ATE549651T1 - Siebdruckverfahren verfahren zur verkapselung von optoelektronischen chips - Google Patents

Siebdruckverfahren verfahren zur verkapselung von optoelektronischen chips

Info

Publication number
ATE549651T1
ATE549651T1 AT04738016T AT04738016T ATE549651T1 AT E549651 T1 ATE549651 T1 AT E549651T1 AT 04738016 T AT04738016 T AT 04738016T AT 04738016 T AT04738016 T AT 04738016T AT E549651 T1 ATE549651 T1 AT E549651T1
Authority
AT
Austria
Prior art keywords
screen printing
printing method
optoelectronic chips
encapsulating optoelectronic
encapsulating
Prior art date
Application number
AT04738016T
Other languages
German (de)
English (en)
Inventor
David Robert Cameron Rolston
Tomasz Maj
Shao-Wei Fu
Original Assignee
Reflex Photonique Inc Reflex Photonics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/725,566 external-priority patent/US7178235B2/en
Application filed by Reflex Photonique Inc Reflex Photonics Inc filed Critical Reflex Photonique Inc Reflex Photonics Inc
Application granted granted Critical
Publication of ATE549651T1 publication Critical patent/ATE549651T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/0198—Manufacture or treatment batch processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4212—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element being a coupling medium interposed therebetween, e.g. epoxy resin, refractive index matching material, index grease, matching liquid or gel
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4236—Fixing or mounting methods of the aligned elements
    • G02B6/4239—Adhesive bonding; Encapsulation with polymer material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07551—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting
    • H10W72/07554—Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting changes in dispositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/536—Shapes of wire connectors the connected ends being ball-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/5363—Shapes of wire connectors the connected ends being wedge-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/541—Dispositions of bond wires
    • H10W72/5445—Dispositions of bond wires being orthogonal to a side surface of the chip, e.g. parallel arrangements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/541—Dispositions of bond wires
    • H10W72/547—Dispositions of multiple bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/874—On different surfaces
    • H10W72/884—Die-attach connectors and bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/931—Shapes of bond pads
    • H10W72/932—Plan-view shape, i.e. in top view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Led Device Packages (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Light Receiving Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Packages (AREA)
  • Semiconductor Lasers (AREA)
AT04738016T 2003-07-24 2004-07-26 Siebdruckverfahren verfahren zur verkapselung von optoelektronischen chips ATE549651T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US62590603A 2003-07-24 2003-07-24
US10/725,566 US7178235B2 (en) 2003-12-03 2003-12-03 Method of manufacturing an optoelectronic package
PCT/CA2004/001408 WO2005010580A1 (en) 2003-07-24 2004-07-26 Encapsulated optical package

Publications (1)

Publication Number Publication Date
ATE549651T1 true ATE549651T1 (de) 2012-03-15

Family

ID=34108155

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04738016T ATE549651T1 (de) 2003-07-24 2004-07-26 Siebdruckverfahren verfahren zur verkapselung von optoelektronischen chips

Country Status (6)

Country Link
US (1) US7820462B2 (https=)
EP (1) EP1654572B1 (https=)
JP (1) JP2006528834A (https=)
AT (1) ATE549651T1 (https=)
CA (1) CA2569265C (https=)
WO (1) WO2005010580A1 (https=)

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US7200295B2 (en) * 2004-12-07 2007-04-03 Reflex Photonics, Inc. Optically enabled hybrid semiconductor package
US7482610B2 (en) * 2005-01-13 2009-01-27 Massachusetts Institute Of Technology Vertical-cavity enhanced resonant thermal emitter
DE102005036824A1 (de) * 2005-08-04 2007-03-29 Siemens Ag Chipmodul zum Einbau in Sensorchipkarten für fluidische Anwendungen sowie Verfahren zur Herstellung eines derartigen Chipmoduls
JP4699155B2 (ja) * 2005-09-29 2011-06-08 日本電信電話株式会社 光モジュール
TWI325618B (en) * 2007-01-02 2010-06-01 Chipmos Technologies Inc Film type package for fingerprint sensor
JP4553026B2 (ja) * 2008-03-27 2010-09-29 富士ゼロックス株式会社 光伝送装置
GB0902569D0 (en) 2009-02-16 2009-04-01 Univ Southampton An optical device
JP5526738B2 (ja) * 2009-11-27 2014-06-18 株式会社リコー 発光装置、マルチビーム光源装置、マルチビーム走査装置及び画像形成装置
JP6036463B2 (ja) * 2013-03-26 2016-11-30 日立金属株式会社 光モジュール、光通信機器、および光伝送装置
US20150030281A1 (en) * 2013-07-25 2015-01-29 Avago Technologies General IP (Singapore) Pte, Ltd. Methods and apparatuses for preventing an optics system of an optical communications module from being damaged or moved out of alignment by external forces
US10877231B2 (en) 2017-02-24 2020-12-29 Reflex Photonics Inc. Wirebonding for side-packaged optical engine

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US4130343A (en) * 1977-02-22 1978-12-19 Bell Telephone Laboratories, Incorporated Coupling arrangements between a light-emitting diode and an optical fiber waveguide and between an optical fiber waveguide and a semiconductor optical detector
US4819041A (en) 1983-12-30 1989-04-04 Amp Incorporated Surface mounted integrated circuit chip package and method for making same
NL8702493A (nl) * 1986-10-31 1988-05-16 Seiko Epson Corp Optisch opnamemedium en werkwijze voor het vervaardigen daarvan.
JPH02209785A (ja) * 1989-02-09 1990-08-21 Sony Corp 光半導体装置
EP0734074A1 (en) 1990-07-16 1996-09-25 Nitto Denko Corporation Photosemiconductor device
JP2542746B2 (ja) * 1991-03-04 1996-10-09 ローム株式会社 レ―ザダイオ―ド
US5313365A (en) 1992-06-30 1994-05-17 Motorola, Inc. Encapsulated electronic package
US6054716A (en) * 1997-01-10 2000-04-25 Rohm Co., Ltd. Semiconductor light emitting device having a protecting device
JP3087676B2 (ja) 1997-02-13 2000-09-11 日本電気株式会社 ゲル状樹脂を用いた光結合系及び実装構造
US6583444B2 (en) * 1997-02-18 2003-06-24 Tessera, Inc. Semiconductor packages having light-sensitive chips
JPH11119064A (ja) * 1997-10-17 1999-04-30 Fujitsu Ltd 光伝送端末装置
JP3355122B2 (ja) 1998-01-08 2002-12-09 富士通株式会社 光モジュールの封止方法
JP2000110176A (ja) * 1998-10-02 2000-04-18 Fujitsu Ltd 光モジュール及びその製造方法
WO2000031771A1 (en) 1998-11-25 2000-06-02 Act Micro Devices Optoelectronic module and method of making same
JP4068842B2 (ja) 1999-08-25 2008-03-26 浜松ホトニクス株式会社 光受信装置、並びに、その保持装置及び配置方法
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JP4045710B2 (ja) * 1999-12-16 2008-02-13 松下電器産業株式会社 半導体発光装置の製造方法
FR2807168B1 (fr) * 2000-03-29 2002-11-29 Commissariat Energie Atomique Procede et dispositif d'alignement passif de fibres optiques et de composants optoelectroniques
US6709170B2 (en) * 2001-01-08 2004-03-23 Optical Communications Products, Inc. Plastic encapsulation of optoelectronic devices for optical coupling
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Also Published As

Publication number Publication date
WO2005010580A1 (en) 2005-02-03
EP1654572A1 (en) 2006-05-10
CA2569265A1 (en) 2005-02-03
JP2006528834A (ja) 2006-12-21
US7820462B2 (en) 2010-10-26
EP1654572B1 (en) 2012-03-14
EP1654572A4 (en) 2009-03-25
US20080211048A1 (en) 2008-09-04
CA2569265C (en) 2012-10-09

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