2 (ja) 1998-12-11 2005-06-29 パイオニア株式会社 収差補正装置及びこれを用いた光ピックアップ装置
JP2000235715A (ja) 1999-02-15 2000-08-29 Sony Corp 光学ヘッド
US6596458B1 (en) * 1999-05-07 2003-07-22 Fuji Photo Film Co., Ltd. Positive-working photoresist composition
US6787283B1 (en) * 1999-07-22 2004-09-07 Fuji Photo Film Co., Ltd. Positive photoresist composition for far ultraviolet exposure
US6798992B1 (en) 1999-11-10 2004-09-28 Agere Systems Inc. Method and device for optically crossconnecting optical signals using tilting mirror MEMS with drift monitoring feature
US6220707B1 (en) 2000-02-25 2001-04-24 20/10 Perfect Vision Optische Geraete Gmbh Method for programming an active mirror to mimic a wavefront
IL155043A0 (en) 2000-09-22 2003-10-31 Bristol Myers Squibb Pharma Co Efficient process for preparation of a factor xa inhibitor
JP4364459B2 (ja) 2000-12-07 2009-11-18 富士通株式会社 光信号交換器の制御装置および制御方法
KR100863850B1 (ko) * 2001-01-30 2008-10-15 마츠시타 덴끼 산교 가부시키가이샤 가변형 미러와 당해 가변형 미러를 구비한 정보 장치 및 보상 광학 장치
JP4441134B2 (ja) * 2001-02-08 2010-03-31 オリンパス株式会社 静電アクチュエーター及びミラーアレイ
JP4117112B2 (ja) * 2001-03-30 2008-07-16 富士フイルム株式会社 ポジ型フォトレジスト組成物
JP4346839B2 (ja) 2001-07-17 2009-10-21 富士通株式会社 光スイッチの制御方法および制御装置
US6538802B2 (en) * 2001-07-31 2003-03-25 Axsun Technologies, Inc System and method for tilt mirror calibration due to capacitive sensor drift
JP3800161B2 (ja) 2001-10-11 2006-07-26 株式会社デンソー 微小可動機構システムと微小可動機構部の制御方法
US7088492B2 (en) 2001-10-11 2006-08-08 Denso Corporation Micro movable mechanism system and control method for the same
WO2003065103A1 (fr) * 2002-01-29 2003-08-07 Matsushita Electric Industrial Co., Ltd. Miroir a forme variable et dispositif de regulation de lumiere possedant ledit miroir
US6708082B2 (en) * 2002-06-03 2004-03-16 Texas Instruments Incorporated System identification to improve control of a micro-electro-mechanical mirror
JP4039150B2 (ja) 2002-07-09 2008-01-30 株式会社デンソー 光スイッチサブシステム
WO2004041710A1 (fr) * 2002-11-06 2004-05-21 Matsushita Electric Industrial Co., Ltd. Micro-actionneur a fonction de detection de deplacement avec miroir deformable
WO2004077819A1 (fr) * 2003-02-25 2004-09-10 Matsushita Electric Industrial Co., Ltd. Capteur optique
CN1601625A (zh) * 2003-09-24 2005-03-30 松下电器产业株式会社 信息装置和光学拾波器
US7081647B2 (en) * 2003-09-29 2006-07-25 Matsushita Electric Industrial Co., Ltd. Microelectromechanical system and method for fabricating the same
US7208857B2 (en) * 2004-12-16 2007-04-24 Hewlett-Packard Development Company, L.P. Drive calibration method and system

Also Published As

Publication number Publication date
US7635939B2 (en) 2009-12-22
WO2004041710A1 (fr) 2004-05-21
US20060109538A1 (en) 2006-05-25
JP4435691B2 (ja) 2010-03-24
JPWO2004041710A1 (ja) 2006-03-09
KR100630029B1 (ko) 2006-09-27
KR20050043801A (ko) 2005-05-11
US7368846B2 (en) 2008-05-06
US20080231141A1 (en) 2008-09-25
EP1564181A1 (fr) 2005-08-17

Similar Documents

Publication Publication Date Title
AU2003277565A1 (en) Microactuator provided with diplacement detection function, and deformable mirror provided with this microactuator
AU2003294125A1 (en) Deformable mirror
AU2003278863A1 (en) Mirror reflective element assembly
AU2003266321A1 (en) Tetrahydropyrimidine-2-one derivatives and their uses
AU2002325533A1 (en) Laser depilator
AU2003262857A1 (en) Selective feature activation
AU2003259085A1 (en) Compact, high-efficiency thermoelectric systems
AU2003210792A1 (en) Fast steering mirror
EP1376427A3 (fr) Détecteur de courrier électronique non sollicité (SPAM) avec challenge
AU2003268686A1 (en) Occludator, face bow, occlusion-confirming system and tempromandibular joint-reproducing system
AU2003211120A1 (en) Removable labels, coupons and the like
AU2003292628A1 (en) Hinge device with temporary angle-setting function
AU2003253938A1 (en) Rear view mirror with snap connection
AU2003289454A1 (en) Retroreflecting functional member and retroreflecting unit
AU2003244351A1 (en) Pen-input device surface member, and pen-input device
AU2003299943A1 (en) Heterocycles and uses thereof
AU2003281558A1 (en) Probabilistic calculation element, drive method thereof, and recognition device using the same
AU2003265397A1 (en) Customizable, illuminated hair beads
AU2003232075A1 (en) Modified t lymphocytes and uses therefor
AU2003280894A1 (en) Iris detection
AU2003285385A1 (en) The transmembrane protein amigo and uses thereof
AU2003248263A1 (en) Cosmetic
AU2003231827A1 (en) Pseudo-tissues and uses thereof
AU2003298739A1 (en) Intermedin and its uses
AU2003244114A1 (en) Mems array, manufacturing method thereof, and mems device manufacturing method based on the same

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase