ATE67592T1 - Platinum-duennschichtwiderstandsthermometer mit hochtemperatur-diffusionsbarriere. - Google Patents

Platinum-duennschichtwiderstandsthermometer mit hochtemperatur-diffusionsbarriere.

Info

Publication number
ATE67592T1
ATE67592T1 AT87901835T AT87901835T ATE67592T1 AT E67592 T1 ATE67592 T1 AT E67592T1 AT 87901835 T AT87901835 T AT 87901835T AT 87901835 T AT87901835 T AT 87901835T AT E67592 T1 ATE67592 T1 AT E67592T1
Authority
AT
Austria
Prior art keywords
thin film
resistance thermometer
high temperature
diffusion barrier
film resistance
Prior art date
Application number
AT87901835T
Other languages
English (en)
Inventor
Fred C Sittler
Adrian C Toy
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Application granted granted Critical
Publication of ATE67592T1 publication Critical patent/ATE67592T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G01K7/183—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C1/00—Details
    • H01C1/02—Housing; Enclosing; Embedding; Filling the housing or enclosure
    • H01C1/028—Housing; Enclosing; Embedding; Filling the housing or enclosure the resistive element being embedded in insulation with outer enclosing sheath
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
    • H01C7/021—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient formed with two or more layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Thermistors And Varistors (AREA)
AT87901835T 1986-02-13 1987-02-06 Platinum-duennschichtwiderstandsthermometer mit hochtemperatur-diffusionsbarriere. ATE67592T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US06/829,279 US4791398A (en) 1986-02-13 1986-02-13 Thin film platinum resistance thermometer with high temperature diffusion barrier
PCT/US1987/000252 WO1987005146A1 (en) 1986-02-13 1987-02-06 Thin film platinum resistance thermometer with high temperature diffusion barrier
EP87901835A EP0327535B1 (de) 1986-02-13 1987-02-06 Platinum-dünnschichtwiderstandsthermometer mit hochtemperatur-diffusionsbarriere

Publications (1)

Publication Number Publication Date
ATE67592T1 true ATE67592T1 (de) 1991-10-15

Family

ID=25254059

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87901835T ATE67592T1 (de) 1986-02-13 1987-02-06 Platinum-duennschichtwiderstandsthermometer mit hochtemperatur-diffusionsbarriere.

Country Status (7)

Country Link
US (1) US4791398A (de)
EP (1) EP0327535B1 (de)
JP (2) JP2681782B2 (de)
AT (1) ATE67592T1 (de)
CA (1) CA1266803A (de)
DE (1) DE3773213D1 (de)
WO (1) WO1987005146A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT403851B (de) * 1993-01-06 1998-06-25 Heraeus Sensor Nite Gmbh Widerstandsthermometer mit einem messwiderstand

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DE3542788A1 (de) * 1985-12-04 1987-06-19 Degussa Vorrichtung zur thermischen massenstrommessung von gasen und fluessigkeiten
US5000113A (en) * 1986-12-19 1991-03-19 Applied Materials, Inc. Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process
US5755886A (en) * 1986-12-19 1998-05-26 Applied Materials, Inc. Apparatus for preventing deposition gases from contacting a selected region of a substrate during deposition processing
US5041809A (en) * 1990-01-08 1991-08-20 General Electric Company Glass-ceramic temperature sensor for heating ovens
US5026971A (en) * 1990-01-08 1991-06-25 General Electric Company Temperature control system for a heating oven using a glass-ceramic temperature sensor
US5053740A (en) * 1990-01-11 1991-10-01 General Electric Company Porcelain enamel temperature sensor for heating ovens
DE59006062D1 (de) * 1990-03-23 1994-07-14 Siemens Ag Temperaturfühler.
EP0571412B1 (de) * 1991-02-15 1998-05-27 Siemens Aktiengesellschaft Hochtemperatur-platinmetall-temperatursensor
US5652181A (en) * 1993-11-10 1997-07-29 Micron Display Technology, Inc. Thermal process for forming high value resistors
DE19542516C1 (de) * 1995-11-15 1997-04-17 Heraeus Sensor Gmbh Temperatur-Sensor
US5958606A (en) * 1997-02-05 1999-09-28 Cyntec Company Substrate structure with adhesive anchoring-seams for securely attaching and boding to a thin film supported thereon
EP0973020B1 (de) 1998-07-16 2009-06-03 EPIQ Sensor-Nite N.V. Elektrischer Temperatur-Sensor mit Mehrfachschicht
DE19901183C2 (de) * 1999-01-14 2001-01-25 Sensotherm Temperatursensorik Platintemperatursensor und Herstellungsverfahren für denselben
US6437681B1 (en) * 1999-10-27 2002-08-20 Cyntec Company Structure and fabrication process for an improved high temperature sensor
US6341892B1 (en) 2000-02-03 2002-01-29 George Schmermund Resistance thermometer probe
KR100415387B1 (ko) * 2001-07-26 2004-01-16 (주)유일계량기 산화티탄이 코팅된 온도계
DE10210772C1 (de) * 2002-03-12 2003-06-26 Heraeus Sensor Nite Gmbh Temperatursensor
DE10225602A1 (de) * 2002-06-07 2004-01-08 Heraeus Sensor-Nite Gmbh Halbleiterbauelement mit integrierter Schaltung, Kühlkörper und Temperatursensor
US7377961B2 (en) * 2004-01-12 2008-05-27 Intel Corporation Hydrogen vent for optoelectronic packages with resistive thermal device (RTD)
US7495542B2 (en) * 2004-08-12 2009-02-24 Kelk Ltd. Film temperature sensor and temperature sensing substrate
DE102007046900C5 (de) 2007-09-28 2018-07-26 Heraeus Sensor Technology Gmbh Hochtemperatursensor und ein Verfahren zu dessen Herstellung
DE102009007940B4 (de) * 2009-02-06 2010-11-18 Heraeus Sensor Technology Gmbh Nichtleitfähiges Zirkonoxid
DE102009028634A1 (de) 2009-08-19 2011-03-03 Innovative Sensor Technology Ist Ag Verfahren zur Herstellung einer Schutzschicht für Widersstandssensoren und Widerstandssensor
FI126956B (fi) * 2010-10-14 2017-08-31 Janesko Oy Menetelmä ja mitta-anturi lämpötilan mittaamiseksi
FI125815B (fi) 2010-10-14 2016-02-29 Janesko Oy Mitta-anturi lämpötilan mittaamiseksi
DE102011051845B3 (de) 2011-07-14 2012-10-25 Heraeus Sensor Technology Gmbh Messwiderstand mit Schutzrahmen
US10371581B2 (en) * 2017-06-02 2019-08-06 Sensata Technologies, Inc. Alumina diffusion barrier for sensing elements
US11067454B2 (en) * 2019-07-22 2021-07-20 Sensata Technologies, Inc. Stability of a resistance temperature detector
EP3961170A1 (de) * 2020-08-27 2022-03-02 Heraeus Nexensos GmbH Temperatursensor und verfahren zur herstellung eines derartigen temperatursensors

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GB674484A (en) * 1950-06-15 1952-06-25 Degussa Improvements in or relating to resistance-thermometers
US2802925A (en) * 1954-03-13 1957-08-13 Degussa Resistance thermometer
GB768117A (en) * 1955-01-13 1957-02-13 Degussa Electrical resistance thermometer of low heat capacity
US3564474A (en) * 1968-06-04 1971-02-16 Nat Res Dev Electrically heatable elements
US3714702A (en) * 1971-08-17 1973-02-06 Atomic Energy Commission Method for diffusion bonding refractory metals and alloys
FR2168918A1 (en) * 1972-01-26 1973-09-07 Koshkina Lidia Highly constant resistors - with carbon and organo-silicon insulating coatings produced on ceramic by pyrolysis
US3845443A (en) * 1972-06-14 1974-10-29 Bailey Meter Co Thin film resistance thermometer
DE2450551C2 (de) * 1974-10-24 1977-01-13 Heraeus Gmbh W C Elektrischer messwiderstand fuer ein widerstandsthermometer und verfahren zu seiner herstellung
DE2507731C3 (de) * 1975-02-22 1978-09-07 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler, 6000 Frankfurt Meßwiderstand für Widerstandsthermometer und Verfahren zu seiner Herstellung
GB1546091A (en) * 1975-02-28 1979-05-16 Johnson Matthey Co Ltd Thermometers
DE2527739C3 (de) * 1975-06-21 1978-08-31 W.C. Heraeus Gmbh, 6450 Hanau Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer
US4129848A (en) * 1975-09-03 1978-12-12 Raytheon Company Platinum film resistor device
DE2558752C3 (de) * 1975-12-24 1978-10-19 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler, 6000 Frankfurt Verfahren zur Herstellung eines Schichrwiderstandes als Meßwiderstand für Widerstandsthermometer
US4139833A (en) * 1976-11-22 1979-02-13 Gould Inc. Resistance temperature sensor
IE47186B1 (en) * 1977-09-13 1984-01-11 Johnson Matthey Co Ltd Improvements in and relating to the measurement of temperature
US4447824A (en) * 1980-08-18 1984-05-08 International Business Machines Corporation Planar multi-level metal process with built-in etch stop
GB2096645B (en) * 1981-03-24 1984-10-31 Rosemount Eng Co Ltd A method of producing a resistance element for a resistance thermometer
JPS5892201A (ja) * 1981-11-27 1983-06-01 松下電器産業株式会社 薄膜白金温度センサ
JPS6064401A (ja) * 1983-09-20 1985-04-13 株式会社カ−ク 白金薄膜測温抵抗体
IN165267B (de) * 1984-07-31 1989-09-09 Rosemount Inc
JPS61188901A (ja) * 1985-02-16 1986-08-22 株式会社日本自動車部品総合研究所 流量センサ用膜式抵抗

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT403851B (de) * 1993-01-06 1998-06-25 Heraeus Sensor Nite Gmbh Widerstandsthermometer mit einem messwiderstand

Also Published As

Publication number Publication date
JPH0917608A (ja) 1997-01-17
JP2770268B2 (ja) 1998-06-25
EP0327535B1 (de) 1991-09-18
WO1987005146A1 (en) 1987-08-27
EP0327535A1 (de) 1989-08-16
US4791398A (en) 1988-12-13
CA1266803A (en) 1990-03-20
DE3773213D1 (de) 1991-10-24
JPH01500629A (ja) 1989-03-01
JP2681782B2 (ja) 1997-11-26
EP0327535A4 (de) 1989-04-27

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee