ES2052952T3 - Estructura monolitica de deteccion o de imagineria infrarroja y su procedimiento de fabricacion. - Google Patents

Estructura monolitica de deteccion o de imagineria infrarroja y su procedimiento de fabricacion.

Info

Publication number
ES2052952T3
ES2052952T3 ES89403277T ES89403277T ES2052952T3 ES 2052952 T3 ES2052952 T3 ES 2052952T3 ES 89403277 T ES89403277 T ES 89403277T ES 89403277 T ES89403277 T ES 89403277T ES 2052952 T3 ES2052952 T3 ES 2052952T3
Authority
ES
Spain
Prior art keywords
manufacturing procedure
infrared imaging
polyimide
detection structure
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES89403277T
Other languages
English (en)
Inventor
Luc Audaire
Jean-Claude Peuzin
Bernard Schaub
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of ES2052952T3 publication Critical patent/ES2052952T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

LA ESTRUCTURA COMPRENDE UNA CAPA DE POLIIMIDA (114) AISLANTE ELECTRICO Y TERMICO, SENSORES (102) DE INFRARROJO AISLADOS UNOS DE LOS OTROS QUE CONTIENEN UNA PELICULA PIROELECTRICA (104) DE POLIVINILO CUYO LADO (109) EN CONTACTO CON LA POLIIMIDA ESTA EQUIPADO CON DOS ELECTRODOS (106, 108) EN FORMA DE PEINES CUYOS DIENTES ESTAN IMBRICADOS, ESTANDO LA PELICULA PIROELECTRICA POLARIZADA (111) EN UN PLANO PARALELO A LA PELICULA Y SEGUN DIRECCIONES PARALELAS Y PERPENDICULARES A LOS DIENTES DE LOS PEINES, TENIENDO UN CIRCUITO INTEGRADO (116) UNA CARA (134) EN CONTACTO CON LA CAPA DE POLIIMIDA, EQUIPADA CON CIRCUITO DE LECTURA (117), ZONAS DE CONTACTO ELECTRICO (130, 132) QUE ATRAVIESAN DE PARTE A PARTE LA CAPA DE PILIIMIDA Y CONECTAN LOS ELECTRODOS DE CADA SENSOR CON UN CIRCUITO DE LECTURA.
ES89403277T 1988-11-29 1989-11-27 Estructura monolitica de deteccion o de imagineria infrarroja y su procedimiento de fabricacion. Expired - Lifetime ES2052952T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8815581A FR2639784B1 (fr) 1988-11-29 1988-11-29 Structure monolithique de detection ou d'imagerie infrarouge et son procede de fabrication

Publications (1)

Publication Number Publication Date
ES2052952T3 true ES2052952T3 (es) 1994-07-16

Family

ID=9372368

Family Applications (1)

Application Number Title Priority Date Filing Date
ES89403277T Expired - Lifetime ES2052952T3 (es) 1988-11-29 1989-11-27 Estructura monolitica de deteccion o de imagineria infrarroja y su procedimiento de fabricacion.

Country Status (6)

Country Link
US (1) US5008541A (es)
EP (1) EP0371868B1 (es)
JP (1) JPH02189971A (es)
DE (1) DE68915251T2 (es)
ES (1) ES2052952T3 (es)
FR (1) FR2639784B1 (es)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR930004764A (ko) * 1991-08-26 1993-03-23 윌리엄 이. 힐러 비냉각 촛점면 어레이
FR2691579A1 (fr) * 1992-05-21 1993-11-26 Commissariat Energie Atomique Système de conversion d'une image infrarouge en image visible ou proche infrarouge.
WO1993026050A1 (en) * 1992-06-11 1993-12-23 Honeywell Inc. Two-level microbridge bolometer imaging array and method of making same
US5409548A (en) * 1993-05-17 1995-04-25 The United States Of America As Represented By The Secretary Of The Army Ferroelectric detector array utilizing material and fabrication technique
FR2715250B1 (fr) * 1994-01-19 1996-04-05 Commissariat Energie Atomique Dispositif tridimensionnel de détection de rayonnement et procédé de fabrication de ce dispositif.
US5457318A (en) * 1994-04-29 1995-10-10 Texas Instruments Incorporated Thermal detector apparatus and method using reduced thermal capacity
KR0144651B1 (ko) * 1994-09-30 1998-08-17 이형도 초전형 적외선 센서
US6137107A (en) * 1996-08-30 2000-10-24 Raytheon Company Thermal detector with inter-digitated thin film electrodes and method
US5990481A (en) * 1996-08-30 1999-11-23 Raytheon Company Thermal detector with preferentially-ordered thermally sensitive element and method
US6087661A (en) * 1997-10-29 2000-07-11 Raytheon Company Thermal isolation of monolithic thermal detector
US6278117B1 (en) * 1999-03-04 2001-08-21 Qel, Inc. Solid state radiation detector with tissue equivalent response
DE10142531A1 (de) * 2001-08-30 2003-03-20 Philips Corp Intellectual Pty Sensoranordnung aus licht- und/oder röntgenstrahlungsempfindlichen Sensoren
US7049153B2 (en) * 2003-04-23 2006-05-23 Micron Technology, Inc. Polymer-based ferroelectric memory
DE10357135B4 (de) 2003-12-06 2007-01-04 X-Fab Semiconductor Foundries Ag Fotodetektor mit Transimpendanzverstärker und Auswerteelektronik in monolithischer Integration und Herstellungsverfahren
JP4535367B2 (ja) * 2004-05-24 2010-09-01 ルネサスエレクトロニクス株式会社 集積回路装置
KR100667339B1 (ko) * 2005-01-11 2007-01-12 삼성전자주식회사 바이오 센서 및 그 시스템
FR3044408B1 (fr) * 2015-11-30 2019-06-14 Commissariat A L'energie Atomique Et Aux Energies Alternatives Capteur de motif thermique a capacite pyroelectrique horizontale
FR3090209B1 (fr) * 2018-12-18 2021-01-15 Commissariat Energie Atomique Procede de fabrication d’un dispositif comprenant un materiau acquerant une propriete electrique apres avoir ete soumis a une polarisation electrique

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3846820A (en) * 1973-06-26 1974-11-05 Westinghouse Electric Corp Mosaic for ir imaging using pyroelectric sensors in a bipolar transistor array
US3973146A (en) * 1974-03-18 1976-08-03 North American Philips Corporation Signal detector comprising field effect transistors
US4341012A (en) * 1980-09-29 1982-07-27 The United States Of America As Represented By The Administrator, National Aeronautics And Space Administration Pyroelectric detector arrays
JPS5879122A (ja) * 1981-11-05 1983-05-12 Kureha Chem Ind Co Ltd 焦電性赤外線検出器
GB2163596B (en) * 1984-08-24 1988-02-03 Philips Electronic Associated A thermal imaging device and a method of manufacturing a thermal imaging device
US4740700A (en) * 1986-09-02 1988-04-26 Hughes Aircraft Company Thermally insulative and electrically conductive interconnect and process for making same
US4769545A (en) * 1986-11-26 1988-09-06 American Iris Corporation Motion detector

Also Published As

Publication number Publication date
JPH02189971A (ja) 1990-07-25
FR2639784B1 (fr) 1991-01-11
DE68915251D1 (de) 1994-06-16
EP0371868A1 (fr) 1990-06-06
EP0371868B1 (fr) 1994-05-11
FR2639784A1 (fr) 1990-06-01
US5008541A (en) 1991-04-16
DE68915251T2 (de) 1994-11-24

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