ATE501988T1 - Aluminiumoxidgesintertes produkt und herstellungsverfahren dafür - Google Patents
Aluminiumoxidgesintertes produkt und herstellungsverfahren dafürInfo
- Publication number
- ATE501988T1 ATE501988T1 AT09252108T AT09252108T ATE501988T1 AT E501988 T1 ATE501988 T1 AT E501988T1 AT 09252108 T AT09252108 T AT 09252108T AT 09252108 T AT09252108 T AT 09252108T AT E501988 T1 ATE501988 T1 AT E501988T1
- Authority
- AT
- Austria
- Prior art keywords
- aluminum oxide
- sintered product
- oxide sintered
- grains
- rare
- Prior art date
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
- C04B35/111—Fine ceramics
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/62645—Thermal treatment of powders or mixtures thereof other than sintering
- C04B35/62655—Drying, e.g. freeze-drying, spray-drying, microwave or supercritical drying
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/645—Pressure sintering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3206—Magnesium oxides or oxide-forming salts thereof
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
- C04B2235/3222—Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4)
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- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
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- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
- C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
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- C04B2235/3227—Lanthanum oxide or oxide-forming salts thereof
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- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
- C04B2235/3865—Aluminium nitrides
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- C04B2235/44—Metal salt constituents or additives chosen for the nature of the anions, e.g. hydrides or acetylacetonate
- C04B2235/444—Halide containing anions, e.g. bromide, iodate, chlorite
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- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
- C04B2235/85—Intergranular or grain boundary phases
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- C—CHEMISTRY; METALLURGY
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008223910 | 2008-09-01 | ||
JP2009174334A JP5203313B2 (ja) | 2008-09-01 | 2009-07-27 | 酸化アルミニウム焼結体及びその製法 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE501988T1 true ATE501988T1 (de) | 2011-04-15 |
Family
ID=41572561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT09252108T ATE501988T1 (de) | 2008-09-01 | 2009-09-01 | Aluminiumoxidgesintertes produkt und herstellungsverfahren dafür |
Country Status (8)
Country | Link |
---|---|
US (1) | US8236722B2 (de) |
EP (1) | EP2163535B1 (de) |
JP (1) | JP5203313B2 (de) |
KR (1) | KR101563007B1 (de) |
CN (1) | CN104150884B (de) |
AT (1) | ATE501988T1 (de) |
DE (1) | DE602009000902D1 (de) |
TW (1) | TWI447088B (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7751907B2 (en) | 2007-05-24 | 2010-07-06 | Smiths Medical Asd, Inc. | Expert system for insulin pump therapy |
JP5501040B2 (ja) * | 2009-03-26 | 2014-05-21 | 日本碍子株式会社 | アルミナ焼結体、その製法及び半導体製造装置部材 |
JP6015012B2 (ja) * | 2011-02-04 | 2016-10-26 | 住友大阪セメント株式会社 | 静電チャック部材 |
US9073773B2 (en) * | 2011-03-11 | 2015-07-07 | Saint-Gobain Ceramics & Plastics, Inc. | Refractory object, glass overflow forming block, and process for glass object manufacture |
US9174874B2 (en) | 2011-03-30 | 2015-11-03 | Saint-Gobain Ceramics & Plastics, Inc. | Refractory object, glass overflow forming block, and process of forming and using the refractory object |
EP2802543B1 (de) | 2012-01-11 | 2019-06-05 | Saint-Gobain Ceramics & Plastics, Inc. | Feuerfestes objekt |
JP5872998B2 (ja) * | 2012-04-26 | 2016-03-01 | 日本特殊陶業株式会社 | アルミナ焼結体、それを備える部材、および半導体製造装置 |
WO2016121286A1 (ja) * | 2015-01-29 | 2016-08-04 | 京セラ株式会社 | 試料保持具 |
WO2016138111A1 (en) | 2015-02-24 | 2016-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Refractory article and method of making |
CN106892648B (zh) * | 2015-12-21 | 2020-06-09 | 中国石油天然气股份有限公司 | 一种球形氧化铝的制备方法 |
JP7049108B2 (ja) * | 2017-12-25 | 2022-04-06 | 日本特殊陶業株式会社 | 静電チャック |
KR101965895B1 (ko) * | 2018-11-08 | 2019-04-04 | 주식회사 케이에스엠컴포넌트 | 정전 척 및 그 제조 방법 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2475533A1 (fr) * | 1980-02-08 | 1981-08-14 | Euroceral | Procede de fabrication de pieces, notamment de tubes, en alumine translucide |
JPS56169182A (en) * | 1980-05-29 | 1981-12-25 | Sumitomo Electric Industries | Ceramic material sintering method |
DE3681566D1 (de) * | 1985-12-06 | 1991-10-24 | Hitachi Ltd | Keramiksinter mit hohem waermeausdehnungskoeffizient und ein verbundkoerper aus demselben und metall. |
JPS62187156A (ja) * | 1986-02-12 | 1987-08-15 | 株式会社デンソー | 高絶縁性高アルミナ質磁器組成物の製造方法 |
US5294576A (en) * | 1988-01-13 | 1994-03-15 | Shinko Electric Industries Co., Ltd. | Mullite ceramic compound |
JP3071933B2 (ja) * | 1991-05-28 | 2000-07-31 | 日本碍子株式会社 | 解離したハロゲン系腐蝕性ガスに対する耐蝕性部材およびその製造方法 |
CN1078709A (zh) * | 1992-05-18 | 1993-11-24 | 中国科学院上海硅酸盐研究所 | 高铝陶瓷的低温烧结 |
JP3472419B2 (ja) * | 1996-10-29 | 2003-12-02 | 京セラ株式会社 | 着色アルミナ質焼結体及びその製造方法 |
JP3971539B2 (ja) * | 1999-10-29 | 2007-09-05 | 京セラ株式会社 | アルミナ質プラズマ耐食部材 |
JP4008230B2 (ja) * | 2001-11-14 | 2007-11-14 | 住友大阪セメント株式会社 | 静電チャックの製造方法 |
JP2003313078A (ja) * | 2002-04-18 | 2003-11-06 | Taiheiyo Cement Corp | 窒化アルミニウム焼結体およびそれを用いた静電チャック |
JP2004022585A (ja) | 2002-06-12 | 2004-01-22 | Ngk Spark Plug Co Ltd | 静電チャック |
JP4364593B2 (ja) * | 2003-09-29 | 2009-11-18 | 新光電気工業株式会社 | アルミナ質セラミック板及びその製造方法 |
JP5084155B2 (ja) * | 2005-03-11 | 2012-11-28 | 日本碍子株式会社 | アルミナ焼結体及びその製造方法、並びに、このアルミナ焼結体を用いた静電チャック及びその製造方法 |
WO2008010632A1 (en) * | 2006-07-20 | 2008-01-24 | University-Industry Collaboration Foundation Chungnam National University | Electrostatic chuck with high-resistivity ceramic coating materials |
JP2008223910A (ja) | 2007-03-13 | 2008-09-25 | Nsk Ltd | プーリ装置 |
JP2009174334A (ja) | 2008-01-22 | 2009-08-06 | Toyota Motor Corp | 内燃機関のpcvシステム |
-
2009
- 2009-07-27 JP JP2009174334A patent/JP5203313B2/ja active Active
- 2009-08-25 TW TW098128564A patent/TWI447088B/zh active
- 2009-08-28 US US12/549,524 patent/US8236722B2/en active Active
- 2009-08-31 CN CN201410355834.4A patent/CN104150884B/zh active Active
- 2009-08-31 KR KR1020090081300A patent/KR101563007B1/ko active IP Right Grant
- 2009-09-01 AT AT09252108T patent/ATE501988T1/de not_active IP Right Cessation
- 2009-09-01 EP EP09252108A patent/EP2163535B1/de active Active
- 2009-09-01 DE DE602009000902T patent/DE602009000902D1/de active Active
Also Published As
Publication number | Publication date |
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JP2010077012A (ja) | 2010-04-08 |
TWI447088B (zh) | 2014-08-01 |
TW201012774A (en) | 2010-04-01 |
DE602009000902D1 (de) | 2011-04-28 |
KR101563007B1 (ko) | 2015-10-23 |
KR20100027074A (ko) | 2010-03-10 |
US20100056358A1 (en) | 2010-03-04 |
US8236722B2 (en) | 2012-08-07 |
EP2163535B1 (de) | 2011-03-16 |
EP2163535A1 (de) | 2010-03-17 |
CN104150884A (zh) | 2014-11-19 |
JP5203313B2 (ja) | 2013-06-05 |
CN104150884B (zh) | 2016-04-06 |
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