DE3669919D1 - Optisches messgroessenumformerelement und verschiebungsmessvorrichtung mit einem solchen element. - Google Patents

Optisches messgroessenumformerelement und verschiebungsmessvorrichtung mit einem solchen element.

Info

Publication number
DE3669919D1
DE3669919D1 DE8686201668T DE3669919T DE3669919D1 DE 3669919 D1 DE3669919 D1 DE 3669919D1 DE 8686201668 T DE8686201668 T DE 8686201668T DE 3669919 T DE3669919 T DE 3669919T DE 3669919 D1 DE3669919 D1 DE 3669919D1
Authority
DE
Germany
Prior art keywords
measuring device
sensor element
measuring sensor
displacement
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686201668T
Other languages
English (en)
Inventor
Jan Gerard C O Int Octrooi Dil
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of DE3669919D1 publication Critical patent/DE3669919D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00—Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12—Analogue/digital converters
    • H03M1/22—Analogue/digital converters pattern-reading type
    • H03M1/24—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip
    • H03M1/28—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding
    • H03M1/30—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding incremental
    • H03M1/301—Constructional details of parts relevant to the encoding mechanism, e.g. pattern carriers, pattern sensors
DE8686201668T 1985-10-01 1986-09-29 Optisches messgroessenumformerelement und verschiebungsmessvorrichtung mit einem solchen element. Expired - Lifetime DE3669919D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8502679A NL8502679A (nl) 1985-10-01 1985-10-01 Optisch omzetelement en verplaatsingsmeter voorzien van dit element.

Publications (1)

Publication Number Publication Date
DE3669919D1 true DE3669919D1 (de) 1990-05-03

Family

ID=19846649

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686201668T Expired - Lifetime DE3669919D1 (de) 1985-10-01 1986-09-29 Optisches messgroessenumformerelement und verschiebungsmessvorrichtung mit einem solchen element.

Country Status (5)

Country Link
US (1) US4746792A (de)
EP (1) EP0220757B1 (de)
JP (1) JPS6287815A (de)
DE (1) DE3669919D1 (de)
NL (1) NL8502679A (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3818218A1 (de) * 1988-04-16 1989-10-26 Heidenhain Gmbh Dr Johannes Lichtelektrische winkelmesseinrichtung
US5021649A (en) * 1989-03-28 1991-06-04 Canon Kabushiki Kaisha Relief diffraction grating encoder
DE3934339A1 (de) * 1989-10-14 1991-04-25 Heidenhain Gmbh Dr Johannes Teilungstraeger aus kunststoff mit einer teilungsstruktur
US5130710A (en) * 1989-10-18 1992-07-14 Pitney Bowes Inc. Microcomputer-controlled electronic postage meter having print wheels set by separate D.C. motors
GB9109890D0 (en) * 1991-05-08 1991-08-21 Marconi Gec Ltd Apparatus and method for sensing the relative position of two members
US5521707A (en) * 1991-08-21 1996-05-28 Apeiron, Inc. Laser scanning method and apparatus for rapid precision measurement of thread form
US5274420A (en) * 1992-04-20 1993-12-28 International Business Machines Corporation Beamsplitter type lens elements with pupil-plane stops for lithographic systems
JPH0642914A (ja) * 1992-07-24 1994-02-18 Canon Inc 変位測定装置
DE19511068A1 (de) 1995-03-25 1996-09-26 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
DE19521295C2 (de) * 1995-06-10 2000-07-13 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
WO1997005456A1 (en) * 1995-07-25 1997-02-13 The Regents Of The University Of California Compact disc based high-precision optical shaft encoder
DE19718122A1 (de) * 1997-04-29 1998-11-05 Giesecke & Devrient Gmbh Vorrichtung zur Detektion von eigenschaften eines Blattguts mit reflektiertem Licht
US6803560B1 (en) * 1999-06-10 2004-10-12 Canon Kabushiki Kaisha Optical encoder
EP1111347B1 (de) * 1999-12-15 2001-09-05 Brown & Sharpe Tesa S.A. Positionsgeber
EP1272817B1 (de) * 2000-03-28 2010-02-24 Aim Controls, Inc. Drehgeber
US7881896B2 (en) 2002-02-14 2011-02-01 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
DE10233063A1 (de) * 2002-07-19 2004-01-29 Optolab Licensing Gmbh Optisches Geberelement mit Positionierungsvorrichtung
JP3892843B2 (ja) * 2003-11-04 2007-03-14 株式会社東芝 寸法測定方法、寸法測定装置および測定マーク
JP2008096246A (ja) * 2006-10-11 2008-04-24 Fanuc Ltd 光学式エンコーダ
JP5219745B2 (ja) * 2007-11-14 2013-06-26 キヤノン株式会社 発光装置
JP6118529B2 (ja) 2011-10-21 2017-04-19 日精エー・エス・ビー機械株式会社 成形品の受渡し装置及びブロー成形装置
EP2650655B1 (de) * 2012-04-12 2014-09-03 Siemens Aktiengesellschaft Messwertgeber zum Erhalt einer Positionsinformation
DE102013220190B4 (de) * 2013-10-07 2021-08-12 Dr. Johannes Heidenhain Gmbh Messteilung und lichtelektrische Positionsmesseinrichtung mit dieser Messteilung
EP3339811B1 (de) * 2016-12-20 2019-03-20 Dr. Johannes Heidenhain GmbH Optische positionsmesseinrichtung

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2405341A1 (de) * 1974-02-05 1975-08-07 Leitz Ernst Gmbh Anordnung zur lichtmodulation
FR2483640B1 (fr) * 1980-05-27 1987-02-20 Electricite De France Procede de fabrication d'un reseau optique de phase radial, pour former par rotation deux faisceaux decales en frequence a partir d'un faisceau coherent
JPS57103136A (en) * 1980-12-17 1982-06-26 Matsushita Electric Ind Co Ltd Optical disk and optical disk device
US4528448A (en) * 1982-05-13 1985-07-09 Benson, Inc. Plane linear grating for optically encoding information
NL8202300A (nl) * 1982-06-08 1984-01-02 Philips Nv Inrichting voor het bepalen van hoekverplaatsingen van een voorwerp.
DE3412958A1 (de) * 1984-04-06 1985-10-17 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Phasengitter

Also Published As

Publication number Publication date
EP0220757A1 (de) 1987-05-06
NL8502679A (nl) 1987-05-04
EP0220757B1 (de) 1990-03-28
US4746792A (en) 1988-05-24
JPS6287815A (ja) 1987-04-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL

8339 Ceased/non-payment of the annual fee