DE602009000902D1 - Aluminiumoxidgesintertes Produkt und Herstellungsverfahren dafür - Google Patents

Aluminiumoxidgesintertes Produkt und Herstellungsverfahren dafür

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Publication number
DE602009000902D1
DE602009000902D1 DE602009000902T DE602009000902T DE602009000902D1 DE 602009000902 D1 DE602009000902 D1 DE 602009000902D1 DE 602009000902 T DE602009000902 T DE 602009000902T DE 602009000902 T DE602009000902 T DE 602009000902T DE 602009000902 D1 DE602009000902 D1 DE 602009000902D1
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DE
Germany
Prior art keywords
aluminum oxide
sintered product
grains
rare
oxide sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602009000902T
Other languages
English (en)
Inventor
Naomi Teratani
Yuji Katsuda
Yoshimasa Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE602009000902D1 publication Critical patent/DE602009000902D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111—Fine ceramics
    • C—CHEMISTRY; METALLURGY
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62645—Thermal treatment of powders or mixtures thereof other than sintering
    • C04B35/62655—Drying, e.g. freeze-drying, spray-drying, microwave or supercritical drying
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/645—Pressure sintering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3206—Magnesium oxides or oxide-forming salts thereof
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
    • C04B2235/3222—Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4)
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3227—Lanthanum oxide or oxide-forming salts thereof
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2235/3229—Cerium oxides or oxide-forming salts thereof
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    • C04B2235/38—Non-oxide ceramic constituents or additives
    • C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
    • C04B2235/3865—Aluminium nitrides
    • C—CHEMISTRY; METALLURGY
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    • C04B2235/44—Metal salt constituents or additives chosen for the nature of the anions, e.g. hydrides or acetylacetonate
    • C04B2235/444—Halide containing anions, e.g. bromide, iodate, chlorite
    • C04B2235/445—Fluoride containing anions, e.g. fluosilicate
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    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
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    • C04B2235/74—Physical characteristics
    • C04B2235/77—Density
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    • C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
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    • C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
    • C04B2235/85—Intergranular or grain boundary phases
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    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE602009000902T 2008-09-01 2009-09-01 Aluminiumoxidgesintertes Produkt und Herstellungsverfahren dafür Active DE602009000902D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008223910 2008-09-01
JP2009174334A JP5203313B2 (ja) 2008-09-01 2009-07-27 酸化アルミニウム焼結体及びその製法

Publications (1)

Publication Number Publication Date
DE602009000902D1 true DE602009000902D1 (de) 2011-04-28

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DE602009000902T Active DE602009000902D1 (de) 2008-09-01 2009-09-01 Aluminiumoxidgesintertes Produkt und Herstellungsverfahren dafür

Country Status (8)

Country Link
US (1) US8236722B2 (de)
EP (1) EP2163535B1 (de)
JP (1) JP5203313B2 (de)
KR (1) KR101563007B1 (de)
CN (1) CN104150884B (de)
AT (1) ATE501988T1 (de)
DE (1) DE602009000902D1 (de)
TW (1) TWI447088B (de)

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US8178455B2 (en) * 2009-03-26 2012-05-15 Ngk Insulatores, Ltd. Alumina sintered body, method for manufacturing the same, and semiconductor manufacturing apparatus member
JP6015012B2 (ja) * 2011-02-04 2016-10-26 住友大阪セメント株式会社 静電チャック部材
US9073773B2 (en) * 2011-03-11 2015-07-07 Saint-Gobain Ceramics & Plastics, Inc. Refractory object, glass overflow forming block, and process for glass object manufacture
CN108689591A (zh) 2011-03-30 2018-10-23 圣戈本陶瓷及塑料股份有限公司 耐火物体、玻璃溢流形成块、以及形成和使用该耐火物体的方法
JP2015504841A (ja) 2012-01-11 2015-02-16 サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド 耐火物及び耐火物を使用したガラス板の形成方法
JP5872998B2 (ja) * 2012-04-26 2016-03-01 日本特殊陶業株式会社 アルミナ焼結体、それを備える部材、および半導体製造装置
WO2016121286A1 (ja) * 2015-01-29 2016-08-04 京セラ株式会社 試料保持具
EP3262011A4 (de) 2015-02-24 2018-08-01 Saint-Gobain Ceramics&Plastics, Inc. Feuerfester artikel und verfahren zur herstellung
CN106892648B (zh) * 2015-12-21 2020-06-09 中国石油天然气股份有限公司 一种球形氧化铝的制备方法
JP7049108B2 (ja) * 2017-12-25 2022-04-06 日本特殊陶業株式会社 静電チャック
KR101965895B1 (ko) * 2018-11-08 2019-04-04 주식회사 케이에스엠컴포넌트 정전 척 및 그 제조 방법

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JPS56169182A (en) * 1980-05-29 1981-12-25 Sumitomo Electric Industries Ceramic material sintering method
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US20100056358A1 (en) 2010-03-04
JP5203313B2 (ja) 2013-06-05
KR20100027074A (ko) 2010-03-10
EP2163535A1 (de) 2010-03-17
TW201012774A (en) 2010-04-01
EP2163535B1 (de) 2011-03-16
US8236722B2 (en) 2012-08-07
CN104150884B (zh) 2016-04-06
ATE501988T1 (de) 2011-04-15
CN104150884A (zh) 2014-11-19
JP2010077012A (ja) 2010-04-08
KR101563007B1 (ko) 2015-10-23

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