ATE520152T1 - Leistungshalbleiterbauelement - Google Patents

Leistungshalbleiterbauelement

Info

Publication number
ATE520152T1
ATE520152T1 AT07820844T AT07820844T ATE520152T1 AT E520152 T1 ATE520152 T1 AT E520152T1 AT 07820844 T AT07820844 T AT 07820844T AT 07820844 T AT07820844 T AT 07820844T AT E520152 T1 ATE520152 T1 AT E520152T1
Authority
AT
Austria
Prior art keywords
layer
zone
conductivity type
main side
power semiconductor
Prior art date
Application number
AT07820844T
Other languages
English (en)
Inventor
Arnost Kopta
Original Assignee
Abb Technology Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Abb Technology Ag filed Critical Abb Technology Ag
Application granted granted Critical
Publication of ATE520152T1 publication Critical patent/ATE520152T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/861Diodes
    • H01L29/8611Planar PN junction diodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0603Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
    • H01L29/0607Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
    • H01L29/0611Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
    • H01L29/0615Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
    • H01L29/0619Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
AT07820844T 2006-10-05 2007-10-02 Leistungshalbleiterbauelement ATE520152T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP06405423A EP1909332A1 (de) 2006-10-05 2006-10-05 Leistungshalbleiteranordnung
PCT/EP2007/060462 WO2008040733A1 (en) 2006-10-05 2007-10-02 Power semiconductor device

Publications (1)

Publication Number Publication Date
ATE520152T1 true ATE520152T1 (de) 2011-08-15

Family

ID=37728189

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07820844T ATE520152T1 (de) 2006-10-05 2007-10-02 Leistungshalbleiterbauelement

Country Status (7)

Country Link
US (1) US9048340B2 (de)
EP (2) EP1909332A1 (de)
JP (1) JP5231426B2 (de)
CN (1) CN101558500B (de)
AT (1) ATE520152T1 (de)
ES (1) ES2370665T3 (de)
WO (1) WO2008040733A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4743447B2 (ja) 2008-05-23 2011-08-10 三菱電機株式会社 半導体装置
EP2339613B1 (de) 2009-12-22 2015-08-19 ABB Technology AG Leistungshalbleiterelement und Herstellungsverfahren dafür
EP2341528A1 (de) 2010-01-05 2011-07-06 ABB Technology AG Leistungshalbleiterbauelement und Verfahren zu dessen Herstellung
JP6301776B2 (ja) * 2010-05-26 2018-03-28 三菱電機株式会社 半導体装置
GB2496067B (en) * 2010-06-17 2014-12-24 Abb Technology Ag Power semiconductor device
JP5321669B2 (ja) * 2010-11-25 2013-10-23 株式会社デンソー 半導体装置
EP2980856B1 (de) 2013-03-25 2020-07-22 Fuji Electric Co., Ltd. Halbleiterbauelement und verfahren zu dessen herstellung
DE102016206922A1 (de) * 2015-05-08 2016-11-10 Semiconductor Energy Laboratory Co., Ltd. Touchscreen
CN206532784U (zh) * 2016-02-25 2017-09-29 宗仁科技(平潭)有限公司 开关型功率半导体器件
JP6830767B2 (ja) * 2016-06-14 2021-02-17 株式会社デンソー 半導体装置
CN113056812B (zh) 2018-11-20 2022-12-20 日立能源瑞士股份公司 功率半导体器件和用于生产这种器件的无荫罩的方法
CN113659014B (zh) * 2021-10-20 2022-01-18 四川洪芯微科技有限公司 一种含有阴极短接槽栅结构的功率二极管

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1490051A (fr) * 1965-08-18 1967-07-28 Ass Elect Ind Perfectionnements aux dispositifs redresseurs à semiconducteurs
CH633907A5 (de) * 1978-10-10 1982-12-31 Bbc Brown Boveri & Cie Leistungshalbleiterbauelement mit zonen-guard-ringen.
JPH0266977A (ja) * 1988-09-01 1990-03-07 Fuji Electric Co Ltd 半導体ダイオード
JP3321185B2 (ja) * 1990-09-28 2002-09-03 株式会社東芝 高耐圧半導体装置
JPH0936388A (ja) * 1995-07-20 1997-02-07 Mitsubishi Electric Corp 半導体装置
JP3444081B2 (ja) * 1996-02-28 2003-09-08 株式会社日立製作所 ダイオード及び電力変換装置
DE19804580C2 (de) 1998-02-05 2002-03-14 Infineon Technologies Ag Leistungsdiode in Halbleitermaterial
DE10330571B8 (de) * 2003-07-07 2007-03-08 Infineon Technologies Ag Vertikale Leistungshalbleiterbauelemente mit Injektionsdämpfungsmittel im Rand bereich und Herstellungsverfahren dafür
JP5011748B2 (ja) * 2006-02-24 2012-08-29 株式会社デンソー 半導体装置

Also Published As

Publication number Publication date
ES2370665T3 (es) 2011-12-21
EP1909332A1 (de) 2008-04-09
CN101558500A (zh) 2009-10-14
EP2070125B1 (de) 2011-08-10
US20090200574A1 (en) 2009-08-13
WO2008040733A1 (en) 2008-04-10
US9048340B2 (en) 2015-06-02
JP5231426B2 (ja) 2013-07-10
EP2070125A1 (de) 2009-06-17
CN101558500B (zh) 2012-06-27
JP2010506392A (ja) 2010-02-25

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